Infrared steam laser cleaning

Steam Laser Cleaning with a pulsed infrared laser source is investigated. The infrared light is tuned to the absorption maximum of water (λ=2.94 μm, 10 ns), whereas the substrates used are transparent (glass, silicon). Thus a thin liquid water layer condensed on top of the contaminated substrate is rapidly heated. The pressure generated during the subsequent phase explosion generates a cleaning force which exceeds the adhesion of the particles. We examine the cleaning threshold in single shot experiments for particles sized from 1 μm down to 300 nm.     

KrF excimer laser dry and steam cleaning of silicon surfaces with metallic particulate contaminants

KrF excimer laser-assisted dry and steam cleaning of single-crystal silicon wafers contaminated with three different types of metallic particles was studied. The laser fluence used was 0.3 J/cm². In the dry process, for samples cleaned with 100 laser pulses the cleaning efficiency was 91, 71 and 59% for Au, Cu and W particles, respectively, whilst in steam cleaning the efficiency is about 100% after 5 laser pulses, independently of the type of contaminant. The effects of laser irradiation on the Si surface are investigated by scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). Laser processing at 0.3 J/cm² does not deteriorate the Si-wafer surface, either in dry or steam cleaning. However, the measured XPS intensity coming from the metallic component is greater on the cleaned surfaces than in the initial condition. Quantification of the XPS results, assuming a stratified overlayer model for the detected species and accounting for the presence of the metallic particles on the surface, showed that the obtained results can be explained by the formation of a fractional metallic monolayer on the cleaned surfaces, due to partial vaporisation of small particles initially present on the sample surface. This contamination of the substrate could be considered excessive for some applications and it shows that the process requires careful optimisation for the required efficiency to be achieved without degradation of the substrate. Received: 14 January 2001 / Accepted: 19 February 2001 / Published online: 20 June 2001     

Acoustic laser cleaning of silicon surfaces

We investigate the detachment of small particles from silicon surfaces by means of acoustic waves generated by laser-induced plasma formation at the back side of the sample. It is demonstrated that sufficiently high acoustic intensities can be reached to detach particles in the submicron regime. In order to study this “acoustic laser cleaning” in more detail, we have developed an interference technique which allows one to determine the elongation and acceleration of the surface with high temporal resolution, the basis for an analysis of the nanomechanical detachment process, which takes place on a temporal scale of nanoseconds. We find that the velocity of the detaching particles is significantly higher than the maximum velocity of the substrate surface. This indicates that not only inertial forces, but also elastic deformations of the particles, resulting from the acoustic pulse, play an important role for the cleaning process. PACS 81.65.Cf; 68.35.Np     

ns激光辐照硅光电探测器的损伤阈值

以He-Ne激光作为参考光,采用反射光能量法,测量了ns激光辐照硅光电探测器的损伤阈值,并测量了不同功率密度的强激光辐照下探测器对参考光的反射率.实验结果表明,ns激光辐照硅光电探测器的损伤阈值为4.1×106W/cm2,在探测器被强激光损伤的初期阶段,探测器对参考光的反射率下降很快,继续增加入射激光的能量,探测器对参考光的反射率下降趋于平缓.     

Reaction of cyanide ions with copper on Si surfaces and its use for Si cleaning

A Si cleaning method has been developed by use of potassium cyanide (KCN) dissolved in methanol. When silicon dioxide (SiO₂)/Si(1 0 0) specimens with 10¹⁴ atom/cm² order copper (Cu) contaminants are immersed in 0.1 M KCN solutions of methanol at 25 °C, the Cu concentration is reduced to below the detection limit of total X-ray fluorescence spectrometer of ∼3 × 10⁹ atoms/cm². X-ray photoelectron spectra show that the thickness of the SiO₂ layers is unchanged after cleaning with the KCN solutions. 10¹⁴ cm⁻² order Cu contaminants on the Si surface can also be removed below ∼3 × 10⁹ atoms/cm², without causing contamination by potassium ions. UV spectra show that Cu-cyano complex ions are formed in the KCN solutions after the cleaning. The main Cu species in the KCN solutions is ions with the concentration of []:[Cu⁺] = 1:1.6 × 10²³. Even when the KCN solutions are contaminated with 64 ppm Cu²⁺ ions in the solutions, which form ions, the cleaning ability does not decrease, showing that ions are not re-adsorbed. The KCN solutions can also passivate defect states such as Si/SiO₂ interface states, leading to the improvement of characteristics of Si devices.     

