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13.4nm软X射线干涉光刻透射光栅的优化设计 总被引:1,自引:1,他引:0
基于严格的矢量耦合波方法,结合纳米级光栅实际制作工艺,定量分析了在13.4 nm软X射线(TE偏振)正入射条件下,光栅材料、厚度、占空比、梯形浮雕底角大小等因素对光栅一级衍射效率的影响.结果表明,在此波段处,Si3N4、Cr、Au浮雕的相位作用对光栅衍射起重要影响,其中非金属材料Si3N4比金属材料Cr、Au的相位作用更明显.最后优化得到了用Si(或Si3N4)做衬底的si3N4、Cr、Au光栅,分析结果显示,其一级衍射效率优于目前用于13.4 nm软X射线干涉光刻的Cr、Si3N4复合光栅. 相似文献
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根据衍射光栅的标量理论,计算并讨论了金透射光栅在软X波段衍射效率对光栅厚度和占宽比的依赖关系.结果表明,选择合适的光栅槽深和占宽比,高达 21.9%的衍射效率可能被获得,远高于振幅型光栅的+1级衍射效率10.14%.通过全息光刻与电镀转移技术制作的位相型金透射光栅由300nm的聚酰亚胺薄膜支撑,光栅槽深200nm,占宽比为0.55,周期为1μm,面积为20mm×5mm.在国家同步辐射装置上,测得其+1级透射衍射效率在波长λ=7.425nm时获得最大值,约为16%.
关键词:
透射位相光栅
全息光刻
电镀 相似文献
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用于展宽和压缩激光脉冲的多层膜脉宽压缩光栅是由多层介质高反膜和位于其顶层的浮雕光栅构成。以设计的高反射多层膜为基础,利用傅里叶模式理论分析了其衍射场分布,给出了TE波自准直角入射的使用条件下,多层介质膜脉宽压缩光栅衍射效率的表达式。以-1级衍射效率为评价函数,分别讨论了HfO2和SiO2为顶层材料时,多层膜脉宽压缩光栅-1级衍射效率高于0.95的光栅结构参量范围。结果表明,在该条件下,选择HfO2为顶层材料时,光栅结构参量有较大的取值范围。给出了优化的光栅结构参量,并分析了光栅制作误差及其使用条件的宽容度,对光栅制作工艺和使用具有一定的指导意义。 相似文献
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《光子学报》2015,(10)
设计了一种错位双光栅色散元件,与条纹相机耦合实现了0.1~5keV范围X射线时间分辨谱的测量.该色散元件由2 000lp/mm和5 000lp/mm两块子光栅在空间错位排布而成,低密度光栅测量低能段软X射线(100~1 000eV),高密度光栅测量中能段软X射线(1 000~5 000eV),通过空间错位实现能谱拼接.在同步辐射源上使用单色能点对其进行标定,获得了错位双光栅衍射效率的实验结果.根据光栅的结构特性,结合标定结果与严格耦合波分析理论,计算得到了100~5 000eV能区光栅的绝对衍射效率曲线,并给出了错位双光栅的解谱方法.该错位双光栅能够有效提升透射光栅谱仪的性能,为高温等离子体诊断提供宽谱X射线时间分辨谱定量测量. 相似文献
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入射光在光栅内传输时将激发产生离散模.本文采用模态法调节光栅内离散模的传输特性,使TE和TM偏振光所激发的0、1模为传输模,其余高阶模为消逝模.通过调控0模和1模间的累积相位差,对衍射光进行调控,实现了-1级近100%的高效衍射.采用模态法分三部设计了共振域的矩形全偏振闪耀光栅:1)根据光栅的共振条件给出光栅周期,光栅周期越大槽深越小;2)根据特征模方程计算出光栅占空比;3)根据耦合模条件计算机光栅槽深.实验结果表明,该光栅的TE和TM偏振光同时具备近100%的-1级衍射效率.给出了633nm波长-1级矩形石英全偏振闪耀光栅的典型设计实例,计算结果表明:所设计的全偏振闪耀光栅对TE和TM偏振入射光的-1级衍射效率分别高达96.7%和98.1%,且具有较宽的入射角及入射波长的变化适应范围,较大的制作容差. 相似文献
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假设感光材料的曝光和处理过程都是线性的,那么全息光栅的槽形就取决于干涉条纹的光强度分布对感光层的调制深度.设有光强度为I1和I2的两列相干平面波前,它们相遇时所产生的干涉条纹的光强度分布为式中φ是两列相干波前的位相差,所以全息光栅的槽形分布是一个正弦(或者余弦)函数. 一个正弦函数可以用周期和振幅两个参数来表示,在这里周期是全息光栅的槽距,振幅就是槽深的一半.当槽距给定时,若选择不同的槽深可以获得不同的光栅槽形,反之亦然.我们知道,槽形决定光栅的衍射效率,所以对于正弦槽形的全息光栅来说,要合理选择槽距和槽深,以获得… 相似文献
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变栅距光栅实现啁啾脉冲光谱整形 总被引:1,自引:0,他引:1
为了充分利用放大介质的增益带宽,获得脉宽更短,功率更高的输出脉冲,需要将输入到主放大链的种子脉冲进行光谱整形来补偿放大过程中的增益窄化效应。提出了利用变栅距反射光栅实现中心波长1053nm,谱宽6nm啁啾脉冲的光谱整形。运用严格的光栅衍射耦合波理论分析光栅的衍射特性,发现该方案不会引入相位畸变。分别计算和分析了刻槽深度、入射角大小、光栅周期以及入射光波长的变化对衍射效率的影响,通过选取适当的光栅参量可获得0.5%~84%的光谱调制深度。 相似文献
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新近提出的光学色散元件"之"字形光栅具有优越的衍射特征,在光谱测量和分析中具有重要的应用价值.本文基于卷积定理,采用一种新的数值计算方法对应用于X射线波段的"之"字形光栅的衍射模式进行了模拟计算,并将其衍射模式与传统光栅以及正弦光栅的衍射模式进行了比对研究,结果表明:"之"字形光栅可以将高级衍射抑制到低于一级衍射四个量级的水平,具有比传统光栅优越得多的衍射模式,与理论预期结果一致.在此基础上,又分析了实际应用过程中吸收体对X射线的吸收情况给"之"字形光栅衍射模式带来的影响,最终证实了"之"字形光栅具有较强
关键词:
之字形光栅
卷积定理
衍射模式
光谱测量 相似文献
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D. Heitmann 《Optics Communications》1977,20(2):292-297
We have investigated the diffraction of light from sinusoidally modulated silver surfaces with grating periods from 4000 to 8000 Å for wavelengths of the visible spectrum. We compare our experiments with theoretical results from a light scattering theory in the first non-vanishing order of the modulation height. This theory includes polarization and the optical constants of the grating material. Good agreement of the theory with the experiments is found for weakly modulated gratings if grating anomalies are avoided. 相似文献
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Makoto Ohki Haruo Sakurai Shogo Kozaki 《International Journal of Infrared and Millimeter Waves》1997,18(10):2031-2045
