Mirau相移干涉法测量微透镜阵列面形

基于Mirau相移干涉法,在实验室环境下对微透镜阵列的微表面形貌进行了轮廓测量.实验使用He-Ne激光器作为光源,干涉成像系统由Mirau干涉物镜和其他光学元件组成.在实验中使用压电陶瓷执行器作为相移器,通过5步相移法计算待测表面形貌.实验结果表明,基于Mirau相移干涉法对微透镜阵列面形的测量,水平分辨率达到1.1 μm,垂直测量准确度达到6.33 nm,垂直测量范围为5 μm.对于微透镜阵列的面形测量,通过将微透镜阵列划分为若干微小区域以保证局部面形最大高度小于5 μm,然后辅以精密平移机构进行若干次5步相移法测量局部面形,再利用相位重建所得的数据进行拼接和3D轮廓重建,最终得到整个微透镜阵列的精确微表面形貌.     

利用Mirau显微干涉仪测量微器件的纳米级运动

描述了一种用于微机电系统（MEMS）纳米级微运动测量的Mirau显微干涉系统.该系统利用商业化的Mirau显微干涉仪，它直接安装在光学显微镜上，用于测量一个表面微加工水平谐振器的三维运动.面内运动取决于亮场在最佳焦平面处的图像，而离面运动则取决于频闪得到的干涉图像，该图像在物镜纳米定位器的8个不同位置处得到.实验结果表明了系统进行面内和离面运动测量的纳米级分辨力.     

Nitrogen-rich silicon nitride thin films for deep-ultraviolet Mirau interferometry

We report experimental results on UV-transparent low-pressure chemical-vapor-deposition nitride thin films. We show that, by using nitrogen-rich rather than conventionally silicon-rich thin-film membranes, we are able to obtain more than 95% UV transparency below 250 nm, while keeping the stress of the membrane manageable and below standard nitride's giga-Pascal stress. Using these results, we were able to microfabricate a UV Mirau interferometer for correlation microscopy.     

Coaxial Mirau interferometer

We describe a new interferometric configuration for optical coherence tomography that is based on the Mirau interferometer. It uses the photodetector included in a superluminescent diode package, which makes possible a highly miniaturized device. Other advantages of the configuration include its totally coaxial structure, confocal microscope operation, availability of the full working distance of the imaging objective, and no central obscuration. Fundamental characteristics such as resolution and dynamic range are discussed, and the result of measurement on a rough metallic surface is presented.     

Measuring in-plane and out-of-plane coupled motions of microstructures by stroboscopic microscopic interferometry

A stroboscopic Mirau microscopic interferometer system for measuring in-plane and out-of-plane periodic motions of microstructures is demonstrated. One full cycle of a periodic motion is divided into a number of motion phases. One sequence of interferograms with different phase shifting steps is collected at every motion phase by using stroboscopic imaging. A bright-field image can be extracted from one sequence of interferograms with the same motion phase. In-plane displacements are measured by applying an image matching method to all bright-field images, followed by a compensation for the relative positions of interferograms at the different motion phases, before calculating the phase distribution related to out-of-plane deformation. We demonstrate its capability for measuring a combination of out-of-plane deformation and in-plane displacement in a microresonator.     

垂直扫描白光干涉术用于微机电系统的尺寸表征

随着微机电系统的发展,器件设计和加工过程中的表征成为一个主要问题。提出了将扫描白光干涉表面轮廓测量方法用于微结构和器件的几何特性检测上。测量系统采用了米劳显微干涉仪,利用压电陶瓷物镜纳米定位器实现垂直方向100μm范围内的精确扫描,并通过傅里叶变换算法获取条纹包络峰的位置,进而得到器件的整体集合尺寸信息,与相移干涉方法相比大大提高了测量范围。通过测量纳米台阶对该系统进行了精度标定,测量重复性在亚纳米量级。最后通过测量微谐振器和微压力传感器的几何尺寸说明了该方法的功能。     

超光滑光学表面粗糙度的测定

讨论了如何确定及消除光学轮廓仪的系统误差,进而测定超光滑光学表面粗糙度的方法及结果。在Ｚｙｇｏ Ｍａｘｉｍ ３Ｄ５７００ 表面轮廓仪上使用２－５ ×和２０ ×Ｍｉｒａｕ 物镜测量ｒｍｓ 在０－３ｎｍ 左右的超光滑硅片,通过对每个取样区域数据１６ 次相位平均,再对多个取样区域高度数据平均,消除了仪器的系统误差,使超光滑光学表面粗糙度得到精确测量。并使用其它光学轮廓仪对样品做了验证测量。作为比较,在同样条件下测量了０－８ｎｍ 左右的光滑硅片。     

