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1.
Although femtosecond laser microfabrication is one of the most promising three-dimensional(3D) fabrication techniques, it could suffer from low fabrication efficiency for structures with high 3D complexities. By using etching as a main assistant technique, the processing can be speeded up and an improved structure surface quality can be provided. However,the assistance of a single technique cannot satisfy the increasing demands of fabrication and integration of highly functional 3D microstructures. Therefore, a multi-technique-based 3D microfabrication method is required. In this paper, we briefly review the recent development on etching-assisted femtosecond laser microfabrication(EAFLM). Various processing approaches have been proposed to further strengthen the flexibilities of the EAFLM. With the use of the multi-technique-based microfabrication method, 3D microstructure arrays can be rapidly defined on planar or curved surfaces with high structure qualities. 相似文献
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We report precision microfabrication of fused quartz by laser ablation with a conventional UV laser for what is believed to be the first time. A high-quality micrograting structure is fabricated in fused quartz by a novel technique of laser-induced plasma-assisted ablation with a single KrF excimer laser (248 nm). The plasma generated from a metal target by laser irradiation effectively assists in ablation of the fused-quartz substrate by the same laser beam, although the laser beam is transparent to the substrate. A grating with a period of 1.06 mum is achieved by use of a phase mask. We can control the grating depth to 300 nm by changing the pulse number. This technique permits high-quality microfabrication of electronic and optoelectronic devices based on fused quartz and related silicate materials by use of a conventional UV laser. 相似文献
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《Laser \u0026amp; Photonics Reviews》2014,8(2):250-250
Femtosecond‐laser micromachining has been developed as one of the most efficient techniques for direct three‐dimensional microfabrication of transparent optical materials. In integrated photonics, by using direct writing of femtosecond/ultrafast laser pulses, optical waveguides can be produced in a wide variety of optical materials. With diverse parameters, the formed waveguides may possess different configurations. The paper by F. Chen and J.R. Vázquez de Aldana (pp. 251–275) focuses on crystalline dielectric materials, and is a review of the state‐of‐the‐art in fabrication, characterization and applications of femtosecond‐laser micromachined waveguiding structures in optical crystals and ceramics. 相似文献
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Fabrication of high-efficiency diffraction gratings in glass 总被引:6,自引:0,他引:6
We investigated a microfabrication process for optical gratings with periods of micrometer order that use ultrafast laser pulses in semiconductor-doped glass. ZnS- or PbS-doped SiO2-A12O3-B2O3-CaO-ZnO-Na2O-K2O glass was prepared by a melting method. Glass transmission diffraction gratings with a high refractive-index difference were fabricated with femtosecond laser pulses. The first-order diffraction efficiencies of these gratings were approximately 80%, and the first-order diffraction angles of these gratings were 8 degrees at telecommunication wavelengths. 相似文献
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K. Obata K. Sugioka N. Shimazawa K. Midorikawa 《Applied Physics A: Materials Science & Processing》2006,84(3):251-255
A microchip for DNA electrophoresis made of a new UV transparent polymer material (CYTOP) whose absorption edge is much shorter than 190 nm has been fabricated by F2 laser ablation. F2 laser ablation achieves high-quality microfabrication of CYTOP surface with little deterioration of the optical property and little debris deposition at etched area. The microchip in which the microchannel connected with two reservoirs was embedded was successfully fabricated by bonding the ablated sample to the virgin CYTOP sheet. The fabricated microchip was applied for DNA analysis by electrophoresis and succeeded in separating different base-pares (bp) of DNA from 50 to 766 bp with resolution of 100 bp. PACS 42.70.Jk; 52.38.Mf; 82.45.-h 相似文献
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Y. Hanada K. Sugioka Y. Gomi H. Yamaoka O. Otsuki I. Miyamoto K. Midorikawa 《Applied Physics A: Materials Science & Processing》2004,79(4-6):1001-1003
The laser-induced plasma-assisted ablation (LIPAA) process developed by us, in which only a single conventional pulsed laser is used, makes it possible to perform high-quality and high-speed glass microfabrication. We developed the LIPAA system, which uses the second harmonic of a diode pumped Q-switched Nd:YAG laser, for practical use in industry. The system comprises two optical components, which are the objective lens for high-resolution microfabrication and the galvano mirror type scanner for high-speed patterning of complicated microstructures. In addition to surface microstructuring of the glass, selective metallization of the glass by the LIPAA process, followed by electroless Cu plating, is demonstrated . PACS 42.70.Ce; 42.55Xi 相似文献
