MOCVD生长的InGaN薄膜中InN分凝的研究

利用X射线衍射(XRD)技术测量了MOCVD生长的InGaN薄膜中的InN分凝量.利用Vegard定理和XRD 2θ扫描测得实验的InGaN薄膜的In组分为0.1～0.34.通过测量XRD摇摆曲线的InN(0002)和InGaN(0002)的积分强度之比测得InN在InGaN中的含量为0.0684%～2.6396%.根据XRD理论,计算出InN和InGaN的理论衍射强度.InN含量在所有样品中均小于3%,这表明样品的相分离度比较低.还发现InN在InGaN薄膜中的含量与氮气载气流量和反应室气压明显相关.     

MOVPE生长的InGaN/GaN单量子阱的光致发光和光吸收特性

研究了用金属有机物气相外延(MOVPE)法在蓝宝石衬底上生长的In组分浓度保持不变的InGaN/GaN单量子阱结构在室温下的发光特性和光吸收特性.实验结果表明,在InGaN厚度<3nm时,随着样品InGaN势阱层宽度的增加(1nm),光致发光(PL)谱的发光峰值波长出现明显的红移33nm现象,而且发光强度下降8%,谱线半峰全宽(FWHM)展宽,通过对样品的透射、反射光谱研究发现,量子阱层窄(1.5nm)的样品在波长接近红外区时出现无吸收的现象,即R+T达到了100%,而在阱层较宽的样品中没有发现这一现象,对引起这些现象的原因进行了讨论.这些结果有助于开发和优化三族氮化物半导体光电器件的进一步研究工作.     

MOCVD生长的InN薄膜中In分凝现象

利用金属有机物化学气相淀积(MOCVD)方法不同生长条件下在c面蓝宝石衬底上制备了InN薄膜,通过不同的物理表征手段研究了InN薄膜的物理性质,结果表明:合适的生长温度可以抑制InN薄膜表面分凝现象。研究认为较低的生长温度使作为N源的NH3分解率较低,In—N的成键可能性小,导致In在表面聚集出现分凝;而较高生长温度时,InN薄膜中In—N键能较小,易发生断裂,反应活性较强的N和H原子逸离薄膜表面,In滞留在薄膜表面也导致In分凝现象的出现。相对于表面分凝的样品,未出现表面分凝的样品的薄膜晶体质量和表面形貌也得到了提高。同时,通过Raman散射谱研究了晶格振动E2声子模的应力效应。     

InGaN/GaN多量子阱蓝光LED外延片的变温光致发光谱

利用MOCVD在Al_2O_3(0001)衬底上制备InGaN/GaN MQW结构蓝光LED外延片。以400 mW中心波长405 nm半导体激光器作为激发光源,采用自主搭建的100～330 K低温PL谱测量装置,以及350～610 K高温PL测量装置,测量不同温度下PL谱。通过Gaussian分峰拟合研究了InGaN/GaN MQW主发光峰、声子伴线峰、n-GaN黄带峰峰值能量、相对强度、FWHM在100～610 K范围的温度依赖性。研究结果表明:在100～330 K温度范围内,外延片主发光峰及其声子伴线峰值能量与FWHM温度依赖性,分别呈现S与W形变化;载流子的完全热化分布温度约为150 K,局域载流子从非热化到热化分布的转变温度为170～190 K;350～610 K高温范围内,InGaN/GaN MQW主发光峰峰值能量随温度变化满足Varshni经验公式,可在MOCVD外延生长掺In过程中,通过特意降温在线测PL谱,实时推算掺In量,在线监测外延片生长。以上结果可为外延片的PL发光机理研究、高温在线PL谱测量设备开发、掺In量的实时监测等提供参考。     

蓝光激光器结构中InGaN/GaN多量子阱界面效应的精细光致发光光谱研究

金属有机化学气相沉积(MOCVD)方法制备InGaN/GaN多量子阱结构时,在GaN势垒层生长的N2载气中引入适量H2,能够有效改善阱/垒界面质量从而提升发光效率.本工作利用光致发光(PL)光谱技术,对蓝光激光器结构中的InGaN/GaN多量子阱的发光性能进行了精细的光谱学测量与表征,研究了通H2生长对量子阱界面的调控...     

