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1.
To investigate the effect of the different plasma gases treatment on the surface modification of atmospheric pressure plasma, polyamide 6 films were treated using pure helium (He), He/O2 and He/CF4, respectively. Atomic force microscopy (AFM) showed rougher surface, while X-ray photoelectron spectroscopy (XPS) revealed increased oxygen and fluorine contents after the plasma treatments. The plasma treated samples had lower water contact angles and higher T-peel strength than that of the control. The addition of small amount of O2 or CF4 to He plasma increases the effectiveness of the plasma treatment in polymer surface modification in terms of surface roughness, surface hydrophilic groups, etching rate, water contact angle and bonding strength.  相似文献   

2.
X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) have been used to investigate the effect of reactive ion etching (RIE) on poly(methylhydrogensiloxane-co-dimethylsiloxane) surface in fluorine-based plasmas. Polysiloxane layers supported on the standard silicon wafers were etched using SF6 + O2 or CF4 + O2 plasmas. SEM studies show that the polysiloxane morphology depends on plasma chemical composition strongly. Presence of a columnar layer likely covered with a fluorine rich compound was found on the elastomer surface after the CF4 + O2 plasma exposure. After the SF6 + O2 or CF4 + O2 plasma treatment the polysiloxane surface enriches with fluorine or with fluorine and aluminum, respectively. Different morphologies and surface chemical compositions of the silicone elastomer etched in both plasmas indicate different etching mechanisms.  相似文献   

3.
Some selective cold plasma processing modify specific surface properties of textile polymeric materials such as their dyeability, wettability and hydrorepellence. To correlate the sample surface changes with the acquired surface properties allows one to obtain information on the chemical and physical processing involved in plasma treatment. In this work, atomic force microscopy (AFM) has been applied to investigate the morphological and topographical surface modifications induced by RF cold plasma processing of poly(ethyleneterephthalate) (PET) fabrics. Rms surface roughness and surface area of the samples are measured before and after the treatments. The morphology changes have been analysed as a function of the treatment time and air gas pressure. Measurements have been performed also using plasmas produced by different gases such as He, Ar, SF6 and CF4. The PET shows different behaviour with different gas plasmas. In the case of air, He and Ar gases the sample surface modifications seem to be mainly due to etching effects, while the fluorine atoms grafting probably is responsible for surface rearrangement process using SF6 and CF4 gases. As a consequence different surface properties are produced in the plasma treated samples. Article presented at the International Conference on the Frontiers of Plasma Physics and Technology, 9–14 December 2002, Bangalore, India.  相似文献   

4.
Polyamide 6 (PA 6) films are treated with helium(He)/CF4 plasma at atmospheric pressure. The samples are treated at different treatment times. The surface modification of the PA 6 films is evaluated by water contact angle, atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). The etching rate is used to study the etching effect of He/CF4 plasma on the PA 6 films. The T-peel strengths of the control and plasma treated films are measured to show the surface adhesion properties of the films. As the treatment time increases, the etching rate decreases steadily, the contact angle decreases initially and then increases, while the T-peel strength increases first and then decreases. AFM analyses show that the surface roughness increases after the plasma treatment. XPS analyses reveal substantial incorporation of fluorine and/or oxygen atoms to the polymer chains on the film surfaces.  相似文献   

5.
The morphology of carbon nanotubes synthesized by arc discharge in a CF4gas atmosphere was investigated by scanning electron microscopy and transmission electron microscopy. The electronic properties of these nanotubes were investigated by electron spin resonance. The synthesis conditions in CF4gas were then compared with those in CH4, H2and He based on these results. Furthermore, the mechanism of tube growth in CF4gas was discussed briefly.  相似文献   

6.
The study was performed to examine the correlation between the initial roughness and surface fluorination of paper under RF-CF4 plasma environment.Based on the experimental observations, a correlation was observed between surface fluorination and plasma parameters, e.g. RF-power, treatment time and gas pressure. The level of fluorination with RF-CF4 plasma treatment was found to be extensive in both side of paper. Even very short treatment time, as low as 1 min at 300 W power, provides effective implantation of fluorine (38.7%) on surfaces. It was observed that, CF4 plasma treatment had a significant effect on the molecular fragmentation on both side of paper. However, the felt side have a much stronger effect on plasma-induced dissociation and fluorination than in the wire side of paper.  相似文献   

