Hybrid electron cyclotron resonance-radio-frequency plasma etching of III–V semiconductors in Cl2-based discharges. Part II: InP and related compounds

Electron Cyclotron Resonance (ECR) discharges of CCl₂F₂ or PCl₃ have been used to etch InP, InAs, InSb, InGaAs and AlInAs. The etch rates of these materials increase linearly with additional RF power level applied to the cathode and are in the range 50–180 Å · min^–1 for 50 W (DC bias 308 V), 10 mTorr, 38 CCl₂F₂/2 O₂ plasmas. The etch rates fall rapidly with increasing pressure or increasing O₂-to-CCl₂F₂ ratio. Polymeric surface residues up to 40 Å thick are found on all of these semiconductors when using Freon-based gas mixtures. Etching at practical rates is possible with only 100 V self-bias when using PCl₃ discharges, and the addition of microwave excitation under these conditions enhances the etch rates by factors of 2–9. At higher self-biases (300 V) etch rates of 3500–8000 Å · min^–1 are possible with PCl₃ although the surface morphologies are significantly rougher and the etching less anisotropic than with CCl₂F₂-based mixtures.     

Temperature-dependent dry etching characteristics of III–V semiconductors in HBr- and HI-based discharges

Microwave discharges of HBr/H₂/Ar and H/H₂/Ar with additional do biasing of the sample were used to etch InP, GaAs, and AlGaAs at temperatures between 50–250°C. The etch rates increase by factors of 3–50 and 5–9, respectively, for HBr-and HI-based discharges over this temperature range, but display non-Arrhenius behavior. The etched surfaces became very rough above 100°C for InP with either discharge chemistry due to preferential loss of P, while GaAs and AlGaAs are more tolerant of the elevated temperature etching. The near-surface electrical properties of InP are severely degraded by etch temperatures above 100°C, while extensive hydrogen in-diffusion occurs in GaAs and AlGaAs under these conditions, leading to dopant passivation which can be reversed by annealing at 400°C.     

Dry etching characteristics of III–V semiconductors in microwave BCl3 discharges

Electron cyclotron resonance (ECR) BCl₃ discharges with additional rf biasing of the sample position have been used to etch a variety of III–V semiconductors. GaAs and Al_xGa_1–xAs (x = 0–1) etch at equal rates in BCl₃ or BCl₃/Ar discharges, whereas SF₆ addition produces high selectivities for etching GaAs over AlGaAs. These selectivities are in excess of 600 for dc biases of –150 V, and fall to 6 for biases of –300 V. If the dc biases are kept to – 100 V, there is no measurable degradation of the optical properties of the GaAs and AlGaAs. The AlF₃ formed on the AlGaAs surface during exposure to BCl₃/SF₆ plasmas can be removed by sequential rinsing in dilute NH₄OH and water. In-based materials (InP, InAs, InSb, InGaAs) etch at slow rates with relatively rough morphologies in BCl₃ plasmas.     

Synthesis of 2′-hydroxychalcones and related compounds in interfacial solid-liquid conditions

A general synthetic method of 2′-hydroxychalcones and 2′-hydroxyphenyl-(2-alkylvynyl) ketones in interfacial solid-liquid conditions, is described. No secondary reactions were observed. The interfacial mechanism is discussed by means of the structure of active sites of solid.     

Simulation of droplet heating and desolvation in an inductively coupled plasma — Part I

The total desolvation rate of sample droplets in an argon inductively coupled plasma (Ar ICP) is investigated through the development of a two-phase continuum flow computer model. The desolvation model is supplemented by equations used to determine the trajectories of particles through the plasma. The model is used to calculate the behavior of aerosol droplets from a direct injection high efficiency nebulizer (DIHEN), a micronebulizer used to inject microliter quantities of samples that are toxic, expensive, or of limited volume. We use the combination of desolvation and transport models to present the first predicted spatial distribution of droplet concentrations and evaporation rates in an ICP flow. These data are compared with the behavior of a DIHEN spray in an environment with no net argon gas flow to determine the importance of gas flow rates to overall droplet concentration profiles in the ICP. In addition, two separate techniques (Stokes’ equation and the direct simulation Monte Carlo treatment) for determining droplet trajectories are contrasted.     

Two-Component Ni–Mg–O/V–Mg–O Catalytic System: I. Synthesis and Physicochemical and Catalytic Properties in Oxidative Dehydrogenation of Ethane

Kinetics and Catalysis - In this work, the Ni–Mg–O oxide system was studied as a constituent of the joint Ni–Mg–O/V–Mg–O catalytic system in the oxidative...     

