Error-Compensating Phase Measuring Algorithms in a Fizeau Inter ferometer

In phase-shifting Fizeau interferometers, nonlinear motion of the phase shifter and multiple-beam interference are the most common sources of systematic errors affecting high-precision phase measurement. A new class of algorithms with extended compensating capability for these errors is proposed. Measurement errors for the new algorithms and two groups of conventional algorithms: discrete Fourier algorithms and the Schwider-Larkin-Hibino algorithms are estimated as a function of the number of sampled images when these systematic error sources are equally dominant. It is shown that the conventional phase-measuring algorithms produce significant errors when the reflectivity of the testing surface exceeds ten percent. Also, these algorithms have an optimum number of samples at around seven with which the residual errors become minimum. The new class of algorithms shows a substantial reduction of the residual errors when the number of samples exceeds ten. There is no optimum number of samples for the new algorithms. For fewer than six samples, discrete Fourier algorithms which have no error-compensating capability for the nonlinearity of phase modulation give a minimum error.     

基于Fizeau干涉仪的激光雷达测温方法研究

气温是描述大气状态的基本参数之一,温度的准确测量对天气预报、气候预测及其他气象参数的反演都至关重要。激光雷达作为一种遥感仪器,已经用于气象要素的探测中（风、温度、气溶胶的光学厚度等）。目前,测温激光雷达主要有拉曼激光雷达（振动和转动）、共振荧光激光雷达和Rayleigh散射激光雷达等,拉曼激光雷达需要大功率的激光器和复杂的背景滤波器;共振荧光激光雷达无法探测平流层内的温度;基于Rayleigh散射的测温激光雷达多应用于温度的相对测量,反演温度时需要建立响应函数和校准程序;基于固体腔扫描F-P干涉仪测量大气Rayleigh散射光谱来反演温度的方法,时间分辨率较低,并且该方法在测量过程中需要运动部件,所以不利于星载。在大气低层,分子的Rayleigh散射光谱会受到Brillouin散射的影响,两种散射信号叠加形成的Rayleigh-Brillouin散射光谱不再服从Gaussian分布,直接通过测量散射光谱的半高全宽来反演温度,会产生误差。基于回波能量的方法会受到气溶胶Mie散射信号的影响,所以在对流层中该方法并不适用。为了实现对流层内温度的高精度和高时间分辨率的测量,提出利用Fizeau干涉仪和PMT阵列对对流层内分子的Rayleigh-Brillouin散射光谱进行测量,并通过插值的方法来对回波信号中气溶胶Mie散射信号进行抑制,从而使Mie散射信号对温度反演的影响较小,最后将测量光谱和理论光谱进行全光谱匹配来实现温度的反演。除此之外,还对Fizeau干涉仪的自由光谱区、固体腔几何长度、腔体反射率、扫描间隔等参数进行了优化设计。为了验证本文提出方法的可行性,利用Matlab软件建立了一套仿真模型,通过模拟表明,在不考虑云、风和水汽含量的影响时,利用该方法测量对流层内的大气温度时,测量误差小于1 K。该测温方法可以对对流层内的大气温度廓线实现高精度、高时间分辨率的测量, 在测量过程中不需要使用运动部件,有较高的使用价值,并对同类高光谱激光雷达分光系统的研究具有借鉴意义, 为我国高光谱激光雷达陆基及星载应用提供了一套可行的技术方案和温度反演方法。     

光纤Fizeau干涉仪的声发射检测研究

验证了一种基于光纤Fizeau干涉仪的声发射传感器,可用于固体表面传播的超声波的检测.这种传感器的特点是能够精确地检测由固体表面传播的超声波产生的微弱振动.当超声波信号通过光纤传感器到达探测器时,干涉仪的输出光强度受到了超声信号的调制.通过检测干涉仪的输出光强度并利用Fourier变换,测得了超声信号的振幅和频率.对传感系统的相位调制特性进行了仿真,并对实验结果进行了分析.     

