发射光谱法研究纳秒激光烧蚀硅等离子体特性

利用调Q Nd3+∶YAG激光器三倍频355 nm激光脉冲烧蚀空气环境的硅样品,观测不同脉冲激光能量下产生的等离子体在380～420 nm范围内的时间-空间分辨等离子体发射光谱,观测到在等离子体羽膨胀初期存在N+发射光谱。在局域热力学平衡近似条件下,根据时间-空间分辨等离子体发射光谱计算得到等离子羽体电子温度和电子密度随时间延时存在二次指数衰减变化,等离子体羽体电子温度和电子密度的空间分布近似呈Lorentz分布,发现在确定激光脉冲能量下电子密度空间分布最大值偏离光谱强度最大空间位置并对产生原因进行分析,探讨了等离子体羽参数与激光脉冲能量的关系。     

脉冲激光烧蚀碲镉汞材料的等离子体发射谱

脉冲激光辐照处于不同背景气压下的Hg0.8Cd0.2Te材料表面,用时间和空间分辨诊断技术探测了激光照射后产生的等离子体发射谱,根据所获得的飞行时间谱测量了等离子体中粒子的出射速度,结果表明粒子速度随着出射距离的增加迅速减小,且背景气压对出射速度有很大的影响,而激光能量对粒子速度的影响不大。另外根据谱线的展宽计算了等离子体中的电子密度,结果表明,电子密度在激光辐照样品后的短时间内迅速减小,且电子密度最大的位置不是出现在靶的表面而是在距表面一定距离处。     

脉冲激光制备类金刚石薄膜及原位激光等离子体发射光谱

用ＹＡＧ脉冲激光轰击真空室内的石墨靶,可以形成包含碳素的激光等离子体,并在硅或石英衬氏上淀积形成某种类型的碳膜。用光学多道分析仪原位测量了激光等离子体的发射光谱,给出反应空间可能存在的反应基团有碳原子、碳离子、碳分子等,用拉曼光谱研究了薄膜的结构,证明所形成的薄膜为类金刚石膜,并得出碳原子和碳离子与薄膜的类金刚石结构有关。制备过程中,氢的参与有利于薄膜中金刚石成分的形成。空间分辨的原位激光等离子体发射光谱表明,在反应空间存在薄膜形成的最佳位置。     

Emission Spectrochemical Analysis of Metals Using a Nitrogen Laser

Comparative studies of the possibilities of using pulsed nitrogen and Nd:YAG lasers for emission spectrochemical analysis of copper-zinc alloys have been made. The nitrogen laser developed on the basis of the commercial excimer laser provided an energy of radiation pulses of 5 mJ with an error of less than 0.8% at a repetition frequency of 100 Hz. The high stability and the high pulse repetition frequency of the nitrogen laser were attained due to the additional high-speed fan inside the laser chamber, which provided agitation and circulation of the gas mixture. It has been shown by experiment that the spectral emission of the plasma formed by means of the nitrogen laser is characterized by intensity fluctuations with a root-mean-square deviation of 1.4%, whereas in the case of using an Nd:YAG laser it was 14.3%. The advantages of the nitrogen laser that are due to the increased signal-to-background ratio and the suppression of the selective evaporation effect have been revealed.     

飞秒强激光与欠稠密等离子体相互作用中的二次谐波辐射

对超短超强激光脉冲 (45fs,6× 10 17W /cm2 )与光致电离氦气形成的欠稠密等离子体相互作用中的二次谐波辐射进行了实验研究。测量了多种打靶强度的飞秒激光脉冲与不同气体密度氦气相互作用的二次谐波光谱 ,得到在欠稠密等离子体中二次谐波辐射与打靶激光能量的关系 ,分析了产生二次谐波辐射产生的物理机制 ,在考虑了强短脉冲激光电离气体产生的等离子体径向电子密度梯度因素 ,基于非线性作用过程的理论预期曲线与实验结果较好地吻合     

