Precise interferometric length measurement using real-time fringe fitting

We created a simple device for the measurement of nanoscale displacements consisting in a Twyman-Green interferometer with one mirror having a slight offset in the horizontal plane with respect to the direction perpendicular to the incoming beam and one mobile mirror, a CCD array camera that captures frames of fringes (interferograms) generated by the interferometer and a software that acquires the interferograms captured by the camera and fits the fringes in order to determine the initial spatial phase of the series of fringes and, consequently, to monitor the movement of the mobile arm of the interferometer. Because the interferograms were acquired and analyzed sequentially, the algorithm could be parallelized easily on a multiprocessor/multicore platform. The device can work in real-time in which case the maximum speed of the mobile arm of the interferometer for which we can obtain unambiguous results is 30 λ/8/s, which is, assuming a He-Ne laser as the light source, almost 2.5 μm/s. In real-time conditions, the precision and accuracy of the measurement are low. In stationary conditions, however, the precision was determined to be below 1 nm.     

相干合成子光束一致性检测研究

分析了激光相干合成装置及其光路调整要求,提出利用剪切干涉检测合成光路中子光束一致性的方法。分析剪切干涉原理,建立了剪切板干涉物理模型,以相干合成中两路矩形光束拼接组束为例,数值模拟并研究了子光束的整体倾斜、离焦所对应的剪切干涉条纹,得到了条纹图像与子光束光轴误差、离焦误差之间的对应关系,用于相干合成光路中子光束光轴和发散角误差的判断。光轴倾斜大于5μrad时,可以直接观察互干涉和自干涉条纹变化,发散角在大于10μrad时,干涉条纹变化明显。此外,剪切干涉的自干涉条纹平移可用来检测子光束间的活塞误差,可作为光束拼接相干合成中闭环相位检测和控制的手段。     

相干合成子光束一致性检测研究

分析了激光相干合成装置及其光路调整要求,提出利用剪切干涉检测合成光路中子光束一致性的方法。分析剪切干涉原理,建立了剪切板干涉物理模型,以相干合成中两路矩形光束拼接组束为例,数值模拟并研究了子光束的整体倾斜、离焦所对应的剪切干涉条纹,得到了条纹图像与子光束光轴误差、离焦误差之间的对应关系,用于相干合成光路中子光束光轴和发散角误差的判断。光轴倾斜大于5 rad时,可以直接观察互干涉和自干涉条纹变化,发散角在大于10 rad时,干涉条纹变化明显。此外,剪切干涉的自干涉条纹平移可用来检测子光束间的活塞误差,可作为光束拼接相干合成中闭环相位检测和控制的手段。     

Single-element interferometer

A very simple and stable interferometer using a single optical element - a beam-splitter cube - is presented. The device resembles a two-arm interferometer in which the arms are together in one collimated beam, and the two beam halves interfere with the help of the beam-splitter cube. The proposed device produces simultaneously two interferograms with a relative phase-shift of π (rad). Since the period of straight interference fringes can be stably controlled, the device has potential application in spatial-carrier interferometry and for flexible writing of fiber Bragg gratings.     

Fringe Locking in a Laser Diode Interferometer by Optical Feedback During Modulation of Injection Current

A fringe locking phenomenon in a two beam interferometer using a semiconductor laser subject to optical feedback was, whose injection current is modulated. When a path difference of the interferometer is sufficient, fringes taken by a charge coupled device camera are seen to be stationary and the rms fluctuations of fringe phase is reduced to as low as 0.2ϖ radians from more than 8ϖ radians without the optical feedback. The rms phase fluctuation is independent of frequency and amplitude of the current modulation. The fringe locking has also been observed in the presence of both injection current modulation and piezoelectric transducer mirror vibration.     

Digital phase stepping speckle interferometry

A variation of electronic speckle pattern interferometry (ESPI) is presented whereby phase fringes are produced in contrast to speckle correlation fringes. Digital phase stepping speckle interferometry uses a phase measurement technique developed for holographic interferometry, which involves phase shifting of the reference beam in a conventional speckle interferometer. Saw-tooth phase fringes are produced by subtracting the phases of the speckle fields before and after object deformation in a digital frame store. This enables the sign of the deformation to be distinguished. After application of a special low-pass digital filter, the phase fringes are of adequate quality to be counted automatically.     

