氧等离子体刻蚀CVD金刚石膜的影响机理

采用电子回旋共振(ECR)等离子体在不同的磁场位形和工作气压下刻蚀化学气相沉积(CVD)金刚石膜,运用双探针和离子灵敏探针法对等离子体进行了诊断,研究了等离子体参数对刻蚀效果的影响。结果表明:磁场由发散场向收敛场转变时,离子温度、电子温度和等离子体密度都随之增大,刻蚀效果逐渐增强;当工作气压由低气压向高气压变化时,等离子体参数先增大后减小,CVD金刚石膜表面粗糙度降低程度也出现了相同的趋势。     

氧等离子体刻蚀CVD金刚石膜的影响机理

采用电子回旋共振（ECR）等离子体在不同的磁场位形和工作气压下刻蚀化学气相沉积（CVD）金刚石膜,运用双探针和离子灵敏探针法对等离子体进行了诊断,研究了等离子体参数对刻蚀效果的影响。结果表明：磁场由发散场向收敛场转变时,离子温度、电子温度和等离子体密度都随之增大,刻蚀效果逐渐增强;当工作气压由低气压向高气压变化时,等离子体参数先增大后减小,CVD金刚石膜表面粗糙度降低程度也出现了相同的趋势。     

高增透的类金刚石碳膜的红外吸收特性研究

利用射频等离子体分解甲烷的技术在锗片上沉积了非晶结构的类金刚石碳膜,傅里叶红外光谱仪测量显示镀覆的类金刚石碳膜的锗片在红外范围内具有高增透作用,特别在１７４０～！２０４４ｃｍ＾－１其峰值透过率高达９９％,在９４５．７ｃｍ＾－１（１０．６ｕｍ）处透过率为９４．５％。利用实测的液内的吸收系数接近于０,在１０．６ｕｍ的吸收系数为２３０ｃｍ＾－１,膜主要由ｓｐ＾３的Ｃ＿Ｈ键结构组成,各吸收峰均得到了很好的     

金刚石膜微结构的慢正电子束测量研究

用慢正电子束辅助以拉曼光谱方法对一批较高质量的PECVD金刚石膜的微结构进行测量研究．拉曼光谱实验结果显示,这批金刚石膜中金刚石相含量比较高,正电子湮没实验进一步从微观结构上指出各个金刚石膜之间存在很大差异,并且从缺陷角度发现各样品中缺陷尺寸和缺陷浓度不一样,造成膜质量不同．S-E曲线变化趋势反映出各样品金刚石晶体结构存在明显不同．这表明正电子湮没技术是测量金刚石膜微结构的有力手段．     

REBCO厚膜的液相外延生长研究

本文从基片和种膜、LPE的初始阶段研究和超导性能的控制这三个方面回顾总结了液相外延生长REBCO(RE=稀土元素)厚膜的研究进展.我课题组发现的高温超导体氧化物YBCO的过热现象直接证实了采用低包晶熔点的YBCO种膜可以生长包晶温度较高的REB-CO,丰富了种膜的选择范围,此现象尤为值得关注.在LPE生长的初始阶段存在种膜的部分溶解、夹杂的形成和与稀土元素种类有关的择优生长等现象,用包括曲率效应和界面能影响的粗化机制可以解释以上现象.因而生长高结晶性的LPE厚膜时选用高品质的种膜甚为重要.为优化生长工艺,须考虑种膜的品质、熔剂中的Ba/Cu比和气氛对Mg的污染和结晶取向,RE离子对Ba的替代等方面问题,以达到获得高质量的REBCO LPE厚膜的目的.     

