Three-dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing

We report the three-dimensional (3D) integration of microoptical components such as microlenses, micromirrors and optical waveguides in a single glass chip by femtosecond (fs) laser direct writing. First, two types of microoptical lenses were fabricated inside photosensitive Foturan glass by forming hollow microstructures using fs laser direct writing followed by thermal treatment, successive wet etching and additional annealing. One type of lens is the cylindrical microlens with a curvature radius R of 1.0 mm, and the other is the plano-convex microlens with radius R of 0.75 mm. Subsequently, by the continuous procedure of hollow microstructure fabrication, a micromirror was integrated with the plano-convex microlens in the single glass chip. Further integration of waveguides was performed by internal refractive index modification using fs laser direct writing after the hollow structure fabrication of the microlens and the micromirror. A demonstration of the laser beam transmission in the integrated optical microdevice shows that the 3D integration of waveguides with a micromirror and a microoptical lens in a single glass chip is highly effective for light beam guiding and focusing. PACS 42.62.-b; 81.05.Kf; 42.82.Cr; 82.50.Pt; 42.79.Gn     

Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture

Three-dimensional (3D) micromachining of photosensitive glass is demonstrated by photochemical reaction using femtosecond (fs) laser for lab-on-a-chip application. True 3D hollow microstructures embedded in the glass are fabricated by fs laser direct writing followed by heat treatment and successive wet etching. The modification mechanism of the photosensitive glass by the fs laser and advantage of this process are discussed. Various microcomponents for the lab-on-a-chip devices such as microfluidics, microvalves, microoptics, microlasers, etc. are fabricated by using this technique and their performance is examined . PACS 42.62.-b; 82.50.Pt; 87.80.Mj     

Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining

We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) a second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing the great potential of using these microoptical lenses in lab-on-a-chip applications. PACS 42.62.-b; 81.05.Kf; 82.50.Pt     

Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser

We show that three-dimensional micro-optical components can be embedded in a photosensitive glass by a femtosecond (fs) laser. After exposure to the tightly focused fs laser beam, latent images are written inside the sample. Modified regions are developed by a postbaking process and then preferentially etched away in a 10%-dilute solution of hydrofluoric acid. After this process, hollow internal structures are formed that act as a mirror and a beam splitter. Furthermore, we find that postannealing smoothes the surfaces of the fabricated hollow structures, resulting in great improvement of their optical properties.     

Direct fabrication of freely movable microplate inside photosensitive glass by femtosecond laser for lab-on-chip application

We demonstrate the fabrication of complicated three-dimensional (3D) microstructures embedded in a photosensitive glass by a high-order multiphoton process using a femtosecond (fs) laser. Direct writing of the fs laser followed by a post baking process and preferential etching in a dilute hydrofluoric (HF) acid solution results in a microplate that can freely move in hollow structures embedded in the glass. The fabricated structure functions as a microvalve that can control the flow direction of fluids in the microreactor. PACS 42.62.-b; 81.05.Kf; 82.50.Pt     

3D microoptical elements formed in a photostructurable germanium silicate by direct laser writing

We present our investigations into the fabrication of three-dimensional microoptical elements by the direct femtosecond laser writing of a germanium–silicon photosensitive hybrid material. Germanium glass composites are very interesting for optical applications as they are photosensitive, and maintain high optical transparency in the visible and near-infrared bands of the spectrum. Here, we have used a germanium containing hybrid material to make nanophotonic structures and microoptical elements such as photonic crystal templates, prisms and spatial polarization plates, both on flat surfaces and fiber tips. Our results show that this germanium silicate composite is an excellent material for microoptics fabrication.     

Femtosecond laser application for high capacity optical data storage

A femtosecond (fs) laser application for multi-layer optical recording is investigated. Information patterns at different layer depths were written inside a transparent glass substrate due to micro-void formation by fs laser ablation, which causes re-distribution in glass materials and a refractive index modification. The information bits recorded in a single layer can be retrieved clearly without interference from the neighboring layers. A fs laser irradiation of a transparent polymer matrix (doped with fluorescent materials for use as low-cost recording media) is also studied. A fs laser induced photo-chemical reaction changes the chemical properties of the fluorescent materials and records information bits inside the matrix. With an ultra-fast laser as a new light source, 3D optical recording can be available for high capacity data storage up to 1 TB per disc. PACS 82.50.-m; 42.65. Re; 72.70.Jk.     

