Yields and ionization probabilities of sputtered Inn particles under atomic and polyatomic Aum ion bombardment

The emission of neutral and charged atoms and clusters from a polycrystalline indium surface under bombardment with 5 and 10 keV Au, Au₂, Au₃ and Au₅ projectiles was investigated. Single photon laser postionization was utilized for the detection of sputtered neutral particles. Secondary ions were detected without the laser under otherwise exactly the same experimental conditions. The relative cluster yields were found to be enhanced under polyatomic projectile bombardment, more so the larger the number of atoms in the sputtered cluster. The ionization probability strongly increases with increasing cluster size, but is essentially independent of the projectile impact energy. At a fixed impact energy, the ionization probability of sputtered monomers was found to decrease with increasing number of constituent gold atoms per projectile, but there was no detectable effect for sputtered dimers and larger clusters.     

Molecular ion emission from single large cluster impacts

We investigated the emission of the secondary ions stimulated by single impacts of 136 keV Au₄₀₀⁴⁺ projectiles. The study was carried out on targets of glycine, phenylalanine, and C₆₀. In addition, a target of C₆₀ was examined with 18 keV C₆₀⁺ projectiles. The experiments were performed in the event-by-event bombardment/detection mode. The secondary ions were identified with linear time-of-flight mass spectrometer equipped with an 8-anode detector. The Au₄₀₀⁴⁺ projectile induces abundant multi-ion emission, for instance the average number of detected ions (atomic, fragment, molecular and cluster ions) emitted per event from glycine target is 12.5. The glycine intact molecular ion (Gly⁻) yield is 1.14. The bombardment of a C₆₀ target results in the efficient emission of multiple intact C₆₀⁻ (total yield is 0.15).     

Influence of massive projectile size and energy on secondary ion yields from organic surfaces

We investigated the influence of the projectile size and energy using Au_n^q+ clusters (5 < n < 400, 1 < q < 4) impacting on a glycine target with a 19q-34q keV energy range. We show that both CN⁻ fragment and Gly⁻ molecular ion yields are equivalent for projectiles with n > 9 and increase with the energy per projectile atoms. A maximum yield of 0.5 (50%) for both CN⁻ and Gly⁻ was obtained with the Au₄₀₀⁴⁺ projectile at 136 keV total energy. For Gly⁻, the yield enhancement is linear for Au_n when n > 5. Trends for the CN⁻ fragment are different. A nonlinear yield enhancement proportional to n³ is observed for Au_n when n < 9.     

Simulation of desorption of gold nanoclusters deposited on the (111) surface of Al and Au under bombardment with Au<Subscript>1</Subscript> ions and Au<Subscript>400</Subscript> clusters using the classical molecular dynamics method

The mechanisms of desorption of gold nanoclusters deposited on à substrate under low-energy bombardment with ions and clusters (in the mode of elastic stopping predominance) are analyzed. The classical molecular dynamics method is employed for computer simulation of both “direct” and “indirect” impact of bombarding particles (that is, when a projectile particle either directly interacts with the deposited cluster or penetrates into the substrate without hitting the cluster). Au₁ ions and Au₄₀₀ clusters with an energy of 38 keV and 0.18 keV/atom, respectively, are used as projectile particles. The spherical Au₆₀₅₁ gold nanocluster deposited on a substrate of Al(111) or Au(111) is applied as a target. It is shown that indirect impact does not lead to desorption of the nanocluster from the Al substrate in all considered cases; however, it can initiate desorption from the Au substrate. This phenomenon is quite efficient when the heat spike appearing upon penetration of a projectile particle involves the region of contact between the substrate and the nanocluster deposited on it. As this takes place, an intense flow of the sputtered substrate material transfers a sufficient-for-ejection momentum to the deposited nanocluster.     

Molecular ion yield enhancement induced by gold deposition in static secondary ion mass spectrometry

Static ToF-SIMS was used to evaluate the effect of gold condensation as a sample treatment prior to analysis. The experiments were carried out with a model molecular layer (Triacontane M = 422.4 Da), upon atomic (In⁺) and polyatomic (Bi₃⁺) projectile bombardment. The results indicate that the effect of molecular ion yield improvement using gold metallization exists only under atomic projectile impact. While the quasi-molecular ion (M+Au)⁺ signal can become two orders of magnitude larger than that of the deprotonated molecular ion from the pristine sample under In⁺ bombardment, it barely reaches the initial intensity of (M−H)⁺ when Bi₃⁺ projectiles are used. The differences observed for mono- and polyatomic primary ion bombardment might be explained by differences in near-surface energy deposition, which influences the sputtering and ionization processes.     

