High-sensitivity Fabry-Perot interferometric pressure sensor based on a nanothick silver diaphragm

We present a fiber-optic extrinsic Fabry-Perot interferometer pressure sensor based on a nanothick silver diaphragm. The sensing diaphragm, with a thickness measured in a few hundreds of nanometers, is fabricated by the electroless plating method, which provides a simple fabrication process involving a high-quality diaphragm at a low cost. The sensor exhibits a relatively linear response within the pressure variation range of 0-50 kPa, with a high pressure sensitivity of 70.5 nm/kPa. This sensor is expected to have potential applications in the field of highly sensitive pressure sensors.     

High-sensitivity fiber-tip pressure sensor with graphene diaphragm

A miniature fiber-tip pressure sensor was built by using an extremely thin graphene film as the diaphragm. The graphene also acts as a light reflector, which, in conjunction with the reflection at the fiber end-air interface, forms a low finesse Fabry-Perot interferometer. The graphene based sensor demonstrated pressure sensitivity over 39.4 nm/kPa with a diaphragm diameter of 25 μm. The use of graphene as diaphragm material would allow highly sensitive and compact fiber-tip sensors.     

FBG传感器在空腔爆炸压力测量中的应用研究

光纤光栅(FBG)传感器具有灵敏度高，测量量程大，抗电磁干扰能力强，耐高温能力强等诸多优点，在爆炸冲击测试领域具有广泛的应用前景。针对空腔爆炸压力变化历程对压力传感器的性能要求，设计了一种抗冲击FBG压力传感器。传感器采用圆平膜片作为承压面，利用均匀压力作用下的挠度拉伸FBG产生位移。对传感器的力学模型进行了理论计算，并进行了有限元仿真，理论分析与数值模拟计算结果误差小于2%。使用标准压力源对传感器进行了标定，获得最终的压力灵敏度为545.187 kPa/nm，线性度相关度为99.998%。根据空腔爆炸现场防护需求，设计了有效的抗爆防护装置，并将该传感器成功用于空腔爆炸爆后气体压力变化历程测量，取得很好的测试效果。     

High-sensitivity, high-frequency extrinsic Fabry-Perot interferometric fiber-tip sensor based on a thin silver diaphragm

We propose and demonstrate a fiber-tip sensor based on an ultra-thin silver diaphragm for highly sensitive and high frequency ultrasonic detection. The diaphragm is prepared by the vacuum thermal deposition method and then transferred to the fiber tip. The sensor demonstrated in this letter has a 300 nm thick diaphragm with an inner diameter of 75 μm, leading to a static pressure sensitivity of 1.6 nm/kPa and a resonant frequency of 1.44 MHz. This sensor has potential applications in many fields such as structural health monitoring and medical ultrasonography.     

A Facile Strategy for Low Young's Modulus PDMS Microbeads Enhanced Flexible Capacitive Pressure Sensors

Flexible pressure sensors are widely demanded in human care systems. A simple and effective strategy for sensor fabrication can markedly promote its application. Herein, a facile strategy is employed to prepare a flexible capacitive pressure sensor with a polydimethylsiloxane microbeads-modified dielectric layer. Owing to the microbeads structure, the proposed sensor achieves a sensitivity of 0.048 kPa⁻¹ in the range of 0–10 kPa with a wide dynamic range (up to 100 kPa). The sensitivity is nine times higher than that of the planar structure. Moreover, the microbeads structured sensor obtains a low limit of detection (0.2 kPa), fast response time (120 ms), and good stability (variation lower than 3.30% after 1000 loading/unloading cycles at 20 kPa). The finite-elemental analysis reveals that the microbeads structure is critical to enhance the performance of sensors. Finally, the pressure sensor is successfully applied to detect touch signal, joints movement, and breathing, exhibiting its promising prospects as smart wearable devices. Furthermore, the strategy may provide a new idea for the microstructural design of capacitive pressure sensors.     

