Ultrafast laser fabrication of low-loss waveguides in chalcogenide glass with 0.65 dB/cm loss

This Letter reports on the fabrication of low-loss waveguides in gallium-lanthanum-sulfide chalcogenide glasses using an ultrafast laser. Spatial beam shaping and temporal pulse width tuning were used to optimize the guided mode profiles and optical loss of laser-written waveguides. Highly symmetric single-mode waveguides guiding at 1560 nm with a loss of 0.65 dB/cm were fabricated using 1.5 ps laser pulses. This Letter suggests a pathway to produce high quality optical waveguides in substrates with strong nonlinearity using the ultrafast laser direct writing technique.     

Design and fabrication of electro-optic waveguides with self-assembled superlattice films

This paper presents a strategy for fabricating low loss waveguide devices based on high electro-optic (EO) coefficient self-assembled superlattice (SAS) films, a new sort of polymeric films grown on SiO₂ film and coated with other polymeric films to form multi-layer EO waveguides structure without electric field poling. Firstly, the optical propagation loss induced by the absorption of electrodes is simulated and optimized to obtain both the low optical loss and the low drive voltage. Then this paper gives the scanned electron microscopic (SEM) images of the fabricated devices, the simulated and experimental images of the single guided mode, and the measured optical propagation loss of the EO waveguide devices of 1.0 dB/cm. Finally, the very great agreement between the simulated and measured results of propagation loss of devices is observed.     

High quality NbTiN films fabrication and rapid thermal annealing investigation

NbTiN thin films are good candidates for applications including single-photon detector, kinetic inductance detector, hot electron bolometer, and superconducting quantum computing circuits because of their favorable characteristics,such as good superconducting properties and easy fabrication.In this work, we systematically investigated the growth of high-quality NbTiN films with different thicknesses on Si substrates by reactive DC-magnetron sputtering method.After optimizing the growth conditions, such as the gas pressure, Ar/N_2 mixture ratio, and sputtering power, we obtained films with excellent superconducting properties.A high superconducting transition temperature of 15.5 K with narrow transition width of 0.03 K was obtained in a film of 300 nm thickness with surface roughness of less than 0.2 nm.In an ultra-thin film of 5 nm thick, we still obtained a transition temperature of 7.6 K.In addition, rapid thermal annealing(RTA) in atmosphere of nitrogen or nitrogen and hydrogen mixture was studied to improve the film quality.The results showed that Tc and crystal size of the NbTiN films were remarkably increased by RTA.For ultrathin films, the annealing in N_2/H_2 mixture had better effect than that in pure N2.The T_c of 10 nm films improved from 9.6 K to 10.3 K after RTA in N_2/H_2 mixture at 450℃.     

The concept and realization of nanostructure fabrication using free-standing metallic wires with rapid thermal annealing

Free-standing metallic nanostructures are considered to be highly relevant to many branches of science and technology with applications of three dimensional metallic nanostructures ranging from optical reflectors,actuators,and antenna,to free-standing electrodes,mechanical,optical,and electrical resonators and sensors.Strain-induced out-of-plane fabrication has emerged as an effective method which uses relaxation of strain-mismatched materials.In this work,we report a study of the thermal annealing-induced shape modification of free-standing nanostructures,which was achieved by introducing compositional or microstructural nonuniformity to the nanowires.In particular gradient,segmented and striped hetero-nanowires were grown by focused-ion-beam-induced chemical vapor deposition,followed by rapid thermal annealing in a N2 atmosphere.Various free-standing nanostructures were produced as a result of the crystalline/grain growth and stress relief.     

Integrated all-optical pulse regenerator in chalcogenide waveguides

We report a fully integrated, passive, all-optical regenerator capable of terabit per second operation, based on a highly nonlinear chalcogenide (As2S3) glass rib waveguide followed by an integrated Bragg grating bandpass filter. We demonstrate a clear nonlinear power transfer curve with 1.4 ps optical pulses, capable of improving the signal-to-noise ratio and reducing the bit error rate for digital signals.     