Fizeau型偏振移相干涉仪的实验研究

研究了一种Fizeau型偏振移相干涉仪。以中心波长为650nm的多纵模半导体激光器作为光源,利用光源的短相干特性和一套偏振延迟装置分出一对偏振方向正交的参考光和测试光,采用巴比涅-索列尔补偿器作为偏振移相器。测试了一块平行平板的前表面面形,面形PV值为0.0682λ,RMS值为0.0127λ。该方法的优点是移相精度高,移相时无须推动参考镜,适用于大口径光学系统的干涉测试,可消除多表面干涉杂散条纹的影响。     

基于菲佐干涉仪测风激光雷达的误差分析

详细分析了基于菲佐(Fizeau)干涉仪测风激光雷达利用条纹重心法反演风速时的方法误差和系统噪声引起的测量误差。提出了方法误差的修正方法,推导出了测量误差理论公式。并用蒙特卡罗方法模拟了低对流层的回波信号,并对其进行条纹重心法风速反演。结果表明:方法误差和气溶胶与分子后向散射比有关,噪声引起的测量误差与信号强度和气溶胶与分子后向散射比有关。在0~5 km,高度采用条纹技术测量的风速误差小于1 m/s。     

Measurement of surface figure of plane optical surfaces using Fizeau interferometer with wedge phase-shifter

A Fizeau interferometer-based set-up for measurement of surface figure of plane optical surfaces has been discussed. Phase-shifting interferometry has been applied using wedge phase shifter. Technique for elimination of system aberrations has been described. Results are shown for a plane surface.     

菲索干涉仪中精确移相的实现

为了实现移相式菲索干涉仪对光学元件面形的高精度测量,建立了干涉仪同步采集移相系统,并对精确移相方法进行了研究。介绍了移相系统的构成和工作原理,计算了测量过程中移相器的速度。针对PZT移相器在移相过程中会引入离焦误差,并存在加速段和减速段的问题,详细设计了移相器的行进过程。最后,对移相器的性能进行了标定。在改造后的干涉仪上开展了重复性验证实验,结果表明：干涉仪可以获得λ/11 340的RMS测量重复性。对改造后干涉仪与Zygo公司生产的Verifire XP/D干涉仪的测量精度做了比对实验,结果显示：相同元件下两者测量结果的面形RMS之差约为0.9 nm,表明提出的移相系统及移相方法在重复性和准确度方面都能满足纳米级面形测量的要求,为研制高精度移相干涉仪奠定了基础。     

Measurement of surface figure of plane optical surfaces with polarization phase-shifting Fizeau interferometer

A Fizeau interferometer based set up for measurement of surface forms of plane optical surfaces has been discussed. Phase shifting interferometry has been applied using polarization phase shifter. A linearly polarized (632.8 nm) He–Ne laser has been used as the source. Light reflected from the object and the reference/master surfaces are made circularly polarized in opposite senses by means of two properly oriented quarter wave retardation plates placed at appropriate positions, one inside and other outside the interference cavity of the interferometer, and phase shifts are introduced between the object and the reference/master waves by varying angular orientation of a polarizer/analyzer. Final result is made free from any residual wave-front aberrations introduced by the (intra-cavity) wave plate by subtracting phase values obtained by PSI technique between a high optical quality master surface and the reference surface from that obtained for the test object surface with respect to the same reference surface for each point of the interference field. Results are shown for a plane surface.Advantages of the technique presented are linearity and high accuracy in phase stepping, no perturbation of the interference cavity during the phase shifting and possibility of real time or dynamic interferometry.     