激光烧蚀金属表面产生的发射光谱分析

用观测时间和空间分辨发射光谱的方法研究了脉冲激光烧蚀金属铝靶过程中产生的等离子体羽的特性，计算了其膨胀速度，讨论了大气中等离子体点燃的机制。     

CO2激光锡等离子体极端紫外及可见光光谱

利用CO2激光烧蚀锡靶产生等离子体,当入射到靶面的单个脉冲能量为400mJ,半峰全宽(FWHM)为75ns时,使用光谱仪和增强型电荷耦合器件(ICCD)采集了等离子体的时间分辨光谱。在局域热平衡假设下,利用谱线的斯塔克展宽和五条Sn II谱线的相对强度计算并得到了等离子体电子密度、电子温度和辐射谱线强度随时间的变化规律;利用掠入射极端紫外平场光栅光谱仪,结合X射线CCD同时探测了光源在6.5～16.8nm波段的时间积分极端紫外辐射光谱。实验结果表明:激光点燃等离子体早期的100ns内有很强的连续谱,此后才能分辨出明显的原子和离子线状谱。在延时0.1～2.0μs的时间区间内,等离子体中的电子温度和密度分别在2.3～0.5eV和7.6×1017～1.2×1016 cm-3范围内,均随时间经历了快速下降,然后再较缓慢下降的过程。激光锡等离子体极端紫外不可分辨辐射跃迁光谱峰值中心位于13.5nm,FWHM为1.1nm。     

激光诱导Al等离子体连续辐射的时间分布

用Ar作环境气体,压强固定在10kPa,每个激光脉冲能量为115mJ,利用时空分辨技术,采集激光烧蚀Al靶产生的等离子体辐射的时间分辨谱。分析了Al等离子体连续辐射特征。简要讨论了激光诱导等离子体连续辐射的产生机理。提出了原子对激光诱导等离子体连续辐射共振吸收理论。激光诱导等离子体的连续辐射的主要机制是轫致辐射和复合辐射,在激光脉冲作用到靶面瞬间,轫致辐射占主导地位;等离子体演化初期,复合辐射和轫致辐射共同产生等离子体连续辐射;等离子体演化后期,连续辐射主要复合辐射产生的。Al原子对连续辐射的共振吸收是选择性的,这是改变连续辐射按波长“平滑”分布的主要机制。     

Bi靶激光等离子体极紫外光源以及碎屑辐射特性研究

激光等离子体极紫外光源具有体积小、稳定性高和输出波长可调节等优势,在极紫外光刻领域发挥着重要的作用。Bi靶激光等离子体极紫外光源在波长9～17 nm范围内具有较宽的光谱,可应用于制造极紫外光刻机过程中所需的极紫外计量学领域。利用平像场光谱仪和法拉第杯对Bi靶激光等离子体极紫外光源以及离子碎屑辐射特性进行了实验研究。在单脉冲激光打靶条件下,实验中观察到Bi靶激光等离子极紫外光谱在波长12.3 nm处出现了一个明显的凹陷,其对应着Si L-edge的吸收,是Bi元素光谱的固有属性。相应地在波长为11.8和12.5 nm位置处产生了两个宽带的辐射峰。研究了两波长光谱特性以及辐射强度随激光功率密度的变化。结果表明,在改变聚焦光斑大小实现不同激光功率密度（0.7×1010～3.1×1010 W·cm-2）过程中,当功率密度为2.0×1010 W·cm-2时两波长处的光辐射最强,其原因归结为Bi靶极紫外光辐射强度受激光能量用于支撑等离子膨胀的损失和极紫外光被等离子体再吸收之间的平衡制约所致。在改变激光能量实现不同激光功率密度过程中,由于烧蚀材料和产生两波长所需高阶离子随着功率密度的增加而增加,增强了两波长处的光辐射。进一步,研究了双脉冲激光对Bi靶极紫外光谱辐射特性影响,实验发现双脉冲打靶下原来在单脉冲打靶时出现在波长13～14 nm范围内的凹陷消失。最后,对单脉冲激光作用Bi靶产生极紫外光源碎屑角分布进行了测量。结果表明,当探测方向从靶面法线方向移动到沿着靶面方向上的过程中,探测到Bi离子动能依次减小,并且离子动能随激光脉冲能量降低而呈线性减小。此项研究有望为我国在研制极紫外光刻机过程所需的计量学领域提供技术支持和打下夯实的基础。     

