Circular ripple formation on the silicon wafer surface after interaction with linearly polarized femtosecond laser pulses in air and water environments

Ultrashort laser pulse interaction with the surface of silicon wafer in air and water environments is investigated. Ti:sapphire laser with 40 femtosecond laser pulses at 790 nm and 10 Hz repetition rate was used. The ablation threshold of the silicon surface in the air was determined to be about 0.28 J cm^?2. The surface morphology was studied by using scanning electron microscope images. The size of the regular ripples formed in the air environment is a little smaller than the laser wavelength. Due to the nonlinear interaction and self-focusing before the target, the ripples size reduced to nearly a half of the laser wavelength in the water. Moreover, the spikes’ structure formation and their diameter in air and water were studied. Two regimes for spike formation in water are proposed that can explain the anomalous decrease of the spikes’ diameter in higher fluence. During the interaction of single linearly polarized femtosecond laser pulse with the surface, an irregular ripple formation that called circular ripple is observed. This structure which is a result of radiation pressure implies to the surface by the end of the pulse. A new physical model for interpretation of the circular ripples formation based on the ponderomotive force of an ultrashort pulse laser is proposed which can predict the size of the circular ripples. The calculated results are in accordance with our experimental findings.     

The influence of ultra-fast temporal energy regulation on the morphology of Si surfaces through femtosecond double pulse laser irradiation

The effect of ultra-short laser-induced morphological changes upon irradiation of silicon with double pulse sequences is investigated under conditions that lead to mass removal. The temporal delay between 12 double and equal-energy pulses (E _p=0.24 J/cm² each, with pulse duration t _p=430 fs, 800 nm laser wavelength) was varied between 0 and 14 ps and a decrease of the damaged area, crater depth size and periodicity of the induced subwavelength ripples (by 3–4 %) was observed with increasing pulse delay. The proposed underlying mechanism is based on the combination of carrier excitation and energy thermalization and capillary wave solidification and aims to provide an alternative explanation of the control of ripple periodicity by temporal pulse tailoring. This work demonstrates the potential of pulse shaping technology to improve ultra-fast laser-assisted micro/nanoprocessing.     

Progressive formation of fine and coarse ripples on SiC surface by repeated irradiation of femtosecond laser pulses

In this work, we report the progressive formation of first nanoparticles, next fine ripples, and eventually coarse ripples during the irradiation of single-crystal 6H-SiC surfaces with increasing number of femtosecond laser pulses (λ = 515 nm, τ = 250 fs, repetition rate = 100 kHz). At laser fluences greater than the single-pulse ablation threshold, nanoparticles were produced on the surface by the first few pulses over which fine ripple patterns overlapped at increased pulse numbers. As the pulse number was further increased over ten, the surface was gradually transformed into a coarse ripple–covered one. At laser fluence below the threshold, however, only fine ripples were formed nonuniformly.     

Nd:YAG纳秒激光诱导硅表面微结构的演化

利用Nd:YAG纳秒激光(波长为532和355 nm)对单晶硅在真空中进行了累积脉冲辐照,研究了表面微结构的演化情况.在激光辐照的初始阶段,532和355 nm激光脉冲均在硅表面诱导出了波纹结构,后者辐照硅表面后形成了近似同心但稍显混乱的环形波纹结构.随着脉冲数的增加,波纹结构逐渐演化为一种类似珠形的凹凸结构,最后形成准规则排列的微米量级锥形结构,该微结构的生长依赖于表面张力波和结构自组织.分析发现,形成的交叉环形结构主要是在355 nm激光辐照硅的过程中,表面张力波导致波纹结构部分叠加的结果.     

Mode-locked all-fiber ring laser based on broad bandwidth in-fiber acousto-optic modulator

Active mode-locking of long-cavity all-fiber ring laser based on broad bandwidth in-fiber acousto-optic modulator (AOM) is reported. The proposed AOM combines the advantages of intermodal coupling induced by standing flexural acoustic waves in a double-ended tapered fiber. We focus our attention on the effects of large tapered transitions to improve the bandwidth modulation. Our approach permits the implementation of broad modulation bandwidth (13 nm), high modulation depth (50 %), and low optical loss (1.1 dB) in an 80-μm configuration. The effects of the AOM in the laser performance are also investigated. Transform-limit optical pulses of 25 ps temporal width and 2.7 W peak power were obtained at 2.46 MHz repetition rate.     

