Roughness measurement of metals using a modified binary speckle image and adaptive optics

This paper proposes an integrated roughness measurement system that is based on adaptive optics (AO) and binary analysis of speckle pattern images. The aim of this study was to demonstrate the necessity for AO compensation in regions containing both heat and fluid flow turbulences. A speckle image was obtained by projecting a laser beam onto the specimen surface, and the laser pattern image reflected from the surface was binarized to experimentally correlate the intensity with the surface roughness. In the absence of the AO correction scheme, induced turbulences can severely increase the residual rms error from 0.14 to 1.4 μm. After a real-time closed-loop AO correction, we can reduce the wavefront root mean square (rms) error to 0.12 μm, which not only compensates for the aberration error from induced disturbances but also improves the overall performance of the optical system. In addition, an AO system having different gains was investigated, and a threshold gain value was found to be able to steadily compensate for the wavefront errors in less than 2 s. Measurement results of five steel samples having roughness ranging from 0.2 to 3.125 μm (0.3λ and 5λ, where λ is the diode laser wavelength) demonstrate an excellent correlation between the intensity distribution of binary images and average roughness with a correlation coefficient of 0.9982. Furthermore, the proposed AO-assisted system is in good agreement with the stylus method and less than 9.73% error values can be consistently obtained.     

一种静态傅里叶变换红外光谱仪的光学系统分析与设计

对基于多级微反射镜的傅里叶变换红外光谱仪进行了光学分析,研究了光源尺寸、光强分布的不均匀性和光学系统像差等因素对光谱复原的影响。发现光源尺寸影响光谱分辨率,光强分布的不均匀性和光学系统像差会产生基线噪声。数值计算的结果表明,当光阑的尺寸小于2.5mm,不均匀的标准偏差小于0.5,准直系统的波像差均方根值小于0.05,以及缩束成像系统的光斑直径小于30μm时,光谱复原的噪声可以忽略。给出了光学系统的设计结果。     

Wavefront correction of Ti:sapphire terawatt laser with varying precision of phase conjugation between deformable mirror and wavefront sensor

The phase conjugation between the deformable mirror and the wavefront sensor in the aberration correction of a terawatt Ti:sapphire laser is studied experimentally and theoretically in this paper. At varying values of phase-conjugation precision, we focus the corresponding beams into spots of the same size of 5.1 μm×5.3 μm with a f/4 parabola in the 32 TW/36 fs Ti:sapphire laser system. The results show that the precision of conjugation can induce an intensity modulation but does not significantly affect the wavefront correction.     

薄镜面面形主动校正技术研究

采用12个主动支撑点对口径400 mm薄实验镜进行面形主动校正,使用Zygo干涉仪测量面形误差,主动支撑点的力促动器由位移促动器和力传感器组成。分别测量单个促动器的响应函数,由各促动器的响应函数组成刚度矩阵,然后用阻尼最小二乘法计算各支撑点的校正力。实验中分析主动支撑结构对各项Zernike形式像差的校正能力,并选择了7项像差进行校正。经过5次校正,使初始状态下1.16λ(λ=0.632 8μm)RMS面形精度达到0.13 RMS,接近镜面抛光后的精度。     

温度对潜望式激光通信终端SiC反射镜性能影响

分析了温度梯度和均匀温度对潜望式激光通信终端反射镜形变的影响,利用椭圆域上的Zerni-ke多项式对椭圆反射镜的波前进行拟合,计算由于热形变导致的波前畸变误差,给出了星间激光通信终端反射镜均方根值、发射光束瞄准误差、接收端光强随温度梯度和均匀温度的变化关系。结果表明:温度梯度对反射镜的影响只是引起峰值光强的漂移和少许下降,当温度梯度为14℃/m时瞄准误差达2.1μrad。均匀温度会引起接收端的光强分布变化,从而导致很大的瞄准误差和光强衰减,当均匀温度与参考温度的差值小于0.6℃时,由波前畸变误差引起的瞄准误差小于1μrad,当差值大于0.6℃时,瞄准误差突然增大到几μrad,接收端光强分布发生变化,此时反射镜热形变引起的像散项对光强分布起重要作用。     

