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We present a systematic study of atmospheric chemical vapor deposition growth of carbon nanotubes (CNTs) on patterned, transition metal/GaAs samples employing methane as the carbon feedstock. Controlled CNT growth was found to occur from the exposed metal‐semiconductor interface, rather than from the metal or semiconductor surfaces themselves. A fast sample loading system allowed for a minimization of the exposure to high temperatures, thereby preventing excessive sample damage. The optimum growth temperature for CrNi/GaAs interfaces is 700 °C (at a methane flow rate of 700 sccm). Possible growth scenarios involving the Ni–As–Ga system and its interaction with C is discussed. Raman spectroscopy of the CNTs revealed the presence of pentagon–heptagon defects. Closer analysis of the spectra points towards a mixture of so‐called Haeckelite CNTs. Copyright © 2011 John Wiley & Sons, Ltd. 相似文献
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Shizhi Li Wu Huang Hongshun Yang Zhongshu Wang 《Plasma Chemistry and Plasma Processing》1984,4(3):147-161
Experiments indicate that the temperature in chemical vapor deposition (CVD) of TiN can be decreased from about 1000°C in
conventional CVD to about 500°C by the application of a D.C. nonequilibrium plasma. The hardness of the TiN film is greater
than 2000 kg/mm2 (Vickers). The effect of pressure, ratio of gas mixture, and discharge parameters on the film deposition rate, its hardness,
and microstructures has been studied. 相似文献
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István Vesselényi Krisztian Niesz Andrea Siska Zoltán Kónya Klara Hernadi János B. Nagy Imre Kiricsi 《Reaction Kinetics and Catalysis Letters》2001,74(2):329-336
Multiwall carbon nanotubes have been prepared by catalytic chemical vapor deposition (CCVD) method in high yield using various metals supported on different supports. Measurements by transmission electron microscopy (TEM) revealed the presence of high quality nanotubes on each catalyst, however, comparing the different catalysts in nanotube production it can be stated that beyond metals, the support also affects both the quality and the quantity of nanotubes. 相似文献
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Branching carbon nanotubes were synthesized by pyrolysis of acetylene at 700℃ over oxygen-free copper and γ-Al2O3-supported Cu unitary or Cu/Fe binary catalysts. The morphologies of the as-grown products were charac-terized by transmission electron microscopy. The results indicated that the branching structures were closely related to the Cu component of the catalysts. We proposed that the special electronic structure (3d104s1) of Cu play the crucial role in the formation of the heptagon defects related to the branching structures. 相似文献
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Vyacheslav O. Khavrus Nataliia V. Lemesh Svitlana V. Gordijchuk Andriy I. Tripolsky Tetyana S. Ivashchenko Mykola M. Biliy Peter E. Strizhak 《Reaction Kinetics and Catalysis Letters》2008,93(2):295-303
A simple method for producing unsupported nickel catalyst that can be used to synthesize multi-wall carbon nanotubes (MWNT)
has been developed. The yield of purified MWNTs is about 1.8 gmwnt/(gcat×h). 相似文献
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The chemical vapor deposition (CVD) of crystalline thin films of neodymium hexaboride (NdB6) was achieved using either nido ‐pentaborane(9) or nido ‐decaborane(14) with neodymium(III) chloride on different substrates. The highly crystalline NdB6 films were formed at relatively moderate temperatures (835 °C, ca. 1 µm/h) and were characterized by scanning electron microscopy, X‐ray emission spectroscopy, X‐ray diffraction and glow discharge mass spectrometry. The NdB6 polycrystalline films were found to be pure and uniform in composition in the bulk material. Depositions using CoCl2, NdCl3 and B5H9 as the CVD precursors resulted in the formation of a mixture of NdB6 and CoB phases, rather than the ternary phase. Copyright © 2008 John Wiley & Sons, Ltd. 相似文献
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Rein U Kirss 《应用有机金属化学》1992,6(8):609-617
Homoleptic allyl derivatives of many Main-Group and transition metals, M(C3H5)n, are readily available through one-pot syntheses using metal halides and allyl Grignard reagents or by alkylation of alkali-metal salts. The relatively low molecular weight of a C3H5 ligand contributes to high vapor pressures whilst the stability of the allyl radical is predicted to reduce decomposition temperatures. These compounds represent a class of volatile precursors for organometallic chemical vapor deposition (OMCVD) of thin films. Film growth studies using iridium, molybdenum, palladium, platinum, rhodium, selenium, tellurium and tungsten compounds are reviewed and the relationships between pyrolysis pathways and film purity are discussed. 相似文献
