PZT厚膜及高频超声换能器的研究

近年来,基于PZT厚膜的超声换能器研究受到了广泛的重视。本文综述了PZT厚膜制备技术的发展情况,简要介绍了水下声纳和医用超声领域中PZT厚膜型高频超声换能器的应用研制进展。     

Acoustic wave transmission through piezoelectric structured materials

This paper deals with the transmission of acoustic waves through multilayered piezoelectric materials. It is modeled in an octet formalism via the hybrid matrix of the structure. The theoretical evolution with the angle and frequency of the transmission coefficients of ultrasonic plane waves propagating through a partially depoled PZT plate is compared to finite element calculations showing that both methods are in very good agreement. The model is then used to study a periodic stack of 0.65PMN-0.35PT/0.90PMN-0.10PT layers. The transmission spectra are interpreted in terms of a dispersive behavior of the critical angles of longitudinal and transverse waves, and band gap structures are analysed. Transmission measurements confirm the theoretical calculations and deliver an experimental validation of the model.     

Resonant modes and magnetoelectric performance of PZT/Ni cylindrical layered composites

Resonant modes and magnetoelectric performance of layered PZT/Ni and Ni/PZT/Ni cylindrical composites are considered. The first and the second resonant frequencies in the 1–150 kHz range correspond to the axial and the radial modes. Experimental results and theoretical analysis indicate that one should choose the trilayered structure and the first resonant frequency as the working frequency. This study is helpful in design and applications of magnetoelectric devices.     

A miniaturization of the multi-degree-of-freedom ultrasonic actuator using a small cylinder fixed on a substrate

Multi-degree-of-freedom ultrasonic actuator has been studied for robot arms and multidimensional precision table and so on because of its simple structure, silent operation, and holding force. In this study, we aim to miniaturize multi-degree-of-freedom ultrasonic actuator for fabrication on a substrate. This actuator consists of a stainless steel cylinder and a PZT ring. The cylinder is fixed on a substrate and the PZT ring is glued to the substrate near the cylinder. The 1st longitudinal vibration and the 2nd bending vibration are simultaneously excited in the cylinder to make elliptical motion at the top of the cylinder and a ball rotor placed on the cylinder rotates because of the friction force. Length of the cylinder was decided so as to tune the resonance frequency of the 1st longitudinal vibration to the 2nd bending one. Actuator performances are evaluated experimentally using a 14 mm height and 7 mm diameter stainless steel cylinder with a 0.5 mm thickness PZT ring. The rotation about the cylinder axis is tested using the two orthogonal bending vibrations with 90 degrees phase difference. Also, the rotation about horizontal axes were investigated using the combination of the longitudinal vibration and one of two bending vibrations. We measured the rotation speed of a steel ball and obtained 15.8 rps using a 6 mm diameter ball rotor.     

Preparation of Nb doped PZT film by RF sputtering

Undoped lead zirconate titanate (PZT) and Nb doped lead zirconate titanate (PNZT) films formed on an Ir/Ti/SiO₂/Si substrate using an RF magnetron sputtering method were studied in detail. Films of about 3–4 μm thickness were deposited at a substrate temperature of 525 ^°C. X-ray diffraction measurement (XRD) shows that the obtained PZT and PNZT films are both strongly uniaxially oriented in the (100) direction of the perovskite structure, and TEM observation shows that the films have columnar structures. The addition of Nb results in changes of film electrical characteristics, particularly dielectric constant and hysteresis characteristics. Sputtered PNZT films (Nb 13 at.%) formed on silicon diaphragm structures generate 2 times more deflections than undoped PZT film formed on the same structure, thus demonstrating a superior piezoelectric performance. A sputtering method to directly form a PNZT film with high piezoelectric constant on a substrate at low temperature via electrodes finds a wide potential use in MEMS applications.     

光纤布拉格光栅型全光纤声光调制器的特性研究

将光纤光栅的傅里叶模式耦合理论应用于光纤布拉格光栅型全光纤声光调制器的理论分析中. 与现有的分析方法相比, 该模型算法简单、 求解容易, 能够快速有效地获得调制器的传输特性. 基于该模型, 理论分析了超声波频率及声致应变幅度对调制器特性的影响. 仿真结果表明, 该调制器反射谱的主反射峰与次反射峰的波长间隔与超声波频率成正比, 反射峰的反射率随着声致应变幅度的改变而发生周期性的变化. 另外, 在同一声致应变幅度下, 低频超声波调制的光栅反射中存在更多的次反射, 光栅反射能量的周期性变化更加明显. 实验中, 使用频率为885.5 kHz的超声波对光纤布拉格光栅进行调制. 实验结果与仿真结果相一致.     