7.
Influence of the carrier gas on HfCl4-H2O and ZrCl4-H2O atomic layer processes was investigated. The growth rates of HfO2 and ZrO2 decreased with increasing flow rate and pressure of the N2 carrier gas. Data of real-time quartz crystal microbalance measurements demonstrated that the effect observed was mainly due to influence of carrier gas on surface reactions and the role of overlapping the precursor pulses was negligible. At the same increase of the carrier gas mass flow, the increase of the linear flow rate led to more significant changes of thin-film properties than the increase of the carrier gas pressure did. Thin films with higher density, higher refractive index and, particularly, lower concentration of residual chlorine were obtained at higher carrier gas flow rates. Increase of the carrier gas flow rate also resulted in a higher concentration of a metastable phase in HfO2 thin films deposited at 300 °C.  相似文献   

8.
Blends of two highly crystalline polymers containing an elastomer were prepared to study the glass transition of the confined elastomer. The polymers chosen were high density poly ethylene (HDPE), polypropylene (PP), and two elastomers of a different nature: natural number (NR) and EPDM. The dynamic mechanical analyzer (DMA) technique was used to analyze the storage modulus of blends with elastomer content from 0% to 30% by weight, with the remainder made up of equal amounts of HDPE and PP, and blends with 10% of the elastomer, but varied ratios of polyolefins. We used the differentiation modification of the Arrhenius method in the kinetic analysis assuming an n‐order relaxation mechanism, which allowed detecting the percolation threshold of NR. Results indicate that both temperature and activation energy for glass transition (T g ) are dependent on the types of polymers in the blend and blend composition. The T g and E values of the unblended elastomers are higher than those in blends; this behavior is associated with the elastomer confinement and blend morphology.  相似文献   

9.
Sputtering can be defined as the process whereby particles leave the surface as a direct consequence of the presence of incident radiation. When particles leave the surface as a result of receiving momentum from the collision cascade induced by the incident radiation, the process is called “physical sputtering”. If the incoming radiation (ions, electrons, or photons) induces a chemical reaction which leads to the subsequent desorp-tion of particles, the process could be classified as “chemical sputtering”. There are a number of molecules such as CH4, CF4, CF3H, CF3CI, etc., whose binding energy to a large variety of surfaces is believed to be only a few kcal/mole. Therefore, these molecules will not remain absorbed at room temperature. Consequently, if they are generated from surface atoms by radiation-induced processes, they will almost immediately desorb into the gas phase. This process is one type of chemical sputtering. Recent data obtained in plasma environments suggest that this type of reaction is a widely occurring phenomena: however, few systematic quantitative investigations of the subject have been completed. In this paper we will review the evidence for chemical sputtering and discuss mechanisms based on experimental information obtained for the chemical sputtering of silicon and SiO2 under argon ion bombardment in the presence of a molecular beam of XeF2. Under these conditions, 25 or more silicon atoms can leave the surface per incident argon ion. About 75% of the silicon is emitted as SiF4 (gas) and the rest leaves as silicon atoms or SiFx radicals. The total yield (silicon plus fluorine) is greater than 100 atoms/ion. The measured yields are a strong function of XeF2 flux and a much weaker function of ion energy in the range 500-5000 eV. The chemical-sputtering yield for SiO2 is smaller than that of silicon by about an order of magnitude, but it is still larger than the physical-sputtering yield. Moreover, SiO2 is also sputtered by electrons. These results indicate that the incident radiation induces a chemical reaction between silicon and adsorbed fluorine which produces SiF4, and the SiF4 is subsequently desorbed into the gas phase. We define this process as chemical sputtering. The large yields are probably a consequence of weak binding between the surface and the SiF4 molecule.  相似文献   

10.
《Surface science》1986,172(3):763-772
When a Si substrate, just after SiO2 etching, is exposed to an additional etch using CF4 + H2 reactive sputter etching, carbon and fluorine atoms penetrate into the Si substrate to a depth of ≈ 100–150 Å. The effects of an annealing and oxidation atmosphere for this damage recovery and impurity redistribution in the Si substrate are investigated using IMA and Secco etching. Annealing in N2 gas is only effective for removing fluorine atoms. After dry O2 oxidation, though the carbon atoms are removed, the fluorine atoms are still confined in the oxidized layer. Under wet oxidation, carbon and fluorine atoms are removed as soon as the damaged layer is oxidized. Moreover, after 300 Å wet oxidation, no impurity atoms or defects are observed. Wet oxidation may serve as a pretreatment for Si selective epitaxial growth on a dry etched Si substrate.  相似文献   