Ultrafast time-resolved imaging of femtosecond laser-induced periodic surface structures on GaAs

We report the formation dynamics of periodic ripples on Ga As induced by femtosecond laser pulses（800 nm, 50 fs） via a collinear time-resolved imaging technique with a temporal resolution of 1 ps and a spatial resolution of 440 nm. The onset of periodic ripples emerges in the initial tens of picoseconds in the timescale of material ejection. The periodic ripples appear after irradiation of at least two pump pulses at surface defects produced by the first pulse and the ripple positions kept stable until the formation processes complete. The formation mechanisms of laser-induced periodic ripples are also discussed.     

Influence of consecutive picosecond pulses at 532 nm wavelength on laser ablation of human teeth

The interaction of 40 ps pulse duration laser emitting at 532 nm wavelength with human dental tissue (enamel, dentin, and dentin–enamel junction) has been investigated. The crater profile and the surface morphology have been studied by using a confocal auto-fluorescence microscope (working in reflection mode) and a scanning electron microscope. Crater profile and crater morphology were studied after applying consecutive laser pulses and it was found that the ablation depth increases with the number of consecutive pulses, leaving the crater diameter unchanged. We found that the thermal damage is reduced by using short duration laser pulses, which implies an increased retention of restorative material. We observe carbonization of the irradiated samples, which does not imply changes in the chemical composition. Finally, the use of 40 ps pulse duration laser may become a state of art in conservative dentistry.     

Ripple formation in various metals and super-hard tetrahedral amorphous carbon films in consequence of femtosecond laser irradiation

Ripple formation in consequence of ultrashort laser pulse irradiation of materials is a well-known phenomenon. We have investigated the formation of ripples in various metals, i.e. steel, tungsten carbide hard metal, as well as in superhard ta-C films, where we used femtosecond laser pulses of 775 nm and 387 nm mean wavelength and 150 fs pulse duration. The aim was to investigate how the ripple parameters depend on irradiation parameters, and if such ripples have a potentiality for applications. In the paper, we will show that on smooth surfaces the ripple orientation is perpendicular to the electric field vector of the linearly polarized laser beam, as is well-known. Moreover, it will be shown that the ripple period decreases with decreasing laser wavelength and/or increasing angle of incidence of the laser beam on the substrate. By using optimum parameters large areas of the materials and films can be rippled swiftly, which would be important for applications. For instance, the improvement of frictional and wear behavior of tribologically stressed surfaces by ripples was investigated on ta-C coated steel surfaces.     

A comparison of ns and ps steam laser cleaning of Si surfaces

We report a quantitative investigation on the efficiency of the steam laser cleaning process using ns and ps pulses. Well-characterized polymer particles with a diameter of 800 nm dispersed on commercial Si wafers were chosen as a modeling contaminant system. As a result of our investigation, we show for the first time the feasibility of performing efficient steam laser cleaning with ps laser pulses and compare the achieved efficiency with the one obtained for ns pulses. For ns pulses, we found a cleaning fluence threshold of 50 mJ/cm² that is independent of the pulse durations (2.5 ns and 8 ns) and the wavelengths (532 nm and 583 nm) used. The application of ps pulses (FWHM=30 ps, 5=583 nm) lowered this threshold to 20 mJ/cm². Both cleaning thresholds are far below the melting thresholds for these laser parameters. Cleaning efficiencies >90% were reached for both pulse durations.     

Frequency shifting of sub-100 fs laser pulses by stimulated Raman scattering in a capillary filled with pressurized gas

The technique of Raman conversion of sub-100 fs laser pulses based on excitation of active medium by two orthogonally polarized pulses has been developed for Raman lasers with a glass capillary. 52 fs Stokes pulse at the wavelength of 1200 nm has been generated by stimulated Raman scattering of 48 fs Ti:sapphire laser pulse at the wavelength of 800 nm in hydrogen. 13% energy conversion efficiency has been achieved at pulse repetition rate up to 2 kHz.     

Optodynamic energy conversion efficiency during laser ablation on metal surfaces measured by shadow photography

In this investigation, we used high-speed shadow photography to observe fast optodynamic phenomena such as shock waves and the ablation of flat metal surfaces. These phenomena were induced in air by a Q-switched Nd:YAG laser (λ = 1,064 nm) with a pulse duration of 4 ns and an excitation pulse energy between 10 and 55 mJ. For a good spatial resolution of the shadowgraphs, we used short illumination pulses (30 ps) from a frequency-doubled Nd:YAG laser (λ = 532 nm). Using the shadowgraphs of the shock wave expansion into a half-space, we measured the optodynamic energy conversion efficiency, defined as the ratio between the mechanical energy of the shock wave and the excitation pulse energy. This efficiency increases with an increasing excitation pulse energy. We also present the characteristic shadowgraphs of the ablation of a black-painted metal surface, where the macroscopic material particles are clearly visible. They follow the shock wave and eventually overtake it. As a result, the shape of the shock wave, which normally expands concentrically into the half-space, has an altered form. The presented results reveal the phenomenon of the laser ablation of coated metal surfaces.     