Organic SIMS with single massive gold projectile: Ion yield enhancement by silver metallization

The yield of CN from glycine rises from one CN per projectile impact to two when the sample is covered with a nominally 1 nm thick layer of silver. These yields were obtained for bombardment with Au₄₀₀⁴⁺ projectile with 136 keV impact energy. A multitude of CN-based clusters, e.g. Ag_xO_y(CN)_z are produced concurrently. As a result, a total of three CN-based secondary ions are generated per projectile impact. The exceptionally high yield for CN is of interest for biological SIMS.     

Emission of quasi-thermal ions from a solid bombarded by cluster ions

Comparative studies of the emission of quasi-thermal atomic and cluster ions from V, Nb, Ta, Au, and In targets bombarded by cluster ions Au _m ⁻(m = 1–9), as well as from Si and Bi targets bombarded by cluster ions Au _m ⁻(m = 1–9) and Bi _m ⁻(m = 1–5), with energy E ₀ ranging from 6 to 21 keV are carried out. In the case of bombardment by heavy cluster ions, the fraction of the quasi-thermal component in the energy spectra of sputtered atomic ions reaches 50 (for V, In, and Au), 70 (Nb), or more than 90% (Ta). In addition, quasi-thermal ions play a considerable part in the emission of small cluster ions Au₂⁺, In₂⁺, In₃⁺, and Bi _n ⁺(n = 2–7). The results of the generalizing investigation favor the presence of thermal spike conditions at cluster bombardment and their appreciable contribution to the emission of atomic and small cluster ions.     

Polyethylene terephthalate (PET) bulk film analysis using C60, Au3, and Au primary ion beams

The damage characteristics of polyethylene terephthalate (PET) have been studied under bombardment by C₆₀⁺, Au₃⁺ and Au⁺ primary ions. The observed damage cross-sections for the three ion beams are not dramatically different. The secondary ion yields however were significantly enhanced by the polyatomic primary ions where the secondary ion yield of the [M + H]⁺ is on average 5× higher for C₆₀⁺ than Au₃⁺ and 8× higher for Au₃⁺ than Au⁺. Damage accumulates under Au⁺ and Au₃⁺ bombardment while C₆₀⁺ bombardment shows a lack of damage accumulation throughout the depth profile of the PET thick film up to an ion dose of ∼1 × 10¹⁵ ions cm⁻². These properties of C₆₀⁺ bombardment suggest that the primary ion will be a useful molecular depth profiling tool.     

Friction model to describe cluster bombardment

Short time molecular dynamics simulations were performed to model C₆₀ and Au₃ bombardment of an amorphous water sample in the projectile energy range of 5-120 keV. A previously proposed friction model has been applied to describe the fundamental motion of a projectile during cluster bombardment of a solid. This simple analytical model uses a definition of friction on a single particle to describe the cluster movement through a medium. Although the mathematics of the friction model vary among systems, the projectile motion and energy deposition of a single particle into the sample as well as the reactive environment created is close to that of C₆₀ bombardment.     

Influence of primary ion species on the secondary cluster ion emission process from SAMs of hexadecanethiol on gold

In order to investigate the secondary cluster ion emission process of organo-metallic compounds under keV ion bombardment, self-assembled monolayers (SAMs) of alkanethiols on gold are ideal model systems. In this experimental study, we focussed on the influence of the primary ion species on the emission processes of gold-alkanethiolate cluster ions from a hexadecanethiol SAM on gold. For this purpose, we carried out time-of-flight secondary ion mass spectrometry (TOF-SIMS) measurements using the following primary ion species and acceleration voltages: Ar⁺, Xe⁺, SF₅⁺ (10 kV), Bi⁺, Bi₃⁺(25 kV), Bi₃²⁺, Bi₅²⁺, Bi₇²⁺ (25 kV).It is well known that molecular ions M⁻ and gold-alkanethiolate cluster ions Au_xM_y⁻ with M = S-(CH₂)₁₅-CH₃, x − 3 ≤ y ≤ x + 1, x, y > 0, show intense peaks in negative mass spectra. We derived yields Y_SI exemplarily for the molecular ions M⁻ and the gold-hexadecanethiolate cluster ions Au_y+1M_y⁻ up to y = 8 and found an exponentially decreasing behaviour for increasing y-values for the cluster ions.In contrast to the well-known increase in secondary ion yield for molecular secondary ions when moving from lighter to heavier (e.g. Ar⁺ to Xe⁺) or from monoatomic to polyatomic (e.g. Xe⁺ to SF₅⁺) primary ions, we find a distinctly different behaviour for the secondary cluster ions. For polyatomic primary ions, there is a decrease in secondary ion yield for the gold-hexadecanethiolate clusters whereas the relative decrease of the secondary ion yield ξ_Y with increasing y remains almost constant for all investigated primary ions.     