11.
A method for obtaining an intense secondary pulsed molecular beam is described. The kinetic energy of molecules in the beam can be controlled by vibrational excitation of the molecules in the source under high-power IR laser radiation. A compression shock (shock wave) is used as a source of secondary beams. The shock wave is formed in interaction between an intense pulsed supersonic molecular beam (or flow) and a solid surface. The characteristics of the secondary beam were studied. Its intensity and the degree of gas cooling in it were comparable with the corresponding characteristics of the unperturbed primary beam. Vibrational excitation of molecules in the shock wave and subsequent vibrational-translational relaxation, which occurs when a gas is expanded in a vacuum, allow the kinetic energy of molecules in the secondary beam to be substantially increased. Intense [≥1020 molecules/(sr s)] beams of SF6 and CF3I molecules with kinetic energies approximately equal to 1.5 and 1.2 eV, respectively, were generated in the absence of carrier gases, and SF6 molecular beams with kinetic energies approximately equal to 2.5 and 2.7 eV with He (SF6/He=1/10) and H2 (SF6/H2=1/10) as carrier gases, respectively, were obtained. The spectral and energy characteristics of acceleration of SF6 molecules in the secondary beams were studied. The optimal conditions were found for obtaining high-energy molecules. The possibility of accelerating radicals in secondary molecular beams was demonstrated.  相似文献   

12.
SiGe quantum dots (QDs) grown by ultra-high vacuum chemical vapor deposition using H2 and He carrier gases are investigated and compared. SiGe QDs using He carrier gas have smaller dot size with a better uniformity in terms of dot height and dot base as compared to the H2 carrier gas. There is a higher Ge composition and less compressive strain in the SiGe QDs grown in He than in H2 as measured by Raman spectroscopy. The Ge content is higher for He growth than H2 growth due to hydrogen induced Si segregation and the lower interdiffusivity caused by the more strain relaxation in the He-grown SiGe dots. The photoluminescence also confirms more compressive strain for H2 growth than He growth. Hydrogen passivation and Ge-H cluster formation play an important role in the QDs growth.  相似文献   

13.
The gas-to-infinite dilution fluorine chemical shifts of CF4, SiF4, SF6, C6F6, p-fluorotoluene and p-difluorobenzene have been measured for a series of non-polar solvents. Downfield displacements ranging from 3–16 p.p.m. have been observed. Comparisons with proton solvent shifts make it evident that the London dispersion forces are the principal agent in causing the shifts. However, unlike proton resonance where the local diamagnetic shielding is mostly affected, it is probably through the local paramagnetic shielding that solvents alter fluorine chemical shifts.  相似文献   

14.
Energy loss spectra of 2.5 keV electrons, scattered through small angles by CF4, have been obtained in the region of valence, carbon K- and fluorine K-shell excitations. The carbon K-shell spectrum has features which may be associated with the existence of an effective potential barrier in the CF4 molecule.  相似文献   

15.
Room temperature fluorine electron nuclear double resonance (ENDOR) has been successfully observed for several superstable fluorocarbon radicals ·C(C2F4R)(i-C3F7)2 in solution. Three radicals were employed in which CF3, F, and O-c-C6F10SO3C2F5 were introduced as R, and all the hyperfine couplings (hfcs) obtained by ENDOR were assigned with the help of ESR simulation and ab initio MO calculation. In case of ·C(i-C3F7)3 large 13C and considerable β-fluorine couplings suggest the nonplaner arrangement for the central and three carbons at the β-position, in spite of the fact that all the methyl fluorine show the same hfc. Therefore, a rapid puckering motion along the C3 axis together with the methyl rotation should average the hfc’s of the 18 fluorine nuclei to give the same value. When one of the CF3 groups is substituted with an F nucleus, the five CF3 groups give two hfc values, suggesting some dynamics still exists for the molecular frame. When a large group, O-c-C6F10SO3C2F5, is substituted for CF3, all the five CF3 groups become nonequivalent and the ENDOR signal becomes intensive and sharp even at 290 K, indicating that the molecular frame becomes rigid. The relation between the ENDOR spectra of these systems and the intramolecular dynamics is discussed.  相似文献   

