基于叠栅技术的二维亚波长周期结构成像设计

用光子学方法研究了叠栅技术中,当试件光栅被拉压和旋转后,叠栅条纹的空间周期和相对于基准光栅的取向,试件光栅被拉压后的节距等相关问题。根据衍射光波的空间周期可能大于试件光栅空间周期的特点,对二维亚波长周期结构衍射成像进行了设计研究。首先,对二维亚波长周期结构衍射物进行编码,以获得包含编码光栅空间信息的均匀波;其次,使编码得到的均匀波通过光学系统,并被放大到CCD相机所能辨识的大小;再次,经解码光栅解码,滤掉编码波,最终获得二维亚波长周期结构物的空间结构信息,达到超分辨的目的。同时,对成像过程进行了较为详尽的分析,对编码器、解码器的位置以及它们相对衍射物的取向进行了设计研究,对滤波器的选择给予了必要的说明,指出了取得超分辨成像的关键。     

用于光谱合束技术的透射光栅设计与优化

设计并制作了一种亚波长透射光栅,利用该光栅实现了半导体激光阵列光谱合束。基于严格耦合波理论,对光栅占空比、脊高和周期等进行了设计,模拟了不同结构参数对光栅衍射效率的影响,从而实现了光栅衍射效率的优化。理论计算表明,优化后的光栅对940nm激光的-1级衍射效率可达92%。实验结果表明,激光阵列光谱合束后,输出功率为46.2 W,光束质量为3.9mm·mrad。     

亚波长浮雕光栅的衍射和抗反射及增透研究

研究了亚波长光栅的衍射对抗反射和增强透射性能的影响。理论分析表明,如果要达到抗反射和增强透射的双重效果,需要避免衍射引起的横向波导损耗,光栅周期要足够小;而如果只需要达到抗反射效果,可利用光栅衍射形成横向波导共振降低反射效率,此时光栅周期不需要很小。利用严格耦合波理论对周期、占空比及凹槽深度等结构参数进行优化。采用激光干涉光刻法制作了周期为290 nm的一维浮雕光栅,并测试其透射及反射光谱,结果表明这种结构在大角度范围内对可见光波段有明显的抗反射效果,但是只有波长在非衍射区才具有透射增强效果,而在衍射区透射降低。该研究实验和理论分析相一致,研究结果为根据应用要求合理选择光栅周期、降低制备工艺提供了清晰的物理图像和参考。     

亚波长光栅调制的偏振稳定垂直腔面发射激光器研究

基于微光学技术设计得到了偏振稳定垂直腔面发射激光器结构, 将亚波长光栅结构集成在上分布布拉格反射镜表面, 光栅周期小于材料中光波长, 透射波和反射波中仅包含零级衍射, 避免了高级次衍射造成 的损耗. 集成光栅后不同偏振方向光阈值增益不同, 从而实现偏振控制. 实验结 果显示, 集成亚波长光栅结构后, 整个激射过程中偏振方向被固定在平行于光栅槽方向上, 获得偏振稳定激光输出, 正交偏振抑制比大于12 dB, 且阈值电流仅增大7.14%.     

亚波长光栅衍射效率特性设计的遗传算法优化

亚波长光栅中的衍射需要使用矢量衍射理论进行分析,其衍射效率与多个因素有关,对任意面形、任意入射条件的亚波长光栅的衍射来说,使用严格的耦合波理论进行分析计算可以得到数值解。通过分析不同参数条件下的衍射特性和衍射效率对各个参数的敏感性,获得了对衍射效率影响最大的光栅参数——槽深。用接近衍射效率曲线的抛物线作为目标函数建立了适应度函数。使用遗传算法进行优化,得到了所期望的衍射效率滤波特性,从而完成了具有防伪功能的亚波长光栅的设计。     

亚波长闪耀光栅矢量衍射效率计算

将矢量衍射数值算法—严格耦合波分析用于精确计算亚波长闪耀光栅的衍射效率,并分析其衍射特性。建立了闪耀光栅的电磁介质模型,并将楔形不规则结构简化为多层矩形光栅结构,通过电磁场的介质分布建立严格耦合波方程。根据边界条件求解出各层的电磁场分布,再通过增透矩阵方法将各层电磁场依次迭代,求解出了整个结构的衍射效率。计算分析显示,对闪耀角为11.3°、周期为500 nm的金属铝闪耀光栅可以得到高于90%的衍射效率和相应的闪耀级次。实验表明这种矢量衍射数值算法具有较高的准确性,可以推广应用于高致密刻线复杂光栅的衍射计算分析。     