Formation of nanodots on oblique ion sputtered InP surfaces

Using a field emission gun based scanning electron microscopy, we report the formation of nanodots on the InP surfaces after bombardment by 100 keV Ar⁺ ions under off-normal ion incidence (30° and 60° with respect to the surface normal) condition in the fluence range of 1 × 10¹⁶ to 1 × 10¹⁸ ions cm⁻². Nanodots start forming after a threshold fluence of about 1 × 10¹⁷ ions cm⁻². It is also seen that although the average dot diameter increases with fluence the average number of dots decreases with increasing fluence. Formation of such nanostructured features is attributed due to ion-beam sputtering. X-ray photoelectron spectroscopy analysis of the ion sputtered surface clearly shows In enrichment of the sputtered InP surface. The observation of growth of nanodots on the Ar⁺-ion sputtered InP surface under the present experimental condition matches well with the recent simulation results based on an atomistic model of sputter erosion.     

Kinetic electron emission due to perpendicular impact of carbon ions on tungsten surfaces

Total electron yields for perpendicular impact of C⁺ ions on W have been measured for projectile energies from 0.2 keV to 7 keV. The data are compared with the data of C⁺ bombardment of gold and graphite in order to demonstrate general trends in kinetic electron yields at low projectile velocities. The total electron yields in the studied combinations of projectiles and substrates show a similar exponential dependence Γ ∝ (v/A) exp(−A/v), where A is a constant and v is the projectile velocity.     

Sputtering of thin benzene and polystyrene overlayers by keV Ga and C60 bombardment

The mechanisms of ion-stimulated desorption of thin organic overlayers deposited on metal substrates by mono- and polyatomic projectiles are examined using molecular dynamics (MD) computer simulations. A monolayer of polystyrene tetramers (PS4) physisorbed on Ag{1 1 1} is irradiated by 15 keV Ga and C₆₀ projectiles at normal incidence. The results are compared with the data obtained for a benzene overlayer to investigate the differences in sputtering mechanisms of weakly and strongly bound organic molecules. The results indicate that the sputtering yield decreases with the increase of the binding energy and the average kinetic energy of parent molecules is shifted toward higher kinetic energy. Although the total sputtering yield of organic material is larger for 15 keV C₆₀, the impact of this projectile leads to a significant fragmentation of ejected species. As a result, the yield of the intact molecules is comparable for C₆₀ and Ga projectiles. Our data indicate that chemical analysis of the very thin organic films performed by detection of sputtered neutrals will not benefit from the use of C₆₀ projectiles.     

Energy distributions of atomic and molecular ions sputtered by C60 projectiles

In the process of investigating the interaction of fullerene projectiles with adsorbed organic layers, we measured the kinetic energy distributions (KEDs) of fragment and parent ions sputtered from an overlayer of polystyrene (PS) oligomers cast on silver under 15 keV C₆₀⁺ bombardment. These measurements have been conducted using our TRIFT™ spectrometer, recently equipped with the C₆₀⁺ source developed by Ionoptika, Ltd. For atomic ions, the intensity corresponding to the high energy tail decreases in the following order: C⁺(E^−0.4) > H⁺(E^−1.5) > Ag⁺(E^−3.5). In particular, the distribution of Ag⁺ is not broader than those of Ag₂⁺ and Ag₃⁺ clusters, in sharp contrast with 15 keV Ga⁺ bombardment. On the other hand, molecular ions (fragments and parent-like species) exhibit a significantly wider distribution using C₆₀⁺ instead of Ga⁺ as primary ions. For instance, the KED of Ag-cationized PS oligomers resembles that of Ag⁺ and Ag_n⁺ clusters. A specific feature of fullerene projectiles is that they induce the direct desorption of positively charged oligomers, without the need of a cationizing metal atom. The energy spectrum of these PS⁺ ions is significantly narrower then that of Ag-cationized oligomers. For characteristic fragments of PS, such as C₇H₇⁺ and C₁₅H₁₃⁺ and polycyclic fragments, such as C₉H₇⁺ and C₁₄H₁₀⁺, the high energy decay is steep (E⁻⁴ − E⁻⁸). In addition, reorganized ions generally show more pronounced high energy tails than characteristic ions, similar to the case of monoatomic ion bombardment. This observation is consistent with the higher excitation energy needed for their formation. Finally, the fraction of hydrocarbon ions formed in the gas phase via unimolecular dissociation of larger species is slightly larger with gallium than with fullerene projectiles.     

Cluster projectile ions used for the SIMS analysis of silicon

Comparative studies of the emission of Si _n ⁺ (n = 1–11) cluster ions and impurity-containing polyatomic ions under bombardment of B-doped single crystal silicon with A _m ^? (m = 1–5) cluster ions with an energy of E ₀ = 6–18 keV are carried out. The peculiarities of sputtering an adsorbed-particle layer with cluster ions are revealed. The possibility of determining the depth distribution of adsorbed particles by analyzing the yield of sputtered heteroatomic molecular ions upon bombardment is demonstrated.     