Modification of the fused silica glass network associated with waveguide fabrication using femtosecond laser pulses

Atomic-scale structural changes have been observed in the glass network of fused silica after modification by tightly focused 800-nm, 130-fs laser pulses at fluences between 5 and 200 J cm^-2. Raman spectroscopy of the modified glass shows an increase in the 490 and 605-cm^-1 peaks, indicating an increase in the number of 4- and 3-membered ring structures in the silica network. These results provide evidence that densification of the glass occurs after exposure to fs pulses. Fluorescence spectroscopy of the modified glass shows a broad fluorescence band at 630 nm, indicating the formation of non-bridging oxygen hole centers (NBOHC) by fs pulses. Waveguides that support the fundamental mode at 633 nm have been fabricated inside fused silica by scanning the glass along the fs laser beam axis. The index changes are estimated to be approximately 0.07×10^-3. Received: 17 December 2001 / Accepted: 9 July 2002 / Published online: 25 October 2002 RID="*" ID="*"Corresponding author. Fax: +1-925/423-2463, E-mail: dmkrol@ucdavis.edu     

Selective metallization of photostructurable glass by femtosecond laser direct writing for biochip application

We report the selective metallization of photostructurable glass by femtosecond (fs) laser direct writing followed by electroless copper (Cu) plating. It was found that a Cu thin film can be deposited only on the rough surface of glass ablated by the fs laser. The deposited Cu thin film exhibits strong adhesion and excellent electrical properties. A Cu film can even be deposited on the internal wall of a hollow microchannel inside photostructurable glass by the multiphoton absorption of the fs laser. To show the use of this technique for micro-total-analysis-system (μ-TAS) applications, the fabrication of a microheater operating at temperatures up to 200 °C was demonstrated. PACS 81.05.Kf; 85.40.Ls; 87.85.Va     

Fabrication of microlens arrays in photosensitive glass by femtosecond laser direct writing

This article reports the fabrication of high-fill-factor plano-convex cylindrical and spherical microlens arrays horizontally and vertically embedded in a photosensitive Foturan glass chip by femtosecond (fs) laser micromachining. The microlens arrays were fabricated by modifying the microstructure of Foturan glass using fs laser direct writing followed by thermal treatment, wet etching, and additional annealing. The focusing ability and image quality of the microlens arrays were examined, showing that the lens arrays not only can focus light well but also provide an imaging capability that holds great potential for lab-on-a-chip applications.     

Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip applications

A new technology for rapid prototyping of lab-on-chip devices is described. Direct write of a near-infrared femtosecond laser forms three-dimensional (3D) latent images inside photostructurable glass. Modified regions are developed by a post-annealing and then preferentially etched away in dilute hydrofluoric acid solution with an etching selectivity of 40–50 times, resulting in the formation of true 3D hollow microstructures inside the glass. Microfluidic structures with microcells and microchannels embedded in the glass are fabricated by this technique. PACS 42.62.-b; 47.85.Np; 81.05.Kf     

Threshold effect in femtosecond laser induced nanograting formation in glass: influence of the pulse duration

Recently, femtosecond laser direct writing in porous glass is emerging as a powerful technique for building arbitrary 3D hollow micro/nanostructures in bulk glass materials. In this study, we investigate the pulse duration dependence of laser intensity window for inducing a single nanocrack inside porous glass by femtosecond laser direct writing. We find that the window for a single nanocrack increases with the pulse duration, while the roughness of side walls in the nanocracks becomes higher for pulses longer than ~300 fs. When the femtosecond laser pulses of an optimized duration of ~200 fs are chosen, a sufficiently broad range of laser intensity (~44 % of the structuring threshold) for creating a single nanocrack can be obtained, while smooth sidewalls required by nanofluidic applications can still be maintained. The reported results will be beneficial not only for the development of the 3D femtosecond laser micro/nanostructuring techniques, but also for gaining a deeper understanding of the physical mechanism behind the nanograting formation induced by femtosecond laser irradiation in glass and other transparent materials.     

Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser

Theoretical and experimental investigations have been made of the three-dimensional microchannel fabrication of photostructurable glass by use of a femtosecond (fs) laser. Generally, a microchannel fabricated inside glass by the scanning focal spot of a fs laser perpendicular to the direction of laser propagation assumes an elliptical shape with a cross section of large aspect ratio. We demonstrate that one can greatly reduce the aspect ratio merely by inserting a slit, which is oriented parallel to the laser's scanning direction, before the focusing lens. Computer simulations show that a more symmetrical pattern is obtained in the vicinity of the focal point with the help of such a slit, owing essentially to a diffraction effect.     

Single-pass waveguide amplifiers in Er-Yb doped zinc polyphosphate glass fabricated with femtosecond laser pulses

We have investigated the direct fabrication of subsurface waveguide amplifiers in Er-Yb zinc polyphosphate glass by utilizing the relationship between the initial glass composition and the resulting changes to the network structure after modification by fs laser pulses. Waveguides, exhibiting internal gain of 1 dB/cm at 1.53 μm when pumped with 500 mW at 976 nm, were directly fabricated using a regenerative amplified Ti:sapphire 1 kHz, 180 fs laser system. Optical properties as well as insertion losses and internal gain are reported.     

