等离子体增强化学气相沉积法实现硅纳米线掺硼

用等离子体增强化学气相沉积(PECVD)方法成功实现硅纳米线的掺B.选用Si片作衬底，硅烷 （SiH4）作硅源，硼烷（B2H6）作掺杂气体， Au作催化剂，生长温度440℃.基于气-液-固(VLS)机制，探讨了掺B硅纳米线可能的生长机制.PECVD法化学成分配比更灵活，更容易实现纳米线掺杂，进一步有望生长硅纳米线pn结，为研制纳米量级器件提供技术基础. 关键词： 硅纳米线 化学气相沉积 纳米器件     

光照对HF/Fe(NO3)3溶液中制备硅纳米线的作用研究

以不同掺杂浓度的单晶n型硅为衬底、金属银为催化剂、硝酸铁作为氧化剂制备硅纳米线, 系统研究了光照对不同硝酸铁浓度条件下用化学腐蚀法制备硅纳米线的作用. 研究发现, 不同掺杂浓度的硅衬底, 光照对硅纳米线长度的影响明显不同. 通过对比硅纳米线的长度, 发现光照对硅纳米线的形成兼具促进和溶解作用, 并分别从能带结构、电化学表征和光致发光等方面对这两种作用的形成机理进行了深入讨论.     

衬底位置对化学气相沉积法制备的磷掺杂p型ZnO纳米材料形貌和特性的影响

采用化学气相沉积方法,在无催化剂的条件下,通过改变衬底位置在Si(100)衬底上制备出了高取向的磷掺杂ZnO纳米线和纳米钉.测试结果表明,当衬底位于反应源上方1.5 cm处时,所制备的样品为钉状结构,而当衬底位于反应源下方1 cm处时样品为线状结构.对不同形貌磷掺杂ZnO纳米结构的生长机理进行了研究.此外,在ZnO纳米结构的低温光致发光谱中观测到了一系列与磷掺杂相关的受主发光峰.还对磷掺杂ZnO纳米结构/n-Si异质结I-V曲线进行了测试,结果表明,该器件具有良好的整流特性,纳米线和纳米钉异质结器件的开启电压分别为4.8和3.2 V.     

纳米Si-SiOx和Si-SiNx复合薄膜的低温制备及其发光特性

用等离子体增强化学气相沉积法在低温（低于50℃）衬底上沉积Si-SiOx和Si-SiNx复合薄膜,可得到平均颗粒尺寸小至3nm的高密度（最高可达4.0×1012cm-2）纳米硅复合薄膜.500℃快速退火后,这种复 合薄膜显现出优异的可见光全波段光致发光特性.通过比较相同条件下所制备的纳米Si-SiOx和Si-SiNx复合薄膜的光致发光效率,发现纳米Si-SiNx具有更为优异 的光致发光效率,这一点在可见光短波区表现得尤为显著. 关键词： 等离子体增强化学气相沉积 冷衬底 硅纳米颗粒 光致发光     

硅(001)图形衬底上锗硅纳米线的定位生长

纳米线的定位生长是实现纳米线量子器件寻址和集成的前提.结合自上而下的纳米加工和自下而上的自组装技术,通过分子束外延生长方法,在具有周期性凹槽结构的硅(001)图形衬底上首先低温生长硅锗薄膜然后升温退火,实现了有序锗硅纳米线在凹槽中的定位生长,锗硅纳米线的表面晶面为(105)晶面.详细研究了退火温度、硅锗的比例及图形周期对纳米线形成与否,以及纳米线尺寸的影响.     

衬底对化学气相沉积法制备氧化硅纳米线的影响

通过化学气相沉积法在不同衬底上制备了大量的氧化硅纳米线.选用衬底为Si片、带有约100nm厚SiO2氧化层Si片和石英片.利用场发射扫描电子显微镜(SEM)和透射电镜(TEM，配备有能谱仪)对样品的表面形貌、结构和成分进行研究.结果表明：这些纳米线都为非晶态，但在不同衬底上生长的纳米线形貌、尺寸和化学成分不同.讨论了各种衬底对不同特征氧化硅纳米线生长的影响. 关键词： 化学气相沉积 纳米线 纳米颗粒     

ZnO纳米线的合成与生长机理

采用化学气相沉积系统制备ZnO纳米线,以覆盖一层约5nm厚的Ag薄膜的单晶Si(001)为衬底,纳米线的生长遵循气-液-固(VLS)机理。对得到的样品采用X射线衍射(XRD)和扫描电镜(SEM)进行晶体结构和形貌的表征。XRD结果表明衬底温度在600~700℃时生长的ZnO纳米线具有六方结构和统一的取向。通过扫描电子显微镜分析,比较了生长温度对纳米线直径和长度的影响。实验表明我们可以通过催化剂和温度来实现ZnO纳米线生长的可控。与传统的VLS生长方式不同的是在我们制备的ZnO纳米线顶端并没有看到催化剂颗粒,表明纳米线的生长方式是底部生长,我们对其生长机理进行了研究。     