光纤微机电系统压力传感器的理论分析和数值模拟

设计了一种基于微机电系统(MEMS)的光纤压力传感器,证明了光纤MEMS压力传感器在工作状态下可以由法布里_珀罗腔的理论模型解释。推导出了在光纤MEMS压力传感器中硅横膈膜的压力与干涉光强的关系表达式,并对光纤MEMS压力传感器的模型进行了数值模拟,初步确定了在传感器的制作过程中各个物理量的取值。其中腔体半径为300μm、腔体深度为1.42μm、硅横膈膜厚度为23μm,为光纤MEMS压力传感器的加工和制作提供了理论基础。     

Silicon-Based Integrated Optic Pressure Sensor Using Intermodal Interference between TM-Like and TE-Like Modes

In this paper, a silicon-based integrated optic pressure sensor using an intermodal interference between the fundamental TM-like and TE-like modes is described. The sensor consists of a micromachined rectangular diaphragm and a straight polystyrene optical waveguide passing over the diaphragm. Its sensitivity is theoretically known to be strongly dependent on the position of the waveguide over the diaphragm. To experimentally investigate such dependence, we fabricated a sensor with a 1.2 mm 2 10 mm 2 20 w m diaphragm, over which waveguides were placed at 50 w m intervals. The measured phase sensitivity was 98 mrad/kPa for the waveguide nearest to the diaphragm edge. The measurement was also carried out for the other waveguides. As theoretically expected, the largest sensitivity was obtained for the waveguide nearest to the edge.     

Fiber optic Fabry-Perot pressure sensor with low sensitivity to temperature changes for downhole application

Pressure and temperature are two important parameters in reservoir engineering. The fiber optic sensors can be used for permanent downhole monitoring. In this paper, we propose an extrinsic fiber Fabry-Perot interferometer (EFPI) sensor for pressure measurement with low sensitivity variation. The pressure sensitivity of EFPI sensor and of the fiber Bragg grating (FBG) sensors have been measured. The experimental pressure sensitivity for EFPI and FBG sensors are measured to be 2.75 × 10⁻⁸ 1/kPa and 1.52 × 10⁻⁸ 1/kPa, respectively. The temperature cross-sensitivity problem of the EFPI sensor has been solved by a new technique. The temperature sensitivity of EFPI sensor has been decreased to 1.2 × 10⁻⁶/°C, while the temperature sensitivity of non-compensated EFPI sensor has been measured to be 16.4 × 10⁻⁶/°C. The results show that the EFPI sensor has a higher pressure sensitivity and good capability to decrease temperature sensitivity in comparison to FBG sensor.     

Silicon-Based Integrated Optic Pressure Sensor Using Intermodal Interference between TM-Like and TE-Like Modes

In this paper, a silicon-based integrated optic pressure sensor using an intermodal interference between the fundamental TM-like and TE-like modes is described. The sensor consists of a micromachined rectangular diaphragm and a straight polystyrene optical waveguide passing over the diaphragm. Its sensitivity is theoretically known to be strongly dependent on the position of the waveguide over the diaphragm. To experimentally investigate such dependence, we fabricated a sensor with a 1.2 mm ×10 mm ×20 μm diaphragm, over which waveguides were placed at 50 μm intervals. The measured phase sensitivity was 98 mrad/kPa for the waveguide nearest to the diaphragm edge. The measurement was also carried out for the other waveguides. As theoretically expected, the largest sensitivity was obtained for the waveguide nearest to the edge.     

基于光纤光栅传感的模压腔内压强分布式测量

针对模压腔内压强分布式测量的需要,研制了等强度梁结构的光纤光栅压强传感器.该传感器的波长改变量与压强之间的线性度达到0.999 92.将六个研制的微型光纤光栅压强传感器镶嵌于模具内部,通过圆柱形刚性金属杆传递压力,实现了模压腔内部多点压强分布式测量,取得了很好的实验结果.实验研究了粉末状材料挤压成型过程中模压腔内压强的分布以及变化规律.     

