Nanometre resolution using high-resolution scanning electron microscopy corroborated by atomic force microscopy

The resolving power of high-resolution scanning electron microscopy was judged using topographical height data from atomic force microscopy in order to assess the technique as a tool for understanding nanoporous crystal growth.     

High resolution electron microscopy of ordered polymers and organic molecular crystals: Recent developments and future possibilities

High Resolution Electron Microscopy (HREM) has made it possible to directly image the detailed organization of a variety of polymers and organic molecular crystals. For organic materials it is imperative to use low dose techniques that minimize the structural reorganizations that inevitably occur during electron beam irradiation. This article reviews recent developments in low dose HREM from our own laboratory and elsewhere. The developments in closely related microstructural characterization techniques are also reviewed. In the future, the ability to correct the spherical aberration of the objective lens, the use of low voltages to increase contrast, and the use of time‐resolved techniques are expected to open new avenues for the ultrastructural investigations of organic materials. New sample preparation techniques, such as the ability to make thin samples by focused ion beam (FIBs), to cut samples with an oscillating diamond knife, and to more conveniently prepare cryogenically solidified specimens, are also expected to be of increasing importance. © 2005 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 43: 1749–1778, 2005     

Spatial resolution and information transfer in scanning transmission electron microscopy

The relation between image resolution and information transfer is explored. It is shown that the existence of higher frequency transfer in the image is just a necessary but not sufficient condition for the achievement of higher resolution. Adopting a two-point resolution criterion, we suggest that a 10% contrast level between two features in an image should be used as a practical definition of resolution. In the context of scanning transmission electron microscopy, it is shown that the channeling effect does not have a direct connection with image resolution because sharp channeling peaks do not move with the scanning probe. Through a quantitative comparison between experimental image and simulation, a Fourier-space approach is proposed to estimate defocus and sample thickness. The effective atom size in Z-contrast imaging depends on the annular detector's inner angle. Therefore, an optimum angle exists for the highest resolution as a trade-off between reduced atom size and reduced signal with limited information transfer due to noise.     

Optimized deconvolution for maximum axial resolution in three-dimensional aberration-corrected scanning transmission electron microscopy

Three-dimensional (3D) datasets were recorded of gold nanoparticles placed on both sides of silicon nitride membranes using focal series aberration-corrected scanning transmission electron microscopy (STEM). Deconvolution of the 3D datasets was applied to obtain the highest possible axial resolution. The deconvolution involved two different point spread functions, each calculated iteratively via blind deconvolution. Supporting membranes of different thicknesses were tested to study the effect of beam broadening on the deconvolution. It was found that several iterations of deconvolution was efficient in reducing the imaging noise. With an increasing number of iterations, the axial resolution was increased, and most of the structural information was preserved. Additional iterations improved the axial resolution by maximal a factor of 4 to 6, depending on the particular dataset, and up to 8 nm maximal, but also led to a reduction of the lateral size of the nanoparticles in the image. Thus, the deconvolution procedure optimized for the highest axial resolution is best suited for applications where one is interested in the 3D locations of nanoparticles only.     

Atomic-scale imaging and spectroscopy for in situ liquid scanning transmission electron microscopy

Observation of growth, synthesis, dynamics, and electrochemical reactions in the liquid state is an important yet largely unstudied aspect of nanotechnology. The only techniques that can potentially provide the insights necessary to advance our understanding of these mechanisms is simultaneous atomic-scale imaging and quantitative chemical analysis (through spectroscopy) under environmental conditions in the transmission electron microscope. In this study we describe the experimental and technical conditions necessary to obtain electron energy loss (EEL) spectra from a nanoparticle in colloidal suspension using aberration-corrected scanning transmission electron microscopy (STEM) combined with the environmental liquid stage. At a fluid path length below 400 nm, atomic resolution images can be obtained and simultaneous compositional analysis can be achieved. We show that EEL spectroscopy can be used to quantify the total fluid path length around the nanoparticle and demonstrate that characteristic core-loss signals from the suspended nanoparticles can be resolved and analyzed to provide information on the local interfacial chemistry with the surrounding environment. The combined approach using aberration-corrected STEM and EEL spectra with the in situ fluid stage demonstrates a plenary platform for detailed investigations of solution-based catalysis.     