Bubble nucleation and pressure generation during laser cleaning of surfaces

with a pressure pulse width of . Additionally, the phase of an acoustic pulse is observed to change upon reflection at the liquid–solid interface if bubbles are present, providing a direct proof for laser-induced bubbles. Received: 5 December 1996/Accepted: 6 January 1997     

On all-optical laser cleaning and inspection of contaminated concave metal surfaces

A technique for all-optical laser cleaning and surface quality monitoring of concave metal surfaces is suggested. Contaminated pharmaceutical punches from a tablet compression machine were cleaned using high-energy laser pulses. Image information obtained from a diffractive-optical-element-based sensor was used in inspection of the surface quality change of the concave punches due to laser cleaning. Alternative method for mechanical cleaning of punches is introduced, which is based on simultaneous laser cleaning and surface quality inspection of the punches.     

Universal threshold for the steam laser cleaning of submicron spherical particles from silicon

The efficiency of the "steam laser cleaning" process is examined. For the investigation of the physics of particle removal from the particularly interesting surface of silicon we have deposited well-characterized spherical polymer and silica particles of different diameters ranging from several tens to hundreds of nanometers on commercial wafers. As a result of our systematic study we observe a sharp threshold of the steam cleaning process at 110 mJ/cm² (5=532 nm, FWHM=7 ns) which is independent of the size (for particles with diameters as small as 60 nm) and material of the particles. An efficiency above 90% after 20 cleaning steps is reached at a laser fluence of 170 mJ/cm². Experiments with irregularly shaped alumina particles exhibit the same threshold as for spherical particles.     

Application of laser speckle analysis for the assessment of cementitious surfaces subjected to laser cleaning

This paper focuses on the application of laser speckle technique for the assessment of the effectiveness of laser cleaning of cementitious surfaces. Laser speckle-based methods are non-contact, highly resolving techniques for the measurement of displacement, rotation, and strain of an illuminated area on a rough surface. Since the intensity of reflected light depends on the geometrical microstructure and colour of the samples, any alterations of the surface result in different speckle images. Analysis of speckle images presented here is based on the analysis of the distribution of intensity of reflected light obtained in a selected plane, and analysis of statistical parameters describing such distribution (skewness and kurtosis). A wide range of laser-cleaned mortar samples with different geometrical microstructure and moisture content has been subjected to the assessment by He-Ne laser. Laser speckle method has been successfully used to identify the effectiveness of the laser cleaning process with respect to different surface conditions. It appears that the changes in kurtosis and skewness should be mainly associated with the alterations of geometrical microstructure. Whereas, mean light intensity seemed to depend predominantly on the mortar's absorption characteristics (colour).     

Mechanism of and method to avoid discoloration of stainless steel surfaces in laser cleaning

2 O₃. Based on Auger Electron Spectroscopy analyses and optical microscopic observations, γ-Fe₂O₃ and Fe₃O₄ are formed on the stainless steel surface in laser cleaning in the air. Since laser can induce high temperature rise in stainless steel surfaces, the above phenomenon can be explained by a thermochemical reaction between oxygen in the air and the stainless steel. With increasing laser fluences, the temperature rise in the irradiated area of stainless steel surface increases, which enhances oxygen diffusion into the surface and oxidation reaction within the irradiated area. In order to avoid discoloration of stainless steel surfaces, a vacuum system was used to reduce the oxidation reaction between oxygen and stainless steel. Received: 7 June 1996/Accepted: 30 September 1996     

Study of the laser cleaning on plaster sculptures. The effect of laser irradiation on the surfaces

