6H-SiC的飞秒激光超衍射加工

利用飞秒激光直写微纳加工平台, 对6H-SiC材料进行了突破衍射极限的微纳结构加工研究. 使用中心波长和脉宽分别为800 nm和130 fs的钛蓝宝石激光器和荧光倒置显微镜搭建了飞秒激光直写微纳加工平台, 研究了在不同的实验条件下对6H-SiC的光学加工情况, 采用扫描电子显微镜对加工结构进行表征. 通过分析不同的激光功率和不同的曝光时间等实验条件下加工的分辨率, 发现分辨率随着激光功率的减小而提高, 随扫描速度的增大而提高, 且能突破光学衍射极限. 最终获得125 nm的加工线宽, 并加工了加工线宽240 nm, 周期1.0 μm的线阵列. 研究结果为微机电系统(MEMS)的微器件设计开创了新的思路, 对发展MEMS器件具有重要意义. 关键词： 飞秒激光直写 超衍射加工 6H-SiC 微机电系统     

脉冲激光辐照硅材料引起表面波纹的特性研究

叙述了激光与材料相互作用过程中引起相干受激光散射的机制,以及形成材料表面波纹的特性。在激光波长1．06μm、能量15mJ、光斑直径2mm、脉冲半峰全宽约10ns和入射方向为布儒斯特角的条件下,进行了脉冲激光辐照硅材料形成表面波纹的实验研究。在脉冲激光辐照硅材料表面功率密度略大于材料损伤阈值的条件下,发现了硅材料表面形成的平行等间距直线条纹结构。用光学显微镜和原子力显微镜分别测量了被辐照硅材料表面的波纹形貌特征。在假设硅材料表面波纹的产生与声波在材料中的传播速度有关的条件下,由声波传播速度和激光辐照硅材料的脉冲宽度较好地解释了材料表面形成条纹的宽度．并认为在形成表面波纹的过程中,热应力起主要作用。     

飞秒激光在光敏玻璃内制作微孔

用20倍显微物镜将波长为775 nm的飞秒激光聚焦在光敏玻璃（FOTURAN）内部,通过纵向写制模式由表面以下500 μm曝光至表面,并结合热处理和在浓度8%的氢氟酸超声溶液中腐蚀50 min,在FOTURAN内部制作了直径为几十μm的微孔.利用光学和扫描电子显微镜分析发现微孔具有圆形横截面和清晰边缘,目前得到的深宽比大约为7.通过在宽范围内改变入射激光能流（2.3~36.2 J/cm2）和写制速度（100~1 000 μm/s）,研究了这两项飞秒激光入射参量对制作微孔的影响.发现写制速度对制作微孔直径影响较小,而利用相对低的入射激光能流曝光可得到较大深宽比的微孔,并且在此情形下制作微孔的横截面更圆,璧面光滑度更高,并分析了原因.     

熔石英紫外激光初始损伤形态分析

 采取355 nm激光脉冲辐照熔石英样品,利用Nomarski微分干涉差显微镜、原子力显微镜和扫描电子显微镜观测手段对前后表面产生的损伤点进行了观察分析。对前后表面损伤形态做出详细的描述和分类,从理论上对每种损伤类型产生的条件与机理做出推测。实验结果表明：熔石英前表面存在小麻点群损伤和星状裂纹损伤两种损伤形态,横向尺寸分别为0.8～2.5和1.0～5.5 μm;后表面存在小麻点群损伤、壳状剥离损伤和火山口3种损伤形态,损伤横向尺寸分别为0.48～1.33,4～20和12～30 μm。实验证明了1 μm尺度损伤点的产生与再沉积层密切相关。     