16.
The pressure dependence of coherent dephasing time T2 has been determined by investigating transient emission signals of molecular gas samples, following pulsed microwave excitation. Experimental results on cyanoacetylene (HCCC15N), deuterated fluoroform (CF3D) and 3,3,3-trifluoropropyne (CF3CCH) are reported for the pure gas and also for mixtures with H2 and He for rotational transitions in the frequency range from 5.8 GHz to 19.6 GHz.  相似文献   

17.
E.S.R. spectra of a γ-irradiated single crystal of SiF4 were investigated. The spectra observed were attributed to SiF3 radicals having 28Si (I=0) and 29Si (I=1/2) atoms. From the angular dependence of the spectral lines on rotation of the single crystal, hyperfine tensors were determined for three fluorine atoms and the 29Si atom of the SiF3 radical. The three fluorine atoms in the radical are equivalent, whereas the directions of their hyperfine tensors are different from one another owing to the pyramidal structure of the radical. In addition to the hyperfine analysis, the analysis of the superhyperfine structure due to neighbouring fluorine atoms gave information on the orientation of the radicals in the crystal and the mechanism of radical formation. The structure of the radical is discussed in comparison with that of the CF3 radical.  相似文献   

18.
The effect of femtosecond laser irradiation in air and in O2 and CF4 gas flows on the wettability of electrospun poly(?-caprolactone) fiber tissue scaffolds was studied. Laser power, focus spot size, raster scan spacing and gas atmosphere were varied in experiments. SEM imaging showed the average fiber diameter and surface porosity sizes were both altered by ablation. The micro-scale surface roughness measured by scanning laser profilometry was found to have a non-monotonic relationship to the surface wettability measured by the contact angle of sessile water droplets. In contrast, surface water contact angle continuously decreased with increased oxygen atomic percentage and oxygen-containing group fraction as measured by XPS. Further, the oxygen content was larger for more extensively ablated fiber surfaces, regardless of whether the increased ablation was caused by high laser power, smaller scanning space or smaller defocusing distance. Of the three gas atmospheres, O2 gas flow was the most favorable environment for increasing surface oxidization, resulting in the largest water contact angle decrease for given laser power. For CF4 gas flow, the least oxidization occurred, and the magnitude of water contact angle decrease was smallest for treatment at a given laser power.  相似文献   

19.
Stomaflex elastomers filled with two types of magnetic particles (nano- and micro-sized) were investigated. It was observed that doping with Fe3O4 nanoparticles and applying a magnetic field during the polymerisation process led to a significant change in the local structure of the elastomer. Decreases in the quasi-crystalline phase concentration, in the average size of the crystalline blocks, and in the ordering distance were observed after doping the elastomer with magnetite nanoparticles. After filling the polymer with Fe3O4 nanoparticles, yet the elastomer fractal dimension changes. For the elastomer filled with a large amount of Fe microparticles (75% particle concentration) a texture effect is observed, and this effect is larger for the samples polymerised in a magnetic field. At all microparticle concentrations, these elastomers exhibit surface fractal structure.  相似文献   

20.
Poly(ethylene terephthalate) (PET) films were treated with CF4 plasma immersion. The samples were processed at different RF powers and treatment time. The surface modification of PET films was evaluated by water contact angle (CA), X-ray photoelectron spectroscopy (XPS) and atomic force microscope (AFM). Decrease in contact angle of both sides of PET films was observed under mild treatment conditions. However, as raising treatment power and/or time, the change in contact angle between the two sides of PET films was different. The relatively hydrophobic and hydrophilic surfaces were being in situ formed on the two sides of PET films, respectively. And the extreme values of water contact angle reached 108.63 and 7.56°, respectively. XPS analyses revealed that there was a substantial incorporation of fluorine and/or oxygen atoms in both side surfaces. The relative chemical composition of the C (ls) spectra's showed the incorporation of non-polar fluorine-based functionalities (i.e. CFCFn, CF2 or CF3 groups) and polar oxygen-based functionalities (i.e. COOH or OH groups) in the surfaces. Correlation between the plasma parameters and the surface modification of PET films is also discussed.  相似文献   

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