带有高折射率介质层的金属光栅偏振器特性的研究

研究了一种亚波长金属光栅偏振器在可见光波段的透射与消光特性。与传统亚波长光栅偏振器不同的是,通过在基底和光栅之间增加一层高折射率介质薄膜,提高了TM偏振光透射率和消光比。利用严格耦合波分析法(RCWA),模拟了高折射率介质层厚度、光栅占宽比对透射率和消光比的影响。计算结果表明,在整个可见光波段,合适的介质层厚度可使透射更加均匀并且当入射角在0～60°变化时,TM偏振光的透射率和消光比仍可分别达到79%和50 dB。这种带有高折射率介质层的亚波长金属光栅偏振器结构紧凑,性能优良,特别适合作为液晶平板显示中的偏振分光器件。     

超大数值孔径光刻机投影物镜波像差检测方法

提出了一种基于空间像主成分分析的超大数值孔径光刻机投影物镜波像差检测方法。通过采用偏振光照明和矢量光刻成像模型并考虑投影物镜的偏振像差,准确表征了超大数值孔径光刻机的空间像,从而提高了像差检测模型的精度,实现了超大数值孔径光刻机投影物镜33项泽尼克像差(Z5~Z37)的高精度检测。相比于原基于空间像主成分分析的投影物镜成像差检测技术(AMAI-PCA)方法,所提方法适用于超大数值孔径光刻机投影物镜波像差检测。采用光刻仿真软件PROLITH对所提方法的检测精度进行了仿真验证,并分析了空间像采样间隔对波像差检测精度的影响。仿真结果表明,该方法对泽尼克像差(Z5~Z37)的检测精度优于0.85×10-3λ。     

双层金属纳米光栅的TE偏振光异常透射特性

根据在亚波长金属光栅表面添加电介质会引起TE偏振光的透射异常性, 应用严格耦合波理论和时域有限差分方法, 研究了双层金属纳米光栅在TE偏振光入射时产生的异常透射现象. 利用等效折射率方法建立了双层金属光栅的等效模型, 得到了TE偏振光透射率与聚合物的折射率、厚度以及金属层厚度的变化关系. 确认了结构中聚合物是透射异常出现的必要条件, TE偏振光以波导电磁模式在其中传播, 并认为类Fabry-Perot腔谐振是透射峰值产生的主要原因.     

基于多偏振照明的浸没式光刻机投影物镜高阶波像差快速检测技术

提出了一种基于多偏振照明的浸没式光刻机投影物镜高阶波像差快速检测技术。通过采用一元线性采样方式,在不同偏振照明条件下采集浸没式光刻机投影物镜的空间像进行主成分分析,在快速建模的同时实现高阶波像差的高精度检测。与基于Box-Behnken Design统计抽样方法的超高数值孔径光刻投影物镜高阶波像差检测方法相比,所提技术有效降低了采样数,提高了采样效率,加快了建模速度。采用光刻仿真软件PROLITH对所提技术进行了仿真验证,并分析了照明方式对高阶波像差检测精度的影响。仿真结果表明,该技术对高阶波像差(Z5~Z64)的检测精度优于1.03×10~(-3)λ,同时其建模速度提升了约30倍。     

可调谐型金属线栅偏振器的特性研究

金属线栅偏振器是一种新兴的基于微纳结构的光学偏振器件, 体积小、性能高、易集成.但在紫外和可见光波段, 通过缩小线栅的特征尺寸来提高消光比的方法已经受到纳米制作工艺的限制, 因此需要新的结构来提高其偏振特性.双层金属线栅结构仅在特定波段上提高 器件的偏振特性. 在此基础上, 提出一种间距可调谐的金属线栅偏振器结构, 通过调谐两层金属线栅之间的距离来确保偏振器极高的消光比和很强的透过率. 利用VirtualLab软件的傅里叶模式方法, 计算了可调谐型金属线栅偏振的透过率和消光比. 数值仿真结果表明, 双层可调谐型金属线栅结构在整个紫外、 可见光波段极大地提高了透射光的消光比和透过率. 关键词： 线栅偏振器 可调谐结构 消光比 压电陶瓷     

亚波长光栅偏振分束器的研究

利用单层亚波长硅光栅结构设计出工作在近红外波段的偏振分束器。该偏振分束器在45°入射角附近对TE偏振光具有很高的反射率同时对TM偏振光具有很高的透射率,其设计原理是基于亚波长光栅的泄漏模共振效应以及类布儒斯特效应。利用散射矩阵方法和时域有限差分方法对偏振分束器进行设计和分析。模拟结果显示,该偏振分束器在1390～1600nm的波长范围内的反射与透射消光比大于100;同时该偏振分束器具有相对较大的入射角度容差,在有限尺寸高斯光束入射下能保持很好的性能。     

