Study of n type porous GaAs by photoluminescence spectroscopy: Effect of the etching time on the deep levels

Photoluminescence (PL) analysis is used to study porous layers elaborated by electrochemical etching of n⁺ Si-doped GaAs substrate with different etching times. Temperature and power dependence photoluminescence (PL) studies were achieved to characterize the effect of the etching time on the deep levels of the n⁺ Si-doped GaAs. The energy emission at about 1.46 eV is attributed to the band-to-band (B-B) (e-h) recombination of a hole gas with electrons in the conduction band. The emission band is composed of four deep levels due to the complex of (V_AsSi_GaV_Ga), a complex of a (Ga vacancy - donor - As vacancy), a (Si_Ga-V_Ga³⁻) defect or Si clustering, and a (gallium antisite double acceptor-effective mass donor pair complex) and which peaked, respectively, at about (0.94, 1, 1.14, and 1.32 eV). The PL intensity behavior as function of the temperature is investigated, and the experimental results are fitted with a rate equation model with double thermal activation energies.     

Dopant diffusion and segregation in semiconductor heterostructures: Part 2. B in GexSi1-x/Si structures

x Si_1-x/Si heterostructures have been obtained. Here the chemical effects seem to be of less importance. The Fermi-level effect determines the ionized boron solubilities in Ge_xSi_1-x and in Si, as well as the thermal equilibrium concentration of the singly-positively-charged crystal self-interstitials I⁺ which governs the boron diffusion process. The junction carrier concentration affects the concentration of I⁺ and solubility of B in the region and hence controls B diffusion across the heterojunction. Received: 20 August 1998/Accepted: 23 September 1998     

On the validity of the amphoteric-defect model in gallium arsenide and a criterion for Fermi-level pinning by defects

Using the theoretically calculated point-defect total-energy values of Baraff and Schlüter in GaAs, anamphoteric-defect model has been proposed by Walukiewicz to explain a large number of experimental results. The suggested amphoteric-defect system consists of two point-defect species capable of transforming into each other: the doubly negatively charged Ga vacancyV _Ga ^2– and the triply positively charged defect complex (AS_Ga+V _As)³⁺, with As_Ga being the antisite defect of an As atom occupying a Ga site andV _As being an As vacancy. When present in sufficiently high concentrations, the amphoteric defect systemV _Ga ^2– /(As_Ga+V _As)³⁺ is supposed to be able to pin the GaAs Fermi level at approximately theE _v +0.6 eV level position, which requires that the net free energy of theV _Ga/(As_Ga+V _As) defect system to be minimum at the same Fermi-level position. We have carried out a quantitative study of the net energy of this defect system in accordance with the individual point-defect total-energy results of Baraff and Schlüter, and found that the minimum net defect-system-energy position is located at about theE _v +1.2 eV level position instead of the neededE _v +0.6 eV position. Therefore, the validity of the amphoteric-defect model is in doubt. We have proposed a simple criterion for determining the Fermi-level pinning position in the deeper part of the GaAs band gap due to two oppositely charged point-defect species, which should be useful in the future.     

Defects in as-grown and annealed AlxGa1−xAs single crystals

Photoluminescence studies were made on Sn-, Te- and Ge-doped Al_xGa_1-xAs single crystals before and after annealing at 800°C for 21 h in evacuated and sealed quartz ampoules. The thin p-type surface layer, which was present on all nondegenerate n-Al_xGa_1-x As crystals after annealing, is attributed to the introduction of Si from the inner wall of the ampoule to form shallow Si_As and V_As-Si_As acceptor defects. Sn_As, V_Ga-Te (or) V_Al-Te), Ge_As and V_As-Ge_As defects were observed in Sn-, Te- and Ge-doped Al_x Ga_1-xAs after annealing. The defects were identified by plotting their characteristic recombination radiation energies versus Al composition x and comparing with previously established assignments in GaAs (x = 0). Two prominent bands, located at 1.53 and 1.46 eV independent of Al composition x, were detected in annealed (p) Al_xGa_1-xAs: Ge. The exact nature of the defects giving rise to these bands is not known.     

Defect study of proton-irradiated liquid-encapsulated Czochralski GaAs using the positron-annihilation technique

The positron lifetime of undoped Liquid-Encapsulated Czochralski (LEC)-GaAs and Si-doped (1.3×10¹⁸ cm^–3) LEC-GaAs was measured before and after irradiation with protons (dose 1×10¹⁵/cm², 15 MeV). In Si-doped GaAs, the decrease of positron lifetime at temperatures between 10 and 300 K are due to the decrease of the positron-diffusion length and the increase of the effective shallow traps such as antisite Ga_As. The annealing stage of the proton-irradiation-induced defects which show the different behavior from that of electron-irradiation-induced defects suggests that proton irradiation creates more complicated defect complexes, containing vacancies rather than isolated vacancy-type defects or simple complexes which have been observed during electron-irradiation processes. Above 700 K, proton-irradiation-induced defects such as vacancy-type defects and simple vacancy complexes are almost annealed out, while Si-induced defects such as Si_Ga-V_Ga complexes cannot be annealed out above 973 K.     