光纤光栅压力传感器的理论建模及实验研究

鉴于压力传感器为工业生产中压力监控的一种必不可少的设备,分析了光纤光栅中心波长与光纤光栅应变之间的关系,阐述了带有硬中心的圆形膜片受到均匀压之后,膜片中心的挠度与压力之间的数学关系。在此基础上设计了圆形膜片作为流体压力转化光纤光栅敏感物理量的元件,并结合辅助元件完成对光纤光栅传感器组装,建立了传感器输入输出之间的线性数学模型。通过实验验证传感器线性度和重复性,运用数学计算得出了光纤光栅压力传感器各项参数,灵敏度Km=-0.658 nm/MPa,初始波长0=1 578.441 nm,为后期传感器稳定性作好了铺垫。     

All-fused-silica miniature optical fiber tip pressure sensor

An all-fused-silica pressure sensor fabricated directly onto a fiber tip of 125 microm diameter is described. Simple fabrication steps include only cleaving and fusion splicing. Because no chemical processes are involved, the fabrication is easy, safe, and cost effective. Issues in sensor design and loss analysis are discussed. The sensor has been tested for static pressure response, showing a sensitivity of 2.2 nm/psi, a resolution of 0.01 psi (68.9 Pa), a hysteresis of 0.025%, and capability of operation at temperatures up to 600 deegrees C. This miniature sensor may be suitable for medical diagnostics, environmental monitoring, and other industrial applications.     

基于平面膜片的光纤光栅传感研究

提出了一种基于平面膜片的光纤光栅压强传感器.讨论了该传感器反射谱展宽、峰值波长变化与压强之间的关系.指出将光纤光栅沿径向粘贴在膜片中心附近时,反射谱的峰值波长与压强之间具有良好的线性关系,可以通过检测峰值波长来检测压强.该传感器的压强响应灵敏度系数的实验值为0.3964 nm/MPa,是裸光纤光栅压强灵敏度系数的132.1倍.该传感器的灵敏度系数与压强测量范围可以通过改变膜片的尺寸、材料的弹性模量、泊松比等参量来调节.     

Wavelength-encoded fiber-optic temperature sensor with ultra-high sensitivity

We present in this paper a wavelength-encoded fiber-optic temperature sensor with ultra-high sensitivity. The sensor consists of a segment of multimode fiber (MMF) with a polymer cladding spliced between two single mode fibers, forming a multimode fiber interferometer. For a temperature sensor with a 55 mm long MMF and a 45 mm long polymer cladding, a temperature sensitivity of −3.195 nm/°C has been achieved over a temperature range of 10 °C which is mainly limited by the spectral range of the light source used in the experiments. It has been found that the high temperature sensitivity is mainly attributed to the high thermo-optic coefficient of the polymer cladding. Other advantages of the temperature sensor reported here include its extremely simple structure and fabrication process, and hence a very low cost.     

平面圆形膜片式光纤布拉格光栅温度补偿压强传感

报道了利用光纤布拉格光栅反射波谱带宽展宽技术实现温度补偿的压强传感新方案。结合平面圆形膜片应变调谐的特点,采用膜盒式结构,将光纤光栅中心对准平面圆形膜片零应变半径并沿径向粘贴,利用反射波谱带宽对应变敏感而对温度不敏感的特性解调压强,成功地实现了温度补偿的压强传感测量。基于光谱分析仪0.05nm的光谱分辨力,实验测得带宽随压强响应灵敏度为0.34nm/MPa,压强精度为±0.15MPa,压强测量范围为0~7.5MPa。实验结果与理论分析基本一致。     

Highly Sensitive Temperature Fiber Sensor Based on Mach-Zehnder Interferometer

We propose a highly sensitive temperature fiber sensor based on a Mach-Zehnder Interferometer (MZI). The MZI is composed of a piece of no-core fiber (NCF), a single-mode fiber (SMF), and a fiber taper (FT) structure. To accomplish high sensitivity, the component was immersed in a material with high thermo-optic coefficient (TOC). The experimental results showed that a high temperature sensitivity of 1.56 nm/°C was achieved for surrounding material with a refractive index (RI) of 1.45. The presented sensor has numerous advantages, for instance, extremely high sensitivity, easy fabrication, simple structure, compact size, and in-line applications.     