随机扫描多光子荧光显微成像系统

多光子荧光显微成像是生物学研究的有力手段,但目前的成像速度难以满足神经成像中快事件检测的需要。针对这一问题,提出了一套随机扫描快速多光子荧光显微成像系统。系统采用二维声光偏转器快速扫描飞秒激发光束,能够以每点10μs的速度对特定的感兴趣区域进行跳跃式扫描,即随机扫描,使得有效的扫描速度大为提高。引入单棱镜补偿方法解决应用声光偏转器带来的色散问题。以170 nm荧光小球为样品,测得系统的横向分辨力为0.3μm,纵向分辨力为1.3μm。给出了随机扫描系统和商品化多光子荧光显微镜对同一个荧光细胞的成像结果,证明了新系统的成像能力。     

激光辐照铝靶汽化过程的高速纹影诊断技术

应用高速纹影系统记录激光束辐照在Ly12铝靶时所产生的汽化羽扩张、空气爆炸波、熔融物质喷溅以及穿靶等现象.并由扫描摄影记录的轨迹图测出汽化羽的扩张速度为150～190m/s,空气冲击波速度为450～500m/s,靶表面高压蒸汽速度为5～7.8km/s。     

Observation of microsphere movement driven by optical pulse

A laser beam was coupled into a tapered optical fiber tip with a diameter of about 2.6 μm, and a 46 μm diameter microsphere was propelled by the outgoing optical pulse. With the change of pulse energy from 1.35 to 7.22 μJ, the calculated average velocity of the driven microsphere varied from 0.38 to 10.68 cm/s. The scanning electron microscope images of the fiber tip show that there is no thermal damage during the experiment.     

基于中红外痕量甲烷检测的地震预警仪

随着地震断裂带气体观测技术的快速发展,为了对地震进行精确的预报,减少因地震给人民群众生命和财产带来的损失,根据甲烷气体的释放与地震前上地壳岩石的微裂隙有直接关系的这一微观变化,设计并研制中红外痕量甲烷气体检测仪。仪器采用激发波长为7.65 μm的量子级联激光器(QCL),结合双光路长度为76 m的多次反射herriott长光程气体吸收池,可以在4 s的采样时间内实现40 nmol·mol-1气体检测灵敏度。同时,采用半导体激光器频率调制直接光谱吸收技术,降低了该仪器噪声的主要来源1/f噪声,使气体检测下限达到5 nmol·mol-1 (40 s采用时间)。在野外实验中,利用可控震源车作为模拟地震源,将6个痕量甲烷检测仪以100 m为距离等间隔放置,对距震源中心不同距离下的地表面甲烷气体浓度进行动态测量。实验表明,该仪器可以监测地震前地下痕量甲烷气体的释放,为地震前兆预警提供新的途径。     

镍基非晶复合涂层激光制备及其纳米压痕测试

采用大功率半导体激光熔覆和重熔的工艺在低碳钢表面制备Ni-Fe-B-Si-Nb合金非晶复合涂层,并对所得涂层进行了纳米压痕性能测试。研究结果表明,当激光熔覆时激光功率为0.8kW,熔覆速度为0.36m/min,送粉速度为12g/min,重熔时激光功率为3.5kW,熔覆速度为8m/min,在低碳钢表面成功制备了Ni40.8Fe27.2B18Si10Nb4非晶复合涂层,涂层主要由非晶相和NbC颗粒相组成。纳米压痕测试结果表明经激光重熔后所得非晶复合涂层的显微硬度和弹性模量远远大于未重熔的熔覆层,并且也大于同成分大块非晶。     

以非晶碳作硅基红外增透膜的实验研究

在室温下，用激光烧蚀石墨靶方法在单晶硅衬底表面沉积了不同厚度的非晶碳膜。对膜进行了表面形貌观察，测试并分析了膜的拉曼散射光谱和傅里叶变换红外光谱。发现膜同晶石墨杂质较少，观察到1200cm^-1附近的非晶金刚石拉曼峰，膜层在红外的光透过率高，在硅衬底上适宜于制作波长短于8μm的红外增透膜。     