亚波长金属偏振分束光栅设计分析

结合有效介质理论和薄膜光学的抗反射设计方法,设计了基于0.65μm工作波长的亚波长金属偏振分束光栅,给出了光栅的优化设计参数,采用严格耦合波理论分析了光栅的偏振分束特性.结果表明,亚波长金属光栅对TE偏振表现为金属膜特性,具有高反射,对TM偏振表现为介质膜特性,具有高透射,在-30°<θ<30°的大入射角范围和0.47μm<λ<0.80μm的宽入射波谱内,该光栅的透射光和反射光均具有高偏振消光比和低插入损耗的特点. 关键词： 亚波长金属偏振分束光栅 有效介质理论 薄膜光学 严格耦合波理论     

非对称偏振分束光栅的矢量衍射优化设计

基于严格耦合波理论分析了一种非对称偏振分束光栅的设计。这种偏振分束光栅分别在1级和0级衍射级次上衍射TE和TM偏振波。介绍了利用遗传算法设计偏振分束光栅的方法,并给出了优化实例。仿真结果表明:在设计波长为1.55时,TE偏振波在1级的衍射效率大于93%,TM偏振波在0级的衍射效率大于99%,此时1级和0级的透射消光比分别达到了9914.1和46841.5。通过对设计结果的分析发现,该偏振分束光栅在设计波长附近100nm的波长范围内都具有较高的消光比(大于100),达到了较好的偏振分束效果。     

单层亚波长金属光栅偏振器透射机理研究

为从物理层面理解亚波长金属光栅偏振透射现象以及光栅参数对偏振透射的影响,基于等效介质理论定性解释了单层亚波长金属光栅的偏振透射现象,给出了各个光栅参数对偏振性能的影响规律。对于不同条件下透射峰值产生的机理,基于法布里-珀罗共振理论给出了定量解释。对于等效介质理论和法布里-珀罗共振理论的准确性给出了验证及分析。通过两理论定性或定量的对单层亚波长金属光栅偏振器透射机理的系统分析,将有助于更清晰地理解金属光栅偏振器的偏振透射影响规律。     

面形误差对亚波长金属光栅偏振器性能的影响

基于严格耦合波理论分析了光栅面形误差对亚波长金属光栅偏振器偏振性能的影响.通过对数值结果的分析发现,光栅圆角误差、光栅侧壁倾斜误差和光栅表面粗糙误差对光栅的TM透射效率影响不大,但它们使得光栅的消光比明显降低.因此,面形误差使得光栅的偏振性能明显降低.理论分析表明,顶角为直角、侧壁垂直和表面光滑的理想矩形光栅结构的偏振性能最好.     

Terahertz transmission characteristics of double wire-grid polarizer on low-loss polyethylene substrate

We fabricated a double metallic wire-grid polarizer consisting of micrometer-pitch Cu grating on both sides of low-loss polyethylene substrate by simple electroplating and lithography micro-processing techniques. The performance of transmission was measured using a terahertz (THz) time domain spectroscopy system. The mixed polarization effects of surface plasmon polaritons in an azimuthally rotated grating were investigated. The polarization dependence of both amplitude and phase shift on frequency was demonstrated in the wide range of 0.1?C3 THz, and the extinction ratio is over 22 dB.     

Subwavelength gratings fabricated on semiconductor substrates via E-beam lithography and lift-off method

We present results of the fabrication and measurements on reflective polarizers consisting of stacked bi-layer subwavelength metal gratings prepared on GaAs (100) substrates. These linear gratings were fabricated using electron-beam direct-writing lithography and the lift-off method with periods less than the wavelength of light used for measurements. At normal incidence, the polarizer reflects the light polarized perpendicular to the grating lines (transverse magnetic polarization, TM polarized) but absorbs parallel-polarized light (transverse electric polarization, TE polarized). By optimizing structural parameters, the polarization extinction ratio close to 20 has been experimentally achieved at wavelength of 650 nm.     

Polarization property of light guide surface with bilayered nanostructure

The surface of a solid plate light guide patterned with nanostructure composed of bilayered dielectric and metallic stripes is capable of partially transmitting only one of two orthogonal polarizations while reflecting most of the other, and therefore performs as a reflective polarizer. The polarization dependent transmittance, polarization efficiency and extinction ratio of both parallel and cross stacking of the bilayered nanostructure have been analyzed for all radial and azimuthal light incident angles. Both configurations have shown overall polarization efficiency above 98% over the visible spectrum, and exhibit an extinction ratio above 1,000 within a specific range of light incident angle. Accompanied by a proper polarization converter and light extraction pattern, the polarized light guide can provide a high efficiency or even a polarizer free illumination optics for an application where a planar illuminator with polarized light is required.     