Nonlinear piezoelectricity in PZT ceramics for generating ultrasonic phase conjugate waves

We have succeeded in the generation of acoustic phase conjugate waves with nonlinear PZT piezoelectric ceramics and applied them to ultrasonic imaging systems. Our aim is to make a phase conjugator with 100% efficiency. For this purpose, it is important to clarify the mechanism of acoustic phase conjugation through nonlinear piezoelectricity. The process is explained by the parametric interaction via the third-order nonlinear piezoelectricity between the incident acoustic wave at angular frequency omega and the pump electric field at 2 omega. We solved the coupling equations including the third-ordered nonlinear piezoelectricity and theoretically derived the amplitude efficiency of the acoustic phase conjugation. We compared the efficiencies between the theoretical and experimental values for PZT ceramics with eight different compositions. Pb[(Zn1/3Nb2/3)(1 - x)Tix]O3 (X = 0.09, PZNT91/9) piezoelectric single crystals have been investigated for high-performance ultrasonic transducer application, because these have large piezoelectric constants, high electrical-mechanical coupling factors and high dielectric constants. We found that they have third-order nonlinear piezoelectric constants much larger than PZT and are hopeful that the material as a phase conjugator has over 100% efficiency.     

Thin-disk piezoceramic ultrasonic motor. Part I: design and performance evaluation

The purpose of this study is to gain the knowledge and experience in the design of thin-disk piezoceramic-driving ultrasonic actuator dedicated. In this paper, the design and construction of an innovative ultrasonic actuator is developed as a stator, which is a composite structure consisting of piezoceramic (PZT) membrane bonded on a metal sheet. Such a concentric PZT structure possesses the electrical and mechanical coupling characteristics in flexural wave. The driving ability of the actuator comes from the mechanical vibration of extension and shrinkage of a metal sheet due to the converse piezoelectric effect, corresponding to the frequency of a single-phase AC power. By applying the constraints on the specific geometry positions on the metal sheet, the various behaviors of flexural waves have been at the different directions. The rotor is impelled by the actuator with rotational speeds of 600 rpm in maximum using a friction-contact mechanism. Very high actuating and braking abilities are obtained. This simple and inexpensive structure of actuator demonstrates that the mechanical design of actuator and rotor could be done separately and flexibly according to the requirements for various applications. And, its running accuracy and positioning precision are described in Part II.A closed loop servo positioning control i.e. sliding mode control (SMC) is used to compensate automatically for nonlinearly mechanical behaviors such as dry friction, ultrasonic vibrating, slip-stick phenomena. Additionally, SMC scheme has been successfully applied to position tracking to prove the excellent robust performance in noise rejection.     

Adaptive Integrated Optical Bragg Grating in Semiconductor Waveguide Suitable for Optical Signal Processing

This article presents a methodology for an integrated Bragg grating using an alloy of GaAs, AlGaAs, and InGaAs with a controllable refractive index to obtain an adaptive Bragg grating suitable for many applications on optical processing and adaptive control systems, such as limitation and filtering. The refractive index of a Bragg grating is controlled by using an external electric field for controlling periodic modulation of the refractive index of the active waveguide region. The designed Bragg grating has refractive indices programmed by using that external electric field. This article presents two approaches for designing the controllable refractive indices active region of a Bragg grating. The first approach is based on the modification of a planar micro-strip structure of the iGaAs traveling wave as the active region, and the second is based on the modification of self-assembled InAs/GaAs quantum dots of an alloy from GaAs and InGaAs with a GaP traveling wave. The overall design and results are discussed through numerical simulation by using the finite-difference time-domain, plane wave expansion, and opto-wave simulation methods to confirm its operation and feasibility.     

High frequency broadband PZT thick film ultrasonic transducers for medical imaging applications

A modified sol-gel method is used to prepare PZT thick film on Pt-coated silicon substrate. A new method of vacuum filling sol-gel precursor solution is introduced to improve film quality. The effects of the filling on PZT thick film structure and ferroelectric properties are discussed. The fabrication of a high frequency transducer with the PZT film as the actuating layer is described. The performance of the transducer is measured and results show that the transducer backed by E-Solder without a matching layer has a center frequency of 103 MHz and a bandwidth of 70%. Beam profile measurements show that the transducer has an axial resolution of 9.2 microm and a lateral resolution of 33 microm.     