脉冲激光作用单晶硅的等离子体光谱分析

从激光与物质相互作用理论出发,对脉冲激光作用单晶硅的热特性进行分析。建立一套实验装置,所用激光光源的波长为1 064 nm,脉宽为10 ns,重复频率为1 Hz。得到单晶硅的等离子体谱及热辐射谱,在单晶硅的光电性质基础上对其热表面损伤进行理论分析。提取380~460 nm波段的单晶硅等离子体光谱,分析了谱图中SiⅠ390.52 nm,SiⅡ385.51 nm,SiⅡ413.12 nm三条谱线的相对强度与激光输出功率密度的对应关系。     

Laser plasma plume kinetic spectroscopy of the nitrogen and carbon species

The formation and decay of carbon and nitrogen atoms, CN radicals and C₂ molecules were monitored using spatial‐ and time‐resolved emission spectroscopy in a plasma plume formed during laser ablation of a graphite target in nitrogen atmosphere. A simple exponential model was used to explain the effect of the individual chemical reactions and plasma dynamics on the measured kinetic characteristics. The succession of emissions C → N → CN was observed in the time‐resolved spectra, supporting the suggestion that the CN radical is formed mainly by the direct reaction C + N → CN or C₂ + N₂ → 2CN. The formation of CN radical was enhanced by the additional generation of atomic nitrogen through the RF discharge. (© 2003 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Wavelength Shift Investigation of Optical Emission from Nanosecond Pulsed Laser Ablated Metal Al

The wavelength shift of optical emission from pulsed laser ablation of metal Al in 1atm air has been investigated by using the time-resolved optical emission spectroscopy (OES). The wavelength shift of OES has a second order exponential decay with time and was also found to be significantly influenced by the laser ablated pulse energy. By taking account of the shielding effect of free electrons inside of the plasma plume, the relation between the electron density and wavelength shift has been discussed.     

Calibration-Free Laser Spectral Analysis of Glasses and Copper Alloys

The calibration-free variant of the laser spectral analysis of the material of solid metal and dielectric samples has been evaluated with the example of determining the component composition of certified copper alloys, an optical filter, a crystal sample with known compositions, and fragments of glass jewelry of archeological origin. It has been shown that there is a good agreement between the measurement and reference data for macrocomponent concentrations (10% and more). Discrepancies have been found between the concentrations of components with a small content (1–5%) in the analyzed sample. All the stages and characteristic features of the methods of calibration-free analysis have been analyzed with specific examples.     

Diagnostics of Tin Plasma Produced by Visible and IR Nanosecond Laser Ablation

We present the optical emission spectroscopic studies of the Tin (Sn) plasma, produced by the fundamental (1064 nm) and second (532 nm) harmonics of a Q switched Nd: YAG pulsed laser having pulse duration of 5 ns and 10 Hz repetition rate which is capable of delivering 400 mJ at 1064 nm, and 200 mJ at 532 nm using Laser Induced Breakdown Spectroscopy (LIBS). The laser beam was focused on target material by placing it in air at atmospheric pressure. The experimentally observed line profiles of four neutral tin (Sn I) lines at 231.72, 248.34, 257.15 and 266.12 nm were used to extract the electron temperature (T_e) using the Boltzmann plot method and determined its value 6360 and 5970 K respectively for fundamental and second harmonics of the laser. Whereas, the electron number density (N_e) has been determined from the Stark broadening profile of neutral tin (Sn I) line at 286.33 nm and determined its value 5.85 x 10¹⁶ and 6.80 x 10¹⁶cm^–3 for fundamental and second harmonics of the laser respectively. Both plasma parameters (T_e and N_e) have also been calculated by varying distance from the target surface along the line of propagation of plasma plume and also by varying the laser irradiance. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

预脉冲激光对线状等离子体X射线发射特性的影响

报道了能量比为１：１０、间隔为２００ｐｓ、脉冲宽度为１２０ｐｓ的双脉冲激光驱动线状等离子体的Ｘ射线发射特性。通过与单脉冲驱动情况比较，获得了预脉冲作用下，等离子体轴向辐射增强的空间分布特性。并针对若干重要的辐射跃迁的增强情况，讨论了它们各自的物理原因。     