4D scanning transmission ultrafast electron microscopy: Single-particle imaging and spectroscopy

We report the development of 4D scanning transmission ultrafast electron microscopy (ST-UEM). The method was demonstrated in the imaging of silver nanowires and gold nanoparticles. For the wire, the mechanical motion and shape morphological dynamics were imaged, and from the images we obtained the resonance frequency and the dephasing time of the motion. Moreover, we demonstrate here the simultaneous acquisition of dark-field images and electron energy loss spectra from a single gold nanoparticle, which is not possible with conventional methods. The local probing capabilities of ST-UEM open new avenues for probing dynamic processes, from single isolated to embedded nanostructures, without being affected by the heterogeneous processes of ensemble-averaged dynamics. Such methodology promises to have wide-ranging applications in materials science and in single-particle biological imaging.     

Structural characterization of temperature-sensitive hydrogels by field emission scanning electron microscopy (FESEM)

The submicrometer structure of the temperature-sensitive hydrogels was observed by field emission scanning electron microscopy (FESEM), using synthesized hydrogels of different outer size and shape. The hydrogel structure strongly depends on the homogeneity of the polymer chains during the crosslinking process. A porous structure of the poly(vinyl-methyl-ether) (PVME) bulkgel, synthesized by electron beam irradiation of a concentrated polymer solution, was observed in the swollen state because the phase transitions temperature is acquired through the crosslinking process. Photo-crosslinking reaction of the poly(N-isopropylacrylamide) (PNIPAAm) copolymer in the dry state to form PNIPAAm thin films leads to a rather homogeneous structure. In the shrunk state both gels possess structure being more compact than in the swollen state. We also synthesized PVME and PNIPAAm gels with small outer dimensions in the range of some 100 nm. Heating of the thermo-sensitive polymer in diluted solutions collapses the polymer chains or aggregates. The crosslinking reaction (initiated by electron beam or UV irradiation) of these phase separated structures produces thermo-sensitive microgels. These microgel particles of PVME and PNIPAAm are spherical shape having diameters in the range of 30 - 500 nm.     

The influence of contamination on compositional imaging of self-assembled monolayers by scanning force microscopy

We prepared patterned self-assembled monolayers (SAMs) consisting of hexadecanethiol (16AT) and ferrocenyldodecanethiol (12FAT). The samples were characterized by scanning force microscopy (SFM), X-ray photoelectron spectroscopy (XPS), electrochemistry and contact angle measurements. Lateral force mode (LFM) of SFM shows image contrast even between surface regions of quite similar hydrophobicity. The 12FAT regions undergo irreversible chemical changes and become electrochemically inactive upon long exposure to the laboratory atmosphere. These chemical changes can be monitored by LFM, XPS, contact angle and electrochemistry. The LFM images of the exposed and contaminated samples show a reversed frictional contrast relative to the LFM images of the fresh samples and to the LFM images of the exposed but ethanol-rinsed sample. XPS and SFM data show that the 12FAT regions show more contamination than the 16AT regions. Based on these observations, the mechanism of the LFM image contrast is discussed and other driving forces, arising not only from differences in hydrophobicity but also from basic material properties such as elasticity, packing and contamination, are suggested.     

Cryo-field emission scanning electron microscopy imaging of a rigid surfactant mesophase

The aerosol OT/ L-alpha-phosphatidylcholine/isooctane/water system forms a rigid mesophase that transitions from reverse hexagonal to multilamellar in structure at specific water contents. This study shows that characteristics of ordered liquid-crystalline mesophases can be distinguished and imaged in high clarity using cryo-field emission scanning electron microscopy (cryo-FESEM). The reverse hexagonal phase consists of bundles of long cylinders, some with length scales of over 2 microm, that are randomly oriented as part of a larger domain. Cryo-imaging allows the visualization of the intercylinder spacings and the details of transitions from one domain to another. The multilamellar structured mesophase consists of spherical vesicles of 100 nm to 10 microm in diameter, with intervening noncrystalline isotropic regions. Coexistence regions containing both the reverse hexagonal and lamellar structures are also observed in the transition from the reverse hexagonal to the lamellar phase. These results complement and qualitatively verify our earlier studies with small-angle neutron scattering, high-field nuclear magnetic resonance spectroscopy, and freeze-fracture direct imaging transmission electron microscopy. The information is useful in understanding materials templating in these rigid systems.     

Direct imaging of meniscus formation in atomic force microscopy using environmental scanning electron microscopy

Environmental scanning electron microscopy was used to image meniscus formation between an AFM tip and a surface. At high relative humidity, 70%-99%, the meniscus formed is 100 to 1200 nm in height, orders of magnitude larger than predicted by the Kelvin equation using spherical geometry. The height of the meniscus also demonstrates hysteresis associated with increasing or decreasing relative humidity.     