Reverse-symmetry waveguides: theory and fabrication

We present an extensive theoretical analysis of reverse-symmetry waveguides with special focus on their potential application as sensor components in aqueous media and demonstrate a novel method for fabrication of such waveguides. The principle of reverse symmetry is based on making the refractive index of the waveguide substrate less than the refractive index of the medium covering the waveguiding film (n_water=1.33). This is opposed to the conventional waveguide geometry, where the substrate is usually glass or polymers with refractive indices of ≈1.5. The reverse configuration has the advantage of deeper penetration of the evanescent electromagnetic field into the cover medium, theoretically permitting higher sensitivity to analytes compared to traditional waveguide designs. We present calculated sensitivities and probing depths of conventional and reverse-symmetry waveguides and describe schemes for easy implementation of reverse symmetry. Polymer waveguides are demonstrated to be candidates for cheap, mass-producible reverse-symmetry sensor modules. The grating-coupled waveguiding films of controlled thickness are produced by soft lithography. The resulting films are combined with air-grooved polymer supports to form freestanding single-material polymer waveguides of reverse symmetry capable of guiding light. Received: 20 December 2001 / Published online: 14 March 2002     

Single-mode low-loss chalcogenide glass waveguides for the mid-infrared

We demonstrate the design, fabrication, and characterization of single-mode low-loss waveguides for mid-infrared (MIR) wavelengths. Planar waveguide structures were fabricated from multilayer thin films of arsenic-based chalcogenide glasses followed by the creation of channel waveguides by using the photodarkening effect. Propagation losses as low as 0.5 dB/cm were measured for a quantum cascade laser end-fire coupled into the waveguides. This is a first step toward the design and fabrication of integrated optical components for MIR applications.     

Strong self-phase modulation in planar chalcogenide glass waveguides

Single-mode planar waveguides were fabricated from chalcogenide glass compounds with large Kerr nonlinearities. Strong self-phase modulation of subpicosecond pulses along with low linear and nonlinear absorption losses demonstrates the potential for ultrafast, low-power, all-optical processing applications.     

Third-harmonic generation in slow-light chalcogenide glass photonic crystal waveguides

We demonstrate third-harmonic generation (THG) in a dispersion-engineered slow-light photonic crystal waveguide fabricated in AMTIR-1 chalcogenide glass. Owing to the relatively low loss and low dispersion in the slow-light (c/30) regime, combined with the high nonlinear figure of merit of the material (～2), we obtain a relatively large conversion efficiency (1.4×10(-8)/W(2)), which is 30× higher than in comparable silicon waveguides, and observe a uniform visible light pattern along the waveguide. These results widen the number of applications underpinned by THG in slow-light platforms, such as the direct observation of the spatial evolution of the propagating mode.     

Temperature-controlled UV-laser induced fabrication of planar polymeric waveguides

Integrated-optical waveguides may be written directly into the surface of a planar polymeric substrate by UV-excimer laser irradiation. The loss rate is relatively high due to the refractive index depth profile of waveguides produced in this way. The loss rate can be reduced significantly by use of a temperature-controlled fabrication process: during the UV-laser irradiation the polymeric substrate is heated in a controllable way by a hot plate. An explanation is given for this temperature-dependent effect.     

Optical properties of ErFOD-doped polymers and fabrication of channel waveguides

ErFOD-doped P(MMA-co-GMA) (poly-methyl-methacrylate-co-glycidyl-methacrylate) polymer film was synthesized. The NIR photoluminescence (PL) spectrum of the material showed strong characteristic emission of Er³⁺ ions with broad full width at half-maximum (FWHM) of 55 nm. The rib channel waveguide using ErFOD-doped P(MMA-co-GMA) was designed and fabricated. The loss and gain measurements of the waveguides were also characterized. Further theoretical analysis on Er³⁺ ions in P(MMA-co-GMA) was performed using Judd-Ofelt theory. The results showed that it is a promising material for the elaboration of laser or optical amplifier.     

Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

Chalcogenide glasses have shown promise in fabricating mid infrared(MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low,making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions.     

Two-dimensional X-ray waveguides: fabrication by wafer-bonding process and characterization

The fabrication of two-dimensionally confining X-ray waveguides enables the generation of nanoscopic X-ray beams. First applications of such waveguides for lens-less holographic imaging have already been demonstrated, but were limited by the fabrication methods and the design. To overcome these limitations, we present here the fabrication process for a second generation of X-ray waveguide with air or vacuum as guiding channel, based on e-beam lithography, ion etching and subsequent wafer bonding. This is a first step towards waveguides fulfilling requirements of high transmission and high confinement, since the process can be scaled down to smaller channel dimensions from the present structures. We address the structuring method used and present results of first X-ray characterization at synchrotron beamlines, under two entirely different beam settings, corresponding to the coupling of a coherent beam and an incoherent beam. PACS 41.50.+h; 42.82.Cr; 07.85.Qe     

Photo- and thermal doping of chalcogenide vitreous semiconductors by zinc

Thermal and photodissolution of second-group metal zinc is studied. Differences between that and photodissolution of silver are discussed. Influence of zinc doping on physical properties of ChVS films is shown.     

