Depth profile characterization of Zn-TiO2 nanocomposite films by pulsed radiofrequency glow discharge-optical emission spectrometry

In recent years particular effort is being devoted towards the development of radiofrequency (rf) pulsed glow discharges (GDs) coupled to optical emission spectrometry (OES) for depth profile analysis of materials with technological interest. In this work, pulsed rf-GD-OES is investigated for the fast and sensitive depth characterization of Zn-TiO₂ nanocomposite films deposited on conductive substrates (Ti and steel). The first part of this work focuses on assessing the advantages of pulsed GDs, in comparison with the continuous GD, in terms of analytical emission intensities and emission yields. Next, the capability of pulsed rf-GD-OES for determination of thickness and compositional depth profiles is demonstrated by resorting to a simple multi-matrix calibration procedure. A rf forward power of 75 W, a pressure of 600 Pa, 10 kHz pulse frequency and 50% duty cycle were selected as GD operation parameters.Quantitative depth profiles obtained with the GD proposed methodology for Zn-TiO₂ nanocomposite films, prepared by the occlusion electrodeposition method using pulsed reverse current electrolysis, have proved to be in good agreement with results achieved by complementary techniques, including scanning electron microscopy and inductively coupled plasma-mass spectrometry. The work carried out demonstrates that pulsed rf-GD-OES is a promising tool for the fast analytical characterization of nanocomposite films.     

Pulsed rf-GD-TOFMS for depth profile analysis of ultrathin layers using the analyte prepeak region

Direct solid analysis of ultrathin layers is investigated using pulsed radiofrequency (rf) glow discharge (GD) time-of-flight mass spectrometry (TOFMS). In particular, previous studies have always integrated the detected ion signals in the afterglow region of the rf-GD pulse, which is known to be the most sensitive one. Nevertheless, the analytical capabilities of other pulse time regions have not been evaluated in detail. Therefore, in this work, we investigate the analyte prepeak region, which is the pulse region where the analyte ions peak after the initial sputtering process of each GD pulse, aiming at obtaining improved depth profile analysis with high depth resolution and with minimum polyatomic spectral interferences. To perform these studies, challenging ultrathin Si-Co bilayers deposited on a Si substrate were investigated. The thickness of the external Si layer was 30 nm for all the samples, whilst the internal Co layer thicknesses were 30, 10, 5, 2 and 1 nm, respectively. It should be remarked that the top layer and the substrate have the same matrix composition (Si > 99.99%). Therefore, the selected samples are suitable to evaluate the response of the Si ion signal in the presence of an ultrathin Co layer as well as the possible oxygen contaminations or its reactions. Additionally, these samples have been evaluated using time-of-flight secondary ion mass spectrometry, and the results compare well to those obtained by our pulsed rf-GD time-of-flight mass spectrometry results.     

Use of radiofrequency power to enable glow discharge optical emission spectroscopy ultrafast elemental mapping of combinatorial libraries with nonconductive components: nitrogen-based materials

Combinatorial chemistry and high-throughput techniques are an efficient way of exploring optimal values of elemental composition. Optimal composition can result in high performance in a sequence of material synthesis and characterization. Materials combinatorial libraries are typically encountered in the form of a thin film composition gradient which is produced by simultaneous material deposition on a substrate from two or more sources that are spatially separated and chemically different. Fast spatially resolved techniques are needed to characterize structure, composition, and relevant properties of these combinatorial screening samples. In this work, the capability of a glow discharge optical emission spectroscopy (GD-OES) elemental mapping system is extended to nitrogen-based combinatorial libraries with nonconductive components through the use of pulsed radiofrequency power. The effects of operating parameters of the glow discharge and detection system on the achievable spatial resolution were investigated as it is the first time that an rf source is coupled to a setup featuring a push-broom hyperspectral imaging system and a restrictive anode tube GD source. Spatial-resolution optimized conditions were then used to characterize an aluminum nitride/chromium nitride thin-film composition spread. Qualitative elemental maps could be obtained within 16.8 s, orders of magnitude faster than typical techniques. The use of certified reference materials allowed quantitative elemental analysis maps to be extracted from the emission intensity images. Moreover, the quantitative procedure allowed correcting for the inherent emission intensity inhomogeneity in GD-OES. The results are compared to quantitative depth profiles obtained with a commercial GD-OES instrument.     