Synthesis of VO2 Nanopowders. Part I. Sol–Gel Processing of Vanadium Alkoxide Precursor Within Inverse Micelles

Hydrolysis and condensation of VO(Oi–Pr)₃ within inverse micelles containing aqueous ammonia catalyst is conducted under different reaction conditions as a synthesis strategy for preparing VO₂ nanoparticles having average diameter <100 nm. Sol–gel processing of VO(Oi–Pr)₃ to form V_xO_y gel particles is controlled by varying NH₃(aq) concentration and using oleic acid or acetic acid pre-treatments. Isolated V_xO_y gel nanoparticles are reduced to VO₂ nanoparticles by thermal annealing, although annealing conditions must be optimized for each batch of gel particles. VO₂ nanoparticles of average diameters 24 or 70 nm prepared by this method show an expected hysteretic semiconductor-to-metal phase transition near 68 °C.     

Vibrational spectra of β-lactams—III. potassium 2-azetidinone-1-sulfonate and its isotopic compounds

The IR and Raman spectra of potassium 2-azetidinone-1-sulfonate and its three deuterated and two ¹⁵N-substituted compounds have been recorded, and the observed bands have been assigned on the basis of the isotope effects and the normal coordinate analysis. Comparison of the force constants for the amide group among 2-azetidinone, 1-methyl-2-azetidinone and potassium 2-azetidinone-1-sulfonate indicates that there is a correlation between these constants and the ease of hydrolysis which was determined by NMR spectroscopy, depending on the amide resonance.     

Multi-residue determination of phenolic and salicylanilide anthelmintics and related compounds in bovine kidney by liquid chromatography–tandem mass spectrometry

This paper describes an analytical method for four phenolic and salicylanilide anthelmintics authorised for use within the EU (nitroxinil, oxyclozanide, rafoxanide and closantel) in bovine kidney, and the extension of this procedure to include a number of related compounds; ioxynil, niclosamide, salicylanide and 3-trifluoromethyl-4-nitrophenol (TFM). The method comprises a solvent extraction with 1% acetic acid in acetone and clean-up using a mixed-mode anion-exchange solid phase extraction column. Determination is by reversed phase LC–MS/MS. The method was validated to the latest EU requirements (Commission Decision 2002/657/EC) using both spiked and incurred tissues and was subject to second laboratory evaluation.     

The reaction of β-dicarbonyl compounds with trifluoromethylsulphenyl chloride. Part I. CF3S-substituted esters,anilides of β-keto acids,and their Schiff bases: Synthesis and stability.

The reactions of the β-keto acid derivatives with trifluoromethylsulphenyl chloride were carried out to give the α-SCF₃ substituted esters, anilides, and their Schiff bases of acetyl- and benzoylacetic acids. Ethyl esters of α-(trifluoromethylthio)acetoacetic and α-(trifluoromethylthio)benzoylacetic acids heated in dimethylsulphoxide/water solution give trifluoromethylthioacetone and ω-(trifluoromethylthio)acetophenone respectively, whereas with potassium hydroxide solution they form trifluoromethylthioacetic acid in a good yield.     

Alphabetical index of defined terms and where they can be found Part III: R–Z

 This paper, the third of a series of three, presents the final part of an alphabetical index of approximately 1400 terms taken from various international official standards, protocols and guides. The terms listed are those encountered in the analytical sector, related to sampling, quality, conformity assessment, standardisation, measurement and related statistics. The definitions themselves are not included. The purpose of the index is to provide the user with a ready means of establishing whether a particular term has an official definition and if so where it is located. In doing so it makes location of officially defined terms more straightforward and so encourages their use. It also highlights those terms which are defined in several places, indicating the degree of equivalence between the definitions from the different sources. This third part of the index covers R–Z.     

Phosphorus–nitrogen compounds: Part 19. Syntheses,structural and electrochemical investigations,biological activities,and DNA interactions of new spirocyclic monoferrocenylcyclotriphosphazenes

The reactions of hexachlorocyclotriphosphazatriene, N₃P₃Cl₆, with N-alkyl-N-ferrocenylmethylethylene diamines, FcCH₂NH(CH₂)₂NHR₁ [R₁ = Me (1) and Et (2)], and sodium [3-(N-ferrocenylmethylamino)-1-propanoxide] (3) produce spirocyclic monoferrocenyl tetrachlorophosphazenes (1a–3a). The tetrapyrrolidinophosphazenes (1b–3b) are prepared from the reactions of corresponding phosphazenes (1a–3a) with excess pyrrolidine. The reaction of 1a with excess morpholine affords geminal-morpholino phosphazene (1c), whilst the reactions of 2a and 3a give diethylaminotrimorpholino (2c) and fully substituted morpholino products (3c), respectively. The structural investigations of the compounds are examined by Fourier transform IR, MS, ¹H, ¹³C, ³¹P NMR, DEPT, HETCOR, and HMBC techniques. The crystal structures of 3b and 3c are determined using X-ray crystallography. Cyclic voltammetric and chronoamperometric data show that compounds 1a–3a, 1b–3b, and 1c–3c exhibit electrochemically reversible one-electron oxidation of Fc redox centers which are hardly affected by the substituents on the phosphazene ring. The compounds 1b, 2b, 3b, and 3c are screened for antibacterial activities against Gram-positive and Gram-negative bacteria and for antifungal activities against yeast strains. In addition, the antituberculosis activities (in vitro) of these compounds are evaluated against INH-susceptible reference strain M. tuberculosis H37Rv, and six multi-drug resistant clinical M. tuberculosis isolates. Compound 2b is found to be the most active against the susceptible the reference strain. In addition, 1b, 2b, and 3c are active against all the multidrug-resistant clinical isolates at the highest concentrations. Gel electrophoresis data indicate that the compounds promote the formation of strand breaks in plasmid DNA. Almost all the concentrations lost of supercoiled DNA suggests that the compound 3b is very efficient plasmid-modifier. The compounds inhibit BamHI cleavage of pUC18 DNA while restricting HindIII.     