Femtosecond laser-induced periodic surface structures on steel and titanium alloy for tribological applications

Laser-induced periodic surface structures (LIPSS, ripples) were generated on stainless steel (100Cr6) and titanium alloy (Ti6Al4V) surfaces upon irradiation with multiple femtosecond laser pulses (pulse duration 30 fs, central wavelength 790 nm). The experimental conditions (laser fluence, spatial spot overlap) were optimized in a sample-scanning geometry for the processing of large surface areas (5 × 5 mm²) covered homogeneously by the nanostructures. The irradiated surface regions were subjected to white light interference microscopy and scanning electron microscopy revealing spatial periods around 600 nm. The tribological performance of the nanostructured surface was characterized by reciprocal sliding against a ball of hardened steel in paraffin oil and in commercial engine oil as lubricants, followed by subsequent inspection of the wear tracks. For specific conditions, on the titanium alloy a significant reduction of the friction coefficient by a factor of more than two was observed on the laser-irradiated (LIPSS-covered) surface when compared to the non-irradiated one, indicating the potential benefit of laser surface structuring for tribological applications.     

On the physics of self-organized nanostructure formation upon femtosecond laser ablation

We present new results on femtosecond LIPSS on silicon, fostering the dynamic model of self-organized structure formation. The first set of experiments demonstrates LIPSS formation by irradiation with a femtosecond white light continuum. The ripples are, as usual, perpendicular to the light polarization with a fluence-dependent wavelength between 500 and 700 nm. At higher dose (fluence × number of shots), the LIPSS turn to much coarser structures. The second set of experiments displays the dose dependence of pattern evolution at about threshold fluence. In contrast to the general case of multi-pulse LIPSS, where a strong dependence of the structures on the laser polarization is observed, single-shot exposition of silicon at about the ablation threshold results in a concentric pattern of very regular sub-wavelength ripples following the oval shape of the irradiated spot, without any reference to the laser polarization. When increasing the number of pulses, the usual, typical ripples develop and then coalesce into broader perpendicular structures, interlaced with remnants of the first, finer ripples.     

Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon: the role of carrier generation and relaxation processes

The formation of laser-induced periodic surface structures (LIPSS, ripples) upon irradiation of silicon with multiple irradiation sequences consisting of femtosecond laser pulse pairs (pulse duration 150 fs, central wavelength 800 nm) is studied numerically using a rate equation system along with a two-temperature model accounting for one- and two-photon absorption and subsequent carrier diffusion and Auger recombination processes. The temporal delay between the individual equal-energy fs-laser pulses was varied between 0 and ～4 ps for quantification of the transient carrier densities in the conduction band of the laser-excited silicon. The results of the numerical analysis reveal the importance of carrier generation and relaxation processes in fs-LIPSS formation on silicon and quantitatively explain the two time constants of the delay-dependent decrease of the low spatial frequency LIPSS (LSFL) area observed experimentally. The role of carrier generation, diffusion and recombination is quantified individually.     

Dynamics of the formation of laser-induced periodic surface structures on dielectrics and semiconductors upon femtosecond laser pulse irradiation sequences

The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of fused silica and silicon with multiple (N _DPS) irradiation sequences consisting of linearly polarized femtosecond laser pulse pairs (pulse duration ～150 fs, central wavelength ～800 nm) is studied experimentally. Nearly equal-energy double-pulse sequences are generated allowing the temporal pulse delay Δt between the cross-polarized individual fs-laser pulses to be varied from ?40 ps to +40 ps with a resolution of ～0.2 ps. The surface morphologies of the irradiated surface areas are characterized by means of scanning electron and scanning force microscopy. Particularly for dielectrics in the sub-ps delay range striking differences in the orientation and spatial characteristics of the LIPSS can be observed. For fused silica, a significant decrease of the LIPSS spatial periods from ～790 nm towards ～550 nm is demonstrated for delay changes of less than ～2 ps. In contrast, for silicon under similar irradiation conditions, the LIPSS periods remain constant (～760 nm) for delays up to 40 ps. The results prove the impact of laser-induced electrons in the conduction band of the solid and associated transient changes of the optical properties on fs-LIPSS formation.     