Polymer screening by radiofrequency glow discharge time-of-flight mass spectrometry

The aim of this work is to optimise and evaluate radiofrequency glow discharge (RF GD) time-of-flight mass spectrometry (TOFMS) for identification of organic polymers. For this purpose, different polymers including poly[methylmethacrylate], poly[styrene], polyethylene terephthalate-co-isophthalate and poly[alpha-methylstyrene] have been deposited on silicon wafers and the RF GD-TOFMS capabilities for qualitative identification of these polymeric layers by molecular depth profiling have been investigated. Although some molecular information using the RF continuous mode is available, the pulsed mode offers a greater analytical potential to characterise such organic coatings. Some formed polyatomic ions have proved to be useful to identify the different polymer layers, confirming that layers having similar elemental composition but different polymer structure could be also differentiated and identified.     

Improving pulsed radiofrequency glow discharge for time-of-flight mass spectrometry simultaneous elemental and molecular analysis

The performance of radiofrequency (rf) millisecond pulsed glow discharge (PGD) coupled to a fast orthogonal time-of-flight mass spectrometer (TOFMS) for chemical characterization and quantification of organic volatile compounds was investigated by using two different GD chamber designs. The designs investigated had substantial differences in the way that the volatile organic compound is introduced into the GD and the distance between the cathode and the sampling cone of the mass spectrometer. Bromochloromethane was selected as the model analyte because of the practical interest of determining trihalomethanes at low concentrations, and also because of both its low boiling point (to avoid problems associated with condensations in the interface) and the fact that it has two different heteroatoms, making the fragmentation patterns easier to follow. Pulse shapes of element, fragment, and molecular parent ions obtained by using the two GD chambers under investigation were critically compared. Results revealed the critical effect of the GD chamber geometry in obtaining the three types of chemical information, temporally discriminated. The spectra of the gaseous samples and of a polymer containing TBBPA (solid sample) were also compared. Detection limits for bromochloromethane in the order of low ng L^?1, and the required high tolerance of the plasmas to the introduction of organic vapours, were achieved using one of the proposed GD designs. The capability of the designed system for the analysis of other volatile compounds, for example dimethyl disulfide and dimethyl selenide, was also successfully evaluated, making use of the analytical potential of the information obtained from the different pulse time regions. Figure

?     

Depth profiling with modified dc-Grimm and rf-Grimm-type glow discharges operated with high gas flow rates and coupled to a high-resolution mass spectrometer

The improved analytical capability of direct-current (dc) and radiofrequency (rf) fast flow glow discharges coupled to a sector field mass spectrometer (GD-SFMS) are presented. In particular, the effect of GD chamber design has been studied to obtain suitable crater shapes for depth-profile analysis of solid samples while maintaining the high sensitivity and stability of this source. In this study it was observed that the distance between the sample surface and the end of the flow tube is critical and so careful optimisation is needed. Under optimum conditions plane crater profiles, with high ion-signal sensitivity and sufficient stability, were obtained. The capability to determine qualitative and semi-quantitative depth profiles is presented here using, as model, a coated sample of certified thickness. Finally, the depth resolution achieved for qualitative depth profiles obtained by rf-GD-(SF)MS is compared with that for the well-established rf-GD optical emission spectroscopy (OES) technique.Dedicated to the memory of Wilhelm Fresenius     

Arsenic and antimony determination by on-line flow hydride generation–glow discharge–optical emission detection

Hollow cathode (HC) and conventional flat cathode (FC) glow discharge (GD) optical emission spectrometry (OES) were used as detectors for the determination of arsenic and antimony by on-line hydride generation (HG) in a flow system. Both radiofrequency (rf) and direct current (dc) sources were investigated to produce the discharge. The design of the HC and FC and also the parameters governing the discharge (pressure, He flow rate, voltage, current and delivered power) and the HG (sodium borohydride concentration and reagent flow rates) were investigated using both cathodes. The analytical performance characteristics of HG–GD–OES with HC and FC were evaluated for some emission lines of arsenic (193.7, 200.3, 228.8 and 234.9 nm). The best detection limit (0.2 μg l⁻¹) was obtained when the emission line of 228.8 nm was used with FC. Under the same arsenic optimized experimental conditions, the system was evaluated to determine antimony at 259.7, 252.7 and 231.1 nm, 252.7 nm being the emission line which produced the best detection limit (0.7 μg l⁻¹). The rf-HC–GD–OES system was applied successfully to the determination of arsenic in freeze-dried urine in the standard reference material 2670 from NIST. Finally, a flow injection system was assayed to determine arsenic at 228.8 nm, using a dc-GD with both FC and HC. The results indicated that for low volumes of sample, the HC discharge allows better analytical signals than the FC.     