近红外瞬态脉冲波前高精度干涉检测技术

惯性约束聚变(ICF)系统中高能瞬态脉冲激光由于脉冲时间短、能量高、波前畸变大,通常的检测方法难于检测脉冲激光波前。提出了一种基于空间相位调制技术可用于近红外瞬态波前高精度检测的环形径向剪切干涉仪。该系统可以以30~150 mm的圆瞳和方瞳口径、对波长为1064 nm的近红外纳秒级脉宽的脉冲激光波前实现共路、无参考面的瞬态、高精度的检测。系统的波前重构理论经过计算机仿真验证,精度达1/1000λ以上;检测结果与ZYGO数字波面干涉仪进行了比对,峰谷值、均方根值均优于1/15λ,并具有很好的可重复性。该系统目前已用于惯性约束聚变系统的脉冲检测,并且该技术适用于各种可见光和红外波段激光。     

Noncontact Measurement of Surface Topography by Mirau Interferometer

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Suppression of Multiple-Beam Interference Noise in Testing an Optical-Parallel Plate by Wavelength-Scanning Interferometry

Measurements of optical parallel plates in a Fizeau interferometer lead to problems from multiple-beam interference noise unless the back surface of the plate has an additional treatment to prevent its reflection from reaching the detector. Such internal-reflection noise can be separated from the fundamental interference signal by its modulation frequency in a wavelength-scanning interferometer. However, to completely eliminate the noise, the air-gap distance between the testing and reference surfaces of the interferometer must be adjusted to a specific value, depending on the thickness and refractive index of the plate. This adjustment requires an undesirable change in the air gap, which is related to the phase modulation rate of the interferometer, and also requires additional information regarding the testing plate, which makes the measurement laborious. We show that if we add new symmetries to the sampling functions of the phase measuring algorithm, we can obtain significantly greater tolerance for the air-gap error. A new 19-sample algorithm allows a tolerance of ±23% while keeping the systematic errors at less than λ/200. The periodicity of the new algorithm and an integrating bucket technique also provide more options for the thickness of the testing plate, which guarantees an air-gap distance more independent of this thickness.     

半导体激光微小振动实时干涉测量仪

设计了一种半导体激光干涉测量仪,可以实时测量物体的微小振动。通过信号处理电路对干涉信号进行分析,得到实际振动的振幅和频率。给出了具体的理论分析,实验结果验证了该干涉仪的实用性。     

基于光栅色散干涉条纹的菲佐光干涉望远镜共相检测方法研究

菲佐光干涉望远镜实现高分辨率成像的关键是各子孔径之间相位平移误差的共相检测. 基于物理光学基本原理, 论证了两个子孔径在单色光条件下其远场干涉条纹峰值偏移量与其相位平移误差之间的近似线性关系, 提出了一个波长范围内的平移误差检测方法; 进而提出了基于光栅色散干涉条纹的共相检测方法, 并对其可行性、检测精度和检测范围进行了理论分析与仿真实验. 结果表明, 该方法在原理上可以实现对两孔径的相位平移误差进行直接检测, 50 μm范围内平移误差的检测精度优于20 nm, 解决了既有方法可能存在的2π模糊性及无法判断平移误差正负的问题. 该方法为共相检测技术的进一步研究提供了新的途径和参考.     

三维相位展开算法在精密运动测试中的应用

三维相位展开算法将基于空间的相位展开算法拓展到时间轴上,包含了一维时间和二维空间信息,适合于运动测试。通过建立一维时间相位展开算法的数学模型,分析了该算法运动测试的基本原理,讨论了在精密测试中的使用方法和适用范围,并对微谐振器的微结构进行运动测试。实验表明,算法在相位展开中引入时间信息,不仅消除了形变测量中需选取静止点为相位参考点或参考平面的限制,还可以同时测量物体表面某点纳米级的离面运动曲线和表面形变。     

基于菲佐干涉仪与多通道光电倍增管阵列的多普勒频移检测技术

提出了基于菲佐干涉仪和多通道光电倍增管(PMT)阵列探测器组合的多普勒频移检测的方案,适用于风速测量的直接探测多普勒激光雷达。首先介绍了工作原理,再根据菲佐干涉仪光谱特征对频移检测用干涉仪进行了优化设计,优化设计的菲佐干涉仪腔长150mm、平板反射率0．755。对提出的菲佐干涉仪和多通道光电倍增管阵列探测器组合的方案进行了数值模拟,以分子散射作为背景噪声,计算了该方法的风速测量误差。模拟结果表明,设计的基于菲佐干涉仪的直接探测多普勒测风激光雷达,在30 s的积分时间内、探测高度5 km以下,风速测量误差可以达到0．56 m/s。     