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We have developed a three-dimensional microfabrication method using thermo-sensitive resin. This method exploits the fact that polymerization of thermo-sensitive resins does not obey the law of linear superposition. Three-dimensional (3D) objects are created inside the thermo-sensitive resin by 3D scanning of the volume with a focused laser. Fabrication with the focus of the laser inside the resin can achieve good accuracy and high resolution of the structure. A fabrication system, which consisted of a CD-R pick-up laser and an XYZ stage, was built. Nonlinear polymerizations of the thermo-sensitive resin were verified by fabrication in various conditions of laser intensity and exposure time. In order to demonstrate the present method, a simple 3D microstructure was fabricated inside the resin. PACS 42.62.Cf; 42.70.Jk; 42.82.Cr 相似文献
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Wenjun Wang Xuesong Mei Gedong Jiang Kedian Wang Chengjuan Yang 《Optics & Laser Technology》2012,44(1):153-158
The microfabrication of films with femtosecond lasers has been researched widely for its high spatial resolution and sub-spot-size features. Compared with the common front-side ablation, femtosecond laser rear-side ablation mechanism of films is more complex due to the possible film breaking process. In this paper, the effect of film properties such as adhesion strength and cohesion strength on the material removing characteristics in femtosecond laser rear-side ablation of Cr film is investigated. The possible film breaking process in the rear-side ablation is analyzed firstly, and then some experiments with different films, the vapor deposited Cr film, the sputtered Cr film and the Cr film of photomask are performed. The experimental results indicate that the film properties are key factors influencing material removal characteristics for laser rear-side ablation. By varying film properties and laser fluence, femtosecond laser rear-side ablation technique can be applied in laser cleaning process and fabrication of nanostructures. The unique feature of rear-side ablation will widen the application of femtosecond laser micromachining technique. 相似文献
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Optical waveguide arrays induced in fused silica by void-like defects using femtosecond laser pulses
C. Méndez J.R. Vázquez de Aldana G.A. Torchia L. Roso 《Applied physics. B, Lasers and optics》2007,86(2):343-346
We report a new approach to the microfabrication of permanent optical waveguide arrays inside fused silica induced by focusing
infrared femtosecond laser pulses with microjoule energy. These arrays consist of waveguides limited by void-like damage zones
with very loose coupling among adjacent guides, thus allowing the excitation of a single one. The proposed method shows the
possibility of using created void-like structures for both the fabrication of integrated optical devices as well as for the
control of previously induced refractive index change regions.
PACS 42.65.Re; 42.82.Et; 42.79.-e 相似文献
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We report a new, simplified mechanism for performing micro-rotation. A sample chamber filled with aqueous solution and mounted on a piezoelectric transducer (PZT)-driven stage was used to produce flow-induced torque for rotating micro-objects. We demonstrated the scheme by rotating ellipsoidal yeast particles and a two-sphere system with 20 mW of laser power. Clockwise or counterclockwise rotation could be controlled by changing the initial angular position of the object trapped and by reversing the direction of the PZT-driven stage. This mechanism has potential applications in microfabrication, biotechnology and fluidic technology. 相似文献
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飞秒激光在三维微细体系中的应用 总被引:3,自引:0,他引:3
飞秒激光的超快特性使其能以极低的脉冲能量获得超强光场,并且激光加照区淀积的能量能以通过热扩散途径逸出辐照区域,其与透明物质相互作用是通过双光子或多光子吸收过程实现,故作用区限域于焦点核心很小体积内,因而在三维微制备及生物医学领域有着独到优势。文章介绍了飞秒激光应用于微爆炸、高密度三维光学数据存储、直写光波导及三维光子晶体制备、生物医学工程等方面的最新进展。飞秒激光三维微制备技术在微电子、计算机、光通信、生物医学等高技术领域有着广阔的应用前景。 相似文献
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A. Marcinkevičius V. Mizeikis S. Juodkazis S. Matsuo H. Misawa 《Applied Physics A: Materials Science & Processing》2003,76(2):257-260
We studied the peculiarities of femtosecond laser microfabrication in silica glass with a refractive index that did not exactly
match the value for which the focusing optics is designed. Spherical aberrations resulting from a small refractive index mismatch
were found to increase the size and distort the shape of photodamaged regions, thus reducing the spatial resolution of the
microfabrication. However, these undesirable effects can be minimized, providing that the focusing depth inside the glass
is not too large, and the laser intensity is kept close to the light-induced damage threshold.