钝化低温法生长多层InGaN量子点的结构和光学特性

采用一种新方法生长多层InGaN/GaN量子点,研究所生长样品的结构和光学特性。该方法采用了低温生长和钝化工艺,所以称之为钝化低温法。第一层InGaN量子点的尺寸平均宽度40nm,高度15nm,量子点密度为6.3×10¹⁰/cm²。随着层数的增加,量子点的尺寸也逐渐增大。在样品的PL谱测试中,观察到在In(Ga)As材料系中普遍观察到的量子点发光的温度特性---超长红移现象。它们的光学特性表明:采用钝化低温法生长的纳米结构中存在零维量子限制效应。     

分子束外延生长InGaN/AlN量子点的组分研究

报道了分子束外延生长的绿光波段InGaN/AlN量子点材料,并综合考虑InGaN量子点的应变弛豫,以及应力和量子限制斯塔克效应对量子点发光波长的影响,提出了一种结合反射式高能电子衍射原位测量与光致荧光测量确定InGaN量子点组分的方法.     

分子束外延生长InGaN／A1N量子点的组分研究

报道了分子束外延生长的绿光波段InGaN／A1N量子点材料,并综合考虑InGaN量子点的应变弛豫,以及应力和量子限制斯塔克效应对量子点发光波长的影响,提出了一种结合反射式高能电子衍射原位测量与光致荧光测量确定InGaN量子点组分的方法．     

半导体氮化铟(InN)的晶格振动

本文总结了新型半导体InN薄膜晶格振动研究的现状，主要为Raman散射光谱及部分红外光谱的研究结果。重点内容为InN(包括六方纤锌矿结构和立方闪锌矿结构)的布里渊区中心(Γ点)声子结构、电子激发态(等离子激元)与纵光学声子耦合、无序化激发模和晶格振动模的温度、应力效应等，也涉及部分和InN有关的氮化物合金以及超晶格、量子阱和量子点等结构的晶格振动研究。同时对相关材料和结构的Raman光谱研究作了一些展望。     

InN的光致发光特性研究

研究了利用金属有机化学气相淀积生长的氮化铟薄膜的光致发光特性. 由于氮化铟本身具有很高的背景载流子浓度, 费米能级在导带之上, 通过能带关系图以及相关公式拟合光致发光图谱可以得到生长的氮化铟的带隙为0.67 eV, 并且可以计算出相应的载流子浓度为n=5.4×10¹⁸ cm^-3, 从而找到了一种联系光致发光谱与载流子浓度两者的方法. 另外通过测量变温条件下氮化铟的发光特性, 研究了发光峰位以及发光强度随温度的变化关系, 发现光致发光强度随温度的升高逐渐降低, 发光峰位随温度的升高只是红移, 并没有出现"S"形的非单调变化, 这种差异可能是由于光致发光谱的半高宽过高导致, 同时也可能与载流子浓度以及内建电场强度有关. 关键词： 氮化铟 金属有机化学气相淀积 光致发光 载流子浓度     

Photoluminescence study of InGaN/GaN multiple-quantum-well with Si-doped InGaN electron-emitting Layer

InGaN/GaN multiple-quantum-well (MQW) structure with Si-doped InGaN electron-emitting layer (EEL) was grown by metal–organic chemical vapor deposition and their characteristics were evaluated by photoluminescence (PL) measurements. In a typical structure, a low indium composition and wide potential well was used to be an EEL, and a six-fold MQW was used to be an active layer where the injected carriers recombine. By comparing the PL spectral characteristics of the MQW samples, the PL intensity of MQW with EEL is about 10 times higher than that of typical MQW. Experimental results indicate that the high electron capture rate of the MQW active region can be achieved by employing EEL.     

Photoluminescence properties of selectively grown InN microcrystals

We investigated the photoluminescence (PL) properties of regularly arranged N‐polar InN microcrystals with m ‐plane sidewall facets. We observed narrow PL emission at 0.678 eV with a linewidth of ～14 meV at 4 K and a clear band‐filling effect with increasing excitation power. We also observed a normal red shift of the PL peak energy as large as 51 meV (～150 nm) with increasing temperature from 4 to 300 K, similar to that observed for non‐degenerated semiconductors. The integrated PL intensity ratio I_300K/I_4K was measured to be 6.1%. These results indicate that InN microcrystals have a low residual carrier density and excellent optical properties without being adversely affected by surface electron accumulation, despite their relatively high surface area. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Estimation of InN phase inclusion in InGaN films grown by MOVPE