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A series of transition-metal sulfide one-dimensional (1D) nanostructures have been synthesized by means of a general atmospheric pressure, chemical vapor deposition (APCVD) strategy. Vapour-liquid-solid (VLS) and vapour-solid (VS) mechanisms, along with the results of SEM and TEM observations, were used to explain the formation of these nanostructures. The regularity of the growth in the direction of the hexagonal nanowire is explored; we find that it prefers to grow along (1 0 0), (1 1 0), or (0 0 x) directions owing to particular crystal structures. The adopted synthetic route was expected to provide abundant useful 1D building blocks for the research of mesoscopic physics and fabrication of nanoscale devices. 相似文献
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Large-scale MoS2 and WS2 inorganic fullerene-like (IF) nanostructures (onionlike nanoparticles, nanotubes) and elegant three-dimensional nanoflowers (NF) have been selectively prepared through an atmospheric pressure chemical vapor deposition (APCVD) process with the reaction of chlorides and sulfur. The morphologies were controlled by adjusting the deposition position, the deposition temperature, and the flux of the carrier gas. All of the nanostructures have been characterized by X-ray powder diffraction (XRD), transmission electron microscopy (TEM), and scanning electron microscopy (SEM). A reaction mechanism is proposed based on the experimental results. The surface area of MoS2 IF nanoparticles and the field-emission effect of as-prepared WS2 nanoflowers is reported. 相似文献
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The effect of pressure during thermal plasma chemical vapor deposition of diamond films has been investigated for a pressure range from 100 to 760 Torr. The maximum growth rate in our experiments occurs at 270 Torr for substrate temperatures around 1000°C. The existence of an optimum pressure for diamond deposition may he related to the balance between generation and recombination of atomic hydrogen and carbon-containing active species in front of the substrate. To estimate the concentrations of atomic hydrogen and methyl radicals under thermal plasma conditions, calculations based on thermodynamic equilibrium have been performed. This approximate evaluation provides useful guidelines because rapid diffusion results in a near frozen chemistry within the boundary layer. The effect of substrate pretreatment on diamond deposition depends on the type of substrate used. Two growth modes have been observed-layer growth and island growth of diamond crystals on various substrates. Screw dislocations have been observed in diamond deposition in thermal plasmas, and defects such as secondary nucleations are more concentrated along (III) directions than along (100) directions. 相似文献
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Dr. Sook Young Moon Dr. Woo Sik Kim 《Chemistry (Weinheim an der Bergstrasse, Germany)》2019,25(59):13635-13639
Synthesis of continuous spinnable carbon nanotube (CNT) fibers is the most promising method for producing CNT fibers for commercial applications. The floating-catalyst chemical vapor deposition (FC-CVD) method is a rapid process that achieves catalyst formation, CNT nucleation and growth, and aerogel-like sock formation within a few seconds. However, the formation mechanism is unknown. Herein, the progress of CNT fiber formation with bimetallic catalysts was studied, and the effect of catalyst composition to CNT fiber synthesis and their structural properties was investigated. In the case of bimetallic catalysts, the carbon source rapidly decomposes and generates various secondary hydrocarbon species, such as CH4, C2H4, C2H2, C3H6, and C4H10 whereas monometallic catalysts generate only CH4 and C2H4 on decomposition. CNT fiber formation with Fe1Ni0 begins about 400 mm from the reactor entrance, whereas CNT formation with Fe0.8Ni0.2 and Fe0.5Ni0.5 begins at about 500 and 300 mm, respectively. The formed CNT bundles and individual CNTs are oriented along the gas flow at these locations. The enhanced rate of fiber formation and lowering of growth temperature associated with bimetallic catalysts is explained by the synergistic effects between the two metals. The synthesized CNTs become predominantly semiconducting with increasing Ni contents. 相似文献