MOCVD外延生长原位光致发光谱测量方法

为了实现MOCVD外延生长过程中的PL谱原位测量.利用经过特殊改造的M680红外测温石英光学探针、分支石英光纤、半导体激光器、光谱仪、OD值为6的单波陷波滤光片,在THOMAS SWAN CCS型MOCVD反应室上实现了Si(111)衬底GaN基InGaN/GaN MQW外延生长过程原位PL谱测量.研究结果表明:该原位PL谱测量系统,能够实现激发光的导人、PL谱信号的收集、反射激光及杂散光的过滤;当温度降低至600℃以下时,MOCVD反应室内红外辐射对PL测量的影响可以忽略;该原位PL谱测量方法可推广至Al2O3衬底外延生长.该研究可为MOCVD原位PL谱测量设备开发提供参考.     

Numerical analysis for the growth of GaN layer in MOCVD reactor

The axi-symmetric vertical reactor is a classical reactor configuration for the growth of compound semiconductors by MOCVD. In the present study, the modified reactor is developed to produce uniform and large-volume epitaxial deposition of gallium nitride (GaN). A comprehensive knowledge of the flow, thermal and concentration fields, as well as gas surface reaction, is necessary to develop a CVD reactor. The full elliptic governing equations for continuity, momentum, energy and chemical species are solved numerically. It is investigated how thermal characteristics, reactor geometry, and the operating parameters affect flow fields, mass fraction of each reactant, and deposition rate uniformity. As results, inlet flow rate, inclination angle of wall and inlet design are proposed for optimum operational conditions.     

MOCVD growth of high-quality AlGaAs on Si substrates for high-efficiency solar cells

The crystallinity and solar cell efficiency of Al_0.22Ga_0.78As layers grown on Si substrates have been studied by varying the thermal cycle annealing (TCA) temperature. The optimum TCA temperature to obtain an Al_0.22Ga_0.78As layer with long minority carrier lifetime and high conversion efficiency has been presented. The active-area conversion efficiency of an Al_0.22Ga_0.78As solar cell on a Si substrate as high as 10.2% has been obtained under AM0 and 1 sun conditions.     

Novel single source precursors for MOCVD of AlN, GaN and InN

The MOCVD of AlN, GaN and InN thin films using the novel single source precursors (N₃)₂Ga[(CH₂)₃NMe₂] (1), (N₃)In[(CH₂)₃NMe₂]₂ (2), (N₃)Al[(CH₂)₃NMe₂]₂ (3) and (N₃)AlMe₂(H₂N^tBu) (4) is reported. The compounds are non-pyrophoric. Compound 3 is air stable. No additional N-sources were used for the growth of the nitrides. We achieved epitaxial (AlN, GaN) or polycrystalline (InN) growth at least 200°C below the decomposition temperature of the respective nitride. Some aspects of the reactivity of the precursors with ammonia and the resulting influence on the deposition process were investigated.     

径向流动MOCVD输运过程的数值模拟和反应器优化

针对三重进口径向流动行星式MOCVD反应器的输运过程进行二维数值模拟研究,探讨有关行星式反应器流道高度和托盘直径能否继续扩大,如何控制基片上方温场和浓度场为最佳分布这样一些本质问题,同时寻找反应器的优化条件.模拟结果发现:(1)通过对反应器形状进行优化,使进口处流道趋向于流线的形状,可以大大地削弱甚至消除由流道扩张引起的涡旋;(2)在影响对流涡旋的几何参数中,反应腔高度起主要作用,而反应腔直径影响较小.对于优化后的反应器,发生对流涡旋的临界高度提高到2～2.5cm,对应的反应器直径增加到40cm;(3)在相同温差、不同衬底温度的条件下,反应器内的流动形态不同.衬底温度高,对流涡旋较弱;衬底温度低,对流涡旋较强.其原因在于气体的粘滞力随温度升高从而抑制了浮升力的作用;(4)衬底上方均匀的流场对应均匀的温场和较高的反应物浓度,热扩散则使TMGa在衬底处的浓度降低.     

大尺寸电磁加热的氮化物MOCVD反应室温度场的仿真与优化

本文通过对电磁加热八英寸晶片的立式氮化物MOCVD反应室建立数学模型,利用有限元法,对传统的加热结构进行了优化.为提高晶片温度分布的均匀性,本文提出了矩形槽和圆环段形槽两种不同槽结构的基座,通过对这两种槽结构基座的优化分析发现,与传统用的基座相比,这两种槽结构的基座改变了传统基座中的传热方式和不同方向的传热速率,从而提高了晶片温度分布的均匀性,这有利于提高薄膜生长的质量.     

