光纤型热光可调光衰减器的设计及其衰减分析

提出了一种基于热光调节的可调光衰减器结构。该衰减器通过腐蚀光纤包层到一定厚度和长度后,在表面涂覆较大热光系数的聚合物材料得到。从模场变化角度分析了传输光束的衰减与涂覆材料折射率的关系,并从实验上测试了使用不同涂覆材料时的衰减。理论分析与实验结果均表明在涂覆材料折射率略大于原光纤包层材料折射率时,涂覆材料折射率微小的变化将引起传播光束衰减的大幅度变化,并且光纤被腐蚀的长度越长或包层材料剩余厚度越小,衰减越大。因此,由热光系数大、折射率略大于光纤包层的聚合物材料所组成的可调光纤衰减器,具有衰减调节范围大且功耗小、插入损耗小、成本低、低偏振特性、易于与其它光纤器件耦合或集成等特点。     

新型可变光衰减器的温度特性研究

介绍一种新型光衰减器的工作原理、结构及温度特性.实验中采用在线温度特性测试法得到了新型光衰减器的插入损耗随温度变化的特性曲线.提出通过改进工艺的办法来优化新型光衰减器结构和提高光衰减器温度稳定性的方案.     

位错型微机械可变光衰减器的研究

介绍了一种基于微机械技术实现的可变光衰减器,通过微电磁驱动器改变输入输出光纤之间的径向偏移量来调整衰减量。基于波导传输理论分析确定了器件的结构参量,并通过集成电路微细加工工艺实现了器件的制作和封装。测试结果表明,该可变光衰减器的插入损耗小于1dB,动态范围约35dB,工作电压小于5V,偏振相关损耗小于0.1dB,体积为20mm×15mm×8mm,有望为全光网提供一种低成本,高性能的光通信器件。     

调节精度可配置的可变光衰减器研究

设计了一种调节精度可配置的可变光衰减器结构,通过流体恒压泵驱动薄膜弹起,将流体压力/压强调节转化为光纤微位移控制,实现对接光纤横向位错及光学衰减。使用多物理场耦合与三维时域有限差分的方法对结构模型进行分析,并利用精细加工技术实现了器件的制作。通过对薄膜厚度的选配,实现了光强耦合效率的精度可调配置。理论分析和实验结果表明,选用合适的膜厚得到本衰减器的插入损耗为1.24 dB,可变衰减范围大于60 dB,波长相关损耗小于1 dB。当设定可变光衰减器的光衰减动态范围分别为10 dB和40 dB时,配置0.5 mm薄膜厚度的调节精度分别优于0.04 dB和0.11 dB;当膜的厚度增加时,调节精度会更高。     

可调光衰减器的光衰减量线性补偿

设计制成一种数字化电磁驱动微机械MOEMS可调光衰减器.与传统可调光衰减器相比,该器件不仅可实现光衰减量数字化电控调节,并且可通过器件结构的优化设计,对光衰减量的非线性进行补偿,最终得到线性衰减.器件性能测试表明,插入损耗IL＜0.3 dB,偏振相关损耗PDL＜0.1 dB,波长相关损耗WDL＜0.2 dB,衰减范围0～40 dB,回波损耗RL＞50 dB.     

低偏振相关损耗聚合物光波导

表征了新合成的热光聚合物bisphenol A-aldehyde resin (BPA-resin)的独特性质。并且利用光刻和反应离子刻蚀技术(RIE)制备成功BPA-resin 聚合物的单模条波导.实验结果表明,对于TE和TM偏振,该聚合物波导在1.31 μm和1.55 μm波长下分别有低达0.43 dB/cm和0.51 dB/cm的传播损耗.在上述波长下,波导的低偏振相关损耗 (PDL)小于0.1 dB/cm.因此,是制备可调热光器件的良好导波模快.     

一种MEMS可调光衰减器性能测试及动态响应分析

一种基于微细电火花加工(EDM)技术的非硅基MEMS可调光衰减器,以电磁线圈驱动微反射镜.本文介绍该器件特性测试及动态响应分析,结果表明,驱动电压为0～8 V,工作范围0～35 dB,动态响应时间为2 ms,插入损耗小于0.8 dB,回波损耗小于－50.5 dB.     

