纳米隧道结的制备和特性研究

结合对向靶直流磁控溅射技术、微电子光刻方法和原子力显微镜阳极氧化加工方法制备了实用的纳米钛-钛氧化线-钛隧道结，钛膜的厚度为3.02nm.钛氧化线的宽度为60.5nm，在室温下此隧道结的I-V曲线表现出明显的库仑阻塞效应. 关键词： 原子力显微镜阳极氧化 钛氧化线 隧道结 库仑阻塞效应     

Structural and mechanical properties of Al–C–N films deposited at room temperature by plasma focus device

The Al–C–N films are deposited on Si substrates by using a dense plasma focus(DPF) device with aluminum fitted central electrode(anode) and by operating the device with CH_4/N_2 gas admixture ratio of 1:1. XRD results verify the crystalline Al N(111) and Al_3CON(110) phase formation of the films deposited using multiple shots. The elemental compositions as well as chemical states of the deposited Al–C–N films are studied using XPS analysis, which affirm Al–N, C–C, and C–N bonding. The FESEM analysis reveals that the deposited films are composed of nanoparticles and nanoparticle agglomerates. The size of the agglomerates increases at a higher number of focus deposition shots for multiple shot depositions. Nanoindentation results reveal the variation in mechanical properties(nanohardness and elastic modulus)of Al–C–N films deposited with multiple shots. The highest values of nanohardness and elastic modulus are found to be about 11 and 185 GPa, respectively, for the film deposited with 30 focus deposition shots. The mechanical properties of the films deposited using multiple shots are related to the Al content and C–N bonding.     

Tunneling magnetoresistance of the double spin-filter junctions at nonzero bias

A recent theoretical estimation indicated that the NM/FI/FI/NM double spin-filter junction (DSFJ, here the NM and FI represent the nonmagnetic electrode and the ferromagnetic insulator (semiconductor) spacer, respectively) could have very high tunneling magnetoresistance (TMR) at zero bias. To meet the requirement in research and application of the magnetoresistance devices, we have calculated the dependences of tunneling magnetoresistance of DSFJ on the bias (voltage), the thicknesses of ferromagnetic insulators (semiconductors) and the average barrier height. Our results show that except its very high value, the TMR of DSFJ does not decrease monotonously and rapidly with rising bias, but increase slowly at first and decrease then after having reached a maximum value. This feature is in distinct contrast to the ordinary magnetic tunnel junction FM/NI/FM (FM and NI denote the ferromagnetic electrode and the nonmagnetic insulator (semiconductor) spacer, respectively), and is of benefit to the use of DSFJ as a magnetoresistance device.     

Influence of Interorbital Interference on Tunneling Process in STM

We present a theoretical study of the influence of intra-atomic interorbital interference on the formation of STM images of metal surfaces. The obtained results show that this kind of interference may modify significantly the tunneling current by the increase or decrease of the current contributions flowing through different orbitals of the surface atoms. STM simulations performed for aluminium and nickel surfaces indicate that the height of corrugation and the topographies of STM images of different surfaces depend considerably on this interference.     

The influence of annealing temperature on the morphology of graphene islands

We report on temperature-programmed growth of graphene islands on Ru(0001) at annealing temperatures of 700°C,800°C,and 900°C.The sizes of the islands each show a nonlinear increase with the annealing temperature.In 700°C and 800°C annealings,the islands have nearly the same sizes and their ascending edges are embedded in the upper steps of the ruthenium substrate,which is in accordance with the etching growth mode.In 900°C annealing,the islands are much larger and of lower quality,which represents the early stage of Smoluchowski ripening.A longer time annealing at 900°C brings the islands to final equilibrium with an ordered moir’e pattern.Our work provides new details about graphene early growth stages that could facilitate the better control of such a growth to obtain graphene with ideal size and high quality.     