The focus of this paper is to study the effects caused by the laser irradiation on nineteenth and twentieth century plaster sculptures. Before applying the laser cleaning on the sculptures, it was tested on samples prepared in laboratory according to the results of the scientific investigation carried out on the selected works of art. The characterization of the surface finishing materials of the sculptures was performed by Fourier Transform Infrared spectrometry (FTIR), X-ray Fluorescence spectroscopy (XRF), UV fluorescence photography, and internal micro stratigraphic analysis. Regarding the finishing materials, shellac, zinc white, siccative oil and proteins were found on the surfaces. The results of the scientific investigation, together with the examination of the ancient technical manuals, were used to create the laboratory samples to carry out the irradiation tests with laser. The laser irradiation and cleaning tests were carried out with a Q-switched Nd:YAG system. The irradiated surfaces were analyzed before and after the laser tests with the aid of a video microscope and a reflectance spectrophotometer, in order to evaluate the color changes of the surfaces. The possible morphological modifications caused by laser irradiation were also investigated by Scanning Electron Microscopy (SEM) together with ancillary Energy Dispersive Spectroscopy (EDS) elemental analysis. Concerning the laser cleaning test on the samples, in general little color changes were observed both with the 532 and 1064 nm wavelength. Total color changes, expressed as ΔE*, are always small apart from the samples made of shellac and zinc white in linseed oil, as finishing layer. As regards these samples the surface irradiated with the laser greyed lightly, corresponding to a decrease of L* parameter (lightness). SEM imaging of the treated and not-treated samples, both at low and high magnification, does not show evidence of significant morphological differences due to the laser beam irradiation. Starting from these results, some laser cleaning tests were carried out on the original sculptures, putting them in comparison with an aqueous cleaning method. It was found that the laser cleaning removes effectively the dirt layer preserving the original finishing on the sculpures’ surface, whereas the aqueous cleaning system removes also the finishing.     

A frequency-doubled laser system producing ns pulses for rubidium manipulation

We have constructed a pulsed laser system for the manipulation of cold ⁸⁷Rb atoms. The system combines optical telecommunications components and frequency doubling to generate light at 780 nm. Using a fast, fibre-coupled intensity modulator, we sliced output from a continuous laser diode into pulses with a length between 1.3 and 6.1 ns and a repetition frequency of 5 MHz. These pulses are amplified using an erbium-doped fibre amplifier, and frequency-doubled in a periodically poled lithium niobate crystal, yielding a peak power up to 12 W. Using the resulting light at 780 nm, we demonstrate Rabi oscillations on the F=2,m_F=+2↔F^′=3, m^′ _F=+3-transition of a single ⁸⁷Rb atom. PACS 32.80.Qk; 39.25.+k; 42.55.-f     

Laser cleaning of polymer surfaces

We have investigated the removal of small spherical particles from polymer surfaces by means of 193-nm ArF and 248-nm KrF laser light. Polystyrene (PS) particles with diameters in the range of 110 nm to 1700 nm and silica particles (SiO₂) with sizes of 400 nm and 800 nm are successfully removed from two different substrates, polyimide (PI) and polymethylmethacrylate (PMMA). Experiments were performed in air (23 °C, relative humidity 24–28%) and in an environment with a relative humidity (RH) of about 90%. Received: 13 July 2000 / Accepted: 14 July 2000 / Published online: 9 November 2000     

Electrochemical cleaning of metallic surfaces

The aim of this research is to investigate the feasibility of depleting or modifying solid steel’s surface layer by electrochemically affecting the non-metallic inclusions, such as oxides and sulphides, thus providing zero calibration and modified surface properties. It has been shown that this is possible by decomposing or modifying non-metallic inclusions. This is achieved by the application of cathodic refining of the surface of solid steel, utilising molten salt as the electrolyte. The thermodynamic and electrochemical basis of the experimental results is presented, along with SEM/EDX information. Paper presented at the 6th Euroconference on Solid State Ionics, Cetraro, Calabria, Italy, Sept. 12–19, 1999.     