Simulation of rippled structure adjustments based on localized transient electron dynamics control by femtosecond laser pulse trains

This study investigates the effects of pulse energy distributions on subwavelength ripple structures (the ablation shapes and subwavelength ripples) using the plasma model with the consideration of laser particle–wave duality. In the case studies, the laser pulse (800 nm, 50 fs) trains consist of double pulses within a train with the energy ratios of 1:2, 1:1, and 2:1. Localized transient electron densities, material optical properties, and surface plasmon generation are strongly affected by the energy distributions. Hence, the adjustment of the ablation shape and subwavelength ripples can be achieved based on localized transient electron dynamics control during femtosecond laser pulse train processing of dielectrics. The simulation results show that better, more uniform structures, in terms of ablation shapes and subwavelength ripples, can be easily formed at a lower fluence or subpulse energy ratio of 1:1 with a fixed fluence. It is also found that pulse trains at a 1:1 energy ratio are preferred for drilling high-aspect-ratio microholes or microchannels.     

The growth of nanoscale periodic and dot-like structures on the surface of stainless steel with femtosecond laser pulses in the dry and wet ambient environment

The present work deals with growth of nanoscale periodic and dot-like structures on the surface of stainless steel (SS) by the irradiation of femtosecond laser pulses. For this purpose Ti: Sapphire femtosecond laser pulses (wavelength of 800 nm, pulse length of 25 fs and pulse repetition rate of 1 kHz) were employed in a dry (air) and liquid confined (deionized water and ethanol) environments. The targets were exposed to 1000 succeeding pulses for various fluences ranging from 50 to 150 mJ?cm^?2. Nanoscale structures including ripples, and dots were observed by SEM analysis. The growth and dependence of structure-formation on the ambient environment and laser fluence in both central as well as peripheral ablated areas is systematically investigated. The development of nanostructures and nanoripples is correlated with structural analysis carried out by micro Raman spectroscopy.     

Two-dimensional measurements of laser-induced breakdown in air by high-speed two-frame shadowgraphy

We present two-dimensional measurements of the laser-induced plasma development and shock wave evolution in air. The breakdown is induced by a Q-switched Nd:YAG laser (λ=1064 nm) with a pulse duration of 4 ns. To study these fast laser-induced phenomena, we have developed a high-speed, two frame shadowgraph method. It enables 2D visualization of a laser-induced event in two time instances, which are delayed by an arbitrary time interval in the range from 300 ps to 30 ns. The established method is based on 30 ps, green (λ=532 nm), and linearly polarized laser pulse, which is split into two orthogonally polarized illumination pulses for direct and delayed illumination of the breakdown area. Exploiting polarization of the probe pulses, we capture two temporally and spatially separated frames with two CCD cameras. Special attention is given to the subsequent data processing, especially to the minimization of the systematic error due to alignment of both images, and to the determination of 2D velocity distribution from the captured image pairs.     

150-ps pulse Raman generator pumped by a 1-kHz sub-nanosecond passively Q-switched laser system

Raman conversion with a single Ba(NO₃)₂ crystal (barium nitrate) either in single- and double-pass travelling-wave setups has been investigated. A Master-Oscillator-Power-Amplifier (MOPA) system, based on a passively Q-switched (PQS) laser generating 500-ps pulses and delivering a total energy of 350 μJ at 1 kHz, was used as pump source for the Raman generator. The two-passes setup yielded 116-μJ, 150-ps Fourier- and diffraction-limited pulses at 1198 nm for ≈3× the Raman threshold with no additional Stokes lines, and conversion efficiency of 35%. Such results are interesting not only for direct applications of the wavelength-shifted laser source, but also for further pulse-compression and supercontinuum generation in fibers. Indeed, self-phase modulation up to 0.82 nm has been demonstrated (pulse compression down to 5 ps) as well as 120-nm supercontinuum.     

Cascaded mode-locking of a spectrally controlled Yb:KYW laser

Self-starting and stable mode-locking of an Yb:KYW laser in the picoseconds pulse regime has been achieved by exploiting a positive cascaded Kerr lens in periodically poled KTP. The use of a volume Bragg grating (VBG), for locking the output spectrum of the laser, was essential to achieve a stable mode-locked operation in this wide gain bandwidth laser material. The laser emitted stable, nearly transform-limited pulses with a duration of 16 ps, at a repetition rate of 210 MHz, and with an energy of 3.2 nJ. The mode-locked spectrum was centred at 1,029.1 nm and featured a FWHM bandwidth of 85 pm, which was effectively determined by the VBG. Combination of a large cascaded Kerr nonlinearity with spectral limiting by a VBG represents so far the best opportunity for stable mode-locking of a broadband laser to produce near-transform-limited picosecond pulses.