Low temperature magnetoresistance in La1.32Sr1.68Mn2O7 layered manganite under hydrostatic pressure

The La_1.32Sr_1.68Mn₂O₇ layered manganite system has been studied by the low temperature electrical resistance and magnetoresistance under hydrostatic pressure up to 25 kbar. We have observe both, a Curie temperature (T_C) and a metal-insulator transition (T_MI) at 118 K in the ambient pressure. The applied pressure shifts the T_MI to higher temperature values and induces a second metal-insulator transition (T²_MI) at 90 K, in the temperature dependence of resistivity measurements. Also, the pressure suppresses the peak resistance abruptly at T_C. When an external field of 5 T is applied, we have observed a large negative magnetoresistance of 300% at the transition temperature and a 128% at 4.5 K. However, the increased pressure decreases the magnetoresistance ratio gradually. When the pressure reaches its maximum available value of 25 kbar, the magnetoresistance ratio decreases at a rate of 1.3%/kbar. From our experimental results, the decrease of magnetoresistance ratio with pressure is explained by the pressure induced canted spin state which is not favor for the spin polarized intergrain tunneling in layered manganites.     

Direct observation of the scaling relation between density of states and pairing gap in a dirty superconductor

Theories and experiments on dirty superconductors are complex but important in terms of both theoretical fundamentals and practical applications. These activities are even more challenging when magnetic fields are present because the field distribution, electron density of states, and superconducting pairing potentials become nonuniform. Here, we present tunneling microspectroscopic experiments on Nb C single crystals and demonstrate that Nb C is a homogeneous dirty superconductor. When applying magnetic fields to the samples, we found that the zero-energy local density of states and the pairing energy gap followed the explicit scaling relation proposed by de Gennes for homogeneous dirty superconductors in high magnetic fields. More significantly, our experimental findings indicate that the validity of the scaling relation extends to magnetic field strengths far below the upper critical field, calling for a new nonperturbative understanding of this fundamental property in dirty superconductors. On the practical side, we used the observed scaling relation to derive a simple and straightforward experimental scheme for estimating the superconducting coherence length of a dirty superconductor in magnetic fields.     

Multi-color tunneling quantum dot infrared photodetectors operating at room temperature

Quantum dot structures designed for multi-color infrared detection and high temperature (or room temperature) operation are demonstrated. A novel approach, tunneling quantum dot (T-QD), was successfully demonstrated with a detector that can be operated at room temperature due to the reduction of the dark current by blocking barriers incorporated into the structure. Photoexcited carriers are selectively collected from InGaAs quantum dots by resonant tunneling, while the dark current is blocked by AlGaAs/InGaAs tunneling barriers placed in the structure. A two-color tunneling-quantum dot infrared photodetector (T-QDIP) with photoresponse peaks at 6 μm and 17 μm operating at room temperature will be discussed. Furthermore, the idea can be used to develop terahertz T-QD detectors operating at high temperatures. Successful results obtained for a T-QDIP designed for THz operations are presented. Another approach, bi-layer quantum dot, uses two layers of InAs quantum dots (QDs) with different sizes separated by a thin GaAs layer. The detector response was observed at three distinct wavelengths in short-, mid-, and far-infrared regions (5.6, 8.0, and 23.0 μm). Based on theoretical calculations, photoluminescence and infrared spectral measurements, the 5.6 and 23.0 μm peaks are connected to the states in smaller QDs in the structure. The narrow peaks emphasize the uniform size distribution of QDs grown by molecular beam epitaxy. These detectors can be employed in numerous applications such as environmental monitoring, spectroscopy, medical diagnosis, battlefield-imaging, space astronomy applications, mine detection, and remote-sensing.     

Simultaneous observation of the triangular and honeycomb structures on highly oriented pyrolytic graphite at room temperature: An STM study

Scanning tunneling microscopy (STM) was used to study the surface structures of dry-prepared and di-chloroethane-treated HOPG samples. Both triangular and honeycomb structures were simultaneously observed with the same tip at room temperature around a strand (grain boundary) on the HOPG surface. This observation did not support the tip effect in STM imaging explanation for HOPG in literature. A general layer-sliding model was utilized to explain the experimental results: sliding of the HOPG topmost layer was used to explain the origins of the triangular and honeycomb structures, and molecule intercalation into inter-layer spacing between the first and second layers of HOPG induced inhomogeneous deformation of the HOPG topmost layer that accordingly generated the Moiré patterns of the HOPG sample in di-chloroethane.     