Bi（2223）厚膜微结构分析

测量了预结厚膜在不同压力下的密度，用ＳＥＭ观测了三次烧结扣揭去银的银夹板厚膜、银包套厚膜的厚度和表面、横截面的形貌，实验结果表明，厚膜的临界电流密度比单晶中的临界电流密度低两个量级的原因可能是；在制备过程中粉末内存在的空气，在烧结时产生的空洞而导致厚膜的织构和晶粒间的连接变差，提出了降低空洞、提高厚膜临界电流密度的方法。     

金刚石膜合成条件下的鞘层与等离子体参数分布

本文报导了在用热阴极直流放电等离子体化学气相沉积（通常也称ＥＡＣＶＤ．即电子辅助化学气相沉积）方法合成金刚石的条件下的等离子体密度、电子温度、等离子体空间电位分布及基片附近等离子体鞘结构，并讨论其对成膜的影响．     

微波等离子体化学气相沉积金刚石膜

微波等离子体化学气相沉积是制备金刚石膜的一个重要方法，能制备出表面光滑平整的大面积均匀金刚石膜，文章概述了ＭＰＣＶＤ制备金刚石膜的情况，介绍了ＭＰＣＶＤ制备金刚石膜装置的典型类型及其特点，在国内研制成功天线耦合石英钟罩式ＭＰＣＶＤ制备金刚石膜装置，并在硅片上沉积出大面积均匀的优质金刚石膜。     

自持金刚石厚膜上沉积生长ZnO薄膜及发光特性

采用磁控溅射在自持CVD金刚石厚膜的成核面上制备了ZnO薄膜,并实验研究了其生长特性和发光特性随O2和Ar流量的变化。利用X射线衍射(XRD)、光致发光(PL)光谱、电子探针(EPMA)和霍尔测量对样品进行了检测。结果表明,在O2/Ar比值约为1时沉积得到的ZnO薄膜取向较一致,呈现高阻的状态并且发光性能最好。     

The Elimination of Grains and Grain Boundaries in Grain Growth

The topological changes that occur during coarsening of 2D and 3Dcellular structures, such as polycrystals, areinvestigated. Particular attention is given to the elimination ofgrain boundaries and grains with more than the minimum number oftopological elements. A thermodynamic criterion is introduced tofind out which topological transformations are favoured, based on theevaluation of the Gibbs free energy of the initial and finalconfigurations. In general, elimination of grains is possible only ifthe number of their neighbours is below a critical value, which maybe affected by geometry.     

金刚石锥阵列的无掩膜刻蚀制备及其形貌演变机制

为获得具有优良场发射性能的金刚石锥阵列,利用偏压热灯丝化学气相沉积系统分别在高质量大颗粒金刚石厚膜与纳米金刚石薄膜上进行了无掩膜刻蚀研究,系统比较了高质量大颗粒金刚石厚膜与纳米金刚石薄膜的刻蚀特性,制备了大面积均匀金刚石锥阵列和高长径比(20∶1)金刚石纳米线阵列,探讨了金刚石锥的刻蚀形成机理。     

富勒烯作为过渡层生长金刚石薄膜研究

采用微波等离子体化学气相淀积法，以Ｃ６０膜过渡层，在光滑的单晶Ｓｉ衬底（１００）表面的研磨的石英衬底表面等光学衬底上，首次在无衬底负偏压条件下生长出多晶金刚石薄膜，通过扫描电镜观察到生长膜晶粒呈莱花状，生长表面为金刚石（１００）界面。     

Examination of Dislocation Mechanism on Grain Boundary Sliding in High Angle Grain Boundaries by Stress Change Test

In order to understand the factors dominating grain boundary sliding, stress change tests and stress reversal tests were conducted on aluminum bicrystal specimens with high angle grain boundaries. It is found that small change in stress results in the remarkable change in the rate of grain boundary sliding. Stress reversal tests showed that grain boundary slide hardening does not work for the sliding to the direction opposite to that before the stress reversal. Mean internal stresses for the dislocations contributing to grain boundary sliding are experimentally measured by a method consisting of stress change and annealing. It is found that the velocity of dislocations in the grain boundary is in proportion to the mean effective stress.     

Thermodynamics of Vacancies and Impurities at Grain Boundaries

The thermodynamics of vacancy and impurity adsorption at interfaces and grain boundaries (GBs) in solids is considered. Theoretical expressions are derived for the GB/interface free energy change caused by various levels of vacancy or impurity adsorption. This information is used to predict the behavior of vacancies at interfaces and GBs in a stress gradient and to forecast the effect of impurities on GB fracture strength. The latter predictions provide an interpretation of intergranular fracture behavior in terms of impurity adsorption and GB structural parameters such as GB width and value.     

