Gas chromatographic analysis of trace gas impurities in tungsten hexafluoride

Highly reactive fluorinated gaseous matrices require special equipment and techniques for the gas chromatographic analysis of trace impurities in these gases. The impurities that were analysed at the low-microg/l levels included oxygen, nitrogen, carbon dioxide, carbon monoxide, sulfur hexafluoride and hydrogen. This paper describes the use of a system utilising backflush column switching to protect the columns and detectors in the analysis of trace gas impurities in tungsten hexafluoride. Two separate channels were used for the analysis of H2, O2, N2, CO, CO2 and SF6 impurities with pulsed discharge helium ionisation detection.     

Optimisation of a gas chromatographic method for trace gaseous impurities in nitrogen trifluoride by column sequence reversal

Highly reactive fluorinated gaseous matrices require special equipment and techniques for the gas chromatographic analysis of trace impurities in these gases. The impurities that were analysed at the low mg/L levels included dioxygen (O2), dinitrogen (N2), carbon dioxide (CO2), carbon monoxide (CO), sulfur hexafluoride (SF6), methane (CH4) and nitrous oxide (N2O). Carbon tetrafluoride (CF4) is also present in the product at levels of 20-400mg/L and had to be analysed as well. This paper compares the use of a custom-built dual-channel gas chromatograph utilising single column back flush switching on one channel for the determination of O2, N2, CH4 and CO with column sequence reversal on a second channel for the determination of CO2, N2O, SF6 and CF4 to a similar system using a combination of dual-column back flush and heart-cut configurations. Pulsed discharge helium ionisation detectors were used on both channels in both configurations.     

Determination of Trace Impurities of H2, O2, Ar, N2, CO, CO2, and Hydrocarbons in High-Purity Monosilane by Gas Chromatography

Procedures were proposed for the determination of impurities of permanent gases (H₂, O₂, Ar, N₂, and CO), carbon dioxide, and hydrocarbons in high-purity monosilane by gas chromatography with detection limits of 1–3 ppm, 2 ppm, and 0.02–0.04 ppm, respectively, which are lower by 1–2 orders of magnitude than those published in the literature. The procedures make it possible to check the compliance of the purity of monosilane with present standards of microelectronics (TU 48-0513-057.0-91).     

Sample introduction in high speed capillary gas chromatography; input band width and detection limits

The speed of analysis in capillary gas chromatography can be substantially increased by reduction of the column inner diameter. However, special demands are then posed upon instrumental design. In particular, the sampling system is highly critical because it has to be capable of delivering extremely small injection band widths which must be compatible with the column inside diameter. This study focuses on the evaluation of two potentially suitable sample introduction systems with respect to input band width and detection limits and their compatibility with small bore (≦ 100 μm) columns in capillary gas chromatography. One of them allows liquid on-column injection, based on liquid splitting, of only a few nl onto small bore (≦ 100 ?m) fused silica columns. For gases, input band widths as low as 1 ms are obtained with this system. The other one is part of a miniaturized gas chromatograph with extremely low dead volume interfaces and detector volumes. It allows input band widths for gases of a few ms. Without any preconcentration ppm concentrations are measured in gaseous samples with a 80 ?m thick film capillary column. It will be shown that a further reduction of the minimum detectable amount and analysis time is possible with this equipment.     

Trace analysis of small gas samples in sealed containers with mass spectrometry using static dilution