Received: 3 December 2001 / Accepted: 11 April 2002 / Published online: 10 September 2002
RID="*"
ID="*"Corresponding author. Fax: +81-88/656-7598, E-mail: misawa@eco.tokushima-u.ac.jp 相似文献
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We presented a microfabrication process for optical volume vortex grating inside glass by femtosecond laser pulses. The self-trapped filament of femtosecond laser pulses can induce hundreds μm-long region refractive-index changes in glass. We realized the restructured optical vortex beams using a collimated He–Ne laser beam. The maximum first-order diffraction efficiency was about 19.6%. The volume vortex grating structure fabricated in glass is polarization dependent. 相似文献
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Real three-dimensional microstructures fabricated by photopolymerization of resins through two-photon absorption 总被引:9,自引:0,他引:9
Sun HB Kawakami T Xu Y Ye JY Matuso S Misawa H Miwa M Kaneko R 《Optics letters》2000,25(15):1110-1112
Effective energy windows for two-photon absorption (TPA) photopolymerization of resins were investigated and, with a properly selected laser pulse energy, exquisite three-dimensional (3D) microstructures with submicrometer spatial resolution were achieved. The results show the inherent utility of TPA in the fabrication of real 3D patterns. In particular, we propose and utilize a resin pre-exposure technique by which freely movable components affixed to an axle are built, demonstrating a new application of TPA in laser microfabrication. 相似文献
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K. Venkatakrishnan B.K.A. Ngoi P. Stanley L.E.N. Lim B. Tan N.R. Sivakumar 《Applied Physics A: Materials Science & Processing》2002,75(4):493-496
Photomasks are the backbone of microfabrication industries. Currently they are fabricated by a lithographic process, which
is very expensive and time consuming since it is a multi-step process. These issues can be addressed by fabricating photomasks
by direct femtosecond laser writing, which is a single-step process and comparatively cheaper and faster than lithography.
In this paper we discuss our investigations on the effect of two types of laser writing techniques, namely front- and rear-side
laser writing, with regard to the feature size and the edge quality of a feature. It is proved conclusively that for the patterning
of masks, front-side laser writing is a better technique than rear-side laser writing with regard to smaller feature size
and better edge quality. Moreover the energy required for front-side laser writing is considerably lower than that for rear-side
laser writing.
Received: 22 May 2001 / Accepted: 14 September 2001 / Published online: 17 October 2001 相似文献
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Laser processing of glass is of significant commercial interest for microfabrication of precision optical engineering devices. In this work, a laser ablation enhancement mechanism for microstructuring of glass materials is presented. The method consists of depositing a thin film of aluminum on the front surface of the glass material to be etched. The laser beam modifies the glass material by being incident on this front-side. The influence of ablation fluence in the nanosecond regime, in combination with the deposition of the aluminum layer of various thicknesses, is investigated by determining the ablation threshold for different glass materials including soda-lime, borosilicate, fused silica and sapphire. Experiments are performed using single laser pulse per shot in an air environment. The best enhancement in terms of threshold fluence reduction is obtained for a 16 nm thick aluminum layer where a reduction of two orders of magnitude in the ablation threshold fluence is observed for all the glass samples investigated in this work. 相似文献