Dynamics of plume and crater formation after action of femtosecond laser pulse

Using microinterferometric method, a transition in laser plume from the regime with spallation to the regime without spallation is experimentally studied for the first time. The transition occurs when the fluence F_inc of incident radiation exceeds a threshold of “evaporation” (F_inc)_ev. It has been shown previously that the spallation layer is formed at fluence above the ablation threshold (F_inc)_abl. Thus the spallation exists within the limits (F_inc)_abl<F_inc<(F_inc)_ev. A laser beam has a maximum fluence (F_inc)_c on the axis of the beam. The threshold F_ev separates two cases with qualitatively different morphology: (1) with unbroken shell covering the crater entirely if F_abl<F_c<F_ev, and (2) with the shell having an aperture in the center (like the volcano muzzle) if F_c>F_ev.     

Two-dimensional ‘hat-scratch’ periodic structures induced by a single femtosecond laser pulse on silica glass

Two-dimensional ‘hat-scratch’ structures are fabricated on silica glass by the interference of three non-coplanar beams originating from a single femtosecond laser pulse. The scanning electron microscope (SEM) characterizations show that the as-formed structures are composed of hat holes and scratch marks. The experimental results indicate that the structures are dependent on the intensity of laser beam. The formation of the two-dimensional ‘hat-scratch’ structures is mainly due to the combined laser ablation effects including ionization, shock wave, plasma expansion, and phase explosion.     

Threshold of femtosecond laser-induced damage in transparent materials

The rate at which conduction-band electrons (CBE) absorb laser energy is calculated by both the quantum mechanical and the classical methods. Here fused silica irradiated with a 780-nm femtosecond-pulse laser is used as an example. It is found that the rate obtained by the quantum mechanical method is about one-third of that by the classical method, and it is much less than the direct-current limit. In the flux-doubling model, the avalanche rate in fused silica is 4 I  ps^-1 obtained by the quantum mechanical method, while it is about 13.7 I  ps^-1 by the classical method, where the laser intensity I is in units of TW cm^-2. The differential equation of the evolution of CBE density is solved numerically, and it is found that the combination of CBE–hole recombination, CBE diffusion and initial CBE density (<10¹³ cm^-3) is not important. The dependence of avalanche breakdown threshold on laser-pulse duration is presented. The threshold calculated by the quantum mechanical method agrees well with experimental results, while the threshold obtained by the classical method differs greatly from the experiments. Received: 18 December 2000 / Accepted: 27 April 2001 / Published online: 27 June 2001     

Crystalline orientation effects on conical structure formation in femtosecond laser irradiation of silicon and germanium

Irradiation of Si(1 0 0), Si(1 1 1), Si(1 1 0), Ge(1 0 0), and Ge(1 1 1) is compared for 150 fs, 800 nm wavelength pulses in a rough vacuum atmosphere. The surface crystalline orientation of the material is found to affect the final morphology, with (1 1 1)- and (1 1 0)-surface orientations exhibiting a much higher tendency for conical structure formation under multiple-pulse irradiation. Using cross-sectional transmission electron microscopy, the structures on Si(1 1 1) are found to have primarily crystalline cores with the same crystalline orientation as the substrate. The results show that the crystalline orientation of the target should be considered in laser machining applications.     

Dynamics of the formation of laser-induced periodic surface structures on dielectrics and semiconductors upon femtosecond laser pulse irradiation sequences

The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of fused silica and silicon with multiple (N _DPS) irradiation sequences consisting of linearly polarized femtosecond laser pulse pairs (pulse duration ～150 fs, central wavelength ～800 nm) is studied experimentally. Nearly equal-energy double-pulse sequences are generated allowing the temporal pulse delay Δt between the cross-polarized individual fs-laser pulses to be varied from ?40 ps to +40 ps with a resolution of ～0.2 ps. The surface morphologies of the irradiated surface areas are characterized by means of scanning electron and scanning force microscopy. Particularly for dielectrics in the sub-ps delay range striking differences in the orientation and spatial characteristics of the LIPSS can be observed. For fused silica, a significant decrease of the LIPSS spatial periods from ～790 nm towards ～550 nm is demonstrated for delay changes of less than ～2 ps. In contrast, for silicon under similar irradiation conditions, the LIPSS periods remain constant (～760 nm) for delays up to 40 ps. The results prove the impact of laser-induced electrons in the conduction band of the solid and associated transient changes of the optical properties on fs-LIPSS formation.     

Nanostructured thin films obtained by ultra-short pulse laser deposition of vanadium carbide

In this paper we will report the results obtained by femtosecond Pulsed Laser Deposition on vanadium carbide. These results, compared with those obtained for another group 5 carbide, tantalum carbide, evidence large analogies between the two systems. Optical emission spectroscopy shows in both cases the presence of particles in the secondary plume and in both cases the films are formed by nanoparticles and present a stoichiometry corresponding to the hemicarbide.     