A sampling method for the analysis of small amounts of gases from sealed containers is described. Liquefied pressurised gas samples were expanded into a vacuum box and statically diluted with ultrapure nitrogen. The equations for the sample dilution were established, relating the measured impurity amount fractions in the sample mixture to their partial pressures in the sealed container and, in the case of oxygen, to the air pressure. Ion?Cmolecule reaction mass spectrometry allowed identification and measurement of trace impurities corresponding to partial pressures in the range of 1?hPa in the container. The method was applied for determining the identity and amount of gaseous impurities in n-butane used in implantable gas pressure?Coperated drug infusion pumps. Impurities from the n-butane supply cylinder or from decomposition products, for example due to the laser welding of the Ti plugs of the containers, could be excluded by the results of saturation vapour pressure measurements, FID gas chromatograms and IMR mass spectra. The variability in pressure versus volume among tested infusion pump samples was associated with excess oxygen, attributable to an excessive residual air pressure in the gas containers before they were filled with n-butane. The sample preparation method is principally applicable to measure the composition of small amounts of gas mixtures and gaseous impurities with identified IMR mass spectra down to trace levels??even for ubiquitous substances like oxygen. The volume of the produced gas mixtures allows characterisation of the gas by standard gas analytical methods and for impurities by trace gas analytical methods.     

Bioelectronic detector with monoamine oxidase for halitosis monitoring

Methyl mercaptan (MM) is known as one of the major chemicals of halitosis (bad breath). In this study, a bioelectronic gas sensor (bio-detector) for gaseous MM was developed and was applied to measure halitosis in breath. The bio-detector consisted of a Clark-type dissolved oxygen electrode, a monoamine oxidase type-A (MAO-A) immobilized membrane and a reaction unit that had liquid and gaseous compartments separated by a hydrophobic porous polytetrafluoroethylene (PTFE) diaphragm membrane. The tip of the electrode covered with MAO-A membrane was placed into the liquid compartment as touching to the PTFE diaphragm membrane. In order to amplify the bio-detector output, a substrate regeneration cycle caused by coupling the monooxygenase with l-ascorbic acid as reducing reaction with reagent system, was applied. The results of MM vapor measurements showed the calibration range of the bio-detector for MM vapor was from 0.087 to 11.5 ppm (correlation coefficient: 0.993) and included the human sense of smell level 5 (0.2 ppm). The bio-detector had good selectivity being attributed to enzyme specificity was obtained for several substances (trimethyl amine, ammonia, dimethyl sulfide, etc.). The bio-detector was applied for halitosis measurement. Expired gases in five subjects were sampled every hour and the concentrations of MM in the expired gases were monitored. The output of bio-detector showed behaviour of halitosis level changes in a day such as increasing with passage of time and decreasing after eating.     

非晶硅太阳能电池生产工艺用氣分析方法研究

本文对非晶硅太阳能电池制造工艺过程所用的无机氢化物烷类气体硅烷、硼烷、磷烷、甲烷和氢及其混合气的配制与分析方法进行了研究,以微机控制配气、检测程序、气相色谱法分成分析杂质,电容法测水分,方法已应用于工艺过程分析。     

Study of a subfluoride process for production of high-purity silicon

Process was studied in which high-purity silicon (1.07–1.35 ppm) is obtained from powdered technical-grade silicon (99.81–99.86% Si) produced by acid refining to remove impurities by its treatment with gaseous SiF₄ at a temperature of 1200°C to give pure SiF₂ (gas), with its subsequent decomposition at temperatures lower than 800°C into silicon and SiF₄ (gas) circulating in the system.     

Thermodynamics of high-purity calcium production

We present the results of thermodynamic analysis of the behavior of gaseous and gas-forming impurities at different stages of calcium production, including electrolysis of calcium chloride, vacuum distillation of calcium from copper–calcium alloy, mechanical dispersing, and remelting and granulation of distilled calcium from the melt. The mechanisms of transfer of H, C, N, and O impurities at all stages of the processes under study are discussed. It is shown that in order to produce high-purity calcium, deep degassing needs to be performed when heating the materials loaded at the distillation, remelting, and granulation stages under condition that the equipment is highly air-tight. Distillation of calcium is recommended to be carried out at temperatures that exceed the process start temperature by no more than 20 K.     

