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 共查询到10条相似文献,搜索用时 125 毫秒
1.
采用分子动力学方法模拟200eV的CH3粒子轰击到不同基底温度的钨样品上,分析了C、H原子在钨表面的沉积、散射及溅射情况,结果表明C、H原子的沉降量均随入射剂量的增加而增加。在基底温度为100K时,相同入射剂量下沉积的C原子最多,而当基底温度为1200K,在入射剂量大于1.5X1016cm-2时,C原子的沉降量小于其它基底温度下的C的沉降量。CH3在轰击样品时发生了分解,各种分解情况随基底温度变化较小,其中不同基底温度下一级分解率在40%上下波动,二级分解在23%左右,而完全分解的CH3在9%左右。C、H原子的散射角主要分布在5°~85°间,散射C原子分布的最大值分布在40%~50°或50°~60°间,散射C原子分布的最小值分布在0°~10°或80°~90°间;而不同基底温度下散射H原子分布的最大值均在40°~50°间,最小值均在0°~10°间。散射C原子的能量在0~140eV之间,散射能量为0~120eV的C原子占散射总量的98%以上,散射C原子平均能量随基底温度的增加而增加,其变化从65.5eV增加到68.5eV;散射H原子的能量也在0~140eV之间,但大约70%的散射H原子能量在40eV以内,散射平均能量随基底温度的增加而减小,其变化从13.92eV减小到13.05eV。  相似文献   

2.
用分子动力学方法研究了入射能量对 H2+与 SiC 样品表面相互作用的影响.模拟结果表明,在 H2+轰击 SiC 样品表面的初始阶段,样品中 H 原子的滞留量增加较快,其后,增加的速率减慢,并逐渐趋于饱和.入射能量越大,样品中 H 原子的滞留量也就越大.样品在 H2+的轰击下,样品 Si、C 原子会发生刻蚀.入射能量越...  相似文献   

3.
王梦皎  陈智利 《应用光学》2014,35(4):691-695
使用微波回旋共振离子源,研究Ar+离子束在不同角度、不同入射能量下对蓝宝石表面的刻蚀效果及光学性能。结果表明:所用能量800 eV,1 000 eV及1 200 eV时透过率都有很大的提升,由原来的50%提高到70%~80%,在能量为1 000 eV时增幅最大,能量为1 200 eV时增幅最小;在相同能量、不同角度下刻蚀后蓝宝石粗糙度呈先增大后减小的趋势,而在相同角度、不同能量下粗糙度方面无明显规律。刻蚀后表面形貌测试表明:角度不变,能量为1 000 eV时出现点状纳米结构,能量为1 200 eV时出现柱状纳米结构;能量不变,角度为10、50及80时出现了规律较明显的点状或条状纳米结构,角度为30时表面较为光滑。  相似文献   

4.
利用分子动力学方法研究了H原子与C/Be样品的相互作用过程,当H原子轰击C/Be样品时,发现有一些H原子渗入样品中并且滞留在样品中,H原子的滞留率随H原子的初始入射能量的升高呈线性增长,有些沉积在样品中H原子与C原子相互作用形成H-C键。溅射产物以H原子和H2分子为主。H和H2的产额率随初始入射能量的变化趋势相反,分析了不同机制下产物H和H2的产额率随初始入射能量的关系,且通过分析H原子的入射能量和样品的原子密度的关系来研究轰击后的样品,发现样品中原子分布变化很小,同时分析了化合物中的化学键分布变化较小,只是其化学键的分布峰向样品表面移动。  相似文献   

5.
D. Viel 《Il Nuovo Cimento D》1991,13(11):1361-1367
Summary The scattering of μp atoms in the 1S state from gold atoms was calculated using semi-classical methods. The results were used to write a Monte Carlo program simulating backscattering from a gold surface. For isotropically incident μp of kinetic energy (0.035–10) eV it was found that approximately 5% escape from the surface. The fraction backscattered showed little dependence on the initial μp kinetic energy but increased greatly with incident angle from the normal to the surface.  相似文献   