Energy balance of optical breakdown in water at nanosecond to femtosecond time scales

Received: 3 August 1998/Revised version: 20 October 1998     

Direct observation of the temperature field during ablation of materials by multiple femtosecond laser pulses

We report a direct observation of the temperature field on a steel specimen during ablation by multiple femtosecond laser pulses using an infrared thermography technique. From the experimental results and simulation study of the temperature field, we quantified the deposited thermal power into the specimen during the ablation process. We found that more than two thirds of the incident laser power was deposited in the steel specimen when ablated by multiple femtosecond laser pulses. This result provides further understanding of the heating effect in materials processing by ultrashort laser pulses.     

Evolution of the deposition rate during pulsed laser deposition of hydroxyapatite coatings and its relation with target morphology

The evolution of the deposition rate during pulsed laser deposition of hydroxyapatite coatings with a KrF excimer laser was studied. This evolution was related to the changes produced on the target morphology during laser irradiation. Laser fluences in the 1.0–5.2 J/cm² range, typical for the deposition of hydroxyapatite coatings, were investigated. Deposition rates were measured through a quartz-crystal microbalance, and the target surface was observed by scanning electron microscopy. At the lowest fluences, the deposition rate decreases as the number of pulses increases. At the same time, a cone structure is developed on the target surface. At the highest fluences, the deposition rate increases with the number of pulses. In this case, the target surface becomes rough but cones are not formed. In all cases, an enlargement of the effective irradiated area results. This enlargement produces the effect of fluence dilution and also an increase of the emitting area. These opposite effects could account for the different evolutions found for the deposition rate. At low fluences the effect of fluence dilution would predominate over the increase of the emitting area, and at high fluences the second effect would predominate over the first. Received: 28 September 2000 / Accepted: 4 October 2000 / Published online: 10 January 2001     

Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses at 1300 and 2100 nm wavelengths

We present periodic ripples and arrays of protrusions formed on the surface of silicon after irradiation by low-fluence linearly polarized femtosecond laser pulses. Laser-induced periodic surface structures (LIPSS) are observed for irradiation at center wavelengths of 800, ∼ 1300, and ∼ 2100 nm, with the structure periods somewhat less than the incident wavelengths in air. Additionally, we observe structures with spatial periods substantially less than the incident laser wavelengths. These sub-wavelength periodic structures form only when the photon energy is less than the silicon bandgap energy. We discuss a number of factors which may contribute to the generation of this surface morphology.     

Pulsed laser ablation of solids: transition from normal vaporization to phase explosion

We present experimental data on mass removal during 1064-nm pulsed laser ablation of graphite, niobium and YBa₂Cu₃O_7-δ superconductor. Evidence for the transition from normal vaporization to phase explosion has been obtained for these materials, showing a dramatic increase in the ablation rate at the threshold fluences of 22, 15 and 17.5 J/cm², respectively. A numerical model is used to evaluate the ablation rate and temperature distribution within the targets under near-threshold ablation conditions. The results are analyzed from the viewpoint of the vaporized matter approaching the critical point with increasing laser fluence. A possible means of the estimating the thermodynamic critical temperature from the data for nanosecond laser ablation is discussed. It is suggested that the critical temperature of refractory metals is higher than that estimated with the traditional methods due to plasma effects. An analogy with the boiling crisis (the transition from nucleate to film boiling) is drawn to explain the formation of ablation craters with spallated edges. Received: 18 May 2000 / Accepted: 14 July 2000 / Published online: 22 November 2000     

Modelling the formation of nanostructures on metal surface induced by femtosecond laser ablation

We employ the particle-in-cell method to simulate the mechanisms of femtosecond (fs) laser interactions with a metallic target. The theoretical approach considers the solid as a gas of free electrons in a lattice of immobile ions and the laser fluences close to the ablation threshold. At first moments of the interaction, our simulations mapped out different nanostructures. We carefully characterized the rippling phase and found that its morphology is dependent on the distribution of the electron density and the period of the ripples depends on the laser intensity. The simulation method provides new insights into the mechanisms that are responsible for surface grating formation.     

Short pulse UV laser ablation of solid and liquid gallium

Received: 3 August 1998/Accepted: 7 August 1998     

Morphology and composition on Al surface irradiated by femtosecond laser pulses

We study the surface chemicals and structures of aluminum plates irradiated by scanning femtosecond laser pulses in air for a wide range of laser fluence from 0.38 to 33.6 J/cm². X-ray photoelectron spectroscopy and X-ray diffraction analyses indicate clearly that crystalline anorthic Al(OH)₃ is formed under femtosecond laser pulse irradiation. Besides aluminum hydroxide, crystalline Al₂O₃ is also found in the samples irradiated at high laser fluence. Field emission scanning electron microscopy demonstrates that the surfaces of the samples irradiated with low laser fluence are colloidal-like and that nanoparticles with a few nanometers in size are embedded in glue-like substances. For high laser fluence irradiated samples, the surfaces are highly porous and covered by nanoparticles with uniform size of less than 20 nm.     