A stratified Monte Carlo simulation of CSD in a continuous crystallizer for size-dependent growth

This work deals with the prediction of crystal size distribution (CSD) in a continuous crystallizer for size-dependent growth. Crystal growth rates are described by Abegg, Stevens, and Larson (ASL) model. Stratified Monte Carlo method has been employed to evaluate the integrals involved in the classical moment equation for prediction of CSD. The simulation results have been compared with the available experimental data of K₂CO₃ · 1.5 H₂O crystals in a continuous crystall lizer.     

Study of the dissolution and growth of salt single crystals in inhomogeneous acoustic fields: I. A standing acoustic wave

The growth of the isolated (100) face of a KDP crystal at exposure of the phase boundary to the initial ultrasound field and a standing acoustic wave has been investigated. A significant growth response of this face, exposed to sound normally along the acoustic axis in the near zone of a piston-like half-wave vibrator with f = 20 kHz and tangentially in the pulsed two-frequency (f = 600 and 900 kHz) standing-wave mode, has been revealed. It is shown that the mechanisms of mass exchange enhancement in these acoustic modes are different. The results obtained show a fundamental possibility of controlling crystal growth and dissolution by varying the parameters of inhomogeneous acoustic field.     

Study of the dissolution and growth of salt single crystals in inhomogeneous acoustic fields: II. A focused acoustic field

The growth and dissolution of the isolated (100) face of a KDP crystal at exposure of the phase boundary to focused acoustic fields have been investigated. Visualization tools have been developed and the scale and dynamics of the arising acoustic flows have been established. A quadratic dependence of the dissolution rate on the sound pressure has been obtained; such a dependence is in agreement with the theoretical concepts about the dependence of the mass exchange rate in the acoustic boundary layer on the field parameters. A significant growth response of the face under study, normally exposed to ultrasound along the acoustic axis in the prefocal and postfocal planes of a spherical concentrator (f = 1.4 MHz), has been revealed. It is shown that the mechanisms of mass exchange enhancement in these acoustic modes are radically different. The results obtained show a possibility of controlling growth and dissolution of crystals by varying the parameters of an inhomogeneous acoustic field.     

CBr4 as precursor for VPE growth of cubic silicon carbide

This work presents a study of carbon tetrabromide (CBr₄) as precursor to deposit 3C‐SiC on (001) and (111) Si by VPE technique at temperatures ranging between 1000 °C and 1250 °C. TEM, AFM and SEM results indicate that the epitaxy proceeds as a 3D growth of uncoalesced islands at low temperature, whereas a continuous crystalline layer with hillocks on top is obtained above 1200 °C. The hillocks observed at high temperature appear well faceted and their shape and orientation are analyzed in detail by AFM, showing a {311} preferred orientation. 3D island growth was suppressed by adding C₃H₈ to the precursor gases. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Absorption of water in waste glass as a precursor for foam formation

The objective of this research is to describe the formation of foam glass from waste glass using water as a gasifying agent similar to natural perlite. Artificial perlite with up to 10% water content may be made from waste soda-lime glass by subjecting the glass to water vapor under moderate pressures (less than 250°C). The maximum rate of absorption requires a minimum amount of liquid water to be in contact with the glass. Excess liquid water dilutes the corrosion action of alkali formed. Rate of water absorption as a function of water content and 1N NaOH solution content were examined on rods of glass as well as glass powder. Water adsorption was obtained by heating glass compositions in saturated steam in an autoclave. In general, the absorption of water was related to particle size, liquid water content, hydroxide ion concentration and glass composition.     

A study of growth and morphological features of TiOxNy thin films prepared by MOCVD

The growth and morphological features of MOCVD TiO_xN_y films have been characterized to evaluate the effect of various process parameters on film growth. XRD analysis of the films deposited at 600°C on Si(1 1 1) and mica show a TiN(1 1 1) peak at 2θ=36.6°, but only anatase peaks are detected below 550°C. Above 650°C, both anatase and rutile peaks are detected. The presence of ammonia is not effective below 550°C as the deposited film is mostly TiO₂. Also, ammonia does not play any role in homogeneous nucleation in the gas phase, as evident by the deposition of anatase/rutile particles above 650°C. The following changes in the morphological features are observed by varying process parameters. By increasing the ratio of titanium-isopropoxide to ammonia flow, the cluster shape changes from angular to rounded; dilution of the flow results in larger elongated clusters; increase in flow rate at constant precursor to ammonia ratios, changes the cluster shape from rounded to elongated and the cluster size deceases. Deposition at higher temperatures results in finer clusters with a slower growth rate and eventually results in a very thin film with particle deposition at 650°C and above.     