Critical evaluation of the potential of radiofrequency pulsed glow discharge–time-of-flight mass spectrometry for depth-profile analysis of innovative materials

The combination of radiofrequency pulsed glow discharge (RF-PGD) analytical plasmas with time-of-flight mass spectrometry (TOFMS) has promoted the applicability of this ion source to direct analysis of innovative materials. In this sense, this emerging technique enables multi-elemental depth profiling with high depth resolution and sensitivity, and simultaneous production of elemental, structural, and molecular information. The analytical potential and trends of this technique are critically presented, including comparison with other complementary and well-established techniques (e.g. SIMS, GD–OES, etc.). An overview of recent applications of RF-PGD–TOFMS is given, including analysis of nano-structured materials, coated-glasses, photovoltaic materials, and polymer coatings     

Quantitative determination of carbon concentration profiles by GD‐OES for the study of decarburization in low‐carbon steels

In this study, the quantification of decarburization induced during the annealing process for the fabrication of electrical steels was carried out using glow discharge optical emission spectroscopy (GD‐OES). Different calibration methods, based on external and internal standard references, were examined to optimize the quantification of carbon concentration. Accurate calibration curves for carbon at low concentration ranges were achieved by the use of carbon intensity calibrated by the internal reference, i.e. iron intensity line. This methodology was found to be beneficial for long GD‐OES measurements, providing a better correction over changes in the overall emission intensity with the sputter time. The good depth resolution obtained by the GD‐OES technique enabled the identification of specific features in the steel microstructure related to carbide coarseness. Quantitative carbon concentration profiles were obtained by GD‐OES to evaluate the decarburization effect on the microstructure of low‐carbon steels considering different initial microstructures. The effect of the spatial distribution of carbides in these microstructures on the decarburization kinetics was also studied. Through quantitative determination of carbon elemental profiles by GD‐OES, information about the morphology of the cementite in the microstructure and its development in relation to decarburization was acquired. The depth of decarburization can accurately be determined. On the basis of the global results, GD‐OES thus emerged as being a fast and reliable technique for a better understanding of decarburization kinetics. Copyright © 2015 John Wiley & Sons, Ltd.     

Quantitative depth profiling in glow discharge spectroscopies – A new deconvolution technique to separate effects of an uneven erosion crater shape

An algorithm is presented as a concept for the quantification in direct current and radiofrequency glow discharge (GD) modes for GD optical emission spectroscopy. The algorithm is divided into excitation and sputtering part and thus it is possible to distinguish between the different excitation processes and to consider equivalent sputtering crater formations in both modes. Intensity-time profiles are affected corresponding to the method by several effects. One important effect is that sputtering occurs at a single time in different depths because of curved crater bottoms, this is usually called crater effect. The main purpose is to introduce an iterative deconvolution technique which for the quantification numerically takes into account the curved sputtering crater bottom. Input data for the deconvolution technique are the calibrated mass-time profile, the partial densities of the sample constituents and the measured final shape of the sputtering crater. Using a relatively simple model for ion sputtering the deconvolution technique improves iteratively the calculated layer structure by means of information on crater formation. The mathematical handling is illustrated for the quantification of a depth profile of a multilayer sample of ten 100 nm layers. The resulting concentration-depth profile reflects excellently the real elemental distribution of the multilayer system.     

