两种亚波长金属波片的透射特性对比

综合等效介质理论和表面等离子激元(SPP)Bloch模型,对比分析了两种新的亚波长光栅结构:二维矩形金属光栅和二维椭圆柱金属光栅。利用时域有限差分(FDTD)算法,对比分析了两种结构的透射率及其相位延迟与入射光波长及偏振角变化的关系,尤其两种结构实现λ/4波片功能所对应的透射特性。仿真结果表明,当入射光偏振角为75°时,两种结构均可实现λ/4波片功能,此时二维矩形和椭圆柱金属光栅的透射率分别为0.77和0.67,表明二维矩形金属光栅比椭圆柱光栅具有更好的透射效果。对应550～800nm的入射波长,两种光栅在各自允许的入射偏振角范围内均表现了较为平坦的宽带透射特性。     

自支撑透射光栅的设计、制作和测试

采用标量衍射理论和严格耦合波理论分别计算和讨论了金自支撑透射光栅的衍射效率随波长和光栅周期变化的情况并设计了光栅的结构参数.制作了周期为300 nm、线宽/周期比为055、厚度为200 nm、总面积为1 mm×1 mm、有效面积比为65%的金自支撑透射光栅.在国家同步辐射实验室检测了该光栅在55—38 nm波长范围内的绝对衍射效率.检测结果表明所制作的光栅在8 nm附近具有接近10%的最大衍射效率,并且该光栅对于波长15—35 nm范围内的极紫外波段具有基本稳定的衍射效率. 关键词： 自支撑透射光栅 电子束光刻 电镀     

金属-介质光栅结构表面等离子体耦合效率的模拟研究

表面等离子体可以将光子局域在金属表面附近, 并形成很强的近场能量密度, 可以大大提高金属表面附近分子的发光效率和光电转换吸收材料的利用率, 从而提高发光器件和光电转换器件的效率. 本文研究了在一维周期性金属-介质混合结构的光栅中表面等离子体激元的耦合条件, 给出了耦合效率随着结构和填充因子的变化, 并证明了在光栅的填充因子较高以至光栅的金属间隔较小时, 光子耦合成为表面等离子体的效率较高, 可以达到94%以上. 关键词： 表面等离子体激元 填充因子 光栅 吸收光谱     

一种双面周期开槽型可调太赫兹带通滤波器

为实现低成本高效率的可调太赫兹带通滤波器,采用太赫兹时域波谱系统实验研究了一种在薄铝片上制作的中心开通槽两边双面对称周期性开浅槽的结构.实验结果表明由于双面耦合伪表面等离子体激元的增强透射效应,该滤波器垂直入射时在0.33THz处获得超过95%的高透射率,其透射波的发散角在5°左右.并且当滤波器侧向斜入射时透射峰一分为二,低频透射峰红移而高频透射峰蓝移;当滤波器俯仰方向斜入射时透射峰蓝移.     

一维增透亚波长光栅的研究

将具有高透射性的亚波长光栅置于微机械波长可调谐垂直腔面发射激光器(VCSEL)的内腔当中可以提高波长的调谐范围,为了使波长调谐范围达到最优则必须优化高透射性的亚波长光栅使其透射率达到最大。利用严格耦合波法分析了亚波长光栅的占空比、周期、厚度和入射角对其透射率的影响并找出最优的光栅参数。通过计算分析可得,对于TE和TM偏振存在最佳的占空比使其透射率达到99.5%。在文中条件下,它们对应的占空比分别为0.23和0.80。而光栅厚度对于TE和TM偏振透射率的影响是周期性的,在一个周期内存在一个最佳值使其透射率达到最高。在文中条件下,TE偏振的厚度周期是150 nm,TM偏振的厚度周期是300 nm。当光栅参数不变时,无论是TE还是TM偏振光,它们的透射率只有在垂直入射光栅时(入射角为0°)才能达到最大。而通过等效介质原理可以得出,周期对透射率没有影响。最后计算了透射率在光栅厚度和占空比同时变化时的变化趋势,并从中得出最优的光栅参数。     