光子晶体光纤温度压力传感器

提出了一种在高温环境下同时测量温度和气压的光子晶体光纤温度压力传感器.在普通单模光纤和光子晶体光纤之间熔接一段空心光纤构成干涉结构.空心光纤段构成非本征法布里-珀罗干涉仪,利用光子晶体光纤的微孔与外界相通,通过气体折射率变化来测量环境中的气压变化;光子晶体光纤段构成本征法布里-珀罗干涉仪,利用热膨胀效应和热光效应来测量环境中的温度.传感器的解调通过自制的白光干涉解调仪实现,实验通过测量腔长得到被测环境的温度和气压.在不同温度和气压环境下,对腔长分别为306μm和1535μm的温度压力光纤传感器进行连续测量.实验结果表明,传感器能够在28~800℃的温度下和0~10 MPa的气压下稳定工作,测量范围内温度灵敏度可达17.4 nm/℃,压力灵敏度随温度增加而降低,在28℃时可达1460.5 nm/MPa.     

基于反射光谱特征辨识的光纤气压与温度集成监测方法

针对飞行器机载环境多参量综合测试需求,研究了一种基于反射光谱特征辨识的光纤布拉格光栅(FBG)气压与温度集成监测方法,给出了基于膜片式结构的双参量传感机理及其理论模型。采用基于耦合模理论的OptiGrating软件,得到不同气压与温度条件下光纤布拉格光栅传感器仿真反射光谱。在此基础上,借助弹塑性和恢复性能优良的平膜片感压机构,构建了膜片式双光纤气压/温度集成监测模型。研究表明,恒温条件下应变传感光纤光栅反射光谱随气压增加而逐渐向短波方向偏移,其中心波长灵敏度约为0.803 0 nm·MPa-1,且反射谱主峰及其旁瓣峰值均随气压变化呈现良好线性关系;当气压恒定而温度变化时,处于仅感温不受力状态的温度传感光纤光栅反射光谱中心波长灵敏度约为9.39 pm·℃-1;当气压与温度交叉变化时,能够实现对变温条件下的微小气压变化实时监测。传感光纤光栅受非均匀应变效应反射光谱存在一定啁啾现象,其反射光谱旁瓣峰值波长随环境温度、气压变化均会发生偏移,具有良好线性关系,且在不同气压下反射光谱对应的同一阶数旁瓣峰值幅度相等。该研究能够为航空航天器系统多物理参量在线综合测试提供有益帮助。     

基于掺铒光纤的微型光纤法布里-珀罗干涉传感器

提出了一种化学腐蚀掺铒光纤制作微型光纤法布里-珀罗干涉传感器的方法。通过对掺铒光纤进行化学腐蚀,形成凹槽,再与单模光纤直接熔接制作而成。实验制作的微型法布里-珀罗干涉传感器干涉条纹光滑,对比度达到15dB。对该微型光纤法布里珀罗干涉腔进行了应变和温度传感实验。实验结果表明,在0-600με￡内,波谷移动随应变改变的灵敏度达到1．7pm／με,线性度为0．9998,从73～23℃,波谷移动随温度改变的灵敏度3．9pm／℃,线性度为0．9982。该方法制作的微型光纤法布里-珀罗传感器具有操作简单,一次成型,制作成本低的优点。     

Integrated Optic Pressure Sensor Using Intermodal Interference between Two Mutual Orthogonal Guided-Modes

We theoretically and experimentally investigated fundamental characteristics of an integrated optic pressure sensor using intermodal interference between the lowest-order TM-like and TE-like modes. The sensor consists of a rectangular diaphragm and a straight single-mode waveguide along an edge of the diaphragm. Its operation is based on a difference of phase retardations produced in the two guided modes through the photoelastic effect. The sensor was fabricated by bonding two glass substrates together: a Corning 0211 glass 300 μMm thick to form a waveguide and a thick substrate with a 10 mm × 10 mm square hole to define the diaphragm. The fabricated sensor was successfully tested using a He-Ne laser at 633 nm. The halfwave pressure was measured to be 77 kPa which is almost double the theoretical estimate.