Kinetic energy distributions of neutral In and In2 sputtered by polyatomic ion bombardment

Kinetic energy distributions of neutral In monomers and In₂ dimers sputtered from a polycrystalline indium surface under bombardment with 5 keV/atom Au₁⁻ and Au₂⁻ projectiles have been investigated by means of laser postionization time-of-flight mass spectrometry. Results show that 5 keV Au₁ bombardment leads to results in full compliance with linear cascade sputtering theory. For polyatomic ion bombardment, we find a clear transition to a collisional spike dominated emission process. The spike contribution appears as a low-energy part in the sputtered flux which increases with increasing projectile nuclearity and energy. We show that, the velocity spectrum associated with the low-energy contribution is virtually identical for sputtered monomers and dimers. This finding has important implications with respect to the particle emission mechanism under polyatomic projectile bombardment.     

3D molecular imaging SIMS

Thin monolayer and bilayer films of spin cast poly(methyl methacrylate) (PMMA), poly(2-hydroxyethyl methacrylate) (PHEMA), poly(lactic) acid (PLA) and PLA doped with several pharmaceuticals have been analyzed by dynamic SIMS using SF₅⁺ polyatomic primary ion bombardment. Each of these systems exhibited minimal primary beam-induced degradation under cluster ion bombardment allowing molecular depth profiles to be obtained through the film. By combing secondary ion imaging with depth profiling, three-dimensional molecular image depth profiles have been obtained from these systems. In another approach, bevel cross-sections are cut in the samples with the SF₅⁺ primary ion beam to produce a laterally magnified cross-section of the sample that does not contain the beam-induced damage that would be induced by conventional focussed ion beam (FIB) cross-sectioning. The bevel surface can then be examined using cluster SIMS imaging or other appropriate microanalysis technique.     

Using polyatomic primary ions to probe an amino acid and a nucleic base in water ice

In this study on pure water ice, we show that protonated water species [H₂O]_nH⁺ are more prevalent than (H₂O)_n⁺ ions after bombardment by Au⁺ monoatomic and Au₃⁺ and C₆₀⁺ polyatomic projectiles. This data also reveals significant differences in water cluster yields under bombardment by these three projectiles. The amino acid alanine and the nucleic base adenine in solution have been studied and have been shown to have an effect on the water cluster ion yields observed using an Au₃⁺ ion beam.     

Molecular ion yield enhancement induced by gold deposition in static secondary ion mass spectrometry

Static ToF-SIMS was used to evaluate the effect of gold condensation as a sample treatment prior to analysis. The experiments were carried out with a model molecular layer (Triacontane M = 422.4 Da), upon atomic (In⁺) and polyatomic (Bi₃⁺) projectile bombardment. The results indicate that the effect of molecular ion yield improvement using gold metallization exists only under atomic projectile impact. While the quasi-molecular ion (M+Au)⁺ signal can become two orders of magnitude larger than that of the deprotonated molecular ion from the pristine sample under In⁺ bombardment, it barely reaches the initial intensity of (M−H)⁺ when Bi₃⁺ projectiles are used. The differences observed for mono- and polyatomic primary ion bombardment might be explained by differences in near-surface energy deposition, which influences the sputtering and ionization processes.     

Molecular ion emission from single large cluster impacts

We investigated the emission of the secondary ions stimulated by single impacts of 136 keV Au₄₀₀⁴⁺ projectiles. The study was carried out on targets of glycine, phenylalanine, and C₆₀. In addition, a target of C₆₀ was examined with 18 keV C₆₀⁺ projectiles. The experiments were performed in the event-by-event bombardment/detection mode. The secondary ions were identified with linear time-of-flight mass spectrometer equipped with an 8-anode detector. The Au₄₀₀⁴⁺ projectile induces abundant multi-ion emission, for instance the average number of detected ions (atomic, fragment, molecular and cluster ions) emitted per event from glycine target is 12.5. The glycine intact molecular ion (Gly⁻) yield is 1.14. The bombardment of a C₆₀ target results in the efficient emission of multiple intact C₆₀⁻ (total yield is 0.15).     

Secondary ion emission from a GaAs single crystal upon bombardment with Bi<Stack> <Subscript> <Emphasis Type="Italic">m</Emphasis> </Subscript> <Superscript>+</Superscript> </Stack> cluster ions

Secondary-ion mass spectra and energy distributions upon bombarding a gallium arsenide single crystal using Bi_m⁺(m = 1–5) cluster ions with energies of 2–12 keV are investigated. The gallium cluster ion yield grew nonadditively with the number of atoms in the cluster projectiles. A quasi-thermal component found in the energy spectra of secondary Ga⁺ and Ga₂⁺ ions is indicative of the occurrence of the thermal spike mode upon cluster ion bombardment. The quasi-thermal component in the yield of atomic Ga⁺ ions upon bombardment with Bi₂⁺–Bi₅⁺–ions is 35–75%.     

