蒙特卡罗模拟金刚石薄膜化学气相沉积过程中甲烷浓度的影响

本工作采用蒙特卡罗模拟,研究了以CH4/H2气体混合物作为源料气体的电子辅助热丝化学气相沉积中甲烷浓度对气相沉积过程的影响.计算了典型实验条件下电子能量分布,研究了电子平均能量、碎片H及CH3数目的空间分布、H与CH3的比值及CH3携带的能量随甲烷浓度的变化.结果表明:当电子能量为2-3eV时,电子的数密度达到一峰值;平均电子能量随着甲烷浓度的增加而增加;电子与气体分子碰撞产生的碎片H、CH3和CH2的数密度随距热丝的距离而变化;随着甲烷浓度的增加,原子氢H的数目缓慢下降,然而,官能团CH3和CH2的数目缓慢上升;H与CH3的数量比随甲烷浓度的增加而减少;碎片CH3携带的能量处于1～5eV范围之内,且当甲烷浓度为1.3;时,该能量达到一最值.     

衬底温度对nc-Si∶H薄膜微结构和氢键合特征的影响

采用射频等离子体增强型化学气相沉积(RF-PECVD)技术,以H2和SiH4作为反应气体源,在不同的衬底温度下沉积了nc-Si∶H薄膜.采用Raman散射、X射线衍射、红外吸收等技术分析了薄膜的微结构和氢键合特征.结果表明,随衬底温度的升高,nc-Si∶H薄膜的沉积速率不断增大,晶化率和晶粒尺寸增加,纳米硅颗粒呈现出Si(111)晶面的择优生长趋势.键合特性显示,薄膜中的氢含量随衬底温度升高而逐渐减小,薄膜均匀性先增大后减小.     

CVD金刚石薄膜表面的缺陷研究

用SEM方法观察分析了CVD金刚石薄膜表面的缺陷形貌和结构,直观的两种缺陷为孪晶和孔洞.孪晶反映了晶粒的不完整性,它的产生取决于气相中活性分子的浓度与生长表面活性位数目的比值,孪晶比率随碳源浓度升高和衬底温度的降低而增大;孔洞反映了膜的不致密性,其产生与膜生长速率和衬底表面初始成核密度切相关,孔洞密度随碳源浓度升高和衬底温度的升高而增大.     

PECVD法制备不同衬底微晶硅薄膜的研究

采用等离子体增强化学气相沉积(PECVD)法分别在玻璃衬底和p型薄膜硅衬底上制备了微晶硅薄膜。使用拉曼谱仪、紫外-可见分光光度计、傅里叶红外光谱仪等对微晶硅薄膜进行检测,重点研究了硅烷浓度、衬底温度对薄膜沉积速率和晶化率的影响。实验结果表明:两种衬底上薄膜的沉积速率均随硅烷浓度的增大、衬底温度的升高而变大。硅烷浓度对两种衬底的薄膜晶化率影响规律相同,即均随其升高而降低;但两种衬底的衬底温度影响规律存在差别:对玻璃衬底而言,温度升高,样品晶化率减小;而p型薄膜硅衬底则在温度升高时,样品晶化率先增大后减小。此外还发现,晶化率与薄膜光学性能及含氧量存在较密切关联。     

(111)择优取向ZnS薄膜的制备及特性研究

采用激光分子束外延技术在Al2O3衬底上成功外延生长了ZnS薄膜.用X射线衍射、扫描电子显微镜和光致发光谱表征了衬底温度对薄膜结构、形貌和光学特性的影响.结果表明所生长的ZnS薄膜为闪锌矿,具有(111)择优长向,随衬底温度的升高,X射线衍射峰的半高宽先减小后增大,在衬底温度为300℃时,半高宽最窄.薄膜结构致密,表面不平整度随衬底温度的升高而增大.薄膜的带隙随衬底温度的升高出现蓝移,可见光区域透射率最高达到98;,在360 nm激发波长下,观测到402 nm和468 nm两个发光带,衬底温度为300℃时,发光最强.     