光纤连接器端面几何参量自动测量仪

报道了一种高精度测量光纤连接器端面几何参量的自动测量仪。叙述了光纤连接器的端面几何参量的测量原理。由光纤连接器端面形貌和纤芯中心坐标,可以高精度得到曲率半径、顶点偏移量、端面倾斜角和光纤高度等影响连接器性能的关键端面几何参量。该仪器体积小,自动化程度高,用户界面友好,使用方便,可测量物理接触、角度式物理接触等类型的光纤连接器端面几何参量。实际测量证明,该测量仪有很好的重复测量精度。该测量仪与美国Dorc公司ZX-1 mini PMS测量仪和Norland公司NC3000测量仪相比,测量精度水平相当。该仪器样机已通过华东国家计量测试中心的测试。     

Multiple beam Fizeau interferometer with filtered frequency comb illumination

Real wedge interferometers of the Fizeau-type do not allow for fringes in case of a spectral broadband source - or in short: for white light fringes. Here, the use of a suitable frequency comb source will help to overcome this limitation on the one hand and on the other will offer the capability for enhanced phase sensitivity in high precision measurements of surface deviations. Frequency combs can be produced either by using a pulse train from a fs-laser or by passive filtering of the light emitted by a broadband source as a superlum-diode or a fs-laser. The frequency comb produced by a common fs-laser is extremely fine, i.e., the frequency difference of consecutive peaks is very small or the distance of consecutive pulses of the pulse train might be of the order of 1 m. Therefore, the pulse train produced by passive filtering of a broadband source is better adapted to the needs of surface testing interferometers. White light fringes are either applied for the profiling of discontinuous surfaces and/or can serve as an indication for the correct choice of multiplication factors in superposition interferometry. During the last decennium it became more and more clear that spatially incoherent sources provide better measuring accuracy in surface measurements due to the reduced influence of dust diffraction patterns. The advantage of laser illumination can nevertheless be maintained if the laser light is made spatially incoherent through moving scatterers in the light path. Here, we will discuss the application of spatially incoherent broadband light frequency filtered through a Fabry-Perot filter. The main applications are in the following fields: (1) surface profiling applications using two-beam Fizeau interferometers, (2) selection of single cavities out of a series of interlaced cavities, and (3) sensitivity enhancement for multi-beam interferometers for planeness or sphericity measurements. Some of the discussed possibilities will be experimentally demonstrated.     

斐索光纤干涉仪在超声检测中的应用

针对激光超声中固体表面波的传播特性,研究了一套斐索光纤干涉仪系统并实现了对YAG激发的铝材料表面波的检测.该光纤干涉仪基于共光路干涉原理,消除了其他表面波检测手段的诸多弊端,具有环境要求低、结构简单、易于调节、频响高且为非接触式测量等优点,实验表明该干涉仪适合于激光超声检测.     

用光纤迈克耳孙干涉仪测量折射率

对测量群折射率的白光干涉和光纤迈克耳孙(Michelson)干涉仪技术进行了改进.采用样吕夹片和样品与探测纤端面接触的方法,可以使群折射率的测量过程简单化.根据反射峰宽度的变化,可以调整样品反射界面与光纤的准直性,提高测量精度.     

一种用激光干涉测量光波波长的新方法

提出了一种利用激光干涉仪测量光波波长的方法。通过改变在光的传播路径上垂直放置的透明玻璃与光传播方向的角度,使相干光的光程差发生变化;利用干涉条纹与转过角度、透明玻璃厚度之间的关系,通过激光干涉实验能准确测量出光波的波长。