介质光栅/金属薄膜与银立方体复合结构的SPs研究

理论设计了介质光栅/金属薄膜与银纳米立方体复合结构,通过有限元方法数值模拟计算了该结构中的超高电场增强因子.使用442nm波长的激光作为表面等离子体的激发光源,研究不同尺寸银纳米立方体的消光谱以及不同光栅周期和厚度的反射光谱,得到的该复合结构的最优参数为:光栅周期312nm,厚度90nm,银纳米立方体70nm.在最优参数条件下,数值模拟了复合结构中的电场增强分布,介质光栅/金属薄膜与银纳米立方体复合结构由于存在局域表面等离子体和传播表面等离子体的共振耦合,使得光栅脊与银纳米立方体下顶点接触处热点的电场增强因子高达1.53×106.该复合结构产生的超高电场增强因子,有望应用于表面增强拉曼散射的研究.     

太赫兹人工表面等离子体共面激发与高Q传感

本文提出使用单层光栅超表面结构耦合的方式实现太赫兹人工表面等离子体激元（SSP）共面激发,克服了通过介质耦合器在实际应用时需要反射测量等缺点。在单层金属结构上同时构造周期性光栅和太赫兹SSP复合结构,当太赫兹波垂直入射时,可实现光栅波矢和SSP波矢相匹配,激发SSP模式,在透射谱中可以产生高Q值谐振峰,其Q因子可以达到1 923。分析了结构参数对光栅耦合超表面透射谱以及色散特性的影响。基于该结构透射谱中的高Q谐振峰进行传感研究,在谐振中心频率为0.22 THz时,实现传感灵敏度为67 GHz/RIU。本文所提出的光栅耦合超表面复合结构仅使用单层超表面结构实现了太赫兹SSP模式的激发以及高Q传感,在诸多实际应用领域具有较大的研究潜力。     

亚微米AZO光栅及其漫透射分布特性

探讨亚微米掺铝氧化锌(AZO)光栅的漫透射光谱特性。在AZO薄膜上涂布光刻胶,用325nm激光双光束干涉曝光得到掩模图案。将其置于质量分数为0.5%的稀盐酸溶液中湿法刻蚀,制备出周期(780～1280nm)和高度(60～300nm)能独立调控的AZO一维光栅。正入射双向透射分布函数(BTDF)测试结果表明,400～900nm波段内平均镜面透射率随光栅周期增大而降低,与紫外-可见分光光度计测得的结果吻合;同时,周期越大被衍射到30°～80°范围内的漫透射比重和漫透射峰值均越大,而峰位角越小。根据光栅方程对实验结果给出了合理的解释。     

自支撑透射光栅的设计、制作和测试

采用标量衍射理论和严格耦合波理论分别计算和讨论了金自支撑透射光栅的衍射效率随波长和光栅周期变化的情况并设计了光栅的结构参数.制作了周期为300 nm、线宽/周期比为055、厚度为200 nm、总面积为1 mm×1 mm、有效面积比为65%的金自支撑透射光栅.在国家同步辐射实验室检测了该光栅在55—38 nm波长范围内的绝对衍射效率.检测结果表明所制作的光栅在8 nm附近具有接近10%的最大衍射效率,并且该光栅对于波长15—35 nm范围内的极紫外波段具有基本稳定的衍射效率.     