Rapid in-process measurement of surface roughness using adaptive optics

We present an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics for aberration correction. Measurement results of five steel samples with a roughness ranging from 0.2 to 3.125 μm demonstrate excellent correlation between the peak power and average roughness with a correlation coefficient (R(2)) of 0.9967. The proposed adaptive-optics-assisted system is in good agreement with the stylus method, and error values of less than 8.7% are obtained for average sample roughness in the range of 0.265 to 1.119 μm. The proposed system can be used as a rapid in-process roughness monitor/estimator to further increase the precision and stability of manufacturing processes in situ.     

基于双波前传感器自适应光学技术的太阳光栅光谱仪

为了研究不同太阳大气高度的热力学特性,具有良好成像质量的成像型光栅光谱仪是实现这个目标的重要仪器。然而作为地基式太阳望远镜重要的终端仪器之一,光栅光谱仪的光谱成像性能不可避免的会受到动态波前像差和系统静态像差的影响。动态波前像差常通过在太阳望远镜系统中集成自适应光学系统进行补偿。针对光学系统中的由装调和光学元件加工等引起的静态波前像差,提出了一种基于自适应光学技术校正光栅光谱仪中静态波前像差的方法,并进行了数值模拟仿真和实验验证。实验结果表明,校正后系统的残余波前像差RMS≈0.025λ,此时波前像差对光谱分辨率和能量利用率的影响可忽略,提高了光栅光谱仪的光谱成像质量,证明了所提出的方法的有效性。此外它具有降低光学系统装调精度和光学元件加工精度要求的优点。     

利用调整技术补偿离轴抛物面反射镜面形误差

为了提高光学系统的成像质量,对离轴抛物面反射镜的面形准确度要求越来越高,这大大增加了反射镜的加工难度.本文基于波像差理论,分析了在离轴抛物面反射镜中调整量引入的波像差,提出通过适当调整离轴抛物面反射镜的位置补偿反射镜的面形误差,可以降低离轴反射镜的加工难度、缩短其加工周期、减少加工成本.并借助于ZEMAX软件对一块面形准确度低于λ/40 RMS (λ=632.8 nm)离轴抛物面反射镜进行仿真实验,根据理论计算的调整量调整反射镜的位置,得到了补偿后的离轴抛物面反射镜的面形误差小于λ/60 RMS,仿真结果表明在离轴抛物面反射镜中引入适当的调整量可以有效地补偿反射镜的面形误差.     

空间插值在功率谱密度计算中的应用

为了提高光学元件波前中频PSD计算的精度和有效频谱宽度,提出了填补波前无效数据的双线性插值法和抑制欠采样噪声的六采样点插值法。模拟计算和实验结果表明:双线性插值法有效地保证了填充数据与真实数据的一致性,抑制了零填充方法引入的虚假中高频信息,使得填补后的PSD与原始PSD较好地吻合;六采样点插值法有效地分离了信号和欠采样噪声,使得有效PSD频谱上限从1/2 Nyquist频率提高到Nyquist频率。     

基于近红外光谱的人眼像差校正系统中变形镜性能对比研究

对比分析了基于近红外光谱的人眼像差校正系统中两种微机械薄膜变形镜(OKO37单元和BMC140单元)的结构特征和空间特性,着重对变形镜的影响函数进行了主成分研究,建立了变形镜电压控制模型,并通过调整参数d确定变形镜最优控制模式。最后对Zernike单位模式波前像差和Thibos模式人眼波前像差进行拟合仿真实验,结果表明BMC140单元变形镜对Zernike各阶模式的拟合能力均为OKO37单元变形镜的2倍以上。对RMS均值为0.683λ(λ=0.785 μm)的Thibos模式人眼像差,BMC变形镜校正后残余像差RMS值为0.063λ,达到了光学系统的衍射极限(λ/14)。而OKO变形镜由于受相邻电极交连值大、电极分布密度小等因素的影响,其校正能力不及BMC变形镜,残余像差RMS值为0.168λ。本方法也可用于其他种类变形镜的性能评估。     