The probe profile and lateral resolution of scanning transmission electron microscopy of thick specimens

Lateral profiles of the electron probe of scanning transmission electron microscopy (STEM) were simulated at different vertical positions in a micrometers-thick carbon sample. The simulations were carried out using the Monte Carlo method in CASINO software. A model was developed to fit the probe profiles. The model consisted of the sum of a Gaussian function describing the central peak of the profile and two exponential decay functions describing the tail of the profile. Calculations were performed to investigate the fraction of unscattered electrons as a function of the vertical position of the probe in the sample. Line scans were also simulated over gold nanoparticles at the bottom of a carbon film to calculate the achievable resolution as a function of the sample thickness and the number of electrons. The resolution was shown to be noise limited for film thicknesses less than 1 μm. Probe broadening limited the resolution for thicker films. The validity of the simulation method was verified by comparing simulated data with experimental data. The simulation method can be used as quantitative method to predict STEM performance or to interpret STEM images of thick specimens.     

Electron microscopy methods for studying polymer blends—comparison of scanning electron microscopy and transmission electron microscopy

The possibility of using a scanning electron microscope (SEM) for studying the morphology of mechanical polymer blends was investigated. Compounds of SBS/EPDM, and both filled and unfilled NBR/EPDM were tested. OsO₄-stained thin-sections were also examined in a transmission electron microscope (TEM) and the results were compared.It seemed to be quite possible to use atomic number contrast detection in combination with OsO₄ staining for visualizing the morphology of the blends in SEM. Domains as small as 0·1 μm were clearly seen. This was done by means of a Robinson backscattered electron detector. Sample preparation was easy, 2 mm thick rubber plates were cut on dry ice to obtain a smooth surface. After staining, the samples were coated with a thin conductive carbon layer.The inner structures of SBS and the carbon black particles were not resolved in SEM but were easily seen in TEM.     

Significance of local density of states in the scanning tunneling microscopy imaging of alkanethiol self-assembled monolayers

A systematic scanning tunneling microscopy (STM) study of alkanethiol self-assembled monolayers (SAMs) is presented as a function of the bias voltage, tunneling current, and tip-termini separation. Stable and etch-pit free SAMs of close-packed undecanethiol/Au(111) were obtained after annealing in ultrahigh vacuum. STM revealed two distinct c(4x2) structures with four nonequivalent molecules per unit cell. For both structures, reversible contrast variations occur upon systematically tuning the bias voltage, the current, and the tip-termini distance. These contrast transitions originate from probing the corresponding local density of states (LDOS) of each molecule and not from the reorientation of the alkanethiol chains. The STM contrast is particularly sensitive to the tip-termini separation in the range of 0.5-2.5 A, reflecting the distance-dependence of LDOS. At a fixed tip elevation, the STM contrast is less sensitive to changes in bias within 0.1-1.2 V. For the first time, we demonstrate that LDOS may override the physical height variations in the STM topographic contrast for alkanethiol SAM systems.     

Highly reproducible secondary electron imaging under electron irradiation using high-pass energy filtering in low-voltage scanning electron microscopy

The reproducibility of contrast in secondary electron (SE) imaging during continuous electron irradiation, which caused surface contamination, was investigated using SE high-pass energy filtering in low-voltage scanning electron microscopy (SEM). According to high-pass energy-filtered imaging, dopant contrast in an indium phosphide remained remarkably stable during continuous electron irradiation although the contrast in unfiltered SE images decreased rapidly as a contamination layer was formed. Charge neutralization and the SE energy distributions indicate that the contamination layer induces a positive charge. This results in a decrease of low-energy SE emissions and reduced dopant contrast in unfiltered SE images. The retention of contrast was also observed in high-pass energy-filtered images of a gold surface. These results suggest that this imaging method can be widely used when SE intensities decrease under continuous electron irradiation in unfiltered SE images. Thus, high-pass energy-filtered SE imaging will be of a great assistance for SEM users in the reproducibility of contrast such as a quantitative dopant mapping in semiconductors.     