Band-rejection filter based on a Bragg fiber with a defect layer

<正>A novel band-rejection filter based on a Bragg fiber with a defect layer is proposed.A defect layer is introduced in the periodic high/low index layers in the cladding of the Bragg fiber,which results in large confinement loss for some resonant wavelengths inside the band gap range of the Bragg fiber.A segment of the Bragg fiber with a defect layer can be used as a band-rejection filter,whose characteristics are mainly determined by the structure of the Bragg fiber.The simulation results show that the bandwidth of such a band-rejection filter is dependent on the number of the periodic high/low index layers in both sides of the defect layer in the cladding of the Bragg fiber.     

Dielectrophoretic assembly of lead zirconate titanate microtubes

Lead zirconate titanate (PZT) microtubes were assembled onto pre-patterned substrates using dielectrophoresis of a colloidal suspension of microtubes dispersed in isopropyl alcohol. High aspect ratio tubes with an outer diameter of 2 μm and length of about 30 μm were prepared by vacuum infiltration of mesoporous silicon templates. An interdigitated electrode structure with gap sizes ranging from 2 μm to 15 μm was patterned on a silicon substrate via conventional lithography. This allowed a non-uniform alternating electric field to be generated. The influence of the electrode gap along with the effects of the waveform, amplitude and frequency of an applied signal on the dielectrophoretic assembly of PZT microtubes was investigated. A square wave signal of 5 and 10 Hz was found to be the most effective in assembling the microtubes on a 12 μm electrode gap. The results show potential for the dielectrophoretic technique in realizing integrated 3D devices using the high aspect ratio piezoelectric tube structures as building blocks.     

高Q值超薄完美吸波体设计方法研究

为了增强完美吸波体的吸波性能,提出了一种高Q值超薄完美吸波体的设计方法. 该方法将基片集成波导技术与一般完美吸波体设计方法有机结合,通过合理添加金属过孔实现了高Q值的完美吸波体设计. 利用该方法设计出了厚度0.0065λ、半波功率带宽5.8%的完美吸波体,其吸波率Q值为33.9,比普通完美吸波体吸波率Q值提升了20%以上;其1.5和3 dBsm的雷达散射截面缩减Q值分别提高了54%和67%以上;同时该方法消除了传统设计中的频率偏移问题. 实测与仿真结果表明所设计的吸波体具有高Q值特征,也具有良好的雷达散射截面缩减效果,散射截面缩减最高达14 dBsm. 仿真和实测验证了设计方法的可靠性. 关键词： 基片集成波导技术 频率偏移 吸波率 雷达散射截面     

偏置电压对磁致伸缩/压电层合换能结构磁电性能影响

分析和测试了偏置电压调整时PZT5/Terfenol-D/PZT8层合换能结构磁电性能. 提出了一种磁致伸缩/压电层合磁电换能结构的一阶谐振频率控制方法. 通过改变压电驱动层的直流电压对磁电层合结构的预应变进行改变, 从而调整谐振频率. 分析偏置电压、 应变、 弹性模量、 谐振频率和谐振磁电电压系数之间关系. 分析表明: 在较小应变情况下, 控制电压几乎可以线性调节谐振频率, 而层合结构谐振磁电电压系数几乎与偏置电压无关. 实验研究验证: 理论与实验结果较好吻合. 在-170 V-+170 V的偏置电压时, 谐振频率可以几乎线性调整. 最大频率调整量达到1 kHz, 偏置电压对一阶纵振频率的控制率达到: 2.94 Hz/V. 在偏置磁场为0-225 Oe时, 谐振频率调整量与偏置磁场无关. 偏置磁场会改变谐振磁电电压系数, 在大于178 Oe静态磁场偏置时, 磁电电压系数最大, 达到1.65 V/Oe.     

Frequency response of second-order extremely asymmetrical scattering in wide uniform holographic gratings

Second-order extremely asymmetrical scattering (EAS) and grazing-angle scattering (GAS) are types of Bragg scattering in slanted wide periodic gratings. They occur when the second diffracted order satisfies the Bragg condition and has a wavevector parallel (for EAS) and almost parallel (for GAS) to the grating boundaries. In this paper, for the first time, a rigorous numerical study of the frequency responses of second-order EAS and GAS is presented for bulk TE electromagnetic waves in planar holographic gratings. A highly unusual pattern of strong optical resonances in the side-lobe structure of these frequency responses is predicted. A relationship between these resonances and the previously predicted GAS resonances (at zero detunings of the Bragg condition) is established and analysed. A special new type of eigenmodes in slanted wide periodic gratings with strong frequency detunings are predicted in the case of second-order EAS and GAS. The eigenmodes are shown to be guided by the grating alone without any conventional guiding effect in the structure. The typical field structure in such eigenmodes is investigated and discussed. PACS 42.25Fx; 42.79Dj; 42.40Eq     