大口径望远镜波像差的外场检验方法

为在外场环境下对大口径望远镜进行系统波像差的检验,研制了一套具有高探测能力的Shack-Hartmann波前传感器.利用恒星作为光源,对口径1 m、焦距11 m的大口径望远镜进行了波像差检验实验,测量结果为系统波像差在0.39λ~ 0.46λ RMS之间,且随着俯仰角的增加而增大,主要像差形式为3阶0°像散,与星点检验的结果一致.     

高功率固体激光装置哈特曼传感器参考波前标定方法

 在高功率固体激光驱动器中,参考波前标定是自适应光学系统应用过程中的关键技术之一。基于国内某大型激光原型装置光路特点,对比研究了两种不同的参考波前标定方法,详细分析了两种方法的标定过程和影响标定结果准确性的主要因素,选取了较为准确的参考波前标定结果。基于该参考波前,对AO系统闭环和开环条件下的远场进行了对比测试,实验证明了标定结果的有效性。该研究结果成功应用于该激光原型装置的AO系统波前补偿实验。     

基于线性相位反演技术的自适应光学闭环实验研究

利用成像光学系统、变形镜、装有图像采集卡和D/A卡的PC机等建立了一套基于线性相位反演技术的自适应光学闭环实验系统.在Windows操作系统下用VC完成图像处理和控制算法.利用一台高测量精度的哈特曼传感器测量波前信息并评价自适应光学系统的校正效果.在不同像差大小状态下研究了这种基于线性相位反演技术的自适应光学系统的像差校正能力.收敛速度,稳定性等.实验结果表明,基于线性相位反演技术的自适应光学系统对静态小像差有较好的校正效果.     

利用离轴三反镜光学系统确定各镜的装调公差

利用条纹泽尼克系数与赛德尔像差的关系,在三反镜光学系统的出瞳面上,用条纹泽尼克系数来表示系统的波像差。通过光学设计软件Zemax计算得到三反镜光学系统各镜的装调公差,以公差要求高的镜面作为装调基面,从而减少要调整的自由度。通过分析泽尼克(Zernike)系数在公差范围内的变化幅度来确定光学系统在出瞳面上各个像差的变化幅度,用该幅度的变化量来决定主次三镜各自由度在各个方向上的敏感度,最终确定各个自由度的优化调整级别。对一大口径无遮拦离轴三反镜光学系统进行了装调,在波长λ=632.8nm的条件下进行了检测。结果表明:整个光学系统全视场波前误差的均方根值RMS=0.108λ。     

The assessment of loss mechanisms in laser induced breakdown of gases at 10.6 μm

Loss mechanisms occuring in laser induced breakdown of gases at 10.6 μm are assessed taking into account the effects of spherical aberration. The experimental results indicate the importance of spherical aberration in governing the intensity distribution in focussed laser beams and emphasise the need for reliable evaluation of the focal volume in studies of loss processes in the initiation of breakdown at 10.6 μm.     