Atomistic mechanisms of dopant-induced multiple quantum well mixing and related phenomena

We discuss mechanisms of Ga self-diffusion and impurity diffusion in GaAs, and of layer mixing enhancement in GaAs/AlGaAs multiple quantum wells (MQWs). Ga self-diffusion and Ga-Al interdiffusion are governed by the triply negatively charged Ga vacancies, V _Ga ^3– , under intrinsic and n-doping conditions, and by doubly positively charged Ga self-interstitials, I _Ga ²⁺ , under heavy p-doping conditions. The mechanisms responsible for enhancing MQW mixing are the Fermi-level effect for the n-dopants Si and Te, and the combined effects of the Fermi-level and the dopant diffusion-induced nonequilibrium point defects for the p-dopants Zn and Be. For n-type GaAs the donor Si atoms diffuse primarily also via V _Ga ^3– . For p-type GaAs the interstitial-substitutional impurities Zn and Be diffuse via the kickout mechanism and induce a supersaturation and an undersaturation in the concentrations of I _Ga ²⁺ , respectively, under indiffusion and outdiffusion conditions.     

Dopant diffusion and segregation in semiconductor heterostructures: Part 1. Zn and Be in III-V compound superlattices

chemical effect on the neutral species; and (ii) a Fermi-level effect on the ionized species, because, in addition to the chemical effect, the solubility of the species also has a dependence on the semiconductor Fermi-level position. For Zn and Be in GaAs and related compounds, their diffusion process is governed by the doubly-positively-charged group III element self-interstitials (I²⁺ _III), whose thermal equilibrium concentration, and hence also the diffusivity of Zn and Be, exhibit also a Fermi-level dependence, i.e., in proportion to p². A heterojunction consists of a space-charge region with an electric field, in which the hole concentration is different from those in the bulk of either of the two layers forming the junction. This local hole concentration influences the local concentrations of I²⁺ _III and of Zn^- or Be^-, which in turn influence the distribution of these ionized acceptor atoms. The process involves diffusion and segregation of holes, I²⁺ _III, Zn^-, or Be^-, and an ionized interstitial acceptor species. The junction electric field also changes with time and position. Received: 20 August 1998/Accepted: 23 September 1998     

Annealing behavior of the 0.8 eV luminescence in undoped semiinsulating GaAs

The annealing behavior of the 0.8 eV luminescence band in undoped semiinsulating GaAs has been investigated. It is found to be fully analogous to that of the As_Ga antisite electron-paramagnetic-resonance signal. The radiative recombination of electrons with the doubly ionized As_Ga double donor is discussed as the origin for the 0.8 eV band.     

Solubility and point defect-dopant interactions in GaAs—II: Tin-doping

The form of the solubility curves for tin in both LPE and VPE grown GaAs are rationalised by a thermodynamic model which presumes that the dominant acceptor state due to tin is the donor-gallium vacancy complex Sn_GaV^?_Ga rather than the commonly postulated Sn^?_As.In LPE growth from tin-rich solutions where the arsenic concentration in the melt exceeds the gallium concentration, very low electron mobilities have been reported and this is shown to arise from auto-compensation of the Sn⁺_Ga donors by the Sn_GaV^?_Ga acceptors.     

Influence of the Substrate Orientation on the Silicon Capture into A- and B- Sublattices of Gallium Arsenide in Molecular Beam Epitaxy

The influence of crystallographic orientation of the growth surface near (100) and (111)A GaAs singular faces on the silicon capture into A- and B-sublattices of gallium arsenide in molecular beam epitaxy is investigated by the electrophysical and photoluminescence methods. It is demonstrated that the silicon dopand is incorporated into GaAs layers not only as simple Si_Ga donors but also as elemental Si_Ga acceptors and more complex defects, namely, Si_As–V_As complexes. The concentration of defects of different types in layers depends on the orientation of the growth surface, and the amphoteric properties of silicon on the (111)A face are manifested stronger than those on the (100) face.     