Activation and cleaning of oxide surfaces by a cw CO2 laser

Silica, alumina, and zinc oxide surfaces have been dehydroxylated by a cw CO₂ laser. Three to seven W/cm² produce the same surfaces spectroscopically as does heating at 400–1000°C. Varying the laser power while keeping the total number of photons constant shows that this is not a linear photochemical process and may be purely thermal desorption. Laser heating has a number of practical advantages over traditional heating methods which have been used for surface cleaning and activation.     

Fiber laser cleaning of metal mirror surfaces for optical diagnostic systems of the ITER

The results of experimental studies into efficiency of removal of films with a complex composition from metal mirrors by pulsed fiber laser irradiation are presented. It is shown that the initial reflectivity of optical elements can be restored by the selection of modes of irradiation impacting the surface with the sputtered film. Effective cleaning is performed by radiation with a power density lower than 10⁷ W/cm². The removal of contaminations at such a relatively low power density occurs in a solid phase, owing to which the thermal effect on the mirror is insignificant.     

Theoretical investigation on nonlinear absorption of multilevel organic molecular system in ns, ps and fs regime

The nonlinear absorption properties of organic materials in nanosecond (ns), picoseond (ps) and femtosecond (fs) regime were theoretically investigated by rate equations based on multilevel organic molecular system, respectively. The simulation results show that the RSA is mainly due to the absorption contribution of the triplet first excited state in the ns regime and that of the singlet first excited state in the ps regime, both of which are a third-order nonlinear phenomena. The RSA in fs regime is mainly due to the excited state absorption (ESA) induced by two-photon absorption (TPA), which is a fifth-order nonlinear phenomenon.     

连续激光与单脉冲纳秒激光对CMOS的损伤效应

针对前照式有源型可见光互补金属氧化物半导体（CMOS）器件,开展了1080 nm连续激光与1064 nm单脉冲ns激光损伤效应的对比研究,观察到了CMOS出现点损伤、半边黑线损伤与十字交叉黑线损伤三个典型的硬损伤阶段,并分析了损伤机理。在连续激光辐照下,损伤效应主要是热效应的影响。当辐照时间小于稳态时间时,辐照时间越长,损伤阈值越低,当辐照时间大于稳态时间时,损伤阈值趋于稳定值。对损伤后的CMOS器件的微观结构进行了显微观察,结合CMOS电路结构深入分析了各种典型实验现象的损伤机理,半边黑线损伤与十字交叉黑线损伤主要是不同层金属线路熔断导致信号断路。在单脉冲ns激光作用下, CMOS像元表面的硬损伤主要是激光加热作用和等离子体冲击波作用引起的。     

Mg-based photocathodes prepared by ns, ps and fs PLD for the production of high brightness electron beams

Mg-based films have been prepared by pulsed laser deposition technique for photocathode applications. We have investigated the influence of pulse laser duration on morphology and photoemissive properties. Two laser sources have been used, generating pulses of 30 ns at 308 nm (XeCl excimer laser), 5 ps and 500 fs at 248 nm (KrF excimer laser) to grow Mg films onto Si and Cu substrates in high vacuum (∼10⁻⁷ Pa) and at room temperature. Morphological investigations carried out by scanning electron microscopy (SEM) have revealed that, in our experimental conditions, the number and the mean size of the droplets on the films surfaces decreases as the pulse laser duration shortens. The contamination level of Mg film surfaces have been studied by energy dispersive X-ray spectroscopy (EDX). The photoelectron performances in terms of quantum efficiency (QE) and emission stability have been tested in a UHV DC photodiode cell (10⁻⁷ Pa). Measures of the QE of the samples surfaces have revealed a decrease on the initial value for Mg-based photocathodes prepared by fs laser (from 7.8 × 10⁻⁴ to 6.6 × 10⁻⁴) PLD with respect to ps (from 6.2 × 10⁻⁴ to 7.4 × 10⁻⁴) and ns lasers (from 5.0 × 10⁻⁴ to 1.6 × 10⁻³). A comparison among Mg-based photocathodes prepared by ns, ps and fs PLD for the production of high brightness electron beams has been presented and discussed.