Preparation of new glass systems by the polymeric precursor method for dental applications

Glass ionomer cements (GICs) are largely employed in Dentistry for several applications, such as luting cements for the attachment of crowns, bridges, and orthodontic brackets as well as restorative materials. The development of new glass systems is very important in Dentistry to improve of the mechanical properties and chemical stability. The aim of this study is the preparation of two glass systems containing niobium in their compositions for use as GICs. Glass systems based on the composition SiO₂-Al₂O₃-Nb₂O₅-CaO were prepared by chemical route at 700 °C. The XRD and DTA results confirmed that the prepared materials are glasses. The structures of the obtained glasses were compared to commercial material using FTIR, ²⁷Al and ²⁹Si MAS-NMR. The analysis of FTIR and MAS-NMR spectra indicated that the systems developed and commercial material are formed by SiO₄ and AlO₄ linked tetrahedra. These structures are essential to get the set time control and to have cements. These results encourage further applications of the experimental glasses in the formation of GICs.     

ASL model for prediction of CSD in a continuous crystallizer

A Monte Carlo simulation scheme is proposed for crystal size distribution (CSD) in a continuous crystallizer for size dependent growth rate. Crystal growth rates are described by Abegg, Stevens, and Larson (ASL) model. The proposed model is used to predict CSD from potassium carbonate crystallizer. The agreement between theory and available data confirms the validity of the model.     

A dynamic model of alumina inclusion collision growth in the continuous caster

The number and morphology of non-metallic inclusions are the key factors to estimate the quality of the steel product, so it is of particular importance to have a profound knowledge about the collision and aggregation among the inclusions in the molten steel. In this paper, a three-dimensional mathematic model was developed to predict the dynamic growth of alumina inclusions in the continuous caster. This model includes Eulerian approach for turbulent flow field and inclusion’s concentration and number density fields, and Lagrangian approach for inclusion’s collision growth. The numerical results indicate that the convective transfer leads to the ‘W’ distributions of inclusion in the continuous caster. This phenomenon is consistent with Javurek’s experiment. For a single inclusion, the larger inclusion has more chances to trap other inclusions, and the trapped inclusions tend to be the smaller inclusions with diameter less than 10 μm. The aggregated inclusions are dendritic with some tips and arms, which have been observed in Yin’s experiment. Cluster formation of alumina inclusion depends on the turbulent flow, which contributes to the enhancement of the collision rate and determines the inclusion growth mechanism.     

Aluminum lactate – An attractive precursor for sol–gel synthesis of alumina-based glasses

A novel aluminum precursor, aluminum lactate (Al(lact)₃), was used in the sol–gel synthesis of alumina-based systems. The peculiar chelation properties of aluminum lactate in aqueous solution make this precursor quite attractive for the sol–gel synthesis of alumina-containing materials. Based on the reaction of aluminum lactate with different precursors such as phosphorus, boron, fluorine and others, (Na₂O–)Al₂O₃–P₂O₅, (Na₂O–)Al₂O₃–B₂O₃, (Na₂O–)Al₂O₃–B₂O₃–P₂O₅, (Na–)Al–P–O–F, amorphous gels and glasses were prepared. The local structures of glasses prepared by both sol–gel and melt-cooling methods were compared by using solid state NMR.     

Physically admissible rules of evolution for discrete representations of continuous media

We propose a weighted residual procedure for defining physically admissible evolution rules for discrete models of generally anisotropic continuous media. The procedure is used to define 2D isotropic square Lattice Spring Models (LSM) of the Laplace, Maxwell, and Cauchy–Poisson equations. The latter LSM is employed to simulate the power law acoustic emission accompanying the microfracturing phenomenon in heterogeneous solids. We demonstrate the necessity and the advantages of physically admissible evolution rules, in comparison with commonly employed, ad hoc defined and empirically adjusted evolution rules.     

A precursor of liquid–liquid coexistence in the metal–nonmetal transition range of fluid mercury

We have carried out precise measurements of sound velocity c for fluid mercury at high temperatures and high pressures. The temperature coefficient of the sound velocity at constant pressure is negative in the metallic region, but it becomes small and positive in the non-metallic region. Similarly, the pressure coefficient at constant temperature is positive in the metallic region, while it is negative in the non-metallic region. Moreover, there appears a hump in the temperature or pressure dependence of c in the metal–nonmetal (M–NM) transition range. These anomalous behaviors could be understood if we would assume a hypothetical two-phase region in the M–NM transition range.     

Dielectric monitoring of curing process for some epoxide-amine thermosets

Three recently synthesized epoxy monomers were studied. All the monomers form a nematic phase in temperatures above 80 °C. This paper presents the dielectric response of pure monomers in the frequency range of 10⁶–10⁹ Hz as well as its changes occurring in the course of crosslinking with 4,4′-diaminodiphenylmethane used as curing agent. A relaxation process related to molecular motions is clearly visible in this frequency range for each of the monomers, though its characteristics are somewhat different in particular cases. The evolution of the relaxation process is visible in the course of curing. The dynamics of curing observed through dielectric data is compared with the results of differential scanning calorimetry measurements.