6.
The fraction of K and Na atoms initially trapped by the W(110) surface has been measured as a function of the incident energy (0.5–15 eV) and as a function of the incident angle. The trapping probability equals one at low incident energies (Ei ? 0.5 eV) and decreases with increasing energy. The measurements show an increase of trapping with increasing angle of incidence θi (measured from the surface normal). Simultaneously the desorption energies Qi were determined from the temperature dependence of the measured mean residence time on the W(110) surface. We obtained for K: Qi = 2.05 ± 0.02 eV, and for Na: Qi = 2.60 ± 0.04 eV.The trapping phenomenon at a solid surface was approximated in a theoretical way by calculating the in-plane trajectory of a projectile scattered from a diatomic surface-molecule. The important feature which showed up was the conversion of tangential to normal momentum of the projectile, and thus the inapplicability of cube models. As a function of the angle of incidence two regimes can be distinguished: at the smaller angles the scattering is governed by simultaneous interaction of the projectile with two neighbouring surface atoms, and at the higher angles of incidence the single particle interaction contributes most to the momentum transfer.  相似文献   

7.
The molecular dynamics simulation of interaction between CH+ with various energy and fusion material tungsten is conducted. The simulated results show that in the incident process, the sputtering rates of C and H atoms change suddenly at the different exposure doses when the incident energy is 50, 100 and 150eV respectively, a few of W atoms are sputtered in the interaction process, but the sputtering rate is less than 0.24%. When the exposure dose is about 3.92×1016cm−2, the incident energy is 50eV, a hydrocarbon firm without W atom is formed on the sample surface bombarded by the ions. A mixed film of W, C and H is formed at the other energy. The deposited rates of C and H atom first decrease then increase with the incident energy increament, the minimum deposited rats appear at 250 and 200eV respectively. The density profiles of C, H atoms, C−H, C−C, W−C bonds in the sample after bombardment move towards the inside of sample, and the C sp3 dominated the sample.  相似文献   

8.
柯川  赵成利  苟富均  赵勇 《物理学报》2013,62(16):165203-165203
通过分子动力学模拟了入射能量对H原子与晶Si表面相互作用的影响. 通过模拟数据与实验数据的比较, 得到H原子吸附率随入射量的增加 呈先增加后趋于平衡的趋势. 沉积的H原子在Si表面形成一层氢化非晶硅薄膜, 刻蚀产物(H2, SiH2, SiH3和SiH4)对H原子吸附率趋于平衡有重要影响, 并且也决定了样品的表面粗糙度. 当入射能量为1 eV时, 样品表面粗糙度最小. 随着入射能量的增加, 氢化非晶硅薄膜中各成分(SiH, SiH2, SiH3)的量以及分布均有所变化. 关键词: 分子动力学 吸附率 表面粗糙度 氢化非晶硅薄膜  相似文献   

9.
We have studied the energy exchange between hyperthermal (5-100 eV) Cs+ projectiles and a Pt(1 1 1) surface by measuring the kinetic energy of the scattered ions. The scattering geometry was chosen to be in-plane with specular scattering angles, and the energy of the scattered ions was analyzed as functions of incidence energy and angle. For low incidence energy (<40 eV), the energy transfer to the Pt surface is substantially enhanced due to the attractive image charge force between Cs+ and the surface. The image charge effects are highlighted by the different energy transfer on Pt(1 1 1) and Si(1 1 1) surfaces. Analysis of the experimental results using two- and three-dimensional theoretical models revealed a well depth of 1 eV for the image charge potential. Hyperthermal Cs+ ions scatter from Pt(1 1 1) predominantly via double collisions with Pt atoms, though the scattering phenomena are insensitive to the impact site at the surface.  相似文献   

10.
Xu Wang 《中国物理 B》2022,31(6):63401-063401
By combing the time-dependent density functional calculations for electrons with molecular dynamics simulations for ions (TDDFT-MD) nonadiabatically in real time, we investigate the microscopic mechanism of collisions between cytosine and low-energy protons with incident energy ranging from 150 eV to 1000 eV. To explore the effects of the collision site and the proton incident energy on irradiation processes of cytosine, two collision sites are specially considered, which are N and O both acting as the proton receptors when forming hydrogen bonds with guanine. Not only the energy loss and the scattering angle of the projectile but also the electronic and ionic degrees of freedom of the target are identified. It is found that the energy loss of proton increases linearly with the increase of the incident energy in both situations, which are 14.2% and 21.1% of the incident energy respectively. However, the scattering angles show different behaviors in these two situations when the incident kinetic energy increases. When proton collides with O, the scattering angle of proton is larger and the energy lost is more, while proton captures less electrons from O. The calculated fragment mass distribution shows the high counts of the fragment mass of 1, implying the production of H+ fragment ion from cytosine even for proton with the incident energy lower than keV. Furthermore, the calculated results show that N on cytosine is easier to be combined with low-energy protons to form NH bonds than O.  相似文献   

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