熔石英亚表面划痕激光诱导损伤阈值实验研究

 用原子力显微镜和光学显微镜观测酸蚀后熔石英亚表面划痕,并根据形貌特征将其分为Boussinesq-point-force crack(BPFC)、Hertzian-conical scratch(HCS)和Plastic indent(PI)三类,测试了各类划痕的损伤阈值,讨论了激光损伤机制。结果表明锐度较大的BPFC损伤阈值不超过2.0 J/cm<>2;深度小于1 μm的 HCS阈值可达2.6 J/cm²;形变较大的PI阈值至2.8 J/cm2,形变较小的PI的激光损伤阈值与无缺陷材料相当。BPFC 和深度超过1 μm的HCS是导致熔石英损伤阈值低的主要因素。     

ZnO／AlN／Si（111）薄膜的外延生长和性能研究

用常压金属化学气相沉积法(MOCVD)在Si(111)衬底上制备了马赛克结构ZnO单晶薄膜。引入低温Al N缓冲层以阻止衬底氧化、缓解热失配和晶格失配。薄膜双晶X射线衍射2θ/ω联动扫描只出现了Si(111)、ZnO(000l)及Al N(000l)的衍射峰。ZnO/Al N/Si(111)薄膜C方向晶格常量为0.5195nm,表明在面方向处于张应力状态;其对称(0002)面和斜对称(1012)面的双晶X射线衍ω摇摆曲线半峰全宽分别为460″和1105″;干涉显微镜观察其表面有微裂纹,裂纹密度为20cm-1;3μm×3μm范围的原子力显微镜均方根粗糙度为1.5nm;激光实时监测曲线表明薄膜为准二维生长,生长速率4.3μm/h。低温10K光致发光光谱观察到了薄膜的自由激子、束缚激子发射及它们的声子伴线。所有结果表明,采用金属化学气相沉积法并引入Al N为缓冲层能有效提高Si(111)衬底上ZnO薄膜的质量。     

Nonlocal photovoltaic response function for the interpretation of hologram writing in ferroelectric crystals

Polycrystalline Ni has been grown by decomposition of Ni(CO)₄ using different wavelengths of the visible radiation of a Kr⁺ laser. The influence of laser irradiance, substrate material and scanning velocity on deposition rate and widths of patterns has been investigated. The deposition rates achieved are typically several μm/s, and the lateral dimensions of the deposits can be as small as 1 μm.     

Laser generation of surface acoustic modes guided by copper lines of sub-micron width on silicon

Surface acoustic waves guided by a copper line embedded in a silica film on a silicon wafer were generated and detected optically using the laser-induced transient grating technique. Lines as narrow as ∼0.2 μm yield a good signal despite the much larger size of the laser spot. The phase velocity of the guided mode is slightly lower than the surface acoustic wave velocity in the thin film structure. Good correlation between the acoustic frequency and the electrical resistivity of the copper lines results from the dependence of both measurements on the line width.     

Microstructure and properties of plastic deformed martensite induced by laser shock processing

Firstly, 45# steel was quenched by the NEL-2500A rapidly axial flow CO2 laser. The experimental parameters were the laser power of 750 W, the laser beam diameter of 4 mm, the scanning velocity of 7 mm/s.The thickness of coating layer was 0.1 mm and the width was 8 mm. Secondly, the martensite induced by laser quench was shocked by Nd:YAG laser. The parameters of laser shock processing were the wavelength of 1.06 μm, the pulse duration of 23 ns, and the output energy of 16-20 J. The laser was focused on a spot of φ7 mm. K9 optical glass was used as confinement. The sample was coated with black paint 86-1 (the thickness is about 0.025 mm). By testing and analysis of samples which were treated by laser quench and laser quench+shock with transmission electron microscope (TEM), it was discovered that the surface layer of martensite was deformed plastically by laser shock processing. In the secondary hardened zones,there were a lot of slender secondary twin crystal martensites, dislocation tangles, and cellular dislocations.Compared with that of the hardened zones through laser quench only, the residual stress and mechanical properties of the secondary hardened zones were improved and increased through laser compound method.     