硅微机械F-腔可变衰减器光学特性分析

一种新型的硅微机械F P腔可变衰减器 ,具有体积小、插入损耗低、调节精度高等优点 ,介绍了其基本结构、基本原理。分析了F P腔两个反射镜的光学特性对F P腔性能的影响 ,包括两反射镜反射率对插入损耗、最大衰减量、工作范围的影响 ,以及F P腔腔长与衰减量之间的关系 ,分析了这种衰减器的带宽响应。衰减器体积只有 2 0 0× 2 0 0× 30 0 μm左右 ,插入损耗小于 2dB ,最大衰减量为 44dB左右。     

超小型非硅基微机械可调光衰减器

研制了一种新型的超小型电磁驱动微机械可调光衰减器（VOA）.该器件采用电磁驱动器转动硅基微镜改变光路实现可调衰减,在结构上采用了全磁性回复,完全摆脱了通常的弹性回复造成的部件疲劳、零点偏移等器件重复性问题.驱动电压为0～5 V,工作范围0～40 dB,插入损耗小于0.8 dB,回波损耗小于－50 dB.器件重要部件采用微细电火花加工(EDM)技术制作,并应用FEA软件进行了结构优化,对衰减响应进行了详尽的理论分析.该VOA设计体积仅为25×10×7 mm3,可构成阵列应用于波分复用（WDM/DWDM）系统中各信道的动态信号平衡或网络保护.     

低功耗聚合物Mach-Zehnder热光开关

采用传统的半导体工艺制作了聚合物Mach-Zehnder型热光开关.利用扫描电镜观测波导形貌,通过红外摄像机观测波导的近场输出光斑,在通信波段1 550 nm波长下测试了器件的输出光谱.在电极上施加直流信号,测得热光开关的消光比为－15 dB,驱动功率为16 mW.引入直流偏置网络,获得了器件的开关特性曲线,经测量开关上升时间为1.2 ms,下降时间为0.8 ms.     

SOI波导反射模式的古斯-汉欣空间位移效应及其数字式热光开关

借助波导转角镜结构,利用古斯-汉欣空间位移和热光效应折射率调制的有效组合,提出了波导反射模式数字式热光开关结构.在给定入射角的条件下优化了空间古斯-汉欣位移,在具有古斯-汉欣效应的本征态下,反射光束出现了较大的跳跃.在1.0μm厚硅膜的绝缘体上硅平台上,单模输入波导和多模干涉波导结构之间的导模本征态匹配,验证了1×3数...     

Measurement of nonlinear phase of a SOA using an asymmetric loop mirror

We use a setup based on an asymmetric Sagnac interferometer to demonstrate an experimental methodology to characterize the nonlinear phase of a semiconductor optical amplifier as a function of input intensity.     

The thermo-optical variable optical attenuator based on SOI

A thermo-optical variable optical attenuator was studied based on silicon on insulator (SOI) substrate waveguide. It is composed by the single-mode waveguide, taper waveguide, multi-mode waveguide, and inclined electrode. By adjusting the applied voltage on the inclined electrode it can achieve continuously variable attenuation of the output light. The results we studied show that when the applied voltage is about 4.7 V (the corresponding power is 233 mW), the variation of the waveguide's core temperature is about 33 °C, the refractive index changes more than 5.0 × 10⁻³ and the attenuation will reach 35 dB, and the response time is only 35 μs.     

Variable optical attenuator based on a vertical comb drive actuated MEMS micromirror

This letter presents the design, simulation, fabrication, and successful demonstration of a variable optical attenuator (VOA) based on a micromachined micromirror combined with an optical fiber collimator. The micromirror has a size of 500 μm in diameter and a rotational resonance of 4.94 kHz. The micromirror was actuated by vertical comb drive which was fabricated by bulk micromachining process on a silicon on insulator (SOI) wafer. The VOA operates at a low driving voltage of 4.4 V corresponding to the rotation angle of 0.3°. The turn-on and turn-off response time of the VOA are 1.6 ms and 2.74 ms, respectively. Finally, the optical attenuation was measured and an optical attenuation as large as 40 dB was obtained.     