3D periodic structures grown on silicon by radiation of a pulsed Nd:YAG laser and their field emission properties

Periodic three-dimensional structures were successfully grown on single crystal Si wafers either bare or Au-covered under their exposure to a pulsed radiation of a Nd:YAG laser in vacuum. The structures protrude above the initial wafer surface for 10 μm while their spatial period is about 70 μm. The coupling of the laser radiation to Si surface is related to the thermal non-linear absorption of the near band gap radiation. The structures exhibit an efficient field emission with an average emission current of 5 mA/cm² and is sensitive to the post-treatment of samples. The drawbacks of the emission current densities are discussed.     

On the propagation characteristics of metal clad waveguides with a quantum well

The electromagnetic modes of planar metal clad dielectric waveguides containing an n-doped quantum well (QW) are studied theoretically. Special attention is paid on the coupling between metal surface plasmons and intersubband plasmons and the manifestation of this coupling in the propagation characteristics of metal/QW/dielectric and multimode metal/QW/dielectric/metal waveguide structures. The results obtained indicate that the modification of the propagation characteristic induced by the above-mentioned coupling is substantial only in the case of metal/QW/dielectric waveguide structures.     

Dynamics of laser-induced channel formation in water and influence of pulse duration on the ablation of biotissue under water with pulsed erbium-laser radiation

The ability to use fiber-delivered erbium-laser radiation for non-contact arthroscopic meniscectomy in a liquid environment was studied. The laser radiation is transmitted through a water-vapor channel created by the leading part of the laser pulse. The dynamics of the channel formation around a submerged fiber tip was investigated with time-resolved flash photography. Strong pressure transients with amplitudes up to a few hundreds of bars measured with a needle hydrophone were found to accompany the channel formation process. Additional pressure transients in the range of kbars were observed after the laser pulse associated with the collapse of the vapor channel. Transmission measurements revealed that the duration the laser-induced channel stays open, and therefore the energy transmittable through it, is substantially determined by the laser pulse duration. The optimum pulse duration was found to be in the range between 250 and 350 µS. This was confirmed by histological evaluations of the laser incisions in meniscus: Increasing the pulse duration from 300 to 800 µs leads to a decrease in the crater depth from 1600 to 300 µm. A comparison of the histological examination after laser treatment through air and through water gave information on the influence of the vapor channel on the ablation efficiency, the cutting quality and the induced thermal damage in the adjacent tissue. The study shows that the erbium laser combined with an adequate fiber delivery system represents an effective surgical instrument liable to become increasingly accepted in orthopedic surgery.     

Ablation characteristics of aluminum oxide and nitride ceramics during femtosecond laser micromachining

Femtosecond laser ablation of aluminum oxide (Al₂O₃) and aluminum nitride (AlN) ceramics was performed under normal atmospheric conditions (λ = 785 nm, τ_p = 185 fs, repetition rate = 1 kHz), and threshold laser fluencies for single- and multi-pulse ablation were determined. The ablation characteristics of the two ceramics showed similar trends except for surface morphologies, which revealed virtually no melting in Al₂O₃ but clear evidence of melting for AlN. Based on subsequent X-ray photoelectron spectroscopy (XPS) analyses, the chemistry of these ceramics appeared to remain the same before and after femtosecond laser ablation.     

Temperature dependences of the electron-phonon coupling, electron heat capacity and thermal conductivity in Ni under femtosecond laser irradiation

The electron temperature dependences of the electron-phonon coupling factor, electron heat capacity and thermal conductivity are investigated for Ni in a range of temperatures typically realized in femtosecond laser material processing applications, from room temperature up to temperatures of the order of 10⁴ K. The analysis is based on the electronic density of states obtained through the electronic structure calculations. Thermal excitation of d band electrons is found to result in a significant decrease in the strength of the electron-phonon coupling, as well as large deviations of the electron heat capacity and the electron thermal conductivity from the commonly used linear temperature dependences on the electron temperature. Results of the simulations performed with the two-temperature model demonstrate that the temperature dependence of the thermophysical parameters accounting for the thermal excitation of d band electrons leads to higher maximum lattice and electron temperatures achieved at the surface of an irradiated Ni target and brings the threshold fluences for surface melting closer to the experimentally measured values as compared to the predictions obtained with commonly used approximations of the thermophysical parameters.