Three-dimensionally embedded indium tin oxide (ITO) films in photosensitive glass: a transparent and conductive platform for microdevices

A new method for embedding transparent and conductive two- and three-dimensional microstructures in glass is presented. We show that the internal surface of hollow structures fabricated by femtosecond-laser direct writing inside the photosensitive glass can be coated by indium tin oxide (Sn-doped In₂O₃, ITO) using a sol-gel process. The idea of combining two transparent materials with different electrical properties, i.e., insulating and conductive, is very promising and hence it opens new prospects in manufacturing cutting edge microdevices, such as lab-on-a-chips (LOCs) and microelectromechanical systems (MEMS).     

Spectroscopic investigations of femtosecond laser irradiated polystyrene and fabrication of microstructures

We report microfabrication of structures in bulk and thin films of polystyrene (PS) using femtosecond (fs) laser pulses. For the first time to our knowledge, we report emission from the fs laser modified regions of bulk and thin films of PS when excited at 458, 488, and 514 nm. Moreover, we report the existence of peroxide type free radicals, for the first time, in fs laser irradiated bulk PS. We observed the suppression of Raman modes in case of structures fabricated at higher energies and the same effect was noticed in central portion of the structures fabricated. No appreciable broadening was observed in the case of structures fabricated at low energies. Possible applications resulting from such structures are discussed briefly.     

Fabrication of glass micro-prisms using ultra-fast laser pulses with chemical etching process

In this study, a new process of glass micro-prism structures is investigated by an ultra-fast laser irradiation with chemical etching process. The ultra-fast laser is employed by an all-in-one femtosecond laser (FS-laser) system with the amplifier as an excitation source for patterning the structures. Here, the center wavelength of laser is frequency-doubled to 517 nm. Besides, the repetition rate and pulse width of laser are 100 kHz and 350 fs, respectively. First, the embedded gratings of glass with different pitches can be fabricated using a FS-laser process. Afterwards, the glass samples are placed in the hydrofluoric acid (HF) solution for 15 min to develop structures. Finally, the results of this study demonstrated that the V-cut micro-prisms are successfully formed by controlling etching concentration between intrinsic glass material and modified areas.     

Fabrication of 3D microfluidic structures inside glass by femtosecond laser micromachining

Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. One of the most important features of femtosecond laser processing is that a femtosecond laser beam can induce strong absorption in even transparent materials due to nonlinear multiphoton absorption. This makes it possible to directly create three-dimensional (3D) microfluidic structures in glass that are of great use for fabrication of biochips. For fabrication of the 3D microfluidic structures, two technical approaches are being attempted. One of them employs femtosecond laser-induced internal modification of glass followed by wet chemical etching using an acid solution (Femtosecond laser-assisted wet chemical etching), while the other one performs femtosecond laser 3D ablation of the glass in distilled water (liquid-assisted femtosecond laser drilling). This paper provides a review on these two techniques for fabrication of 3D micro and nanofluidic structures in glass based on our development and experimental results.     

Fabrication of integrated microchip for optical sensing by femtosecond laser direct writing of Foturan glass

By the one-continuous fabrication procedure of hollow microstructures using femtosecond (fs) laser direct writing followed by thermal treatment, successive chemical wet etching and additional annealing, three-dimensional integration of microoptics with microfluidics, i.e., a planoconvex microlens with a microfluidic chamber, in a single Foturan glass chip was achieved. Further integration of an optical waveguide was performed through internal refractive index modification by fs laser direct writing after the fabrication of the microlens and the microchamber. An “all-in-one” microchip that is highly effective for on-chip photonic biosensing can be manufactured by the present technique with easy assembly of each microcomponent and without any cumbersome processes for stacking and joining substrates. Experimental demonstration of photonic biosensing using the integrated microchip has revealed that fluorescence analysis and absorption measurement of liquid samples can be performed with efficiencies enhanced by factors of 8 and 3, respectively.     

Spatial Filters on Demand Based on Aperiodic Photonic Crystals

Photonic Crystal spatial filters, apart from stand‐alone spatial filtering function, can also suppress multi‐transverse‐mode operation in laser resonators. Here it is shown that such photonic crystals can be designed by solving the inverse problem: for a given spatial filtering profile. Optimized Photonic Crystal filters were fabricated in photosensitive glass. Experiments have shown that such filters provide a more pronounced filtering effect for total and partial transmissivity conditions.