Fundamental studies of molecular depth profiling and 3D imaging using Langmuir-Blodgett films as a model

Molecular depth profiling and three-dimensional imaging using cluster projectiles and SIMS have become a prominent tool for organic and biological materials characterization. To further explore the fundamental features of cluster bombardment of organic materials, especially depth resolution and differential sputtering, we have developed a reproducible and robust model system consisting of Langmuir-Blodgett (LB) multilayer films. Molecular depth profiles were acquired, using a 40-keV C₆₀⁺ probe, with LB films chemically alternating between barium arachidate and barium dimyristoyl phosphatidate. The chemical structures were successfully resolved as a function of depth. The molecular ion signals were better preserved when the experiment was performed under cryogenic conditions than at room temperature. A novel method was used to convert the scale of fluence into depth which facilitated quantitative measurement of the interface width. Furthermore, the LB films were imaged as a function of depth. The reconstruction of the SIMS images correctly represented the original chemical structure of the film. It also provided useful information about interface mixing and edge effects during sputtering.     

Molecular depth profiling and imaging using cluster ion beams with femtosecond laser postionization

The emergence of cluster ion sources as viable SIMS probes has opened new possibilities for detection of neutral molecules by laser postionization. Previous studies have shown that with atomic bombardment multiphoton ionization using high-power femtosecond pulses leads to photofragmentation. The large amount of photofragmentation can be mostly attributed to high amounts of internal energy imparted to the sputtered molecules during the desorption process. Several pieces of preliminary data suggest that molecules subjected to cluster beam bombardment are desorbed with lower internal energies than those subjected to atomic beam bombardment. Lower energy molecules may then be less likely to photodissociate creating less photofragments in the laser postionization spectra. Here we present data taken from coronene films prepared by physical vapor deposition comparing a 40 keV ion source with a 20 keV Au⁺ ion source, which supports this hypothesis. Furthermore, the depth profiling capabilities of cluster beams may be combined with laser postionization to obtain molecular depth profiles by monitoring the neutral flux. In addition, imaging and depth profiling may be combined with atomic force microscopy (AFM) to provide three-dimensional molecular images.     

Yields and ionization probabilities of sputtered Inn particles under atomic and polyatomic Aum ion bombardment

The emission of neutral and charged atoms and clusters from a polycrystalline indium surface under bombardment with 5 and 10 keV Au, Au₂, Au₃ and Au₅ projectiles was investigated. Single photon laser postionization was utilized for the detection of sputtered neutral particles. Secondary ions were detected without the laser under otherwise exactly the same experimental conditions. The relative cluster yields were found to be enhanced under polyatomic projectile bombardment, more so the larger the number of atoms in the sputtered cluster. The ionization probability strongly increases with increasing cluster size, but is essentially independent of the projectile impact energy. At a fixed impact energy, the ionization probability of sputtered monomers was found to decrease with increasing number of constituent gold atoms per projectile, but there was no detectable effect for sputtered dimers and larger clusters.     

Atoms, clusters and photons: Energetic probes for mass spectrometry

The physical mechanisms underlying the surface based mass spectrometry techniques of atomic SIMS, MALDI and cluster SIMS are discussed along with the relation of the physics to the measured quantities. In particular, there are at least two types of motion resulting from cluster bombardment in SIMS. One scenario involves the individual atoms in the cluster initiating collision cascades similar to atomic bombardment. The second mechanism involves a mesoscale motion of the cluster as a whole. This mesoscale motion can induce an organized flow of the ejected material in a plume.     

Energy distributions of atomic and molecular ions sputtered by C60 projectiles

In the process of investigating the interaction of fullerene projectiles with adsorbed organic layers, we measured the kinetic energy distributions (KEDs) of fragment and parent ions sputtered from an overlayer of polystyrene (PS) oligomers cast on silver under 15 keV C₆₀⁺ bombardment. These measurements have been conducted using our TRIFT™ spectrometer, recently equipped with the C₆₀⁺ source developed by Ionoptika, Ltd. For atomic ions, the intensity corresponding to the high energy tail decreases in the following order: C⁺(E^−0.4) > H⁺(E^−1.5) > Ag⁺(E^−3.5). In particular, the distribution of Ag⁺ is not broader than those of Ag₂⁺ and Ag₃⁺ clusters, in sharp contrast with 15 keV Ga⁺ bombardment. On the other hand, molecular ions (fragments and parent-like species) exhibit a significantly wider distribution using C₆₀⁺ instead of Ga⁺ as primary ions. For instance, the KED of Ag-cationized PS oligomers resembles that of Ag⁺ and Ag_n⁺ clusters. A specific feature of fullerene projectiles is that they induce the direct desorption of positively charged oligomers, without the need of a cationizing metal atom. The energy spectrum of these PS⁺ ions is significantly narrower then that of Ag-cationized oligomers. For characteristic fragments of PS, such as C₇H₇⁺ and C₁₅H₁₃⁺ and polycyclic fragments, such as C₉H₇⁺ and C₁₄H₁₀⁺, the high energy decay is steep (E⁻⁴ − E⁻⁸). In addition, reorganized ions generally show more pronounced high energy tails than characteristic ions, similar to the case of monoatomic ion bombardment. This observation is consistent with the higher excitation energy needed for their formation. Finally, the fraction of hydrocarbon ions formed in the gas phase via unimolecular dissociation of larger species is slightly larger with gallium than with fullerene projectiles.     