石墨单晶表面原子的扫描隧道显微象

扫描隧道显微镜(STM)是近几年发展起来的一种直接观察物质表面微观结构的仪器.利用量子隧道效应,将极细的金属针尖接近样品表面扫描,从而获得样品表面的三维图象,可以反映表面原子排列和原子形态.图1是我们设计制造的扫描隧道显微镜原理图.采用压电陶瓷管P作为x,y和z方向的三维扫描器件.管表面等分为相邻90°的四个电极,针尖T固定在其中的一个电极上.尖端曲率半径为100nm左右的金属针尖,可用化学腐蚀法制备.两对电极上施加扫描电压时,针尖便在垂直于管轴z的x-y方向扫描,而z方向的高低变化则由加在内管壁上的电     

X射线干涉仪实现扫描探针显微镜样板线间距纳米测量

X射线干涉仪以非常稳定的单晶硅晶格作为长度单位 ,可以实现亚纳米精度的微位移测量。提出了将 X射线干涉仪和扫描隧道显微镜结合起来 ,利用单晶硅的晶格尺度测量扫描探针显微镜样板节距的技术方案 ,并进行了实验研究     

Determination of probe spacings for the precise evaluation of electrical characteristics of a magnetic tunnel junction by in-house current-in-plane tunneling measurements

Magnetic tunnel junctions have not been easily accessible for research because of not only their complicated fabrication processes but also side effects induced during the fabrication. The method utilizing arrays composed of in-line four-point probes with various spacings is promising as an alternative to the fabrication method. We found in the current-in-plane tunneling measurement that the determination of the probe spacing is the most important to evaluate the characteristics of magnetic tunnel junctions. Our simulation indicates that if one would choose at least more than three sets of an array with probe spacings centered at the spacing at which the maximum current-in-plane tunneling magnetoresistance is observed, the statistics should become improved resulting in the accurate evaluation of the properties of tunnel junctions. We also found that the suitable probe spacings with a change in the resistance of electrodes are not as sensitive as those with a change in the RA of the tunnel junction. Our results alert that the failure of selecting suitable probe spacings observes no tunneling signals because tunneling is very sensitive to the resistances of the tunnel junction and electrodes, which makes the current-in-plane tunneling method useless.     

高效、高分辨光纤微探针的制备及检验

提出两种同时满足高分辨、高传光效率的探针模型以及制备方法 :先用自制热拉装置将光纤拉制成过渡区为双曲线或抛物线形的探针 ,然后用 4 0 %氢氟酸进行快速腐蚀 ,使探针孔径变小而保持过渡区域形状和锥度基本不变。所获探针孔径变化范围为 2 0～ 2 0 0 nm,锥度 2 0°～ 6 0°。为检验探针性能 ,将两种探针的出射光分布与用传统热拉法所得到探针进行对比 ;探测了光子扫描隧道显微镜状态下的倏逝波衰减曲线 ;给出了用集光式扫描近场光学显微镜得到的近场光学图像 ;同时 ,验证了探针对剪切力控制的适用性。     

Single electron tunneling at large conductance: The semiclassical approach

We study the linear conductance of single electron devices showing Coulomb blockade phenomena. Our approach is based on a formally exact path integral representation describing electron tunneling nonperturbatively. The electromagnetic environment of the device is treated in terms of the Caldeira-Leggett model. We obtain the linear conductance from the Kubo formula leading to a formally exact expression which is evaluated in the semiclassical limit. Specifically we consider three models. First, the influence of an electromagnetic environment of arbitrary impedance on a single tunnel junction is studied focusing on the limits of large tunneling conductance and high to moderately low temperatures. The predictions are compared with recent experimental data. Second, the conductance of an array of N tunnel junctions is determined in dependence on the length N of the array and the environmental impedance. Finally, we consider a single electron transistor and compare our results for large tunneling conductance with experimental findings. Received 2 February 2000     

Observation of single-spin transport in an island-shaped CoFeB double magnetic tunnel junction prepared by magnetron sputtering

The Co₄₀Fe₄₀B₂₀(CFB)/MgO/CFB/MgO/CFB-based multilayer was prepared by conventional magnetron sputtering and utilised in the fabrication of double magnetic tunnel junctions (DMTJs) for which the middle CFB layers were island-shaped. By analysing the magnetic property of the CFB islands with Langevin’s equation, it was possible to identify their diameters of 7.6, 8.9 and 11.0 nm; accordingly submicron-scaled DMTJs were fabricated to investigate single-spin transport phenomena. The coulomb staircase and the oscillatory tunnel magnetoresistive (TMR) were able to be observed at 6 K, where the TMR ratio was enhanced up to 60%, which is the highest value ever achieved in this structure.     