The amount of InN included in InGaN films grown by MOCVD (metalorganic chemical vapor deposition) was estimated by X-ray diffraction measurement technology. The In compositions in our InGaN films are measured as 0.1–0.34 by X-ray 2θ scan using Vegard’s law. The inclusion of InN in InGaN layers was obtained as 0.0684–2.6396% by measuring the ratio of the integrated intensity of the InN (0002) peak to that of the InGaN (0002) peak in X-ray rocking curves. The theoretical diffraction intensities from InN and InGaN have been calculated according to the X-ray-diffraction theory. The values of the InN inclusion for all our samples were less than 3%, which indicated that the degree of phase separation of the samples was low. It was also found that the flow rate of N₂ carrier gas and the operation pressure strongly affected the InN inclusion in InGaN. Received: 20 November 2000 / Accepted: 16 May 2001 / Published online: 27 June 2001     

Vertical polarization-induced doping InN/InGaN heterojunction tunnel FET with hetero T-shaped gate

A novel vertical InN/InGaN heterojunction tunnel FET with hetero T-shaped gate as well as polarization-doped source and drain region (InN-Hetero-TG-TFET) is proposed and investigated by Silvaco-Atlas simulations for the first time. Compared with the conventional physical doping TFET devices, the proposed device can realize the P-type source and N-type drain region by means of the polarization effect near the top InN/InGaN and bottom InGaN/InN heterojunctions respectively, which could provide an effective solution of random dopant fluctuation (RDF) and the related problems about the high thermal budget and expensive annealing techniques due to ion-implantation physical doping. Besides, due to the hetero T-shaped gate, the improvement of the on-state performance can be achieved in the proposed device. The simulations of the device proposed here in this work show I_ON of 4.45×10^-5 A/μm, I_ON/I_OFF ratio of 10¹³, and SS_avg of 7.5 mV/dec in InN-Hetero-TG-TFET, which are better than the counterparts of the device with a homo T-shaped gate (InN-Homo-TG-TFET) and our reported lateral polarization-induced InN-based TFET (PI-InN-TFET). These results can provide useful reference for further developing the TFETs without physical doping process in low power electronics applications.     

Photoluminescence and Raman scattering in spatially inhomogeneous heteroepitaxial InGaN layers

Spatial inhomogeneities of the indium distribution in In _x Ga_1–x N epitaxial layers grown on sapphire substrate with a GaN buffer layer were investigated using photoluminescence (PL) in addition to confocal scanning Raman spectroscopy (RS) and PL. Broad emission bands from In-enriched InGaN nanoclusters (700–900 nm) and from the volume outside the clusters (about 460 nm) were observed in PL spectra of an epitaxial InGaN layer with an average In content of 25.7%. It was established that larger micro-PL intensities corresponded to energetically shallower clusters. The observed broadly asymmetric A₁(LO) RS band of InGaN confirmed that the In concentration in the layer was highly variable. Modeling the LO phonon band by two Lorentzian curves gave an average In concentration of 21% in the volume outside the clusters and 37% in the nanoclusters, which was considerably higher than the average concentration in the layer and agreed well with their PL band positions.     

Improved Photoluminescence in InGaN/GaN Strained Quantum Wells

The influence of strain accumulation on optical properties is investigated for InCaN/CaN-based blue lightemitting diodes grown by metal organic vapor-phase epitaxy. It is found that it is possible to reduce the strain relaxation and hence the nonradiative recombination centers in InCaN multi-quantum wells （MQWs） byadopting more InCaN/CaN MQWs pairs. The alleviation of strain relaxation in a superlattice layer results in the crystalline perfection and effective quality improvement of the epitaxial structures. With suitable control of the crystalline quality and reduced strain relaxation in the MQWs, there shows a 4-fold increase in light output luminous efficiency as compared to their conventional counterparts.     

Single intermediate-band solar cells of InGaN/InN quantum dot supracrystals

We measured the elemental mappings in dental enamel of Gigantopithecus blacki (n=3) using synchrotron radiation X-ray fluorescence (SRXRF) to understand the dietary variation during the time of tooth eruption. In order to account for the effects of diagenesis on the variation of elements in these fossil teeth, we compared the Fe and Mn elemental distribution and levels in dental enamel of G. blacki with that of a single modern pig tooth and found no differences. The observation of the variations of Sr, Ca and RE (rare earth elements) distribution in the incremental lines reveals that the plant foods utilized by G. blacki from the early Pleistocene or the middle Pleistocene had varied during the formation of dental enamel, possibly caused by the change of living environment or food resources. The variations of elemental distribution in different incremental lines are very promising to understand the nutritional and physical stress of G. blacki during the tooth eruption and environmental adaptations.