This paper is described for T-matrix analysis of the electromagnetic wave diffraction from a Fourier grating that the boundary
value problem is treated by applying the extended boundary condition. The rigorous form of the expression of matrix elements
is presented in the term of Bessel functions of the first kind. The error of power conservation versus the truncated number
has been examined for mode number. Diffraction efficiencies versus groove depth and wavelength for a second or third harmonic
wave of Fourier grating have been discussed. Numerical results are in good agreement with those obtained from other method
and experimental values. Reasonable numerical results are presented for a groove depth per period of the Fourier grating less
than 0.25. 相似文献
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全息光栅实时显影监测曲线的理论模拟 总被引:8,自引:2,他引:6
在特定的工艺条件下,光刻胶的非线性效应非常显著;合理地利用非线性效应,能够制作出近似矩形的全息光栅掩模。为了分析清楚非线性效应对光栅沟槽成形的作用机理,有必要建立一个显影理论模型。模拟得到的光栅轮廓和实验样片的扫描电子显微镜照片结果很吻合。根据这个模型,进而使用光栅严格理论,得到其主要特征与实时监测实验曲线一致的理论模拟监测曲线。理论分析和实验证实,该模型基本表征了工艺条件对光栅沟槽形状的影响,并揭示了光刻胶呈现显著非线性效应时,必然对应着明暗条纹中心位置之间的显影刻蚀速率相差很大。这个模型为全息光栅的工艺研究提供了一个有效的理论分析工具。 相似文献
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A high-efficiency, ultrabroadband dielectric internal reflection grating with rhombus-shaped grooves is designed by a rigorous coupled-wave analysis, and an effective method for predicting spectral bandwidths of gratings from their efficiency maps is presented. The grating can be fabricated from a single dielectric material, and its reflection diffraction efficiency of the -1st order can reach more than 0.99. More importantly, an ultrabroadband top-hat diffraction spectrum with efficiency exceeding 0.98 over 170 nm wavelength wide is achieved, which makes the gratings suitable for applications associated with broadband illumination, such as ultrashort pulses. 相似文献
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The Raman spectrum of a dielectric substance deposited in a few microns thick film on a diffraction grating (aluminium coating), is obtained with a trapped laser beam inside the film. In order to assure the most efficient coupling, a single mode of propagation is excited in “reverse coupling”; the selection of groove spacing is discussed. 相似文献
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This paper presents a more detailed interaction of an electromagnetics light with a metallic surface-relief subwavelength grating utilizing the rigorous coupled-wave analysis. The focus of this work is the accurate modeling of undetermined aspects of diffraction patterns produced by binary metallic grating structures, specially gold grating. First-order diffraction efficiency for rectangular-groove gold grating with equal groove and ridge widths are presented for various wavelengths as a function of period, groove depth, polarization and angle of incidence. We also studied diffraction efficiency of both of TE and TM polarization modes against increasing of incident angle as well as TE polarization against increment of grating period. As a result, very low reflectivity at zero-order was found out for TE and TM polarizations at the pitch of Λ = 2λ. Having been studied diffraction efficiency of metallic surface-relief gratings, we also examined polarization-dependent efficiency of diffraction orders, for different groove depths. Simulation results have been completely presented. 相似文献
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对称面形光栅TE模的衍射特性 总被引:3,自引:1,他引:2
本文采用耦合波方法计算了对称面形光栅的衍射效率,分析了光栅截面面形为正弦、三角形、矩形、梯形光栅衍射效率与光栅周期、沟槽深度的关系,计算了光栅的峰值衍射效率。理论计算表明:合理地选择光栅周期、沟槽深度,对称面形光栅都可以达到很高衍射效率,接近100%;光栅的峰值衍射效率基本出现在Bragg衍射且光栅的周期等于衍射波长时。 相似文献