带喷流超声速光学头罩流场气动光学畸变试验研究

超声速光学头罩在大气层内飞行时, 需要在光学窗口表面顺来流方向进行喷流冷却, 致使窗口上方流场更为复杂. 目标光线穿过窗口上方流场, 受到激波、膨胀波、混合层、湍流边界层等流场结构引起的变密度场影响而产生波前畸变, 导致成像出现偏移、抖动、模糊等气动光学效应. 本文对马赫数3.8来流条件下有无喷流时超声速光学头罩流场引起的气动光学波前畸变进行了试验研究. 基于纳米示踪的平面激光散射技术, 首先对流场图像进行密度校准获得高时空分辨率密度场, 然后采用光线追迹法计算得到波长532 nm平面光波垂直于光学窗口穿过流场后的光程差(optical path difference, OPD)分布, 并对窗口上方近壁区有无喷流状态的流场结构引起的 OPD分布进行了研究. 发现无喷流时, 流场结构相对较为简单, 窗口上方有较长的回流区和层流区, 而有喷流时窗口上方出现复杂的剪切层、混合层及湍流边界层, 流动很快就转捩为湍流结构, 其引起的气动光学畸变要明显高于无喷流状态. 无喷流状态相隔5 μs的流场引起的光程差均方根值分别为0.0348 和0.0356 μm, 有喷流状态的光程差均方根值分别为0.0462 和0.0485 μm. 关键词： 超声速 喷流 气动光学 光程差     

三维光存储中折射率失配引起的球差补偿

为实现三维光存储中折射率失配引起的球差补偿,建立了光学存储系统模型,获得了折射率失配引起的波前偏差函数与存储深度的表达式.采用泽尔尼克循环多项式对波前偏差函数进行补偿展开.在双光子荧光和单光子共焦荧光读出方式下,均可获得读出荧光强度与存储深度的关系:在折射率失配引起的球差未得到补偿矫正的情况下,存储深度在200 μm左右读出荧光强度基本上下降为零;当折射率失配引起的初级球差被补偿矫正后,读出荧光强度随存储深度的下降得到较好改善;当折射率失配引起的二级球差被补偿矫正后,存储深度在1 mm内存储点强度随深度基本上没有明显地变化.并且对像差补偿方法进行了具体地分析.     

波前功率谱密度函数评价方法探讨

 波前功率谱密度PSD（Power Spectral Density）能定量给出波前畸变的空间频率分布、限定波纹度和粗糙度指标，全面反映ICF驱动器对高功率激光光学元件加工质量的特殊要求。给出了波前功率谱密度PSD的定义及计算方法，并使用大口径相移干涉仪作为波前检测仪器，对光学磷酸盐钕玻璃透射波前进行了测试实验，获得波前一维PSD分布，证实功率谱密度为高功率激光光学元件波前参数的一种有效表征方式。同时，还对PSD与均方根RMS之间的关系进行了初步的讨论。     

Influence of wave-front aberrations on bit error rate in inter-satellite laser communications

We derive the bit error rate (BER) of inter-satellite laser communication (lasercom) links with on-off-keying systems in the presence of both wave-front aberrations and pointing error, but without considering the noise of the detector. Wave-front aberrations induced by receiver terminal have no influence on the BER, while wave-front aberrations induced by transmitter terminal will increase the BER. The BER depends on the area S which is truncated out by the threshold intensity of the detector (such as APD) on the intensity function in the receiver plane, and changes with root mean square (RMS) of wave-front aberrations. Numerical results show that the BER rises with the increasing of RMS value. The influences of Astigmatism, Coma, Curvature and Spherical aberration on the BER are compared. This work can benefit the design of lasercom system.     

Simultaneous Measurement of Velocity and Equivalent Diameter on Non-Spherical Particles

The performance of a laser-based optical technique to measure simultaneously the velocity and equivalent diameter of nonsphercial particles was evaluated. The size information was provided by the absolute intensity of diffractively scattered light by a particle crossing a single laser beam, which is concentric with a laser Doppler probe volume. The response curve (size-intensity relationship) of the technique was estimated by calculations using the Fraunhofer approximation. Experiments with spherical glass and polyethylene and non-spherical metal and ceramic particles ranging from 20 to 200 μm confirmed the operation of the technique and in all the measurements the maximum error of the average diameter was 10 μm as compared with size information provided by a microscope.