均匀等离子体光栅的色散特性研究

最近研究表明,两束交叉激光脉冲在等离子体中传播时,可以诱导生成周期等离子体密度调制(或称等离子体布拉格光栅). 分别利用传输矩阵法和耦合模理论,推导了激光斜入射时等离子体光栅的色散关系. 两种方法均表明,均匀等离子体光栅存在着光子带隙结构,并且在带隙附近有强烈的色散. 当激光斜入射时,带隙结构会呈现不同的偏振特性：S偏振光的带隙宽度随着入射角的增大而逐渐变宽,而P偏振光的带隙宽度随着入射角的增大先迅速变窄,在布儒斯特角入射时带隙消失,然后又随着入射角的增大而迅速变宽. 超宽的光子带隙和超高的激光损伤阈值,使得等离子体光栅有望成为一种新型的操纵强激光脉冲的光子器件. 关键词： 等离子体光栅 传输矩阵法 耦合模理论 光子带隙     

Thermal emission properties of one-dimensional grating with different parameters

Thermal emission is often presented as a typical incoherent process. Incorporating periodic structures on the tungsten surface offers the possibility to obtain coherent thermal emission sources. Here we illustrate grating as an example to examine the influence of the geometric parameters on the thermal emission properties. It is found that for very shallow gratings, only surface plasmon polariton(SPP) modes can be excited and the emission efficiency is closely related with the filling factor. When the ratio of the depth to period of the grating is in the range from 1/20 to 1/2, the field between the adjacent corners can be coupled to each other across the air gap for the filling factor larger than 0.5 and produce a similar resonance as in an air rod. Further increase of the grating depth can cause the groove of the grating forming metal–insulator–metal(MIM) structures and induce surface plasmon standing wave modes. Our investigations will not only be helpful for manipulating thermal emission properties according to applications, but also help us understand the coupling mechanism between the incident electromagnetism waves and gratings with different parameters in various research fields.     

Extraordinary optical transmission through metal gratings with single and double grooved surfaces

We investigate the transmission properties of a normally incident TM plane wave through metal films with periodic parabolic-shaped grooves on single and double surfaces using the finite-difference-time-domain method. Nearly zero transmission efficiency is found at wavelengths corresponding to surface plasmon excitation on a flat surface in the case where the single surface is grooved. Meanwhile, resonant excitation of surface plasmon polariton (SPP) Bloch modes leads to a strong transmission peak at slightly larger wavelengths. When the grating is grooved on double surfaces, the transmission enhancement can be dramatically improved due to the resonant tunnelling between SPP Bloch modes.     

Enhanced optical transmission through a nanoslit by coupling light between periodic strips and metal film

Surface plasmon resonance （SPR） is obtained by exciting the surface plasmon （SP） at the metal and dielectric interface, which can greatly enhance the extraordinary optical transmission （EOT） through a nanoslit milled in the metal film. We present a structure with a 50-nm-wide silver nanoslit for EOT by coupling light into the dielectric interlayer between periodic strips and a metal film. When the period of the metallic strips is equal to the wavelength of the SPR, the transmission efficiency of 187.6 through the nanoslit is enhanced. The metallic strip width over the nanoslit is optimized to improve transmission efficiency, and the maximal efficiency of 204.3 is achieved.     

Enhancement of extraction efficiency by metallic photonic crystal embedding in light-emitting diode

The bandgap effect of photonic crystals (PCs) and the effect of grating diffraction can be used to improve the extraction efficiency of light from the light-emitting diode (LED). The transmission of light at certain wavelength through periodic sub-wavelength hole arrays in metal films is extraordinary, surface plasmon (SP) effects effectively. In this letter, silver metallic photonic crystals with square lattice of cylinder unit cells are fabricated in GaN layer of GaN-based blue LED. We use the finite-difference time-domain (FDTD) method to investigate the optical transmission, the results show that the light extraction efficiency is enhanced by more than four times. Then we use the surface plasmon dispersion relation to analyze the mechanism of antireflection.     

THz surface plasmon jump between two metal edges

We excite surface plasmon in the THz frequency range at a metal surface using a diffraction grating coupler. Then the excited surface plasmon propagates along the flat metal surface, scatters into free space at the sample edge and then couples onto the flat surface of a second device similar to the emitting one. Using THz time-domain spectroscopy, we study plasmon propagation and its coupling processes in time and frequency domains. We measure a surface plasmon propagation length, at a flat air-aluminum interface, smaller than expected. We report for the first time a high coupling efficiency of the THz surface plasmon field between the two grating devices separated by a several centimeters-thick air gap.     