Corrective correlation method for the analysis of gases by plasma/laser-excited fluorescence spectrometry

Traces of gaseous impurities in permanent gases can be quantitatively determined by recording their fluorescence produced in a dual process of excitation in a plasma discharge combined with excitation in a resonant field of laser radiation. However, variations in the composition of the gas samples can cause systematic errors of determination. Such errors can be corrected using a correlation relationship established between the fluorescence intensity and concentrations of components of the sample. As an example, the possibility of accurate determination of low neon concentrations in a sample of helium containing an undetermined amount of argon is presented. The correlation relationship between the level of the saturated fluorescence of neon and the saturation parameter (spectral density of laser power required to reach the 50% level of neon fluorescence intensity relative to the level of the completely saturated fluorescence) over a broad argon content range in helium was established and used. The objective was to neutralize possible obscuring impacts of unknown uncontrolled impurities that may or may not be present in a gas sample on the analytical results.     

A New Model for the Genesis of Natural Gases--Multi-source Overlap, Multi-stage Continuity, Type Controlled by Main Source and Nomenclature by Main Stage (Ⅰ)--Multi-source Overlap and Type Controlled by Main Source

Based on the geochemical studies of natural gases in the past ten years in China, the authors have proposed a new model for their genesis--multi-source overlap, multi-stage continuity, main source-controlling type and nomenclature by the main stage.Multi-source refers to a diversity of material sources involved in the formation of natural gases, including abiogenic and biogenic material sources. In regard to biogenic sources, either oil-generating or coal-generating organic matter would produce gaseous hydrocarbon reservoirs of commercial importance. Generally, natural gases originating from these sources can overlap to form gas reservoirs. Under specific circumstances mantle-source abiogenic gases could overlap biogenic gases to form gas reservoirs. In nature, natural gases predominated by gaseous hydrocarbons may be formed from a single end-member source. However, multi-source overlap is more typical of the genesis of natural gases.     

Analyse du titane et de ses alliages par spectrométrie d'émission dans l'ultraviolet-vide

The large ultraviolet spectrograph for analysis in vacuum (VUV spectrograph) developed by ONERA and described in a previous article, has been used for multielements quantitative analysis: in pure titanium, concentrations of oxygen, nitrogen, hydrogen and carbon have been determined as well as silicon and iron impurities; in titanium-based alloys, addition metals at high concentration, Al, V, Mo, Zr, Si, have also been determined simultaneously with the gaseous elements and impurities. The analytical lines located between 200 and 2600 Å and corresponding to highly ionized atoms (II to VI) have been selected. The stability of the equipment has been tested and the repeatability of results has been investigated. This new analytical technique allows the study of various surface phenomena such as the variations in oxygen, nitrogen and carbon concentrations with a resolution in depth of a few microns. The method allows it to envisage the quantitative analysis of surface phenomena on metal films with a thickness below one micron.     

Features of the anatase transformation to rutile

We showed that the transformation of anatase to rutile is accompanied by a set of various chemical reactions in which the anionic and/or cationic impurities in the anatase partitioned in a separate phase (gaseous or condensed) resulting in the rutile titanium dioxide with a low content of impurities.     

Hydrogen Oxidation on a Platinum Microelectrode: Effect of Carbon Monoxide Impurities

The kinetics of the hydrogen oxidation and the CO adsorption on a Pt (ultra)microelectrode is studied in a 0.5 M H₂SO₄ solution saturated with a mixture of gaseous H₂ and CO at partial CO pressures p _CO = 10–500 ppm. The balance between rates of diffusion and adsorption of CO at different adsorption times is studied. Studied is the effect of CO impurities in H₂ on steady-state polarization curves for the hydrogen ionization and nonsteady-state curves of the oxidation current decay with time at 0.02–0.05 V. Conditions under which in a certain time interval and at a certain CO concentration the slope of an I vs. t curve is proportional to p _CO are determined. The obtained dependence may be used when designing a technique for monitoring CO impurities in technical hydrogen.     