微结构特性的光学测试平台

微结构是微机电系统的基本元件,其几何尺寸、运动特性、材料及力学特性直接影响微机电系统的整体性能。提出一种将计算机微视觉、米劳显微干涉、频闪成像和激光多普勒测振等技术充分融合的微结构静态和动态特性的光学测试平台,分别对微谐振器的平面和离面周期运动特性和微机械扭转镜的离面瞬时运动特性进行测试研究。实验结果表明,利用计算机微视觉和频闪成像技术能够实观微结构的平面位移、运动相位及喈振频率等周期运动参量的测试．位移的重复精度为30nm;利用显微干涉和频闪成像技术可实现微结构的离面位移及表面扭曲等周期运动参量的测试．位移的重复精度为3nm;激光多普勒测振技术具有在频域上对微结构瞬态运动进行分析的优点．是时域上周期运动测试的重要补充。     

Sinusoidally phase-modulated interference microscope for high-speed high-resolution topographic imagery

We describe an interference microscope that produces topographic images with a minimum acquisition time of 20 ms. The system is based on phase-shifting interferometry with sinusoidal phase modulation induced by the oscillation of an interferometric objective (Michelson or Mirau). A CCD camera captures four images per oscillation period to produce a phase map in real time. The system is installed on a commercial microscope.     

Interferometry for Ellipso-Height-Topometry – Part 1: Coherence scanning on the base of spacial coherence

A modified Linnik and a Mirau interferometer are introduced which can be used for Ellipso-Height-Topometry. With these, a set of topographies can be measured, where the measured height H(x, y), the ellipsometric angles Φ(x, y), Δ(x, y) and the degree of polarization P(x, y) all refer to the same pixels of the raster. This coherent set of topographies can be used to calculate topographies of further quantities, e. g. the complex refractive index N(x, y) = n(x, y) – k(x, y) i of bulk surfaces or parameters of thin films, even for discontinuous structures. Material maps which indicate the presence of specific materials and show their exact location in the frame can be generated.

In part I, these interferometric configurations are described and results are presented. It is shown that for oblique incidence, which is obligatory for an ellipsometric detection, the envelope of the interferogram or correlogram can be narrowed for improved z-scan (vertical) discrimination, even in the case of the height detection. By a theoretical analysis, we prove that this is an effect of conventional spatial coherence as a function of the width of the source and can be utilized without any source modulation or source shaping even for small spectral bandwidth of the radiation. This is verified for tungsten incandescent lamps, and for LED's. In part II algorithms for ellipsometric measurements, calibration procedures and first complete topography sets are presented.     

Recoupling of chemical-shift anisotropy powder patterns in MAS NMR

A comparison of three different implementations of the chemical-shift recoupling experiment of Tycko et al. [R. Tycko, G. Dabbagh, P.A. Mirau, Determination of chemical-shift-anisotropy lineshapes in a two-dimensional magic-angle-spinning NMR experiment, J. Magn. Reson. 85 (1989) 265-274] is presented. The methods seek to reduce the effects of artefacts resulting from pulse imperfections and residual C-H dipolar coupling in organic solids. An optimised and constant time implementation are shown to give well-defined and artefact free powder pattern lineshapes in the indirectly observed dimension for both sp2 and sp3 carbon sites. Experimental setup is no more demanding than for the original experiment, and can be implemented using standard commercial hardware.     

一种提高静态傅里叶干涉仪光谱分辨率的方法

为了在不改变静态傅里叶变换干涉具尺寸的前提下提高光谱分辨率,设计了正交斜楔型静态傅里叶变换干涉具,采用两个正交的等效斜楔形成连续的光程差变化.通过推导传统干涉具与正交斜楔型干涉具的光程差函数,设计了采用正交斜楔型干涉具增加有效探测长度,从而提高光谱分辨率的方法.经仿真计算,正交斜楔型干涉具的最大光程差为0.323 4 mm,比传统干涉具的0.080 8 mm大4倍左右,即光谱分辨率提高了4倍.实验证明,由于正交斜楔的探测原理使干涉具边缘的干涉条纹产生畸变,故要对干涉条纹进行边缘切除及滤波,给出了切除大小的计算公式.采用WQF520型光谱仪进行对比实验,检测800 nm的激光,该干涉具误差小于1 nm.该方法可有效地提高静态傅里叶变换干涉具的光谱分辨率.     