热退火、激光束和电子束等作用对纳米硅制备及其局域态发光特性的影响

在纳米晶体硅制备的过程中, 晶化处理是影响和提高纳米硅发光效率的重要制备环节. 热退火、激光退火和电子束辐照是使纳米硅样品晶化的不同方式. 实验表明: 选取适当的晶化方式和参量对制备纳米硅晶体结构至关重要, 特别是在制备硅量子点和量子面的过程中控制好参量, 可以得到较高的发光效率. 有趣的是, 在实验中发现: 当晶化时间较短(如低于20 min)时, 可以获得较好的纳晶硅结构(如量子点结构), 对应于较好的纳晶硅光致发光(PL)和掺杂局域态发光; 当晶化时间较长(如超过30 min)时, 纳米晶体硅结构被破坏, 致使PL谱逐渐减弱与消失. 结合热退火、激光退火和电子束辐照对纳米硅晶化过程, 本文建立起晶化时间对纳米硅局域态发光影响机理的物理模型, 解释了晶化时间对纳米硅局域态发光的影响.     

Simulation and fabrication of THz waveguides with silicon wafer by using eye-shaped pillars as building blocks

Silicon-based photonic crystal is a promising material for terahertz (THz) waveguide due to its high refractive index contrast. In this work, we introduce eye-shaped pillars as the feature building blocks for two-dimensional (2D) photonic crystals. The simulation study shows that larger TE mode band gaps (PBGs) can be created by the arrangement of dielectric eye-shaped pillars in air. The reflective spectra demonstrate that there are complex PBGs, where the peak position and intensity can be changed by varying the parameter e. Moreover, the peak of reflective spectra exhibits an obvious blue shift with the increase of incidence angle of light. When the vacant space in the structure is filled by polystyrene (PS) microspheres of 2 μm in diameter, the peak intensity of reflective spectra reduces significantly compared with that without PS microspheres, which suggests that this design can act as a sensor in the fields of biology, agriculture or medicine.     

Reduction of insertion loss after annealing of silicon oxynitride optical waveguides

The insertion losses of silicon oxynitride (SiON) waveguides have been measured in the 1550 nm wavelength region. The waveguide structure consisted of a 2.0μm SiON waveguide core with a refractive index of 1.50, a 0.5μm SiO₂ upper cladding and a 5.0μm SiO₂ lower cladding with a refractive index of 1.45. It was found that the wavelength-dependent insertion losses of the waveguide were greatly reduced by annealing, and the loss was decreased more than 5.7 dB/cm at 1550 nm after annealing at optimum conditions. The former was attributed to the reduction of the absorption caused by N-H and Si-H vibration modes, and the latter was due to the improvement of the interface roughness and homogeneity in the waveguides after annealing.     

Rapid thermal annealing of ITO films

Tin-doped indium oxide (ITO) films with 200 nm thickness were deposited on glass substrates by DC magnetron sputtering at room temperature. And they were annealed by rapid thermal annealing (RTA) method in vacuum ambient at different temperature for 60 s. The effect of annealing temperature on the structural, electrical and optical properties of ITO films was investigated. As the RTA temperature increases, the resistivity of ITO films decreases dramatically, and the transmittance in the visible region increases obviously. The ITO film annealed at 600 °C by RTA in vacuum shows a resistivity of 1.6 × 10⁻⁴ Ω cm and a transmittance of 92%.     

Femtosecond laser fabrication of phase-shifted Bragg grating waveguides in fused silica

Phase-shifted Bragg grating waveguides (PSBGWs) were formed in bulk fused silica glass by femtosecond laser direct writing to produce narrowband (22±3) pm filters at 1550 nm. Tunable π and other phase shifts generated narrow passbands in controlled positions of the Bragg stopband, while the accurate placement of multiple cascaded phase-shift regions yielded a rectangular-shaped bandpass filter. A waveguide birefringence of (7.5±0.3)×10(-5) is inferred from the polarization-induced spectral shifting of the PSBGW narrowband filters.