逐级酸处理对锡盟褐煤的结构及热解特性的影响：气相产物的生成

为了考察逐级酸处理对锡盟褐煤热解过程中气相产物生成的影响,对锡盟褐煤进行了HF-HNO₃-HCl逐级处理,原煤和酸处理煤样采用固定床热解-气相色谱法在线分析气相产物释放行为和变化的研究。结果表明,逐级酸处理过程对锡盟褐煤热解过程中含氢气体、含氧气体和含硫气体的释放有着明显的影响。不同气体的形成途径、形成阶段和温区不同,导致酸处理过程对其的影响有明显的差异。逐级酸处理的煤样,除因矿物质对煤热解气相产物的影响减弱外,HNO₃处理样还因其氧化作用引起了气相产物释放趋势的变化,使得含氢气体的释放量降低、含氧气体释放量增加;降低了H₂S的累积释放转化率而促进COS的释放。     

Analytical methods for airborne arsine,silane and dichlorosilane by adsorption sampling and AA spectrophotometry

Analytical methods for arsine, silane and dichlorosilane by adsorption sampling and elemental analysis with graphite furnace AA were studied to establish convenient methods for atmospheric contamination surveys. This study included the following five items: (1) primary selection of adsorbents applicable to adsorption sampling; (2) examination of the adsorption capacities of the adsorbents for the gases; (3) improvement of the adsorbents by chemical modification; (4) desorption of the gases adsorbed on the adsorbents with solvents; and (5) quantitative analysis of arsenic and silicon in the solutions. Experimental results showed that active carbon made from synthetic thermosetting resin beads contained no aresenic and little silicon as impurities. This active carbon by itself was proved to adsorb arsine and dichlorosilane, but not silane. Impregnation with sodium hydroxide of the active carbon improved the adsorption capacity for all three gases. Refined silica gel, free from arsenic contamination, did not adsorb arsine by itself but potassium permanganate impregnation produced an adsorption capacity for arsine. The adsorbed arsine on the active carbon was desorbed into a hot dilute nitric acid solution with high efficiency (over 90%), but arsine adsorbed on sodium hydroxide impregnated active carbon or on potassium permanganate impregnated silica gel was dissolved into various solutions only at lower efficiencies. Silane adsorbed on sodium hydroxide-impregnated active carbon was desorbed with hot water with an efficiency higher than 90%. Dichlorosilane adsorbed on the active carbon with or without sodium hydroxide impregnation was desorbed with a nitric acid solution with efficiency of 85%. The lower determination limit for arsine able to discriminate from background interference of arsenie was 0.005 ppm, and those for silane and dichlorosilane were each 0.05 ppm for 3-dm³ air samples.     

Studies of the atomization mechanism in a graphite furnace—I. The contents of the gaseous impurities in the furnace and their variations

Using theoretical calculations of the partial pressures of gaseous impurities in the atmosphere in a GFA as a basis, the authors arrived at conclusions which are at variance with those of L'vov and frech and their co-workers. Accordingly, the partial pressure of free oxygen (p_o) in a GFA originates predominantly from the thermal decomposition of the oxides of the analyte and impurities in the matrix during atomization when the temperature is higher than 1000°C; then, p_o depends on the nature of the sample. The total amount of oxygen in a GFA depends on the initial amount of it in the argon gas and the amount released from the sample when the temperature is lower than 1000°C.The variation of the partial pressure of CO is for the first time characterized as follows: the content of CO, which is mainly dependent on the sample and the total amounts of gaseous impurities in the argon purge gas, does not vary markedly with the temperature and other factors during the whole process of atomization. The gaseous impurities exist mainly in the form of CO.     

On the influence of nitrogen and oxygen on the GD-OES analysis results

Summary The effect of nitrogen and oxygen impurities in argon on the analytical line intensity of various elements and other discharge parameters of a dc glow discharge has been studied. The two gaseous impurities were introduced into the discharge gas argon as molecular gaseous additions as well as sputtering products from the samples. Both elements may initiate chemical reactions in the plasma leading to a reduction of the number of free atoms of the determined elements available for excitation in the discharge plasma. Considering the main components of the investigated sample, nitrogen or oxygen contents exceeding the critical threshold of about 0.1 mass-% may alter the analytical line intensities of the elements of interest significantly. The effect of smaller gaseous impurity contents could be detected only by the determination of the emission yield. The line intensity may increase or decrease depending on the elements present in the discharge plasma.