VHF-PECVD制备微晶硅薄膜及其微结构表征研究

采用VHF-PECVD技术制备了系列不同衬底温度的硅薄膜.运用微区拉曼散射(Micro-Raman)和X射线衍射(XRD)对薄膜进行了结构方面的测试分析.Micro-Raman测试结果表明:随衬底温度的升高,薄膜逐渐由非晶向微晶过渡,晶化率(Xc)逐渐增大.XRD的结果显示样品的择优取向随衬底温度的升高而变化,(220)方向计算得出样品的晶粒尺寸逐渐变大.     

工艺参数对飞秒激光沉积硅基ZnO大面积均匀薄膜性能的影响

研究了衬底温度、真空度、激光能量、激光脉冲频率及退火处理对飞秒激光制备硅基ZnO大面积均匀薄膜的结构和性能的影响.结果表明,当激光能量为1.5mJ、脉冲频率为400 Hz、真空度为1.0 mPa、衬底温度为80℃时,所制备的薄膜质量最佳.薄膜呈高度c-轴取向,为典型的六方纤锌矿结构,晶粒沿垂直于衬底表面的方向生长;当衬底温度高于80℃时,随着温度的升高,c-轴取向度降低.80℃制备的薄膜在可见紫外区域透过率达98;,电阻率随温度升高而减小,退火后薄膜的透过率增大、电阻率升高.     

衬底温度对共蒸发制备GaSb多晶薄膜性质的影响

采用共蒸发的方法在玻璃衬底上制备出GaSb多晶薄膜材料.研究了薄膜生长速率与衬底温度、Ga源温度和Sb源温度的关系.通过XRD、UV-Vis、Hall效应和AFM等测试方法,研究了衬底温度对于GaSb薄膜的结构特性、光电性质以及表面形貌的影响.GaSb多晶薄膜具有(111)择优取向,薄膜的吸收系数达到105 cm-1,晶粒尺寸随衬底温度升高逐渐增大;衬底温度为540℃时,薄膜的迁移率达到127 cm2/V·s,空穴浓度为3×1017 cm-3.GaSb薄膜的表面粗糙度随温度增加而增加.     

衬底温度对氢化非晶硅薄膜特性的影响

采用等离子增强化学气相沉积(PECVD)系统,以乙硅烷和氢气为气源,石英玻璃和单晶硅片为衬底制备了氢化非晶硅(a-Si∶ H)薄膜.采用扫描电子显微镜、X-射线衍射仪、台阶仪、紫外可见分光光度计、傅里叶变换红外光谱仪和电子能谱仪等分别表征了a-Si∶H薄膜的表面形貌、结晶特性、沉积速率,光学带隙,键合结构和Si化合态等特性.结果表明:随着衬底温度的增加,a-Si∶H薄膜表面的颗粒尺寸减小,均匀性增加,沉积速率则逐渐降低;衬底温度从80℃增加到130℃时,光学带隙显著增加,而在130℃至230℃范围内,光学带隙基本不随衬底温度变化;以SiH键对应的伸缩振动的相对峰强度逐渐增加,而以SiH2或(SiH2)n键对应的伸缩振动的相对强度逐渐减小;a-Si∶H薄膜中Si0+态的相对含量增加.因此,衬底温度大于130℃有利于制备优质a-Si∶H薄膜,230℃是沉积a-Si∶H薄膜的最佳衬底温度.     

电子辅助热丝化学气相沉积金刚石薄膜中氢原子谱线与最佳成膜条件

采用蒙特卡罗方法,对以CH4／H2混合气体为源气体的EACVD中的氢原子发射过程进行了模拟。研究了不同实验条件下产生的H、CH3的数目与氢原子谱线相对强度的关系,给出了一种利用氢原子谱线来获得最佳成膜实验条件的方法。本工作对于有效控制工艺条件,生长出高质量的金刚石薄膜具有重要意义。     