Depth profiling analysis of thick Ni- and Co-doped oxide layers on Cr-based alloys of the interconnector of a solid oxide fuel cell using rf GDMS

A radiofrequency glow discharge ion source designed in our laboratory was coupled to a commercial double-focusing mass spectrometer in the original mode with an inductively coupled plasma ion source. This modification of rf GDMS extends the analytical capability of the mass spectrometer with ICP for the analysis of liquids to the direct analysis of insulating, semiconducting and conducting solids in the whole range of conductivity.The analytical procedure of the depth profiling analysis of the oxide coating of chromium-based alloys used as interconnectors in SOFC technology was discussed. The investigation of the depth profiles of Ni and Co in the thick oxide layers on the surface of Ni- and Co-doped alloys showed that the incorporation of these elements into the oxide during oxidation at 950°C is uniform.     

New hardware for radio frequency powered glow discharge spectroscopies and its capabilities for analytical applications

A new radio frequency (rf) hardware is developed for glow discharge spectroscopic methods. The resulting features and its capabilities for analytical applications are discussed. The electrical equipment developed allows to work as quickly, stably, reliably and easily as known from the direct current (dc) mode. Moreover, the rf power measurement has been improved. The hardware has been developed, optimised and tested for glow discharge optical emission spectroscopy (GDOES), but nevertheless it is possible to use it for all procedures applying glow discharge sources.     

New hardware for radio frequency powered glow discharge spectroscopies and its capabilities for analytical applications

A new radio frequency (rf) hardware is developed for glow discharge spectroscopic methods. The resulting features and its capabilities for analytical applications are discussed. The electrical equipment developed allows to work as quickly, stably, reliably and easily as known from the direct current (dc) mode. Moreover, the rf power measurement has been improved. The hardware has been developed, optimised and tested for glow discharge optical emission spectroscopy (GDOES), but nevertheless it is possible to use it for all procedures applying glow discharge sources.     

Lithium-fusion sample preparation method for radio frequency glow discharge optical emission spectroscopy (rf-GD-OES): analysis of coal ash specimens

The use of lithium-fusion sample preparation methods for the analysis of powder-form specimens by radio frequency glow discharge optical emission spectroscopy (rf-GD-OES) has been evaluated for the test case of coal ash samples. The development of an elemental analysis technique for chemically complex coal ashes presents a challenge in terms of having simple sample preparation, providing accurate results, and minimizing analysis time. The adopted sample preparation procedure for the coal specimens involved a standard lithium fusion methodology. This procedure circumvents many problems associated with the common compaction methods employed for GD analysis of inorganic powders. It was found that coal ashes prepared as glass disks using a mixture of lithium compounds as the host matrix and analyzed by rf-GD-OES provide good plasma stabilization, with analyte optical emission signals stabilizing in ∼1 min and exhibiting ∼2% RSD variations for sputtering times of up to 10 min thereafter. The evaluation of discharge operating parameters and the assessment of approaches to quantitative analysis were also investigated. Discharge parameters of an rf power of 30 W and an Ar discharge gas pressure of 4 Torr yielded rapid signal stabilization and optimized S/B ratios. Sample-to-sample precision of better than 7% RSD was achieved for repetitive samplings (in the same sample locations) for species present at the parts-per-million level in the sample. Limits of quantification could not be adequately evaluated as the levels of the target analytes in the fusion components (i.e. lithium compounds) were above the method detection limit. It is believed that the general methodology holds promise for rf-GD analysis of a range of inorganic solids in powder form.     

Pulsed remote Raman system for daytime measurements of mineral spectra

A remote Raman system has been developed utilizing a 532nm pulsed laser and gated intensified charged couple device (ICCD) detector in the oblique geometry. When the system is set for 50m sample distance it is capable of measuring Raman spectra of minerals located at distances in the range of 10-65m from the telescope. Both daytime and nighttime operations are feasible and the spectra of minerals can be measured in a short period of time, of the order of a few seconds. In oblique geometry, measured sampling depth is more than 30m, during which the system maintains very high performance without any adjustments. Much longer sampling depth (0.1-120m) has been observed when the system is configured in the coaxial geometry. Clear advantages of using a gated detection mode over the continuous (CW) mode of operation in reducing the background signal and eliminating long-lived fluorescence signals from the Raman spectra are presented. The performance of the pulsed Raman system is demonstrated by measuring spectra of Raman standards including benzene (C(6)H(6)) and naphthalene (C(10)H(8)), a low Raman cross section silicate mineral muscovite (KAl(2)(Si(3)Al)O(10)(OH)(2)), and a medium Raman cross section mineral calcite (CaCO(3)).     