Modified super-wide-angle Sagnac imaging interferometer based on LCoS for atmospheric wind measurement

The modified super-wide-angle Sagnac imaging interferometer (MSASII) based on liquid crystals on silicon (LCoS) is proposed as a novel device for the detection of the upper atmospheric wind field. This device employs the phase-only modulation (POM) of LCoS coupled with the MSASII, and can measure phase changes in multi-band emissions without moving mirror. It can be used to replace the conventional Michelson’s interferometer with step-moving mirror device. The optical path difference (OPD) equation of MSASII-LCoS is derived, and the four compensation conditions (field, chromatics, thermal and achromaticity of thermal compensations) are discussed within the scope of wind measurement. The real parameters of LCoS and optical glasses are selected for numerical simulation and analysis. Three aurora lines (732.0, 630.0 and 557.7 nm) are considered, and their phase variations are 3.61, 2.02 and 0.15 fringes at the same incident angle of 3°, respectively. The rate of change of OPD with temperature is the magnitude of 10⁻⁶ cm/K, and the corresponding phase variations are within 0.09 fringes. The accuracy of phase modulation can be 0.614×10⁻² rad when LCoS of 10-bits is used. The novel model MSASII-LCoS shows its advantage for atmospheric wind measurement in the aspects of the overall structure, anti-vibration, operational flexibility and detection accuracy.     

Multimode interferometer for guided matter waves

Atoms can be trapped and guided with electromagnetic fields, using nanofabricated structures. We describe the fundamental features of an interferometer for guided matter waves, built of two combined Y-shaped beam splitters. We find that such a device is expected to exhibit high contrast fringes even in a multimode regime, analogous to a white light interferometer.     

球面的快速测量与非球面的快速拼接

利用立式车间用球面干涉仪实现比较法球面面形测量，一次调整好以后可以达到多片快速测量，避免复杂的调整，通过监示器看到光圈；并可以通过条纹扫描技术实现光圈数Ｎ及局部光圈数ΔＮ的自动客观判读；对于低陡度非球面的多块拼接，可以籍助“非球面特征干涉图”实现快速初步拼接，然后再用每个子孔径的相位探测实现整个孔径的拼接，并可以通过数字的测量与波面相减自动获得非球面的面形误差。     

Quadrature phase-shifting interferometer using spatial carrier

We propose a high-speed phase measurement using a phase calculation algorithm in a quadrature phase-shifting interferometer (QPI), which is applied to tilted fringes. Although the spatial carrier method is useful for a high-speed measurement with a single imaging sensor, the spatial resolution in conventional phase calculation algorithms is reduced owing to the use of three or more phase-shifted data at different sample points. Phases in the QPI method can be calculated with only two quadarture phase-shifted data extracted from the tilted fringes before and after a phase change of the interferometer. Thus, the proposed method can suppress the reduction of the spatial resolution compared with that in conventional methods, and makes it possible to measure a phase at high-speed. The principle and experimental results of this technique are presented.     

Real-time surface shape measurement by an active interferometer

We have succeeded in video rate analysis of fringes stabilized by an active interferometer placed outside optical benches. The interferometer uses the closed loop control of injection current of a laser diode to compensate for fringe movement that is detected by a spatial filtering detector. A video image of the locked fringes with tilt is supplied to the real-time fringe analyzer that delivers unwrapped phase distribution from the three phase shifted fringes generated by the electronic moiré method. For a concave mirror of 130 mm diameter placed on a wooden desk we observed the repeatability of λ/60 for P-V surface error of λ/5.     

改变写入Bragg波长的干涉条纹运动的扫描式Talbot干涉仪

一种干涉条纹运动的扫描式Talbot干涉仪被用于改变光纤Bragg光栅的写入Bragg波长。在系统中,光纤光栅是由来自相位掩模的±1级衍射光经平面镜反射后在远场形成紫外干涉条纹写入的,其中,相位掩模被用作±1级衍射光的分束器。值得注意的是通过干涉条纹的运动来扫描写入光纤光栅,有效降低了Talbot干涉仪对写入光源相干性的要求。     

Phase measurement accuracy of feedback interferometers

Feedback interferometers are described with specific reference to potential applications in micro-machines. A theoretical analysis is developed to determine the linearity, stability, and noise performance of this type of interferometer. The theoretical analysis was tested using a prototype high-precision feedback interferometer which showed that, at a feedback loop gain which enabled the system to track 6 fringes, the linearity of the interferometer was better than λ/100 and single phase measurements could be made with an accuracy of λ/80.     