嵌入式镀膜光栅的数值模拟研究

嵌入式镀膜光栅是将平行四边形的介质膜层,以亚波长量级的周期嵌入波导中.针对该光栅在不同偏振态、不同角度入射下的各级衍射效率问题,本文基于严格耦合波分析理论,对该光栅进行建模与数值分析.结果表明,在TE模入射时,该光栅的一级衍射效率可随膜厚在[0,37％]内变化,其余非零级次的衍射效率低于2％.衍射特性可以满足平视器成像的效率递增要求,同时可以减少能量的损失与杂散成像光线.当入射光束的角度在纵向[45°,70°]、横向[-15°,15°]内变化时,一级衍射效率的变化平稳,可以保持平视器不同视场的成像能量均匀.针对入射光偏振态、光栅材料、嵌入膜层倾角、光栅周期对衍射特性的影响,给出了相应的数值分析,可为波导全息平视器中衍射元件的制作提供理论指导.     

相位光栅分离双波长宽角度光线的理论分析

使用衍射光栅的分色分光方式一般以平行光入射情况为讨论基础,对于非平行光入射的情况讨论较少.本文基于菲涅尔衍射理论和角谱理论,将球面波与平面波的衍射波场联系起来,从而在传播函数中引入角度参量,结合分数泰伯效应的理论基础,推导出双波长宽角度入射光线经相位光栅衍射后的波场分布函数,并对推导出的函数进行数值模拟,得到像面不同位置衍射波场分布.与平行光入射时的标准波场分布相比较,得到宽角度入射时的衍射波场的横向展宽量和偏移量.通过调节光栅台阶的宽度,改变衍射场的展宽和偏移,使各个单一波长的衍射波场宽度小于光栅周期的一半,从而减少双波长光衍射波场的混叠.同时本文给出波场宽度与光栅台阶宽度的变化关系,选取光栅面上多个位置作为台阶宽度的计算点,并对整个光栅的台阶宽度进行曲线拟合,得到可以使双波长宽角度入射光实现良好空间分离的光栅参量.该结果可用于各类宽角度入射光线的光谱分离场合,如双波长成像、液晶显示和液晶投影等.     

基于导模共振效应三基色窄带滤光片的研究

为获得性能优良的三基色窄带滤光片,提出了一种基于减反射薄膜波导光栅结构的导模共振滤光片.该滤光片由亚波长光栅结构、波导层和基底组成.采用严格耦合波理论分析了亚波长光栅结构和波导层厚度对导模共振滤光片反射光谱性能的影响.数值分析表明λ/4-λ/2-λ/4结构能有效提高导模共振滤光片的性能.当光栅结构位于基底侧时,红绿蓝三...     

亚波长介质光栅的闪耀特性分析

采用严格耦合波理论与矩阵LU分解法,求解了亚波长矩形介质光栅的衍射场,给出了TE和TM偏振波的耦合波方程组及其矩阵形式.通过数值计算分析了TE和TM偏振波的入射角、刻槽深度、入射波长等参量对＋1级衍射波衍射效率的影响.结果表明,当Λ=0.5λ0,θ=55°,d=0.38λ0,λ=10.6 μm时可以实现对TE偏振波＋1级的闪耀,衍射效率达到近90%,同时具有较宽广的角度适应范围.     

Sub-diffraction-limited far-field imaging in infrared

We investigated a far-field superlens operating at mid-infrared wavelength that allows resolving subwavelength features in the far-field. By utilizing evanescent enhancement provided by surface plasmon excitation of silver nanorods and Moiré effect, we numerically demonstrated that subwavelength information of an object can be converted to propagating information. This information can then be captured by conventional optical components. A simple image reconstruction algorithm can restore the subwavelength object. A sub-diffraction-limited resolution of 2.5 μm at 6-μm wavelength is demonstrated.     

Sub-diffraction-limited far-field imaging in infrared

We investigated a far-field superlens operating at mid-infrared wavelength that allows resolving subwavelength features in the far-field. By utilizing evanescent enhancement provided by surface plasmon excitation of silver nanorods and Moiré effect, we numerically demonstrated that subwavelength information of an object can be converted to propagating information. This information can then be captured by conventional optical components. A simple image reconstruction algorithm can restore the subwavelength object. A sub-diffraction-limited resolution of 2.5 μm at 6-μm wavelength is demonstrated.     

