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研究了基于硅基集成光波导的马赫-曾德干涉仪(MZI)型化学传感芯片的设计、制备及相关敏感特性的模拟和分析.传感芯片采用硅基二氧化硅光波导材料,利用与传统互补型金属氧化物半导体(CMOS)兼容的工艺技术制作.通过波导的单模设计以及对MZI结构的优化,获得了有效折射率分辨率达到10-7量级的高灵敏度传感芯片.作为化学传感器,把MZI的其中一臂设计成传感臂.并进行适当的表面修饰,可制作出高灵敏度的干涉型光波导化学传感器.最后,对该传感器的折射率分辨率、敏感特性等进行了分析、模拟,同时,对面临的关键问题进行了分析和讨论. 相似文献
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光纤法布里-珀罗干涉温度和压力传感器具有灵敏度高、制作简单、成本低、体积小和抗电磁干扰能力强等优点,已被广泛应用于军事和民用领域.在某些环境恶劣,如具有强电磁干扰和腐蚀性,或提供给传感器的安装空间非常有限的特殊工业领域,微型光纤温度和压力传感器发挥着重要的作用,国内外诸多高校、科研院所都在对其进行研究.本文综述了光纤法布里-珀罗干涉仪的基本原理、制备技术、及其压力和温度传感应用的研究进展.详细介绍了湿法化学腐蚀制备法、电弧放电制备法、飞秒激光制备法、聚合物辅助制备法等常见光纤法布里-珀罗腔传感器的制作工艺,分析了不同制作工艺的优缺点;详细介绍了光纤法布里-珀罗干涉仪在温度传感、压力传感和温压一体传感领域的应用;最后对光纤法布里-珀罗干涉温度压力传感器的发展进行了总结和展望. 相似文献
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声发射技术作为一种动态无损检测手段,主要实现对材料产生的缺陷进行动态监测及损伤位置的预测。微机电系统声发射传感器在检测材料疲劳裂纹位置和扩展方向上应用广泛,实现其对材料裂纹的3-D动态位移检测,对于无损检测技术的发展具有重要意义。该文提出了一种新型3-D微机电系统声发射传感器,首先对3-D微机电系统声发射传感器进行了结构设计和性能分析,结构方面主要包括z方向响应传感单元和x、y方向响应传感单元设计;其次通过传感器的阻尼、谐振点处灵敏度计算,证明传感器的性能良好;最后采用有限元软件ANSYS对z方向响应传感单元做了模态和谐响应分析,x、y方向响应传感单元做了模态分析和谐响应分析,仿真结果与理论值吻合较好,验证了结构设计的合理性,对实现材料裂纹的三维动态检测具有一定的参考意义。 相似文献
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《应用声学》2020,(2)
声发射技术作为一种动态无损检测手段,主要实现对材料产生的缺陷进行动态监测及损伤位置的预测。微机电系统声发射传感器在检测材料疲劳裂纹位置和扩展方向上应用广泛,实现其对材料裂纹的3-D动态位移检测,对于无损检测技术的发展具有重要意义。该文提出了一种新型3-D微机电系统声发射传感器,首先对3-D微机电系统声发射传感器进行了结构设计和性能分析,结构方面主要包括z方向响应传感单元和x、y方向响应传感单元设计;其次通过传感器的阻尼、谐振点处灵敏度计算,证明传感器的性能良好;最后采用有限元软件ANSYS对z方向响应传感单元做了模态和谐响应分析,x、y方向响应传感单元做了模态分析和谐响应分析,仿真结果与理论值吻合较好,验证了结构设计的合理性,对实现材料裂纹的三维动态检测具有一定的参考意义。 相似文献
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传感器作为物联网技术的基石,在人们的生产生活中发挥着重大作用.其中,基于隧穿磁阻效应(tunneling magnetoresistance, TMR)的磁传感器具有灵敏度高、尺寸小、功耗低等优点,在导航定位、生物医学、电流检测和无损检测等领域具有极大的应用前景.本综述以TMR传感器技术路线的发展为核心,囊括了从基本传感单元到三维空间磁场检测,再到实际应用的多个研究重点.首先,介绍了TMR传感器发展历程并阐明其基本工作原理,讨论了提高单个传感单元磁隧道结输出线性度的方法.接下来,详细介绍了传感器的重要电路结构—惠斯通电桥,以及制备TMR全桥结构的多种工艺方法.进一步,从三维空间磁场检测这一市场需求入手,深入讨论了基于TMR传感器的三维传感结构的设计和制备方法.同时,以传感器灵敏度和噪声水平这两大基本性能为切入点,列举了TMR传感器性能的优化方案.最后,本文对TMR传感器的应用展开了详细介绍,以自旋麦克风,生物传感器两个新兴应用为例,对TMR传感器未来在物联网中的发展和应用进行了展望. 相似文献
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本文提出了一种用于生物样品检测的高灵敏度太赫兹折射率超材料吸波体传感器.该传感器由2个同心开口金属环组成,是一种多模谐振器.传感器在0.7—2.5 THz频率范围内具有2个独立可调的工作频段,即1.079 THz和2.271 THz,可观测样品在太赫兹波段的不同电磁效应.采用吸收特性、灵敏度等指标评估太赫兹传感器的性能,自由空间中的吸收率超过99.9%,具有较高的频率选择特性,灵敏度达到693.7 GHz/RIU,检测生物样品最小折射率变化量为0.004,传感性能较好.所提出的传感器使用低介电常数的柔性材料,具有生物相容性、便携性等优点,且在0°—60°斜入射角下及4%的制作误差内显示出高度稳定性.此外,通过乙醇-水混合物模拟实验,验证了传感器的检测效果.本文设计的传感器单元结构之间相互作用小、稳定、易制作,能够显著增强光与物质之间相互作用,在太赫兹高灵敏生物传感检测中具有广阔的应用前景. 相似文献
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A novel fiber Bragg grating high-temperature sensor 总被引:3,自引:0,他引:3
A novel fiber Bragg grating (FBG) sensor for the measurement of high temperature is proposed and experimentally demonstrated. The interrogation system of the sensor system is simple, low cost but effective. The sensor head is comprised of one FBG and two metal rods. The lengths of the rods are different from each other. The coefficients of thermal expansion of the rods are also different from each other. The FBG will be strained by the sensor head when the temperature to be measured changes. The temperature is measured basis of the wavelength shifts of the FBG induced by strain. A dynamic range of 0–800 °C and a resolution of 1 °C have been obtained by the sensor system. The experiment results agree with theoretical analyses. 相似文献
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Fiber grating sensors for high-temperature measurement 总被引:1,自引:0,他引:1
Yage Zhan Hua Wu Qinyu Yang Shiqing Xiang Hong He 《Optics and Lasers in Engineering》2008,46(4):349-354