Ion-beam-assisted MBE growth of semi-spherical SiGe/Si nano-structures

Semi-spherical SiGe/Si nano-structures of a new type are presented. Epitaxial islands of 30–40 nm in base diameter and 11 nm in height and having a density of about 6×10¹⁰ cm^-2 were produced on (001) Si by molecular beam epitaxial growth of Si/Si_0.5Ge_0.5 layers with in situ implantation of 1-keV As⁺ ions. It was found by cross-section transmission electron microscopy that the islands have a complicated inner structure and consist of a micro-twin nucleus and semi-spherical nano-layers of various SiGe compositions. The nature of the surface patterning is interpreted by stress relaxation through implantation-induced defects. Received: 12 July 2001 / Accepted: 4 September 2001 / Published online: 2 October 2001     

Tunneling resonances in structures with a two-step barrier

Electron transport through an asymmetric heterostructure with a two-step barrier N⁺GaAs/N⁻GaAs/Al_0.4Ga_0.6As/Al_0.03Ga_0.97As/N⁻GaAs/N⁺GaAs was investigated. Features due to resonance tunneling both through a size-quantization level in a triangular quantum well, induced by an external electric field in the region of the bottom step of the barrier (Al_0.03Ga_0.97As layer), and through virtual levels in two quantum pseudowells of different width are observed in the tunneling current. The virtual levels form above the bottom step or above one of the spacers (N⁻GaAs layer) as a result of interference of electrons, in the first case on account of reflection from the Al_0.4Ga_0.6As barrier and a potential jump at the Al_0.03Ga_0.97As/N⁻GaAs interface and in the second case — from the Al_0.4Ga_0.6As barrier and the potential gradient at the N⁻GaAs/N⁺GaAs junction, reflection from which is likewise coherent. Pis’ma Zh. éksp. Teor. Fiz. 67, No. 10, 814–819 (25 May 1998)     

1MeV Si+衬底加温注入Al0.3Ga0.7As/GaAs超晶格和GaAs的晶格损伤研究

用卢瑟福背散射／沟道技术研究了１ＭｅＶＳｉ⁺在衬底加温和室温下以不同剂量注入Ａｌ_0.3Ｇ_0.7Ａｓ／ＧａＡｓ超晶格和ＧａＡｓ后的晶格损伤。在衬底加温下，观察到Ａｌ_0.3Ｇａ_0.7Ａｓ／ＧａＡｓ超晶格和ＧａＡｓ都存在一个动态退火速率与缺陷产生速率相平衡的剂量范围，以及两种速率失去平衡的临界剂量。超晶格比ＧａＡｓ更难以损伤，并且它的两种速率失去平衡的临界剂量也大于ＧａＡｓ中的相应临界剂量，用热尖峰与碰撞模型解释了晶格损伤积累与注入剂量和衬底温度的关系。用ＣＮＤＯ／２量子化学方法计算了ＧａＡｓ和Ａｌ_xＧａ_1-xＡｓ中化学键的相对强度，并根据计算结果解释了注入过程中Ａｌ_0.3Ｇａ_0.7Ａｓ／ＧａＡｓ超晶格和ＧａＡｓ中晶格损伤程度的差别。 关键词：     

Refractive index of Ga1−xAlxAs

A semi-empirical method for calculating the room temperature refractive index of Ga_1?xAl_xAs at energies below the direct band edge is presented. This quantity is important in the design of GaAs heterostructure lasers as well as other wave-guiding devices using these materials. The calculated values compare favorably with recent data. The method is shown to be useful for the Ga_1?xAs_xP system as well.     

Optimization of optical characteristics of In0.29Ga0.71As0.99N0.01/GaAs straddled nano-heterostructure

Designing of a nanoscale Quantum Well (QW) heterostructure with a well thickness of ～60?Å is critical for many applications and remains a challenge. This paper has a detailed study directed towards designing of In_0.29Ga_0.71As_0.99N_0.01/GaAs straddled nanoscale-heterostructure having a single QW of thickness ～60?Å and optimization of optical and lasing characteristics such as optical and mode gain, differential gain, gain compression, anti-guiding factor, transparency wavelength, relaxation oscillation frequency (ROF), optical power and their mutual variation behavior. The outcomes of the simulation study imply that for the carrier concentration of ～2?×?10¹⁸cm^?3 the optical gain of the nano-heterostructure is of 2100?cm^?1 at the wavelength is of 1.30?μm. Though the obtained gain is almost half of the gain of InGaAlAs/InP heterostructure, but from the wavelength point of view the InGaAsN/GaAs nano-heterostructure is also more desirable because the 1.30?μm wavelength is attractive due to negligible dispersion in the silica based optical fiber. Hence, the InGaAsN/GaAs nano-heterostructure can be very valuable in optical fiber based communication systems.     