复合Ag/SiO_2正弦光栅基底SERS特性分析

当前微流控表面增强拉曼散射(SERS)检测领域常用的贵金属纳米颗粒溶胶单位体积内热点区域数量有限且热点区域范围较小,而贵金属纳米三维阵列结构加工时间长,成本高昂并存在"记忆效应"。本文提出了集成到微流道的复合Ag/SiO_2正弦光栅SERS基底结构,可以利用激光干涉光刻技术进行制备,无需预制掩膜版,可实现大面积、低成本SERS基底简易快速制备。利用严格耦合波分析方法(RCWA)建立了复合正弦光栅表面电场增强数学评估模型,推导了表面等离子体共振(SPP)耦合吸收率数学模型,分析了入射光、复合正弦光栅结构与外界环境介电常数的优化匹配关系,得到了入射光785 nm条件下的最佳复合正弦光栅结构。通过制备加工并实验验证了复合正弦光栅的SERS性能,SERS增强因子(EF)能够达到10~4。     

Mie谐振耦合的亚波长金属孔宽带高透射传输

表面等离激元共振激发的亚波长金属孔透射较Bethe理论有大幅度的提高,然而,由于共振对频率的敏感性以及金属在光频的高损耗特性,表面等离激元共振难以实现亚波长金属孔的宽带高透射传输.本文采用放置在金属孔两边的硅纳米颗粒的Mie谐振耦合取代表面等离激元共振,实现亚波长金属孔的宽带高透射传输.全波仿真结果表明,采用Mie谐振耦合的亚波长金属孔(r/λ=0.1)光传输,透射系数超过90%的带宽达到65 nm,与表面等离激元共振诱导的透射增强相比,峰值增高了1.5倍,3 dB带宽拓宽了17倍.根据耦合模理论,建立了Mie谐振耦合亚波长金属孔透射的等效电路模型,并在临界耦合状态下反演出电路模型中的元件参数值.进一步研究发现,仅通过改变等效电路模型中的耦合系数,就可全面揭示Mie谐振耦合亚波长金属孔透射的传输规律,并得到与全波电磁仿真完全一致的结果,从而找到光与放置硅纳米颗粒的亚波长金属孔相互作用的数学表达,也给予人们在光学领域按照电路设计方法构建相应功能模块的启示.     

Anomalous transmission of terahertz wave through one-dimensional lamellar metallic grating

The anomalous transmission through one-dimensional lamellar metallic gratings was investigated in terahertz (THz) regime. The extraordinary optical transmission (EOT) is identified to originate from two possible ways: coupling of incident light with waveguide resonances and coupling of surface plasmon polaritons (SPPs) at the upper and lower interfaces of metal grating. The dual effects of SPPs have been clarified in this study: (i) the excitation of SPP modes at each individual interface results in the weakness of the THz wave transmission; and (ii) the coupling of SPP modes at two interfaces of metal grating is attributed to enhancement of THz wave transmission. The enhanced transmission is dominated by the coupling of incident light with transverse waveguide resonances. Numerical simulation based on finite-difference time-domain (FDTD) agrees well with experimental results.     

利用窄刻槽金属光栅实现石墨烯双通道吸收增强

构建基底/窄刻槽金属光栅/覆盖层/石墨烯结构,利用金属光栅激发的表面等离子体激元共振和窄光栅刻槽支持的法布里-珀罗共振,在可见光波段实现单层石墨烯的双通道吸收增强,并结合简化模型估算出双吸收通道所在位置.在波长462和768 nm处,石墨烯的光吸收效率分别为35.6%和40.1%,相比石墨烯本征光吸收率的增强均超过15.5倍.进一步研究发现由于短波处吸收增强源于金属光栅的表面等离子体激元共振,其吸收特性受覆盖层厚度、刻槽深度和宽度变化的影响较小;而由于长波处吸收增强源于窄刻槽中的法布里-珀罗共振,因此呈现出良好的角度不敏感吸收特性.