Simultaneous ejection of two molecular ions from keV gold atomic and polyatomic projectile impacts

We present the first experimental data on the simultaneous ejection of two molecular ions from the impact of Au(+)(n) (1< or =n< or =4) with energies ranging between 17 and 56 keV. The yields from single phenylalanine (Ph) emission, coemission of two Ph ions, and emission of the Ph dimer were measured. Large increases (1 to 2 orders of magnitude) in coemitted ion yields were observed with increasing projectile energy and complexity. Correlation coefficients were calculated for the coemission of two Ph ions; their behavior suggests differences in emission pathways for bombardment by atomic and polyatomic projectiles.     

Disordering and annealing of a Si surface under low-energy Si bombardment

Abstract

We simulated the bombardment of Si(100)(2 × 1) by Si atoms using molecular dynamics. The kinetic energies of the projectiles were 100 and 50 eV. To model the Si–Si-interactions the empirical potential of Stillinger and Weber with the two body part of the potential splined to the universal potential was used. A geometric criterion based on the Lindemann radius was defined to study damage in the Si target. We observed clusters of disordered Si atoms in the target induced by the bombardment. Large clusters of about 50 atoms are formed in the beginning of the bombardment; they shrink and decay into smaller clusters until and equilibrium cluster size of about 10 atoms is reached. Upon annealing at elevated temperature the disordered zones dissolve into point defects.     

Matrix-enhanced secondary ion mass spectrometry: The Alchemist's solution?

Because of the requirements of large molecule characterization and high-lateral resolution SIMS imaging, the possibility of improving molecular ion yields by the use of specific sample preparation procedures has recently generated a renewed interest in the static SIMS community. In comparison with polyatomic projectiles, however, signal enhancement by a matrix might appear to some as the alchemist's versus the scientist's solution to the current problems of organic SIMS. In this contribution, I would like to discuss critically the pros and cons of matrix-enhanced SIMS procedures, in the new framework that includes polyatomic ion bombardment. This discussion is based on a short review of the experimental and theoretical developments achieved in the last decade with respect to the three following approaches: (i) blending the analyte with a low-molecular weight organic matrix (MALDI-type preparation procedure); (ii) mixing alkali/noble metal salts with the analyte; (iii) evaporating a noble metal layer on the analyte sample surface (organic molecules, polymers).     

Evaluation of secondary ion yield enhancement from polymer material by using TOF-SIMS equipped with a gold cluster ion source

We investigated the enhancement of the secondary ion intensity in the TOF-SIMS spectra obtained by Au⁺ and Au₃⁺ bombardment in comparison with Ga⁺ excitation using polymer samples with different molecular weight distributions. Since the polymer samples used in this experiment have a wide molecular weight distribution, the advantages of the gold cluster primary ion source over monoatomic ion could accurately be evaluated. It was observed that the degree of fragmentation decreased by the usage of cluster primary ion beam compared with monoatomic ion beam, which was observed as a shift of the intensity distribution in the spectra. It was also found out that the mass effect of Au⁺ and Ga⁺ as monoatomic primary ion, resulted in about 10-60 times of enhancement for both samples with different molecular distributions. On the other hand, the Au₃⁺ bombardment caused intensity enhancement about 100-2600 compared with Ga⁺ bombardment, depending on the mass range of the detected secondary ion species. The cluster primary ion effect of Au₃⁺, compared with Au⁺, therefore, was estimated to be about 10-45.     