金属薄膜亚波长近场成像特性研究

采用基于等离子体物理模型的时域有限差分方法模拟了金属薄膜近场成像特性;采用薄膜传输矩阵方法计算了金属薄膜对倏逝波分量的放大作用.实现了周期为1μm的Cr光栅的成像实验,验证了平板金属薄膜的模拟成像特性. 关键词： 时域有限差分 金属薄膜 近场亚波长成像 传输矩阵方法     

Subwavelength imaging enhancement through a three-dimensional plasmon superlens with rough surface

In this Letter we investigate the subwavelength imaging of a three-dimensional plasmon superlens based on the full vector wave simulations of optical wave propagation and transmission. The optical transfer functions are computed. Comparisons are made between the results of lenses with flat and periodic/random rough surfaces. We also study the problem of practical imaging system geometry using laser as an illumination source. Results show that the lens with periodic or random roughness can reduce the field interference effects, and provide improved focus on the transmission field and the Poynting flux. We illustrate that the subwavelength roughness in a plasmon lens can enhance the image resolution over a flat lens for both matched and unmatched permittivity conditions. The enhancement of resolution occurs because the introduced subwavelength roughness can amplify the evanescent wave components and suppress the surface plasmon resonance peaks.     

Subwavelength lithography using metallic grating waveguide heterostructure

We present subwavelength periodic gratings achieved by employing a metallic grating waveguide heterostructure (MGWHS). The mask can be designed to make one of its diffraction order (±mth) waves resonate with the surface plasmon wave supported by the MGWHS. With a finite-difference time-domain method, we numerically demonstrate that one-dimensional periodic structure of about 60 nm feature, which is far beyond the diffraction limit, can be patterned with the interference of the 3rd diffraction order waves of the mask at a wavelength of 546 nm. The technique can also be extended to two-dimensional patterns using circularly polarized incidence and for the incidence with an angle θ.     

Efficient and wide spectrum half-cylindrical hyperlens with symmetrical metallodielectric structure

We propose a half-cylindrical hyperlens with symmetrical metallodielectric structure which consists of five periods of the symmetrical GaP/Ag/GaP films. Such hyperlens can transfer subwavelength information to the output surface (about one wavelength) due to the flat dispersion. Compared with the half-cylindrical hyperlens composed of the resonant Ag/GaP structure, the symmetrical GaP/Ag/GaP metallodielectric structure shows higher transmission and resolution for the propagating waves and evanescent waves, which is also confirmed by the transfer matrix method. In addition, subwavelength imaging can be realized when the incident wavelength varies from 550 nm to 650 nm.     

Plasmon mechanism of light transmission through a metal film or a plasma layer

It is shown that a smooth metal film (or a plasma layer) can be made transparent for an electromagnetic wave when two identical subwavelength diffraction gratings are placed on both sides of the film. The electromagnetic wave transmission through the metal film is caused by excitation of evanescent surface waves (plasmons) and their transformation into propagating waves at the gratings. A model which is developed analytically shows that the problem of the wave transmission is physically equivalent to the problem of excitation of two coupled resonators of evanescent waves which are formed at the two film surfaces.     

Enhance the resolution of photonic crystal negative refraction imaging by metal grating

The resolution of imaging is limited by the missing of high-frequencies information. The superlens employing negative refraction can compensate for these components. But for the directional coupling of Bloch waves and the low coupling efficiency of large-angle waves, the resolution of subwavelength imaging is not satisfactory. However, the subwavelength metallic grating can produce high-order diffracted waves carrying a lot of high-frequencies information. Therefore, this structure is used to inhibit the zero-order diffraction and enhance the high-order diffraction to achieve super-resolution.     

Improvement of plasmonic field-matter interaction by subwavelength dielectric gratings

We experimentally and theoretically investigate that detection sensitivity in surface plasmon resonance (SPR) biosensors can be significantly enhanced by employing subwavelength dielectric gratings deposited on a gold film. The enhancement originates from an improvement of field-matter interaction: enhanced evanescent field intensity at the binding region and increased surface reaction area. Using a large-area SiO₂ grating array fabricated by nanoimprint lithography, experimental sensor performance measured by parylene film coating shows that the SPR substrates combined with a dielectric grating provide a notable sensitivity improvement compared to a conventional bare gold film. We also demonstrate that plasmon field can be more confined and enhanced at the dielectric gratings with a larger width. The proposed SPR structure could potentially be useful in a variety of plasmonic applications including high-sensitivity biosensors.