超小型非硅基微机械可调光衰减器

研制了一种新型的超小型电磁驱动微机械可调光衰减器（VOA）.该器件采用电磁驱动器转动硅基微镜改变光路实现可调衰减,在结构上采用了全磁性回复,完全摆脱了通常的弹性回复造成的部件疲劳、零点偏移等器件重复性问题.驱动电压为0～5 V,工作范围0～40 dB,插入损耗小于0.8 dB,回波损耗小于－50 dB.器件重要部件采用微细电火花加工(EDM)技术制作,并应用FEA软件进行了结构优化,对衰减响应进行了详尽的理论分析.该VOA设计体积仅为25×10×7 mm3,可构成阵列应用于波分复用（WDM/DWDM）系统中各信道的动态信号平衡或网络保护.     

一种MEMS可调光衰减器性能测试及动态响应分析

一种基于微细电火花加工(EDM)技术的非硅基MEMS可调光衰减器,以电磁线圈驱动微反射镜.本文介绍该器件特性测试及动态响应分析,结果表明,驱动电压为0～8 V,工作范围0～35 dB,动态响应时间为2 ms,插入损耗小于0.8 dB,回波损耗小于－50.5 dB.     

光纤直接耦合微加工型可调光衰减器

设计研制了一种新型小体积, 低成本的光纤直接耦合微加工型可调光衰减器. 该器件采用电磁微线圈驱动柔性框架上的活动光纤微位移实现信号功率衰减变化, 驱动电压为0~8 V, 工作范围0~65 dB, 动态时间响应小于2.3 ms. 器件构造工艺主要使用了CNC高精度雕刻和激光点焊封装技术. 利用有限元单元法进行器件理论分析, 并报告了其测试性能.     

非硅基底1×4微机电系统光开关

设计研制了一种小体积、低成本、可扩展的低电压非硅基底 1× 4微机电系统光开关。开关单元由电磁驱动 ,微反射镜绕直径 10 0 μm转轴转动 ,驱动电压为 5V ,开关时间小于 2ms,插入损耗小于 0 .84dB ,具有断电自锁功能。器件构造工艺采用微细电火花加工技术。用有限元法分析受力和磁场 ,进行结构优化设计 ,并着重介绍开关的实现及性能     

位错型微机械可变光衰减器的研究

介绍了一种基于微机械技术实现的可变光衰减器,通过微电磁驱动器改变输入输出光纤之间的径向偏移量来调整衰减量。基于波导传输理论分析确定了器件的结构参量,并通过集成电路微细加工工艺实现了器件的制作和封装。测试结果表明,该可变光衰减器的插入损耗小于1dB,动态范围约35dB,工作电压小于5V,偏振相关损耗小于0.1dB,体积为20mm×15mm×8mm,有望为全光网提供一种低成本,高性能的光通信器件。     

可调光衰减器的光衰减量线性补偿

设计制成一种数字化电磁驱动微机械MOEMS可调光衰减器.与传统可调光衰减器相比,该器件不仅可实现光衰减量数字化电控调节,并且可通过器件结构的优化设计,对光衰减量的非线性进行补偿,最终得到线性衰减.器件性能测试表明,插入损耗IL＜0.3 dB,偏振相关损耗PDL＜0.1 dB,波长相关损耗WDL＜0.2 dB,衰减范围0～40 dB,回波损耗RL＞50 dB.     

光纤直接耦合微加工型1×2光开关

设计研制了一种新型小体积,低成本的1×2光纤直接耦合微加工型光开关.该器件使用电磁微线圈驱动一封装在微加工柔性框架上的活动光纤,使其对准另两根固定光纤,实现光路转换.驱动电压为5 V,开关时间小于2 ms,插入损耗达到0.9~1.1 dB.器件构造工艺采用了CNC雕刻技术和EDM技术.本文剖析了器件损耗,用有限元软件ANSYS分析了器件的磁场和弹簧受力而优化结构设计,并报告了器件性能测试.     

调节精度可配置的可变光衰减器研究

设计了一种调节精度可配置的可变光衰减器结构,通过流体恒压泵驱动薄膜弹起,将流体压力/压强调节转化为光纤微位移控制,实现对接光纤横向位错及光学衰减。使用多物理场耦合与三维时域有限差分的方法对结构模型进行分析,并利用精细加工技术实现了器件的制作。通过对薄膜厚度的选配,实现了光强耦合效率的精度可调配置。理论分析和实验结果表明,选用合适的膜厚得到本衰减器的插入损耗为1.24 dB,可变衰减范围大于60 dB,波长相关损耗小于1 dB。当设定可变光衰减器的光衰减动态范围分别为10 dB和40 dB时,配置0.5 mm薄膜厚度的调节精度分别优于0.04 dB和0.11 dB;当膜的厚度增加时,调节精度会更高。     