非周期微纳结构增强有机发光二极管光耦合输出的研究进展

有机发光二极管（OLED）具有功耗低、重量轻、色域宽、响应时间快及对比度高等优点,在全彩平板显示和固态照明等领域均显现出巨大的应用潜力,受到人们的广泛关注.然而,较低的光输出效率使得器件的外量子效率远低于内量子效率,这严重制约了OLED器件的发展和应用.因此如何提高OLED器件的光耦合输出效率已成为备受关注的研究课题.本文主要介绍了采用非周期微纳结构提高OLED器件光耦合输出效率的最新研究进展,对随机微纳透镜结构、光散射介质层、聚合物多孔散射薄膜、随机凹凸波纹结构及随机褶皱结构等多种对器件亮度分布和光谱稳定性无明显影响的光耦合输出技术进行了总结和讨论.最后,对提高OLED器件光耦合输出研究做了总结和展望.     

Ultrasonic radiation to enable improvement of direct methanol fuel cell

To improve DMFC (direct methanol fuel cell) performance, a new method using ultrasonic radiation is proposed and a novel DMFC structure is designed and fabricated in the present paper. Three ultrasonic transducers (piezoelectric transducer, PZT) are integrated in the flow field plate to form the ultrasonic field in the liquid fuel. Ultrasonic frequency, acoustic power, and methanol concentration have been considered as variables in the experiments. With the help of ultrasonic radiation, the maximum output power and limiting current of cell can be independently increased by 30.73% and 40.54%, respectively. The best performance of DMFC is obtained at the condition of ultrasonic radiation (30 kHz and 4 W) fed with 2 M methanol solution, because both its limiting current and output power reach their maximum value simultaneously (222 mA and 33.6 mW, respectively) under this condition. These results conclude that ultrasonic can be an alternative choice for improving the cell performance, and can facilitate a guideline for the optimization of DMFC.     

Lead-free transducer for non-destructive evaluation

Lead-free piezoelectric ceramics with the formula 0.90(Bi_0.5Na_0.5)TiO₃ - 0.05(Bi_0.5K_0.5)TiO₃ - 0.015(Bi_0.5Li_0.5)TiO₃-0.05BaTiO₃ (abbreviated as BNKLBT-1.5) were prepared by a conventional mixed-oxide method. A disc of this material was fabricated and used to construct an ultrasonic transducer suitable for use in non-destructive evaluation (NDE). Using a laser vibrometer, it was observed that both BNKLBT and PZT exhibited a surface displacement pattern indicative of coupling of the radial mode vibration with the thickness mode vibration. This is consistent with the measurements of electrical impedance vs frequency which showed that for both discs a strong radial mode with many harmonics was clearly observed and many (usually undesired) modes existed near the thickness mode resonance frequency. The discs were mounted in stainless steel housings with appropriate electrical connections to form transducers. Tungsten/epoxy backing was incorporated to provide a very short ring-down time, a characteristic required for many NDE applications. The characteristics of the BNKLBT transducer were quite similar to that of a PZT transducer of similar structure, showing that this lead-free material has the potential to replace PZT in transducers for NDE applications. PACS 43.20.Tb; 43.20.Ye; 43.35.Zc; 43.35.Yb; 43.38.Ar; 43.35.Fx     

波纹误差对同轴布拉格结构反射特性的影响

利用模式匹配法建立了分析波纹参数具有随机误差的矩形槽同轴布拉格结构反射特性的理论模型,并以一个以基模(TEM)工作于220GHz附近的矩形槽同轴布拉格结构为例,研究了矩形凹槽的深度、宽度、周期长度以及位置的随机误差对其反射率频率响应的影响。数值模拟结果表明:在给定的误差范围条件下,凹槽宽度与位置的随机误差对该结构的反射性能影响较小,而凹槽深度与周期长度的随机误差是影响结构反射特性的主要因素,因此在结构的加工制备过程中应视器件性能要求严格控制两者的制造公差。     

GMM/弹性板/PZT层状复合结构的纵振磁电响应

利用Hamilton原理推导GMM/弹性板/PZT三层层状复合结构的运动方程,在推导中考虑层间胶层的作用,包括其剪切变形和纵向变形产生的效果;应用运动方程,根据层状复合结构的边界条件,推导复合结构的固有频率方程,并结合压磁和压电方程,得到层状复合结构在不同固有频率处的磁电响应.对比磁电响应的频率特性的理论值和实验值,频率误差在9.42%以内,磁电电压转化系数的理论值与实验值符合,并讨论了弹性板的尺寸变化对层状复合结构谐振频率的影响. 关键词： 层状复合结构 磁电响应 Hamilton原理 运动方程