Si(001)表面稀土金属硅化物纳米结构

稀土金属元素的硅化物在n型硅衬底上具有高电导率和低肖特基势垒的特点，在大规模集成的微电子器件领域具有很好的应用价值．文章系统介绍了在Si（001）表面自组装生长的稀土金属硅化物纳米结构的研究进展，较全面地讨论了退火温度、退火时间以及稀土金属表面覆盖度等生长条件对纳米结构生长的影响作用，并在此基础上分析了纳米线、纳米岛的晶化结构，衬底对纳米结构生长的影响，以及纳米结构的演化过程．搞清楚这些内在的生长机理，有助于人们今后实现可严格控制稀土金属硅化物纳米结构的形貌尺寸和分布的自组装生长．此外，文章还介绍了目前人们对稀土金属硅化物纳米线电学性质的研究进展．     

微波等离子体化学气相沉积方法在Si衬底上生长SiC纳米线

应用微波等离子体化学气相沉积方法,在单晶Si(100)衬底上生长出SiC纳米线.应用扫描电子显微镜、透射电子显微镜、能量损失谱(EDS)和选区电子衍射(SAD)等方法对纳米线化学组成和结构进行了分析和表征.给出该纳米线的生长机理 关键词： 微波等离子体化学气相沉积 SiC纳米线 生长机理     

化学气相沉积法制备GaN纳米结构设计性实验

在无催化剂辅助条件下,采用化学气相沉积法生长了GaN纳米线.通过调整衬底、NH3气流、生长时间等,实现了半导体GaN纳米线的生长以及形貌调控.用X射线衍射仪和扫描电子显微镜对产物的物相及形貌进行了表征.获得了合成GaN纳米线的优化条件.     

Effect of sputtered films on morphology of vertical aligned ZnO nanowires

Vertical aligned ZnO nanowires were grown by MOCVD technique on silicon substrate using ZnO and AlN thin films as seed layers. The shape of nanostructures was greatly influenced by the under laying surface. Vertical nanopencils were observed on ZnO/Si, whereas the nanowires on both sapphire and AlN/Si substrate have the similar aspect ratio. XRD patterns suggest that the nanostructures have good crystallinity. High-resolution transmission electron microscopy (HRTEM) confirmed the single crystalline growth of the ZnO nanowires along [0 0 1] direction. Room-temperature photoluminescence (PL) spectra of ZnO nanowires on AlN/Si clearly show a band-edge luminescence accompanied with a visible emission. More interestingly, no visible emission for the nanopencils on ZnO/Si substrates, were observed.     

Porous silicon templates for electrodeposition of nanostructures

We report the fabrication and characterization of porous silicon templates for electrodeposition of high aspect ratio one-dimensional metallic nanostructures (nanowires/nanoparticles) in them. Even though nanostructures/nanowires in the past have been fabricated in alumina, polymer or silica templates, the advantages of this approach are the possibility for seamless integration of nanostructures with other silicon components, and silicon based sensors because of better physical and electrical interconnection between the nanostructure and the silicon substrate. In this work, fabrication and characterization of nanowires/nanostructures such as single-segment Ni–Fe and Au and two-segment Ni–Fe/Au electrodeposited in the porous silicon template are presented. The templates with ordered and controlled nanometer-sized pores, 40 nm and 290 nm in diameter, were created through porous Si etching. The morphology, composition and structural characteristics of the template and of the single-segment Ni–Fe and Au and two-segment Ni–Fe/Au nanostructures of diameter 275±25 nm, length up to 100 μm and pitch of 1 μm were analyzed using scanning electron microscopy and X-ray diffraction techniques. The micrographs confirm that the plating parameters have a strong influence on morphology and composition of the structures. Further, the Ni–Fe images show the formation of both vertical and branched nanowires along with nanoparticles, from breakage/discontinuous growth of nanowires. Ni–Fe nanostructures were further analyzed for temperature-dependent magnetization and magnetization vs. magnetic field measurements using a commercial physical property measurement system. They reveal no magnetic anisotropy of the nanostructures probably due to a balance between ‘reduced’ shape anisotropy from branched and rough pore surfaces and magnetocrystalline anisotropy. PACS 61.46.+w; 75.75.+a; 81.07.-b; 81.16.Be     

Fabrication of ZnO nanostructures of various dimensions using patterned substrates

ZnO nanostructures were grown on silicon, porous silicon, ZnO/Si and AlN/Si substrates by low-temperature aqueous synthesis method. The shape of nanostructures greatly depends on the underlying surface. Scattered ZnO nanorods were observed on silicon substrate, whereas aligned ZnO nanowires were obtained by introducing sputtered ZnO film as a seed layer. Furthermore, both the combination of nanorods and the bunch of nanowires were found on porous silicon substrates, whereas platelet-like morphology was observed on AlN/Si substrates. XRD patterns suggest the crystalline nature of aqueous-grown ZnO nanostructures and high-resolution transmission electron microscopy images confirm the single-crystalline growth of the ZnO nanorods along [0 0 1] direction. Room-temperature photoluminescence characterization clearly shows a band-edge luminescence along with a visible luminescence in the yellow spectral range.     