On the Origin and Energy of Triple Junction Defects Due to the Finite Length of Grain Boundaries

King [1] established that due to the discrete nature of their dislocation structure, finite length grain boundaries (GBs) in polycrystalline materials possess discrete values of misorientation angle. For a GB with a length that is not a multiple of the GB period, this leads to the formation of specific disclinations at their junctions with neighboring GBs, which compensate the difference between the misorientations of finite and infinite boundaries. In the present paper the origin of these compensating disclinations within GB triple junctions is elucidated and their strength is calculated using the disclination-structural unit model. It is shown that for a GB with length of about 10 nm the junction disclinations can have a strength value not more than 1°, in contrast to King's calculations that indicate much larger values. Elastic energies of triple junctions due to compensating disclinations are calculated for both equilibrium and non-equilibrium structures of a finite length GB, which differ by the position of the grain boundary dislocation network with respect to the junctions. The calculations show that triple junction energies are comparable to dislocation energies, and that compensating disclinations can play a significant role in the properties of nanocrystalline metals with grain sizes less than about 10 nm.     

Interaction of Point Defects with Grain Boundaries in fcc Metals

Structures of several symmetrical tilt grain boundaries (GBs) with different tilt axes in Cu and Al and their interaction with vacancies and interstitials are studied using atomistic computer simulations with embedded-atom potentials. The lowest defect formation energy in a GB is found to correlate with the GB energy in both Cu and Al. Importantly, vacancies and self-interstitials in GBs have comparable formation energies, suggesting that both defects are equally important for GB diffusion and other properties. Vacancies in GBs can be either localized at certain sites or be delocalized over several sites. Some GB sites do not support a stable vacancy at all. Self-interstitial atoms can occupy relatively open interatomic positions, form split dumbbell configurations, or give rise to highly delocalized displacement zones. These structural forms of point defects have been observed across the whole set of twelve GBs in Cu and six GBs in Al studied in this paper as well as in our previous work [Interface Science 11, 131–148 (2003)]. It is suggested that these structural forms are general to all GBs in fcc metals. They can be explained by the existence of internal stresses and alternating tension and compression regions in the GB core.     

Atomistic Modeling of Point Defects and Diffusion in Copper Grain Boundaries

The atomic structure of several symmetrical tilt grain boundaries (GBs) in Cu and their interaction with vacancies and interstitials as well as self-diffusion are studied by molecular statics, molecular dynamics, kinetic Monte Carlo (KMC), and other atomistic simulation methods. Point defect formation energy in the GBs is on average lower than in the lattice but variations from site to site within the GB core are very significant. The formation energies of vacancies and interstitials are close to one another, which makes the defects equally important for GB diffusion. Vacancies show interesting effects such as delocalization and instability at certain GB sites. They move in GBs by simple vacancy-atom exchanges or by long jumps involving several atoms. Interstitial atoms can occupy relatively open positions between atoms, form split dumbbell configurations, or form highly delocalized displacement zones. They diffuse by direct jumps or by the indirect mechanism involving a collective displacement of several atoms. Diffusion coefficients in the GBs have been calculated by KMC simulations using defect jump rates determined within the transition state theory. GB diffusion can be dominated by vacancies or interstitials, depending on the GB structure. The diffusion anisotropy also depends on the GB structure, with diffusion along the tilt axis being either faster or slower than diffusion normal to the tilt axis. In agreement with Borisov's correlation, the activation energy of GB diffusion tends to decrease with the GB energy.     

氢气浓度对MPCVD金刚石膜色度的影响

利用自行设计的直接耦合石英管微波等离子体化学气相沉积装置, 以氢气和甲烷为反应气体, 沉积出八个金刚石膜样品。研究了氢气浓度对所沉积金刚石膜色度的影响。结果表明, 饱和纯度和色纯度随着H2浓度的增大而升高; 当H2浓度达到94.137%时, 饱和纯度和色度纯度达到最大, 分别为8.5%和9.5%; 之后随着H2浓度的进一步升高饱和纯度和色纯度开始下降。