Two fiber grating sensors for high-temperature measurements are proposed and experimentally demonstrated. The interrogation technologies of the sensor systems are all simple, low cost but effective. In the first sensor system, the sensor head is comprised of one fiber Bragg grating (FBG) and two metal rods. The lengths of the rods are different from each other. The coefficients of thermal expansion of the rods are also different from each other. The FBG will be strained by the sensor head when the temperature to be measured changes. The temperature is measured based on the wavelength-shifts of the FBG induced by the strain. In the second sensor system, a long-period fiber grating (LPG) is used as the high-temperature sensor head. The LPG is very-high-temperature stable CO2-laser-induced grating and has a linear function of wavelength–temperature in the range of 0–800 °C. A dynamic range of 0–800 °C and a resolution of 1 °C have been obtained by either the first or the second sensor system. The experimental results agree with theoretical analyses. 相似文献
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A fiber-optic Fabry–Perot (F–P) acoustic emission (AE) sensor system based on an improved double wavelength stabilization technique is described. Without stabilization, the sensor system drifts out of quadrature due to the presence of low-frequency dynamic strains. The stabilization is achieved by using a dense wavelength division multiplexer (DWDM) to generate two quadrature phase-shifted output signals. An optimum model of double wavelength stabilization is established. The filtering wavelengths of DWDM are calculated using an optimization design method. The performance of the developed sensor system was verified by two preliminary tests. One was a test on the stabilization of operating point of fiber-optic F–P sensor, and other was the detection of simulated AE signals generated by the impact and pencil lead breaking. The test results demonstrate that simulated AE signals are successfully detected using this stabilized sensor system, which solves the fade-out problem. 相似文献
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Optical fibre probes or optrodes often form the heart of multimode fibre-based measurements and sensors. An optrode usually comprises a bundle of multimode fibres, out of which one or more fibres are used for irradiating the sample, and the remaining fibres are used to collect the light reflected/scattered/fluoresced from the sample containing the measurand(s). The so-collected light carries the characteristic signature of the measurand. Here we present our work on the design and realization of optrodes for the measurement of scattered light from liquid samples. Optical properties of a solution are usually characterized by the parameters absorption coefficient μ a , scattering coefficient μ s , and anisotropy factor g. We have developed a simple method to determine μ a , μ s , and g, of a turbid medium, and a Monte–Carlo model was used to simulate the light scattering from the turbid medium. As an application, we describe the development of a turbidity sensor that has been designed and realized by employing an optrode in conjunction with a concave mirror. The estimation of turbidity is done on the basis of total interaction, by considering scattering and absorption of light from the sample solution. Details of the experiments and results are presented here. 相似文献
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The performance of a simple sensor system prepared using gold (Au)-deposited glass rods of 1 to 4 mm in diameter with a deposition length of 100 mm based on surface plasmon resonance (SPR) is presented. The sensor properties of the Au-deposited glass rods of 2 mm in diameter with deposition lengths of 10 to 100 mm are also presented. The sensor system consists of a light-emitting diode (LED) as the light source and a photodiode (PD) as the detector. The response curves and sensor properties of the Au-deposited glass rod with a Au film thickness of 45 nm obtained by using three LEDs with yellowish green (563 nm), red (660 nm), and infrared (940 nm) emissions were investigated. The results were compared with those of a corresponding Au-deposited optical fiber sensor with a core diameter of 0.2 mm. Though the sensitivity, response, and detection limit of the Au-deposited glass rod sensor are lower than those of the optical fiber sensor, the fabrication and handling of the Au-deposited glass rod sensor are easier because of the robustness. Since the dielectric constant of Au changes with the light wavelength, the sensor properties of both the Au-deposited glass rod sensor and the optical fiber sensor depend strongly on the wavelength of the incident light and can be controlled by changing the LED emission wavelength. This sensor system is a new SPR-based refractometer with easy construction and operation. Ethanol concentrations in various spirits were measured with this SPR-based refractometer and the results agreed well with those measured with an Abbe refractometer. 相似文献