基于多级组合棱镜提高激光中心波长检测精度的研究

为了在保证抗干扰能力不下降的条件下提高对激光中心波长的检测精度,设计了多级组合棱镜系统,并提出了多级组合棱镜的干涉条纹拼接处理方法及相位耦合的计算公式.通过计算多级组合棱镜的干涉图强度、光程差函数及光谱分辨率,分析了采用三块子棱镜的组合结构的光谱获取,给出了用于分段干涉条纹拼接的处理方法及步骤,最终光谱分辨率可达2.8...     

移相干涉技术中移相器的自校正方法

移相干涉技术（ＰＳＩ）是８０年代兴起的一门干涉图形自动识别技术，移相器作为移相干涉技术的关键部件其移相误差将直接影响到移相干涉技术的干涉图的识别精度。本文提出了一种移相器的自校正方法，即利用移相干涉仪的自身系统，通过快速傅里叶方法，对移相器进行逐步逼近校正。结合移相式红外干涉仪的研制，给出了一组移相器的自动校正的实验，实验表明，校正后的移相器的非线性误差可由原来的５％降低到０．２％。     

Fringe Locking in a Laser Diode Interferometer under Both Mirror Vibration and Injection Current Modulation

We have found that the fringes in a laser diode interferometer can be locked even in the presence of mirror vibration and injection current modulation. A theoretical analysis explains the fringe locking phenomenon. The dependence of wavelength change on both PZT (piezoelectric transducer) mirror vibration and the injection current variation are calculated using a model of coupled resonators consisting of the laser cavity and the interferometer. The fringe phase change caused by the vibration and modulation of the current is derived from this model, and was proven to be suppressed within much less than 2ϖ in excess of an integer multiple of 2ϖ.     

Photorefractive shearing interferometer

A novel method of obtaining shearing interferogram by slightly moving the crystal in a photorefractive interferometer is proposed. This method can measure the phase of an object itself instead of its diffraction field, and it is easy to realize continuously changeable shearing distance in any lateral direction and introduce carrier fringes at the same time. Both the theoretical analysis and experimental verification are given.     

基于双边倾斜傅里叶干涉具的激光光谱探测技术研究

为了在不改变静态傅里叶干涉具尺寸的基础上提高光谱分辨率,设计了双边倾斜傅里叶干涉具及等光程条纹展宽的方法。通过计算分析双边倾斜傅里叶干涉具空间产生光程差与传统干涉具光程差的关系,得到在整个干涉具尺寸不变的条件下,光谱分辨率提高到9.1 cm-1,比同尺寸静态傅里叶干涉具提高了近8倍,并且不会因干涉条纹混叠而造成无法采集。采用BK7材料加工制成双边倾斜傅里叶干涉具,用6种不同波长的激光照射分析干涉条纹,实验结果显示干涉条纹会因反射位置增大而导致探测波长较长的激光时中心波长偏大,根据其满足线性变化的规律,拟合可知每1nm的激光波长变化造成0.021 1 nm的增大误差,经过标定后平均误差与传统干涉具接近,同时可以有效地提高静态干涉系统的光谱分辨率。     

Talbot interferometry with a vibrating phase object

We describe a Talbot interferometer for measuring a vibrating phase object. The time-average fringes are moiré patterns modulated by the zeroth-order Bessel function. They provide information about the tilt at every point of a vibrating plate, for example. The Talbot interferometer is robust (common path) and cheap (printers grids as beam-splitters). The experiments can be performed with laser illumination or with a collimated beam of white light. Some experimental results are shown.     

一种新型迈克尔逊干涉仪条纹计数器的设计

设计了一种简便的能自动适应不同背景光强的新型迈克尔逊干涉仪条纹计数器。利用光敏电阻将条纹的变化转化为电信号,同时检测出背景光,并利用减法器去掉背景,经施密特触发器整形后,送入单片机计数并显示。实验证明,本计数器原理简单,可以适应不同的背景光强,具有精确度高、操作简便可靠等优点。