Narrow bandgap mid-infrared photodetectors based on InAsSbP quantum dots

The results of investigations of mid-infrared photodetectors based on InAsSbP quantum dot (QD) grown on InAs(100) substrate by modified liquid phase epitaxy are presented. The atomic force microscope measurements have shown that the surface density of grown QDs is (4–8) × 10⁹ cm^?2. Also, the morphology and crystalline quality of grown QDs are investigated by a scanning tunneling microscope. Photodetectors based on n-InAs(100) substrate with InAsSbP QDs on its surface were fabricated in the form of a photoconductor cell. The photoresponse spectrum extended up to 4 μm was observed. The optical properties of fabricated structures were investigated under He–Ne laser irradiation with wavelength of 1.15 μm. It was found that the relative surface conductance increases by 16% at power density of 0.15 W/cm². Capacitance hysteresis with maximal remnant capacitance of 2.17 nF at 10³ Hz was observed as well.     

Writing of two-dimensional crystal curved lines at the surface of Sm2O3-Bi2O3-B2O3 glass by samarium atom heat processing

Two-dimensional crystal curved lines consisting of the nonlinear optical Sm_xBi_1−xBO₃ phase are fabricated at the surface of 8Sm₂O₃·37Bi₂O₃·55B₂O₃ glass by continuous wave Nd:YAG laser (wavelength: 1064 nm) irradiation (samarium atom heat processing) with a power of ∼0.9 W and a laser scanning speed of 5 μm/s. The curved lines with bending angles of 0-90° or with sine-shapes are written by just changing the laser scanning direction. The polarized micro-Raman scattering spectra for the line after bending are the same as those for the line before bending, indicating that the crystal plane of Sm_xBi_1−xBO₃ crystals to the crystal growth direction might be maintained even after the change in the laser scanning direction. It is found from laser scanning microscope observations that the crystal lines at the surface are swelled out smoothly, giving a height of about 10 μm.     

高脉冲重复频率调Q Tm,Ho:GdVO4激光器

报道了一个高效率连续波和调Q高重频两种运行方式的Tm,Ho:GdVO4激光器.Tm,Ho:GdVO4晶体尺寸4 mm×4 mm×7 mm,a轴通光,液氮制冷到100 K,由发射中心波长为793 nm的光纤耦合激光二极管端面泵浦.Tm,Ho:GdVO4激光连续波输出功率4.0 W,光光转换效率26%.声光调Q条件下输出平均高功率3.9 W,脉冲重复频率10 kHz,脉冲宽度50 ns. 通过减小声光Q开关的开启时间,激光脉冲宽度由50 ns减小至23 ns.在10 kHz重频下,测量最大脉冲能量0.39 mJ , 峰值功率7.8 kW.     

Quasi-tunable I2-laser for absorption measurements in the near infrared

The properties and output data of an I₂-laser pumped by a pulsed dye laser have been investigated. The separation between lines to which the laser can be tuned in the region 1.0–1.3 μm is typically 0.5 cm^-1. Lines are emitted in R-P doublets with a separation of 5–15 cm^-1. The possibility of measuring low gas concentrations by recording the intensity ratio of the components in selected doublets has been tested in atmospheric water vapour.     

Studies of magnetic properties of permalloy (Fe-30%Ni) prepared by SLM technology

In the present study, a high permeability induction Fe-30%Ni alloy cubic bulk was prepared by the selective laser melting process. In order to reveal the microstructure effect on soft magnetic properties, the microstructure and magnetic properties of the Fe-30%Ni alloy were carefully investigated by scanning electron microscopy, X-ray diffraction and hysteresis measurements. The bcc-Fe (Ni) phase formation is identified by X-ray diffraction. Meanwhile, it was found that low bcc lattice parameter and high grain size could be obtained when high laser scanning velocity and low laser power were used. Moreover, the lowest value of coercivity is 88 A/m, and the highest value of saturation magnetization is 565 Am²/kg, which can be obtained at a low laser scanning velocity of 0.4 m/s and high laser power input at 110 W.