用于微位移测量的笔束激光干涉仪

介绍了一种基于空间干涉原理的亚微米零差干涉位移测量方法。该方法是对笔束激光干涉仪在微位移测量领域的应用 ,干涉仪的测量精度不受光束波前畸变等光源噪声的影响。给出了干涉仪主要结构参数的选取原则 ;构建了用于微位移测量的笔束激光干涉仪实验系统。实验结果表明 ,该系统具有纳米测量分辨率。     

高灵敏度的量子迈克耳孙干涉仪

迈克耳孙干涉仪不仅可以用来研究物理学的基本问题,而且能够用于精密测量,比如引力波信号的测量.因此,构建高灵敏度的迈克耳孙干涉仪是实现微弱信号测量的关键.目前,人们利用压缩态可以降低迈克耳孙干涉仪的噪声;通过光学四波混频过程能够放大马赫·曾德尔干涉仪中的相位信号,从而提高干涉仪的信噪比和灵敏度.本文研究了一种用于高灵敏度相位测量的量子迈克耳孙干涉仪.在迈克耳孙干涉仪中,利用非简并光学参量放大器取代干涉仪中的线性光学分束器;并且将压缩态注入干涉仪的真空通道,可以得到高信噪比和高灵敏度的干涉仪.由于存在不可避免的光学损耗,分析了迈克耳孙干涉仪内部和外部的损耗对相位测量灵敏度的影响.通过理论计算研究了干涉仪的相位测量灵敏度随系统参数的变化关系,得到了高灵敏度的相位测量量子迈克耳孙干涉仪的实现条件,为用于精密测量的干涉仪的设计提供了直接参考.     

Polarization phase-shifting Jamin shearing interferometer

The Jamin shearing interferometer is very useful in wavefront testing, especially for the low coherent light. Based on this interferometer, a polarization phase-shifting Jamin shearing interferometer is proposed to improve the performance. In the interferometer, two interference beams are linearly polarized and a polarization phase shifter is applied to realize the phase shifting. Different types of configurations of the interferometer are given. With phase-shifting interferograms, the precision of the interferometer can be improved. The interferometer is kept as an equal optical path system and its shearing amount remains changeable with simple structure and easy operation. In experiments, phase-shifting interferograms are obtained by rotating the analyzer. The usefulness of the interferometer is verified.     

Compact cyclic shearing interferometer: part two

A solid cyclic lateral shearing interferometer to be used with parallel beams of light for testing lenses is described. The interferometer can be modified into a polarization interferometer to be used in OTF measurement. The interferometer is compact and immune to environmental disturbance and less prone to misalignment.     

Construction and operation of a simple electronic speckle pattern interferometer and its use in measuring microscopic deformations

The construction and operation of a simple electronic speckle pattern interferometer (ESPI) is described. The underlying theory behind the operation of the interferometer, which is sensitive to out-of-plane displacements, is given. The interferometer uses a commercial digital still camera for image acquisition and a personal computer for image storage and analysis. The interferometer was used to measure microscopic deformations of a steel plate caused by small loads. The results were found to be in good agreement with the predictions of the elastic theory. Various possible applications of the interferometer are mentioned.     

全光纤多模速度干涉仪的研究

针对传统全光纤单模速度干涉仪在爆炸冲击试验中,前端的单模准直器对高速运动的物体的漫反射光难以有效收集,提出了全光纤多模速度干涉仪的装置。利用超辐射发光二极管作为光源,初步验证了全光纤多模速度干涉仪的可行性。主要阐述了全光纤多模速度干涉仪的原理和结构,并将其与全光纤单模速度干涉仪在喇叭振动速度的实验中进行比较,取得了一致的结果,最后还进行霍普金森压杆撞击实验,实测的速度最大值为10.49 m/s,与理论值10 m/s符合较好。     

Zygo interferometer for measuring refractive index of liquids and its application for heavy water analysis

The Zygo interferometer for measuring refractive index of liquids such as heavy water is presented. The accuracy of measurement in the refractive index of liquids is found to be ±0.0002 in the Zygo interferometer. An application of Zygo interferometer for heavy water analysis is also presented. The interferometer is found to be useful for determining the percentage purity of heavy water with an accuracy of ±5% in the purity range of 0–100%.     

用作超声接收器的共焦Fabry-Perot干涉仪

自行研制了一台用作超声接收器的共焦Ｆａｂｒｙ－Ｐｅｒｏｔ干涉仪。本文介绍了用该类干涉仪探测固体表面超声脉冲的原理，给出了干涉仪参数选择的依据及其具体结构形式，估价了共焦状态的精度要求，获得了干涉仪的干涉图样及锯齿波扫描透射曲线等实验结果。同时将该干涉仪成功地应用于探测激光脉冲在金属固体中激励的超声脉冲。