A review of measurement of thermophysical properties of silicon melt

Measurements of thermophysical properties of Si melt and supplementary study of X-ray scattering/diffraction by the authors' group were reviewed. The values obtained differed variously from those of literature. Density was 2–3% larger, surface tension 20–30% smaller, viscosity up to 40% larger, electrical conductivity 8% smaller, spectral emissivity more or less in good agreement with literature values, and thermal diffusivity a few percent larger. An anomalous density jump was found near the melting point. Surface tension and viscosity also showed anomaly. A strange time-dependent change of density was observed over 3 h after melting. X-ray analyses suggested a slight change in local atom ordering, but showed no sign of cluster formation. An addition of 0.1 at% gallium caused the density jump to disappear, while that of boron caused no change. An EXAFS study of the former melt indicated a strong interaction between Ga and Si atoms as if molecules of GaSi₃ existed. The implications of the measured properties are a possibility of soft-turbulence in an Si melt in a relatively large crucible, a more complicated manner of intake of oxygen depleted molten Si from the free surface region to underneath the growing crystal, and a relaxation of the melt after melting arising from trapped gas species.     

Effect of alumina on enthalpy of mixing of mixed alkali silicate glasses

The enthalpy of mixing of mixed alkali (Na₂O and K₂O) silicate glasses containing various concentrations of alumina was determined using an ion-exchange equilibrium method. For glasses with a constant alkali concentration, the enthalpy of mixing was found to become less negative with alumina addition. Consistent with our previous results on the enthalpy of mixing of alumina-free mixed alkali silicate glasses, the magnitude of enthalpy of mixing exhibited a good correlation with the molar volume mismatch of the corresponding two single alkali glasses as well as with the extent of conductivity mixed alkali effect, e.g. excess activation energy of conductivity, ΔE. The reduction of the magnitude of the enthalpy of mixing with alumina addition can be attributed to the reduction of non-bridging oxygen and ionic field strength. Combining the present results with results obtained earlier, the magnitude of the enthalpy of mixing for all mixed alkali (Na₂O and K₂O) silicate glasses with and without alumina was expressed by a simple function of a modified Tobolsky parameter, which takes into account the alkali concentration and the difference in cation-to-effective anion distances. The enthalpy of mixing data of the mixed alkali glasses was then compared with reported experimental data on the conductivity of mixed alkali aluminosilicate glasses. What appears to be conflicting experimental data can be understood in terms of the magnitude of the enthalpy of mixing and we can conclude that the mixed alkali effect is closely correlated with the negative enthalpy of mixing.     

Mesomorphism Dependence on the Position of Substitution of a Pair of Esters

A novel homologous series of ethylene derivatives of thermotropic liquid crystals has been synthesized. The methoxy to octyloxy derivatives are nematogenic, the decyloxy to tetradecyloxy derivatives are smectogenic, in addition to nematogenic, and the hexadecyloxy homologue is smectogenic only. All the members of the series are enantiotropically mesogenic. Thermotropic behavior was determined by an optical polarizing microscope equipped with a heating stage and Differential Scanning Calorimetry (DSC) study. Analytical and spectral data confirm the molecular structures of homologues (infrared, nuclear magnetic resonance, mass spectra, X-ray, and DSC data). Textures of the nematic phase are threaded or Schlieren and that of smectic phase are focal conic fan-shaped of smectic A or C. Transition curves of the phase diagram behave in a normal manner except one or two deviations from the normal trend. The mesophase range (Sm+N) varies from 3°C to 44°C. The average thermal stability for smectic is 93°C and that for nematic 117.4°C. The LC behavior of the novel series is compared with a structurally similar known series.     

原位氮化法制备TiN纳米粉体

用溶胶凝胶法合成的纳米TiO2粉体作为原料,将该粉体在氨气中进行原位氮化制备了TiN纳米粉体.用XRD,TEM,化学分析等手段对合成的TiN纳米粉体的物相组成、形貌、成分进行了分析.实验分析表明:在1000℃和1100℃下分别氮化5h,可以制备粒径大约为40nm和80nm的TiN粉体,其TiN的含量分别为95.40;和98.37;;而在1000℃条件下氮化时间减少到2h时,TiN的含量仅为58.36;.氮化温度和氮化时间是合成纳米TiN的重要因素,提高合成温度和延长氮化时间均可形成纯度较高的TiN纳米粉体,但延长氮化时间更有利于获得粒径小的氮化钛粉体.     