Solubility of salts of d-elements in organic and water-organic solvents: V. Inner-sphere chalcogen S–S contacts in the [Ni(DMSO)4(H2O)2]Cl2 solvate

Russian Journal of General Chemistry - It was proved by the IR spectroscopy that the first coordination sphere of nickel cations in the NiCl2·2DMSO·9H2O, NiCl2·5DMSO·4H2O, and...     

Synthesis, transport and ionophore properties of α,ω-biphosphorylated azapodands: V. Acid-base properties of new phosphorylated azapodands and α,ω-diamines and their participation in the membrane transport of I–III groups metal ions

Acid-base properties of newly and previously synthesized phosphorylated azapodands and ??,??-diamines and their amine precursors were studied. We found that they differ in the same range as has been found previously for the other aminophosphoryl compounds. The investigation of the processes of passive membrane ion transport of a series of metals of I?CIII groups by these reactants showed with all diphosphoryl diamines higher values of the transfer flow of the ions Sc(III), Nd(III), and Sm(III), than the ions of alkali and alkaline earth metals. Under the conditions of active membrane transport the azapodand IV exhibits high efficiency in the ion transport of Sr(II) and Ba(II), while diphosphoryldiamine III exhibits effective transport of Nd(III) ions. The factors that determine the efficiency and selectivity of the membrane extraction of the I?CIII groups metal ions by these diphosphoryl diamines are discussed.     

Thermophysical Properties of High Temperature Reacting Mixtures of Carbon and Water in the Range 400–30,000?K and 0.1–10?atm. Part 2: Transport Coefficients

The present contribution is continuation of Part 1: Equilibrium composition and thermodynamic properties. This paper is devoted to the calculation of transport properties of mixtures of water and carbon at high temperature. The transport properties, including electron diffusion coefficient, viscosity, thermal conductivity, and electrical conductivity are obtained by using the Chapman?CEnskog method expanded to the third-order approximation (second-order for viscosity), taking only elastic processes into account. The calculations, which assume local thermodynamic equilibrium, are performed for atmospheric pressure plasmas in the temperature range from 400 to 30,000?K for pressures of 0. 10, 1.0, 3.0, 5.0 and 10.0?atm. with the results obtained are compared to those of previously published studies, and the reasons for discrepancies are analyzed. The results provide reliable reference data for simulation of plasmas in mixtures of carbon and water.     

500—Biological implications of electric field effects: Part V.Fusion of blastomeres and blastocysts of mouse embryos

Fusion between blastomeres within the zona pellucida as well as in blastocysts to generate polyploid cells has been achieved using microelectrodes in connection with a micromanipulator, a pulse- and a high-frequency generator. The number of blastomeres was converted to one-half the number in the case of two-cell, four-cell and eight-cell stages. For blastocysts a kind of de-differentiation occurred. During fusion between oocytes or 32-cell stage blastomeres, treated first with pronase, a fast lysis was also observed. Under certain conditions this new bioelectrochemical method may be useful for genetic manipulation of oocytes, zygotes, blastomeres and blastocysts.     

Phosphorus–nitrogen compounds Part 55. Syntheses of 4-methoxybenzylspiro(N/N)cyclotriphosphazenes: chemical,structural and biological properties

Research on Chemical Intermediates - The N3P3 ring of hexachlorocyclotriphosphazene, N3P3Cl6 (1) (HCCP; trimer), was used significantly as a scaffold for the syntheses of...     

Electrochemical oxidation of organosilicon compounds: V. Electrochemical oxidation of α-silyethers. remarkable effect of silicon on oxidation potentials and reaction pathways

Substitution of a silyl group for hydrogen at the α-position of ethers caused a significant decrease in their oxidation potentials. This effect is attributed to an interaction of the carbonsilicon σ-bond with the lone pair of the oxygen atom. The preparative anodic oxidation of α-silylethers proceeded smoothly in methanol and the carbonsilicon bond was selectively cleaved to give the corresponding acetals.