Stretching the limits of static SIMS with C60

Pristine and Au-covered molecular films have been analyzed by ToF-SIMS (TRIFT™), using 15 keV Ga⁺ (FEI) and 15 keV C₆₀⁺ (Ionoptika) primary ion sources. The use of C₆₀⁺ leads to an enormous yield enhancement for gold clusters, especially when the amount of gold is low (2 nmol/cm²), i.e. a situation of relatively small nanoparticles well separated in space. It also allows us to extend significantly the traditional mass range of static SIMS. Under 15 keV C₆₀⁺ ion bombardment, a series of clusters up to a mass of about 20,000 Da (Au₁₀₀⁻: 19,700 Da) is detected. This large yield increase is attributed to the hydrocarbon matrix (low-atomic mass), because the yield increase observed for thick metallic films (Ag, Au) is much lower. The additional yield enhancement factors provided by the Au metallization procedure for organic ions (MetA-SIMS) have been measured under C₆₀⁺ bombardment. They reach a factor of 2 for the molecular ion and almost an order of magnitude for Irganox fragments such as C₄H₉⁺, C₁₅H₂₃O⁺ and C₁₆H₂₃O⁻.     

Low energy Ar-ion bombardment effects on the CeO2 surface

The structure and electronic properties of epitaxial grown CeO₂(1 1 1) thin films before and after Ar⁺ bombardment have been comprehensively studied with synchrotron radiation photoemission spectroscopy (SRPES). Ar⁺ bombardment of the surface causes a new emission appearing at 1.6 eV above the Fermi edge which is related to the localized Ce 4f¹ orbital in the reduced oxidation state Ce³⁺. Under the condition of the energy of Ar ions being 1 keV and a constant current density of 0.5 μA/cm², the intensity of the reduced state Ce³⁺ increases with increasing time of sputtering and reaches a constant value after 15 min sputtering, which corresponds to the surface being exposed to 2.8 × 10¹⁵ ions/cm². The reduction of CeO₂ is attributed to a preferential sputtering of oxygen from the surface. As a result, Ar⁺ bombardment leads to a gradual buildup of an, approximately 0.69 nm thick, sputtering altered layer. Our studies have demonstrated that Ar⁺ bombardment is an effective method for reducing CeO₂ to CeO_2−x and the degree of the reduction is related to the energy and amount of Ar ions been exposed to the CeO₂ surface.     

Sputtering of neutral clusters from silver-gold alloys

Polycrystalline Ag, Ag₂₀Au₈₀, Ag₄₀Au₆₀, Ag₈₀Au₂₀ and Au samples were bombarded with 15 keV Ar⁺ at 60° incidence and the resulting secondary neutral yield distribution was studied by non-resonant laser postionisation mass spectrometry. Neutral clusters containing up to 21 atoms were observed for the targets. The yield of neutral clusters, Ag_mAu_n−m, containing n atoms, Y_n, was found to follow a power in n, i.e. Y_n ∝ n^−δ, where the exponent δ varied from 3.2 to 4.0. For a fixed n, the cluster yields showed a variation with number of gold atoms similar to that expected for a binomial distribution. In addition, the cluster compositions from the sputtered alloys were indicative of sputtering from a gold rich surface.     

Effects of SnO2 surface coating on the degradation of ZnS thin film phosphor

Pulsed laser deposited ZnS bare and SnO₂ coated ultra thin films were subjected to prolonged electron beam bombardment with 2 keV energy and a steady 44 mA/cm² current density, in 1 × 10⁻⁶ Torr O₂ pressure backfilled from a base pressure of 3 × 10⁻⁹ Torr at room temperature. Auger electron spectroscopy (AES) was used to monitor changes of the surface chemical composition of both the bare and coated phosphor films during electron bombardment. Degradation was manifested by the decrease of sulphur and accumulation of oxygen on the surface of the bare phosphor. However, with the SnO₂ coating this phenomenon was delayed until the protective SnO₂ was depleted on the surface through dissociation and reduction.     

Matrix-enhanced cluster-SIMS

We have used 23 keV C₆₀⁺ projectiles in the event-by-event bombardment and detection mode to investigate the emission of the gramicidin S [M − H]⁻ ion embedded in a matrix of sinapic acid. We have observed an increase in the gramicidin S [M − H]⁻ ion of approximately eight times by controlling the ratio of gramicidin S to sinapic acid. The maximum of the gramicidin S [M − H]⁻ yield occurs at a matrix/analyte ratio of 10:1. This ratio is different from those typically used in matrix-assisted laser desorption/ionization.