Broadband Terahertz Polarization Converter and Asymmetric Transmission Based on Coupled Dielectric‐Metal Grating

Coupled dielectric‐metal gratings are investigated for broadband terahertz (THz) wave polarization conversion and asymmetric transmission by the experiments and numerical simulations, which are composed of the subwavelength Si grating and metallic wire grating layers. The dielectric grating layer with a large artificial birefringence and low dispersion is employed as a phase engineered waveplate, and the metal wire grating arranged with a 45° angle to the dielectric grating is utilized as a high‐efficiency polarizer. Due to the subwavelength integration, this coupled grating presents a local resonance coupling mechanism between dielectric and metal gratings, which greatly enhances the polarization rotation and expands the bandwidth, not a simple combination with dielectric and metallic gratings. The results demonstrate that a broadband asymmetric transmission with an extinction ratio of 30dB from 0.2 to 1.2 THz is achieved and the highest transmission of 90% can be obtained. It provides a simple way towards practical applications for THz artificial dispersion materials, polarization control and asymmetric transmission.     

Fabrication of a mid-IR wire-grid polarizer by direct imprinting on chalcogenide glass

A mid-IR wire-grid polarizer with a 500 nm pitch was fabricated on a low toxic chalcogenide glass (Sb-Ge-Sn-S system) by the thermal imprinting of periodic grating followed by the thermal evaporation of Al metal. After imprinting, deposition of Al on the grating at an oblique angle produced a wire-grid polarizer. The fabricated polarizer showed polarization with TM transmittance greater than 60% at 5-9 μm wavelengths and an extinction ratio greater than 20 dB at 3.5-11 μm wavelengths. This polarizer with a high extinction ratio can be fabricated more simply and less expensively than conventional IR polarizers.     

Theoretical reflective performance of a sandwiched two-layer grating polarizer

The reflective polarizer is described by a sandwiched two-layer grating with a metal slab. Such a new polarizer is aimed to improve the performance of a reflective grating-based polarizer. The grating is optimized with the usual duty cycle of 0.5, where TE and TM polarizations are reflected in the –1st and the 0th diffraction orders, respectively. With optimized grating parameters, the extinction ratio can reach 45.5 dB and 41.9 dB in two diffraction orders, which are greatly improved compared with the conventional reported surface grating polarizer with the simple structure. Attractive merits of the new design are high efficiency, high extinction ratio, wide incident wavelength bandwidth for TE polarization, and wide angular range for TM polarization. Numerical results are expected to open new opportunities for the design of a grating-based polarizer with the enhanced performance by the complicated grating configuration.     

Numerical Investigation of Surface Plasmons Associated Subwavelength Optical Single-Pass Effect

Surface plasmons （SPs） associated optical single-pass effect has been investigated in novel subwavelength metallic structures, including single slit and grating structures. With influence of SPs, these metallic structures can enhance transmission in incident direction and suppress it in the opposite direction, exhibiting a single-pass effect. The finite difference time domain method is employed to study the influences of structure parameters on far-field transmission, near-field electric field distribution and extinction ratio of the single-pass transmission effect. A maximal extinction ratio of 47.83dB is achieved in the grating structure.     

Polarization-selective subwavelength grating used with 193 nm light

Hyper-NA ArF (193 nm) immersion lithography is one of the most potential technologies to achieve 32 nm critical dimension node. At the corresponding large angles in the photoresist, control of polarization becomes necessary. A polarization beam splitter (PBS) based on a subwavelength dielectric grating has been designed for use with 193 nm light. The polarization-selective property of such grating is explained by the mechanism of mode interference. The designed grating working as a 1 × 2 beam splitter can transmit TM wave (∼ 90%) to the zeroth order with extinction ratio of 753, and it diffracts TE wave (∼ 80%) to the −1st order with extinction ratio of 300.     

Negative role of surface plasmons in the transmission of metallic gratings with very narrow slits

It is generally admitted that the extraordinary transmission of metallic grating with very narrow slits is mainly due to the excitation of surface plasmons on the upper and lower interfaces of the grating. We show that the surface plasmon contribution is not the prime effect and that waveguide mode resonance and diffraction are responsible for the extraordinary transmission. Additionally and surprisingly, we reveal that the transmittance of subwavelength metallic gratings is always nearly zero for frequencies corresponding to surface plasmon excitation. This finding implies that surface plasmons play a negative role in the transmission.