Control of ZnO nanowire arrays by nanosphere lithography (NSL) on laser-produced ZnO substrates

Nanosphere lithography (NSL) is a successful technique for fabricating highly ordered arrays of ZnO nanowires typically on sapphire and GaN substrates. In this work, we investigate the use of thin ZnO films deposited on Si by pulsed laser deposition (PLD) as the substrate. This has a number of advantages over the alternatives above, including cost and potential scalability of production and it removes any issue of inadvertent n-type doping of nanowires by diffusion from the substrate. We demonstrate ordered arrays of ZnO nanowires, on ZnO-coated substrates by PLD, using a conventional NSL technique with gold as the catalyst. The nanowires were produced by vapor phase transport (VPT) growth in a tube furnace system and grew only on the areas pre-patterned by Au. We have also investigated the growth of ZnO nanowires using ZnO catalyst points deposited by PLD through an NSL mask on a bare silicon substrate.     

Ordered Si/Si–O nanowire array and its optical properties

Glancing angle deposition (GLAD) has been employed to fabricate the Si/Si–O nanowires (NWs). The perpendicular NW on silicon substrate shows the amorphous nature. The visible light emission from the NWs was observed from the Si/Si–O nanoparticles. High light absorption inside the Si/Si–O NW structure was recorded.     

Nanoparticle-Coated Silicon Nanowires

The synthesis of silicon nanowires that are densely coated with silicon nanoparticles is reported. These structures were produced in a two-step process, using a method known as hypersonic plasma particle deposition. In the first step, a Ti–Si nanoparticle film was deposited. In the second step the Ti-source was switched off, and nanoparticle-coated nanowires grew under the simultaneous action of Si vapor deposition and bombardment by Si nanoparticles. Total process time, including both steps, equaled 5 min, and resulted in formation of a dense network of randomly oriented nanowires covering1.5 cm² of substrate area. The nanowires are composed of single-crystal Si. The diameters of the nanowires vary over the range 100–800 nm. Each nanowire has a crystalline TiSi₂ catalyst particle, believed to have been solid during nanowire growth, at its tip.     

A novel morphology of SiOx nanowires with a modified diameter

A novel morphology of SiO_x (x=1–2) nanowires was fabricated via a thermal evaporation method by heating pure silicon powder at 1373 K followed by depositing silicon vapor on a quartz-glass substrate which was coated with a catalyst precursor from a 0.005 M Fe(NO₃)₃ aqueous solution. At the deposition temperature, the catalyst particles aggregated and formed quasi-plates, from which a short Si rod grew outward on one side and a great deal of SiO_x nanowires projected outward on the other side, forming comet-like objects with long tails. The diameters of the nanowires gradually decreased with an increase in the distance from the catalyst plate. Received: 9 April 2001 / Accepted: 17 October 2001 / Published online: 23 January 2002     

X射线光电子能谱法研究硅纳米线的能带结构

制备了氧辅助热分解法,以一氧化硅为原料,以氩气为载气,维持管内压强为1000Pa,在高温炉中于1250℃下反应5 h后得到硅纳米线。硅纳米线经5%氢氟酸水溶液处理5 min后,与1×10-3 mol·L-1的氯化金溶液中反应5 min,在硅纳米线的表面上修饰了金纳米粒子,用X射线粉末衍射表征了产物的结构,同时观察到单质硅和金的XRD图谱;用电子扫描和透射显微镜观察了产物的形貌,表明氧辅助方法可制得大量均匀的硅纳米线,修饰在硅纳米线上的金纳米点形状整齐,尺寸均匀,平均直径约8 nm;并用X射线光电子能谱分析了修饰过程中能带结构的变化。结果表明,金纳米粒子表面带负电,它在施主能级和受主能级上都有电子存在;由于氧杂质的存在,硅纳米线的费米能级移向价带顶。     

Horizontal InAs nanowire transistors grown on patterned silicon-on-insulator substrate

High-density horizontal InAs nanowire transistors are fabricated on the interdigital silicon-on-insulator substrate. Hexagonal InAs nanowires are uniformly grown between face-to-face (111) vertical sidewalls of neighboring Si fingers by metal-organic chemical vapor deposition. The density of InAs nanowires is high up to 32 per group of silicon fingers, namely an average of 4 nanowires per micrometer. The electrical characteristics with a higher on/off current ratio of 2×10⁵ are obtained at room temperature. The silicon-based horizontal InAs nanowire transistors are very promising for future high-performance circuits.     

Si纳米线的固-液-固可控生长及其形成机理分析

以Au膜作为金属催化剂,直接从n-(111)Si单晶衬底上制备了直径为30—60nm和长度从几微米到几十微米的高质量Si纳米线.实验研究了Au膜层厚、退火温度、N2气流量和生长时间对Si纳米线形成的影响.结果表明,通过合理选择和优化组合上述各种工艺条件,可以实现直径、长度、形状和取向可控的纳米线生长.基于固-液-固生长机理,定性阐述了Si纳米线的形成过程.