Anomalous enhancement of negative sputtered ion emission by oxygen

Enhancement of negative sputtered ion yields by oxygen (either O⁺₂ bombardment or O₂ gas with Ar⁺ bombardment) is demonstrated for Si^?, As^?, P^?, Ga^?, Cu^? and Au^?, sputtered from a variety of matrices. Because oxygen also enhances positive ion yields of the same species, this effect cannot be simply explained on the basis of existing sputtered ion emission models. To rationalize these phenomena, a surface polarization model is developed which invokes localized electron emissive or electron retentive sites associated with differently oriented surface dipoles in the oxygenated surface. Such sites are considered to dominate the emission of negative and positive ions respectively. The model is shown to correctly predict that Au⁺ and Au^? ion yields are much more strongly enhanced by oxygen in dilute Au-Al alloys than in pure gold.     

The effect of arsenic vapour species on electrical and optical properties of GaAs grown by molecular beam epitaxy

Hall effect, DLTS and low-temperature photoluminescence measurements were used to study the effect of dimeric (As₂) vs tetrameric (As₄) vapour species on the electrical and optical properties of nominally undoped and of Ge-doped GaAs layers grown by molecular beam epitaxy (MBE). The arsenic molecular beam was generated from separate As₂ and As₄ sources, respectively, and from a single source providing an adjustable As₂/As₄ flux ratio. The occurence of the previously described defect related bound exciton lines in the luminescence spectra at 1.504–1.511 eV was found to be directly correlated with the presence of three deep states (M1, M3, M4) which are characteristic of MBE grown GaAs. The intensity of the extra luminescence lines and simultaneously the concentration of the deep electron traps can be reduced substantially simply by decreasing the As₄/As₂ flux ratio. The incorporation of defect related centers as well as of amphoteric dopants like Ge strongly depends on the surface chemistry involved. Therefore, a considerably lower autocompensation ratio in Ge-dopedn-GaAs is obtained with As₂ molecular beam species which provide a higher steady-state arsenic surface population.     

Divacancy complexes induced by Cu diffusion in Zn-doped GaAs

Positron annihilation spectroscopy was applied to investigate the nature and thermal behavior of defects induced by Cu diffusion in Zn-doped p-type GaAs crystals. Cu atoms were intentionally introduced in the GaAs lattice through thermally activated diffusion from a thin Cu capping layer at 1100 °C under defined arsenic vapor pressure. During isochronal annealing of the obtained Cu-diffused GaAs in the temperature range of 450?850 K, vacancy clusters were found to form, grow and finally disappear. We found that annealing at 650 K triggers the formation of divacancies, whereas further increasing in the annealing temperature up to 750 K leads to the formation of divacancy-copper complexes. The observations suggest that the formation of these vacancy-like defects in GaAs is related to the out-diffusion of Cu. Two kinds of acceptors are detected with a concentration of about 10¹⁶ ? 10¹⁷ cm^?3, negative ions and arsenic vacancy copper complexes. Transmission electron microscopy showed the presence of voids and Cu precipitates which are not observed by positron measurements. The positron binding energy to shallow traps is estimated using the positron trapping model. Coincidence Doppler broadening spectroscopy showed the presence of Cu in the immediate vicinity of the detected vacancies. Theoretical calculations suggested that the detected defect is V _Ga V _As-2Cu_Ga.     

Photoluminescence of Al x Ga1−x As/GaAs quantum well heterostructures grown by molecular beam epitaxy

Nominally undoped Al_xGa_1–xAs grown by molecular beam epitaxy from As₄ species at elevated substrate temperatures of 670°C exhibits well-resolved excitonic fine structure in the low-temperature photoluminescence spectra, if the effective As-to-(Al+Ga) flux ratio on the growth surface is kept within a rather narrow range of clearly As-stabilized conditions. In contrast to previous results on Al_xGa_1–xAs of composition 0.15not to shift in energy by changing the excitation intensity. This implies a simple freeelectron carbon-acceptor recombination mechanism for the line without any participation of a donor. In Al_xGa_1–xAs of composition close to the direct-to-indirect cross-over point, two distinct LO-phonons separated by 34 and 48 meV from the (D ⁰,C ⁰) peak position at x=0.43 were observed which were before only detectable by Raman scattering experiments. The intensity of the carbon-impurity related luminescence lines in bulk-type Al_xGa_1–xAs and GaAs layers was found to be strongly reduced, as compared to the excitonic recombination lines, if the respective active layer was covered by a very thin confinement layer of either GaAs on top of Al_xGa_1–xAs or vice versa grown in the same growth cycle.