单模光纤1250～1650 nm超平坦宽带耦合器

随着光纤技术的飞速发展和应用．光纤无源器件顺应当前形势也获得很大的发展空间,其中光纤熔锥器件具有制作简单、性能可靠、价格便宜及技术指标优越等优点,从而广受青睐。在熔锥器件中,光纤耦合器是广为应用的基础元器件。目前为实现全光通信。光纤超平坦宽带耦合器则成为热点课题。利用特殊相位补偿工艺方法,研制出单模光纤超平坦宽带耦合器。其工作波长范围为1250～1650nm,3dB带内最大插损偏差小于等于0．4dB,带内最大附加损耗小于等于0．1dB,方向性(输入侧非注人光的一端的输出光功率与注入光功率的比值)大于等于66．5dB,偏振相关性小于等于0．1dB。研制方法有很高的成品率,可批量生产。     

一种智能光网络中的亚毫秒光开关阵列

设计研制了一种亚毫秒级微机械光开关阵列.该阵列驱动电压为5V,开关时间小于750μs, 插入损耗在0.6 dB～0.8 dB之间,串扰<－70 dB.具有结构简单、成本低廉、可大规模集成的优点,能很好地解决智能光网络节点连接设备OADM快速信号转换和串扰问题.详细介绍了该光开关阵列实现原理,报告了器件性能测试,并应用FEA软件分析了开关单元中磁场和开关驱动过程.     

A liquid lens-based broadband variable fiber optical attenuator

To the best of our knowledge, proposed is the first variable fiber optical attenuator (VFOA) using an electronically controlled variable focus liquid lens. The approach uses the changes in the radius of curvature of the liquid lens edge to enable an electronically controlled optical wedge that produces a varying beam tilt angle. In effect, changing beam tilt within a single mode fiber (SMF) lens free space coupling assembly leads to a polarization independent broadband VFOA design. The demonstrated VFOA experiment shows broadband operation over the 1530-1560 nm C-Band with a 40 dB dynamic range, <0.5 dB resolution, 0.3 dB polarization dependant loss, 4.3 dB fiber-to-fiber optical loss, 3 dB optical bandwidth from 1510 nm to 1700 nm, and switching time of <100 ms. Applications for this VFOA include use in hand held test and measurement equipment.     

Variable optical attenuator based on a vertical comb drive actuated MEMS micromirror

This letter presents the design, simulation, fabrication, and successful demonstration of a variable optical attenuator (VOA) based on a micromachined micromirror combined with an optical fiber collimator. The micromirror has a size of 500 μm in diameter and a rotational resonance of 4.94 kHz. The micromirror was actuated by vertical comb drive which was fabricated by bulk micromachining process on a silicon on insulator (SOI) wafer. The VOA operates at a low driving voltage of 4.4 V corresponding to the rotation angle of 0.3°. The turn-on and turn-off response time of the VOA are 1.6 ms and 2.74 ms, respectively. Finally, the optical attenuation was measured and an optical attenuation as large as 40 dB was obtained.     

基于内反射效应的可变光学衰减器

提出一种基于内反射原理的可变光学衰减器，这种利用一加长的棱镜和涂于棱镜上下两底面的SiO2薄膜的简单结构，使随入射角变化的反射光实现弱偏振相关和大动态范围的衰减。     

Optically controllable variable fiber optical attenuator integrated in conventional optical fiber

New type of optically controllable variable fiber optical attenuator based on thermo-optical effect in liquid cladding of optical fiber is described. The thermo-optical effect in liquid cladding optical fiber causes refractive index contrast changes in core–cladding interface, what enables to change the propagating optical signal power with temperature. The temperature change is achieved by fiber based heating element using laser radiation. Attenuation up to −12 dB was achieved in static dependence and dynamic response confirmed rise time up to 24 ms.     

Digitally controlled fault-tolerant multiwavelength programmable fiber-optic attenuator using a two-dimensional digital micromirror device

A digitally controlled multiwavelength variable fiber-optic attenuator using a two-dimensional digital micromirror device (DMD) is introduced. The results from an experimental four-wavelength (i.e., 1546.92, 1548.52, 1550.12, and 1551.72 nm) proof-of-concept attenuator indicate a 26-dB dynamic range and 11-bit resolution. The measured attenuator average coherent optical cross talk per wavelength channel is -38 dB , limited by the additive noise resulting from the nonideal isolation of the optical circulator and the attenuator module. The average optical loss for our experimental attenuator is 15 dB and is limited mainly by the visible-mode DMD that is used as a 1550-nm infrared window device. Our theoretical estimate of a <8-dB loss optimized attenuator can be used for equalization in multiwavelength fiber-optic communications with as many as 108 wavelengths.     

Twin-Bladed Microelectro Mechanical Systems Variable Optical Attenuator

The design and evaluation of a microelectro mechanical systems (MEMS) based variable optical attenuator is reported. The device contains two blades, which are each driven by a separate electrostatic comb microactuator, and move independently to form a variable slit. This device has been fabricated in silicon-on-insulator material which has been back-etched. Electro-mechanical design considerations, including factors to minimise the side instability of the comb drive, are described. Finite element modelling (FEM) of the variable optical attenuator (VOA) is backed up by theoretical results, and the results from the theoretical work verify the findings from the FEM. Optical modelling of the VOA using near field diffraction theory is also reported. Experimentally, the device was driven from 0-34V DC to measure its static characteristics. For dynamic characterisation, the device was operated from 0-28 V AC and its fundamental resonant frequency was measured to be 3 kHz. Optical measurements including wavelength dependent attenuation are also presented.