Application of scanning electrochemical microscopy and scanning electron microscopy for the characterization of carbon-spray modified electrodes

Different gold surfaces modified by carbon-spray have been investigated by scanning electron microscopy (SEM) and scanning electrochemical microscopy (SECM). A transformation of the SECM image to a distance-location profile is proposed which assists the correlation of both images. The structures found in the transformed SECM images of carbon-spray layers on gold substrates can be explained by the topographic features visible in the SEM pictures. Tempering the carbon spray results in an increased density of electrochemically reactive carbon particles which could be confirmed by cyclic voltammetric investigations. Gold minigrids modified with carbon spray expose some areas of especially large currents which could not be predicted from their SEM images. This effect may result from particles located at the edge of a wire intersection having relatively large active surfaces per particle. They contribute significantly to the total current of the minigrid.     

Growth process and molecular packing of a self-assembled lipid nanotube: phase-contrast transmission electron microscopy and XRD analyses

Phase-contrast transmission electron microscopy (PC-TEM) and quick freezing method have been combined to study the initial growing process of a self-assembled lipid nanotube in water. The PC-TEM enabled us to detect thin lamellar edge structure and the very fast growth of the newborn edge to a thin tube with high contrast. The thin tube acts as a core structure for further growth into thick complete lipid nanotube. The initially formed nanotube structure is denoted as a "core tube". The core tube has uniform wall structure that consists of five lamellar layers and the inner and outer diameters of the core tube are 130 and 180 nm, respectively. The evaluated lamellar spacing of 4.6 nm is well compatible with that measured by X-ray diffraction. We also discussed the molecular packing of the nanotube from the pitch angle determined by the PC-TEM images, X-ray diffraction pattern in wide-angle region, and IR spectroscopy. The subcell structure of the nanotube is assigned to an orthorhombic type. The twisting angle between the neighboring lipid molecules is determined as ca. 0.26 degrees for the first time; it is a crucial parameter for the formation of a lipid nanotube in chiral packing but has not been elucidated before.     

Imaging modes for scanning confocal electron microscopy in a double aberration-corrected transmission electron microscope.

Aberration correction leads to reduced focal depth of field in the electron microscope. This reduced depth of field can be exploited to probe specific depths within a sample, a process known as optical sectioning. An electron microscope fitted with aberration correctors for both the pre- and postspecimen optics can be used in a confocal mode that provides improved depth resolution and selectivity over optical sectioning in the scanning transmission electron microscope (STEM). In this article we survey the coherent and incoherent imaging modes that are likely to be used in scanning confocal electron microscopy (SCEM) and provide simple expressions to describe the images that result. Calculations compare the depth response of SCEM to optical sectioning in the STEM. The depth resolution in a crystalline matrix is also explored by performing a Bloch wave calculation for the SCEM geometry in which the pre- and postspecimen optics are defocused away from their confocal conditions.     

Contrast transfer and resolution limits for sub-angstrom high-resolution transmission electron microscopy.

The optimum imaging of an object structure at the sub-angstrom length scale requires precise adjustment of the lens aberrations of a high-resolution instrument up to the fifth order. A least-squares optimization of defocus aberration C1, third-order spherical aberration C3, and fifth-order spherical aberration C5 yields two sets of aberration coefficients for strong phase contrast up to the information limit: one for variable C1 and C3, at fixed C5, another for variable C1, C3, and C5. An additional correction to the defocus aberration, dependent on object thickness, is described, which becomes important for the use of image simulation programs in predicting optimum high-resolution contrast from thin objects at the sub-angstrom scale. For instruments with a sub-angstrom information limit the ultimate structure resolution, the power to resolve adjacent atom columns in a crystalline object, depends on both the instrumental pointspread and an object pointspread due to finite width of the atomic column potentials. A simulation study on a simple double-column model yields a range for structure resolutions, dependent on the atomic scattering power, from 0.070 nm down to 0.059 nm, for a hypothetical 300-kV instrument with an information limit of 0.050 nm.     

Optimization of permanganic etching of polyethylenes for scanning electron microscopy

The permanganic etching technique has been studied as a function of time, temperature, and concentration for a series of polyethylenes. Kinetic studies show that a film of reaction products builds up on the surface, impeding further etching, an effect which is greatest for the lowest-crystallinity polymers. SEM studies combined with EDS show that the film contains sulfur, potassium, and some manganese. An artifact is produced by the etching process which is impossible to remove by washing procedures if certain limits of time, temperature, and concentration are exceeded. For lower-crystallinity polyethylenes multiple etching and washing steps were required for optimal resolution. Plastic deformation during specimen preparation, whether from scratches or freeze fracturing, enhances artifact formation. When appropriate procedures are used virtually artifact-free surfaces can be produced allowing a combination of permanganic etching and scanning electron microscopy to give a rapid method for detailed morphological characterization of bulk specimens.