A note on the radiative energy loss from an ion-bombarded surface

It has recently been argued that the heat radiation from spikes, according to the Stefan-Boltzmann law, plays an important role in thermal behaviour of a copper target bombarded with 100keV Xe⁺ ions. In this work we have monitored the temperature evolution of a copper bar subjected to a 40 keV N⁺, Xe⁺, Sb₂ ⁺, and a 20 keV Sb⁺ ion bombardment. Our measurements have not revealed any substantial differences between light and heavy ion bombardment as well as between atomic and molecular implantation. Those results are in agreement with the time constant for radiation being long, of order 10⁻⁶s. They also agree with the calculations of the radiative energy loss from the spike, based upon both cylindrical and spherical spike models. In all reported cases, the energy lost from the spike via the heat radiation, although much different for different projectiles, is smaller than 1% of the ion deposited energy and its influence on the target temperature evolution lies within uncertainty of a typical ion current measurement. This work was carried out as a part of Research Project CPBP 01.09     

A simple model for latent track formation due to cluster ion stopping and fragmentation in solids

An estimate of the electronic stopping of a swift cluster ion during different stages of penetration in a given material is presented. We take a simplified approach to the stopping process by neglecting vicinage effects on the stopping cross section as well as spatial distortion due to Coulomb forces among ions. The different stages of penetration and energy loss are based on the hypothesis of formation of a transient plasma (the plasma stopping regime)—due to the release of energetic electrons from the target material—within and around the spatial region defined by the correlated positions of each cluster constituent ion (atom). The density of the transient plasma is treated as a function of the rate of energy deposition and depth up to a point where the rate of energy deposition yields a threshold value where the ejected target electrons immediately recombine so that stopping in a cold target begins (conventional stopping regime) and where the cluster constituent ions start being neutralized according to a charge equilibration scheme as depicted by the effective charge relation of Betz. The model is applied to the stopping of 40.2 Mev C₆₀³⁺ projectiles penetrating an Yttrium–Iron Garnet (YIG) target. Also, in this case, a possible explanation for the experimentally observed cluster-fragmentation events at a certain depth is presented.     

Combined simulations and analytical model for predicting trends in cluster bombardment

A series of computational investigations has been performed to examine the mesoscale energy dynamics of cluster bombardment events on a variety of systems. Through the development and application of the mesoscale energy deposition footprint (MEDF) model, we have successfully predicted the yield trends exhibited by a variety of projectiles and incident energies. The details of this model, dynamics of the damaged region, and comparison to experimental SIMS results are presented. The general cluster behavior which is revealed by this study is also discussed.     

Sputtering of thin benzene and polystyrene overlayers by keV Ga and C60 bombardment

The mechanisms of ion-stimulated desorption of thin organic overlayers deposited on metal substrates by mono- and polyatomic projectiles are examined using molecular dynamics (MD) computer simulations. A monolayer of polystyrene tetramers (PS4) physisorbed on Ag{1 1 1} is irradiated by 15 keV Ga and C₆₀ projectiles at normal incidence. The results are compared with the data obtained for a benzene overlayer to investigate the differences in sputtering mechanisms of weakly and strongly bound organic molecules. The results indicate that the sputtering yield decreases with the increase of the binding energy and the average kinetic energy of parent molecules is shifted toward higher kinetic energy. Although the total sputtering yield of organic material is larger for 15 keV C₆₀, the impact of this projectile leads to a significant fragmentation of ejected species. As a result, the yield of the intact molecules is comparable for C₆₀ and Ga projectiles. Our data indicate that chemical analysis of the very thin organic films performed by detection of sputtered neutrals will not benefit from the use of C₆₀ projectiles.     

Ripening of subsurface amorphous C clusters formed by low energy He ion bombardment of graphite

Surfaces of highly oriented pyrolytic graphite (HOPG) were bombarded with 100 eV and 500 eV He ions at ion doses of a few 10¹⁵ cm² and temperatures ranging from 300 K to 800 K. AFM images were recorded to investigate the topography of the surfaces after ion bombardment. Supplementary electron energy loss (EEL) and thermal desorption (TD) spectra were measured to determine the C sp² fraction of the bombarded surfaces and the amount of trapped He. The temperature at which He ion bombardment was performed had a drastic effect on the surface structure and topography of the targets on the angstrom-scale and micrometer-scale as well. At 300 K, limited defect atom transport revealed an amorphous but relatively flat HOPG surface. Bombardment at 400 K leads to a granular structure of small protrusions in micrometer-scale AFM images, however, without crystalline order on the surface. The protrusions are due to the formation of subsurface clusters of carbon formed by atoms displaced by ion irradiation. Towards higher temperatures during bombardment the clusters agglomerate and cause the surface layers to bend upwards in dome-like shapes. Simultaneously, the microscopic order of the graphite lattice recovers. At 800 K large areas of the top layer retain their order during bombardment, however, a small number of domes indicate that there still exist some subsurface C clusters. The cluster–cluster distance deduced from the dome distribution indicates that the clusters grow through a ripening process. Annealing of graphite at high temperatures subsequent to ion bombardment at low temperatures is much less effective for recovering the surface crystallinity than ion bombardment at high temperature.