Surface topography effects on glow discharge depth profiling analysis

Glow discharge optical emission spectroscopy (GD‐OES) has been shown to be of immense value in elemental depth profiling of thin or thick films on conductive or non‐conductive substrates. For aluminium, GD‐OES has been employed to examine locations of markers and tracers in anodic films, thereby assisting understanding of transport phenomena. In order to investigate the influence of surface topography on depth profiling analysis, anodic aluminium oxide films of various thicknesses, with incorporated electrolyte species, were produced on superpure aluminium substrates of controlled roughnesses. The distributions of incorporated species in the films were subsequently probed. Surface topography modifications and consequent depth resolution degradation were examined during depth profiling analysis performed by GD‐OES. The results reveal that the sputtering process leads to the roughening or smoothing of the surface topography of the specimen for a ratio of the film thickness to the amplitude of the substrate texture less, or greater, than 1 respectively. As a consequence of the surface topography dependence of the ion bombardment, analysis of thin films over rough surfaces suffers from depth resolution limitations due to sputtering‐induced topography changes, thereby limiting quantification of the resultant spectra. Copyright © 2010 John Wiley & Sons, Ltd.     

Analytical potential of a laser ablation–glow discharge–optical emission spectrometry system for the analysis of conducting and insulating materials

The analytical capabilities of a glow discharge (GD) as a secondary source for excitation/ionization of the material provided by laser ablation (LA) have been compared to conventional laser induced breakdown spectroscopy (LIBS). In LA–GD both sources can be independently adjusted to optimize the sampling process and then its subsequent excitation. This could involve a number of analytical performance advantages, such as reduced matrix dependence, greater precision and sensitivity than those encountered in LIBS. For such purpose, an ablation chamber design including two electrodes to generate the GD discharge has been built and assayed. A comparison between LIBS and LA–GD–OES has been carried out, both, under reduced argon and helium atmospheres. Different sets of samples (conducting reference materials, glass and fluorine pellets) have been used to evaluate the novel coupled technique. The LA–GD coupled system has shown to provide lower detection limits. In addition, best linear correlations between intensities and concentrations and lower matrix effects have also been found using the coupled system. Moreover, special advantages of the LA–GD–OES have also been demonstrated for the analysis of fluorine.     

Study of the near‐surface of hot‐ and cold‐rolled AlMg0.5 aluminium alloy

Rolling is known to alter the surface properties of aluminium alloys and to introduce disturbed near‐surface microcrystalline layers. The near‐surfaces of mostly higher alloyed materials were investigated by various techniques, often combined with a study of their electrochemical behaviour. Cross‐sectional transmission electron microscopy (TEM), after ion milling or ultramicrotomy, indicated the presence of disturbed layers characterized by a refined grain structure, rolled‐in oxide particles and a fine distribution of intermetallics. Those rolled‐in oxide particles reduce the total reflectance of rolled Al alloys. Furthermore, various depth profiling techniques, such as AES, XPS, SIMS and qualitative glow discharge optical emission spectroscopy (GD‐OES) have been used to study the in‐depth behaviour of specific elements of rolled Al alloys. Here, the surface and near‐surface of AlMg0.5 (a commercially pure rolled Al alloy with addition of 0.5 wt.% Mg) after hot and cold rolling, and with and without additional annealing is studied with complementary analytical techniques. Focused ion beam thinning is introduced as a new method for preparing cross‐sectional TEM specimens of Al surfaces. Analytical cross‐sectional TEM is used to investigate the microstructure and composition. Measuring the total reflectance of progressively etched samples is used as an optical depth profiling method to derive the thickness of disturbed near‐surface layers. Quantitative r.f. GD‐OES depth profiling is introduced to study the in‐depth behaviour of alloying elements, as well as the incorporation of impurity elements within the disturbed layer. The GD‐OES depth profiles, total reflectance and cross‐sectional TEM analyses are correlated with SEM/energy‐dispersive x‐ray observations in GD‐OES craters. Copyright © 2005 John Wiley & Sons, Ltd.