光纤直接耦合微加工型可调光衰减器

设计研制了一种新型小体积, 低成本的光纤直接耦合微加工型可调光衰减器. 该器件采用电磁微线圈驱动柔性框架上的活动光纤微位移实现信号功率衰减变化, 驱动电压为0~8 V, 工作范围0~65 dB, 动态时间响应小于2.3 ms. 器件构造工艺主要使用了CNC高精度雕刻和激光点焊封装技术. 利用有限元单元法进行器件理论分析, 并报告了其测试性能.     

基于三波导耦合的聚合物电光可调光衰减器

可调光衰减器(VOA)是密集波分复用(DWDM)网络中的重要器件之一,它的一个重要应用是实现多通道间的功率均衡。提出了一种基于三波导耦合结构的聚合物电光可调光衰减器的设计方案,即利用两个旁侧波导耦合掉主通道波导中的光,从而达到衰减的目的。并运用束传播法(BPM)对该器件进行了相关性能的模拟、分析及优化,使得该结构衰减达到60 dB,驱动电压为11.3 V,插入损耗为0.48 dB。该结构有效的降低了驱动电压,并使该结构的高衰减可调光衰减器得以实现。     

Flexible integration of optical switch with optical power splitting and attenuating functions for optical fiber-based networking applications

A flexible integration of optical switch with optical power splitting and attenuating functions has been proposed to optimally serve optical fiber-based networking applications. In this switch, an etched binary-slope sidewall reflector is electrostatically actuated in and out of the plane to manipulate optical signals between input and output optical fibers. The fabrication process is a simple combination of a bulk-silicon micromachining process and silicon-to-glass anodic bonding where fiber alignment grooves, reflectors and actuators are fabricated on the same silicon substrate. Ball-lensed fibers are assembled with the device to achieve high coupling efficiency. Performances of the fabricated devices are measured and discussed. The switching time is less than 9 ms at 31 V. The excess loss of the device is less than 3 dB and the controllable attenuation range is up to 38 dB at 139 V, respectively. Moreover, polarization-dependent loss is less than 0.7 dB in the whole attenuation and splitting range.     

Design of thermo-optic tunable optical filter based on Si/Air DBR and polymer Fabry–Perot microcavity in SOI

An integrated tunable optical filter (TOF) based on thermo-optic effect in silicon on insulator (SOI) rib waveguide is designed and simulated. The device is comprised of two high refractivity contrast Si/Air stacks, functioning as high reflectivity of DBRs (distributed Bragg reflectors) and separating by a variable refractive index polymer Fabry–Perot (F–P) cavity. The designed device exhibits Q = 24077, FWHM = 0.065 nm and finesse = 566. Wavelength tuning is achieved through thermal modulation of refractive variation of the cavity. As the cavity polymer is heated, the refractive index of the cavity decreases. When the temperature of cavity polymer changes within 105, the central wavelength gets a continuous 35 nm shift from 1530 nm to 1565 nm, which can operate the whole C-band in the WDM (wavelength division multiplexing) networks. Moreover, by calculating, the tuning sensitivity is about 0.33 nm/°C. Owing to the compact size and excellent characteristics of integration, the proposed component has a promising utilization in spectroscopy and optical communication.     

聚合物脊形光波导的变分有效折射率法分析

聚合物脊形光波导是聚合物集成光电子器件的重要构成单元.利用有效折射率法计算聚合物脊形光波导的横向折射率分布及有效折射率,将各区域中的光场分布近似用分段函数表达.基于导模满足的标量波动方程,利用变分法确定变分参量,以求得准确的横向光场分布.对聚合物脊形多模光波导基模和高阶模的色散特性与横向场分布进行分析,研究了波导结构参数对色散特性的影响,计算出TM基模和高阶模的光场分布,得出了聚合物脊形光波导的单模传输条件.研究表明,该方法计算量小、精度高,对聚合物光电子器件中脊形光波导的理论分析与设计优化提供了简单高效的方法.