立方晶系晶体本征铁弹相变序参量的选取

在本征铁弹相变的软模理论的基础上,依据弹性本构关系和居里原理,给出了立方晶系晶体所有可能的自发应变的种类,研究了立方晶系晶体本征铁弹相变序参量的选取问题.以Th群和Oh群为例,阐明了不同类的序参量导致晶体对称性变化相同的的原因,提出了该情况下序参量选取的“就少不就多”的原则.得到了发生本征铁弹相变时所有可能的序参量及晶体的对称性的变化.     

On the influence of structural features of DNA on the possibility of metabolic transfer of electrons

Abstract

A fragment of a DNA molecule is considered as one of the channels of metabolic electron transfer. The heterogeneity of the complementary chains is effectively taken into account. This made it possible to find the speed of the electron injected into the DNA conduction band and the current density that it creates. Estimates of electron mobility in nucleic acid chains are made. They were an order of magnitude smaller than that of typical semiconductors. For the specific conductivity of nucleic acid chains, estimates provide a conductivity of one to two orders of magnitude lower than in graphite.     

Features of transformations in REE-containing systems of nitrate precursors in preparatory processes of formation of multifunctional oxide materials

Abstract

The complex study provides a reliable idea of ??the trends in the joint behavior of structural components in the water-salt systems of nitrate precursors of REE, alkaline, alkaline earth metals in the preparatory stages of the processes of forming multicomponent oxide polyfunctional materials on their basis with thermal activation. Stages of such transformations are revealed; The regularities of complex and phase formation in systems and factors influencing them are determined; A number of physicochemical properties of the intermediate phases formed - coordination lanthanides nitrates: their composition, types of compounds, atomic-crystalline structure, regularities of transformations during heat treatment were studied.     

Growth and characterization of semicarbazone of cyclohexanone

A new organic single crystal of semicarbazone of cyclohexanone (SCCH) has been synthesized and grown as a bulk single crystal by low temperature solution growth technique for the first time in the literature. The grown crystal has been confirmed by X‐ray diffraction and proton nuclear magnetic resonance spectral analyses and also characterized by FT‐ir and FT‐Raman studies. Thermal properties of the grown crystals were studied by thermogravimetric and differential thermal analyses. Optical transmittance was studied by ultraviolet‐visible spectrum and the second harmonic generation property was tested by using Q switched Nd: YAG laser as a source. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Influence of density of states on optical properties of GaSe thin film

A systematic investigation on the effect of substrate temperature on the structure, optical absorption and density of states of vacuum evaporated gallium monoselenide (GaSe) thin films is reported. The X‐ray diffraction analysis shows an occurrence of amorphous to polycrystalline transformation in the films deposited at higher‐temperature substrates (573K). The compositional analysis is made with Auger Electron Spectroscopy (AES). The thickness of the film (175nm) is measured by a multiple beam interferometery. Optical characteristics of the GaSe sample have been analyzed using spectrophotometer in the photon energy range of 1.0 ‐ 4 eV. The absorption mechanism has been recognized and the allowed indirect as well as forbidden direct transitions have been found. As‐deposited films show two indirect and allowed transitions due to spin‐orbit splitting of the valence band, as reported here for the first time. Low field conduction have enabled us to determine the density of states in amorphous and poly‐GaSe films. The amorphous and polycrystalline GaSe thin films have localized states density values of N (E_F) = 1.686 × 10¹⁷ cm^‐3 eV^‐1 and 1.257 × 10¹⁵ cm^‐3 eV^‐1 respectively. The experimental results are interpreted in terms of variations in the density of localized states due to progressive decrease of the unsaturated bonds during deposition. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

电子显微分析在表征纳米晶体化学组分中的应用

纳米材料的化学组分及含量影响其光、电、声、热、磁等物理性能,电子显微分析是表征纳米晶体化学组分的重要方法之一.本文综述了X-射线能谱(EDS)、X-射线波谱(WDS)、电子能量损失谱(EELS)和选区电子衍射(SAED)等现代电子显微分析技术在表征纳米晶体化学组分、形貌、尺寸和结构等方面的应用及其研究进展,并比较了这些分析方法存在的差异,提出了其应用中存在的不足及今后的研发方向.