基于脉冲CO2激光锡等离子体光刻光源的极紫外辐射光谱特性研究

研究了不同条件下脉冲放电CO₂激光烧蚀平板锡靶产生的等离子体极紫外辐射特性, 设计并建立了一套掠入射极紫外平焦场光栅光谱仪, 结合X射线CCD探测了光源在6.5～16.8 nm波段的时间积分辐射光谱,得到了极紫外光谱随激光脉宽, 入射脉冲能量及背景气压的变化规律。实验结果发现：入射激光脉冲能量在30～600 mJ变化时,极紫外辐射光谱的强度随辐照激光脉冲能量的增加而增加, 但并不是线性关系, 具有饱和效应, 且产生极紫外辐射的脉冲能量阈值约为30 mJ,当激光脉冲能量为425 mJ时具有最高的转换效率,此时中心波长13.5 nm处2%带宽内的转换效率约为1.2%。激光脉冲半高全宽在50～120 ns范围内变化时, 极紫外辐射光谱的峰值位置均位于13.5 nm,光谱形状几乎没有什么变化, 但是脉宽从120 ns变到52 ns后,由于激光功率密度的提高,极紫外辐射强度也随之增强了约1.6倍。极紫外光谱的强度随背景气压的增大而迅速下降, 当腔内空气气压为200 Pa时, 极紫外辐射光子几乎被全部吸收,而当缓冲氦气气压为7×104 Pa时,仍能够探测到微弱的极紫外辐射信号,计算表明100 Pa的空气对13.5 nm极紫外光的吸收系数为3.0 m-1,而100 Pa的He气的吸收系数为0.96 m-1。     

斜入射泵浦等离子体状态研究

 研究了作用在靶介质上的斜入射泵浦激光,对产生的靶等离子体状态以及激光增益区的影响。研究结果表明,等离子体状态和激光增益区随入射角θ0 (20(变化而变化。当θ0≤20°时这种变化不大。当θ0约30°时等离子体状态和激光增益区有比较明显的变化。当θ0≥40°时, 状态有很大的变化,严重影响激光增益和放大。     

脉冲等离子体推力器等离子体羽流的光谱研究

脉冲等离子体推力器(pulsed plasma thruster, PPT)具有体积小、重量轻、比冲高等优点,特别适合作为执行微小卫星轨道转移、阻力补偿和姿态控制等任务的推进系统。为了深入理解PPT推力产生的机理,本文对采用具有张角的舌型极板的尾部馈送式PPT等离子体羽流开展了时空分辨光谱诊断研究。通过对光谱数据的分析发现： 等离子体羽流的主要成分为C,F,C+,F+,C2+,还含有少量的由于极板烧蚀产生的Cu+和Cu2+;等离子体在放电通道内的分布不均匀,通道中心的等离子体浓度最大,靠近阳极板的等离子浓度要明显大于靠近阴极板的等离子体浓度;在不同位置处等离子体成分也具有较大差别,F+和中性粒子主要分布在靠近阳极侧的区域;通过对各个分立谱线进行多普勒线性拟合,得到了放电通道内等离子体温度信息;以中轴线靠近工质的观测点为例,对该点在整个放电过程中不同时刻的谱线进行分析,得到了该点等离子体的具体演化过程,发现在放电的不同阶段羽流成分及各组分所占比例差别较大。     

Laser absorption and fluorescence diagnostics of a plasma

Diagnostics of a near-surface laser plasma, the plasma of a strong-current pulse gaseous discharge in inert gases, nitrogen, and carbon dioxide under conditions of intense evaporation of the wall of the discharge chamber, the plasma of a discharge with a hollow cathode, and the active medium of an excimer laser was conducted by methods of intracavity laser spectroscopy and laser-induced fluorescence. The dynamic fields and absolute concentrations of atoms, ions, molecules and electrons, the plasma temperature, and the velocities of flows of particles were measured. The quantitative determination of the density of particles in the erosion laser flame prior to breakdown and the phenomena associated with the formation of molecules in the laser plasma received primary consideration. To whom correspondence should be addressd. Instite of Molecular and Atomic Physics of the Academy of Sciences of Belarus, 70, F. Skorina Ave., Minsk, 220072, Belarus. Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 64, No. 3, pp. 281–290, May–June, 1997.     

Studies on the Plasma Shielding of 1.06μm Laser on the Aluminum Target

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