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A new principle of designing a SAW gas sensor is described. This sensor, being essentially of sorption type, also offers properties of thermometric SAW sensors. The basic idea here is that heat fluxes propagate between the SAW substrate and the working surface of the temperature-regulating system with some delay. A sensor based on this principle can detect not only the vapors of volatile substances but also gases by their thermal properties, retaining high temperature stability and speed of response unlike conventional SAW thermometric sensors. The design of this sensor built around a LiNbO3 SAW delay line is described, and experiments on detecting a household propane-butane mixture with this sensor are reported. In particular, the responses of the sensor are measured at different gas-flow rates, two different SAW substrate temperatures, and two propane-butane concentrations. Ways of improving the sensor’s performance are discussed. 相似文献
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A novel fiber-optic curvature sensor, which can measure curvature directly, has been developed in recent years. The electric current measurements system based on fiber-optic curvature sensor and electromagnetic principle is developed. A fiber-optic curvature sensor is bonded to a thin-walled cantilever and two circular magnet targets with the same parameters are configured at the tip of the cantilever symmetrically. In this case, the throughput of the sensor will be changed due to the bending deformation of cantilever, which is proportional to the electromagnetic force caused by measured electric current. Direct and alternate characteristics of the proposed measurement system are studied experimentally. The results show that the measurement errors are within the range of ±5.5 mA and the corresponding accuracy is within 1% at the current measurement range from −300 mA to 300 mA, which indicate the feasibility of the proposed measurement system. 相似文献
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仅依赖无线传感器网络在线实测是利用多跳式通信实现远程发送与存储数据丢包率高,实验阶段设计的二维结构仿真机器鱼巡游避障性能差,GPRS全天候数据采集与传送所需的流量费用高,针对以上这些问题,设计了一套可进行实测的机器鱼自动巡游避障、水质环境实时监测系统平台;该系统通过移动终端程序设计、利用三维采集路径跟踪算法及WSNs与Wifi热点技术对机器鱼群实现远程精准控制,按照设定深度、路径规划的采集点进行水温水位、PH值、溶解氧、电导率、浊度等常五类水质环境数据实时采集、处理、远程存储、显示、分析及预警,给出了系统的总体设计、机器鱼的结构与控制系统设计、终端节点与协调器的硬件系统及上下位机软件系统设计;利用这套系统对巢湖5个取样点实测,水温、溶解氧、PH值平均误差率分别为0.18%、0.5%及0.01%,远高于其他水质在线监测的精度要求,达到了预期成果;同时对水库及精细水产养殖业等水质在线监测与预警具有很高的推广价值。 相似文献
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D. P. Hand M. D. T. Fox F. M. Haran C. Peters S. A. Morgan M. A. McLean W. M. Steen J. D. C. Jones 《Optics and Lasers in Engineering》2000,34(4-6):415-427
A non-intrusive optical sensor system has been developed for focus control of laser welding. This detects the light generated by the process through the laser delivery optics, and exploits the chromatic aberrations of these optics to detect any laser focal error at the workpiece. This system works for a wide range of materials and welding parameters, and example results are presented. The sensor has also been applied to laser ‘direct casting’, a process in which 3-D structures are built by flowing metal powder into a focused laser beam. In this case, melt pool temperature is also important, and so additional optics are incorporated into the sensor to provide a pyrometric temperature measurement which is used to control the laser power. 相似文献