Structural and magnetic changes in MgO-based magnetic tunneling junctions during the early stages of annealing

We have studied the effects of the initial stages of the annealing on magnetic tunnel junctions with MgO barriers and CoFeB electrodes. We report changes in the resistance-voltage characteristics and tunneling magnetoresistance for patterned transport junctions, and correlate these with the observed changes in the structural and magnetic interface morphologies determined by soft X-ray resonant magnetic scattering from sheet films from the same wafer. An important feature of our experiment was that all measurements were carried out within the soft X-ray diffractometer on samples from the same wafer subjected to simultaneous annealing cycles, so that our magnetotransport and scattering data are directly comparable. The as-grown junction showed a tunneling magnetoresistance ratio of 5.5%, and a specific barrier resistance of . A anneal for 1 h resulted in a small rise in barrier resistance and magnetoresistance coupled with a smoothing of the magnetic interfaces, consistent with the healing of barrier defects and removal of tunneling hot-spots. A subsequent anneal for a further hour resulted in further smoothing, and a rise in the magnetoresistance ratio to 72%, and a much weaker dependence of the parallel state resistance upon voltage bias, indicating the development of crystallographic texture in the electrodes. Annealing to yielded a further decrease in magnetic interface width (the quadrature sum of roughness and intermixing length scales). The reduction in interface width for Co species occurred at higher temperatures than for Fe throughout the experiments.     

Influence of interface within the composite barrier on the tunneling electroresistance of ferroelectric tunnel junctions with symmetric electrodes

The interface with a pinned dipole within the composite barrier in a ferroelectric tunnel junction（FTJ） with symmetric electrodes is investigated.Different from the detrimental effect of the interface between the electrode and barrier in previous studies,the existence of an interface between the dielectric SrTiO₃ slab and ferroelectric BaTiO₃ slab in FTJs will enhance the tunneling electroresistance（TER） effect.Specifically,the interface with a lower dielectric constant and larger polarization pointing to the ferroelectric slab favors the increase of TER ratio.Therefore,interface control of high performance FTJ can be achieved.     

Epitaxial growth of highly strained antimonene on Ag(111)

The synthesis of antimonene, which is a promising group-V 2D material for both fundamental studies and technological applications, remains highly challenging. Thus far, it has been synthesized only by exfoliation or growth on a few substrates. In this study, we show that thin layers of antimonene can be grown on Ag(111) by molecular beam epitaxy. High-resolution scanning tunneling microscopy combined with theoretical calculations revealed that the submonolayer Sb deposited on a Ag(111) surface forms a layer of AgSb₂ surface alloy upon annealing. Further deposition of Sb on the AgSb₂ surface alloy causes an epitaxial layer of Sb to form, which is identified as antimonene with a buckled honeycomb structure. More interestingly, the lattice constant of the epitaxial antimonene (5 Å) is much larger than that of freestanding antimonene, indicating a high tensile strain of more than 20%. This kind of large strain is expected to make the antimonene a highly promising candidate for roomtemperature quantum spin Hall material.     

用扫描隧道显微镜操纵Cu亚表面自间隙原子

在超高真空环境下使用扫描隧道显微镜研究了吸附有双甘氨肽分子的Cu(001)表面.在一定的 偏压条件下，针尖在该表面扫描后会形成纳米尺度的Cu团簇，这些团簇可以根据意愿排列成 字母或图形.团簇的高度同偏压、隧道电流以及时间等条件有密切关系.在室温下可以稳定存 在的团簇为制造纳米器件提供了技术上的可能性.实验结果表明，形成团簇的Cu原子不是来 自Cu衬底表面或是针尖.化学吸附在Cu表面的双甘氨肽分子，受到隧道电场的作用会在Cu表 面形成张应变场，Cu亚表面自间隙原子在张应变场作用下迁移到表面是形成团簇的原因. 关键词： 扫描隧道显微镜 纳米尺度Cu团簇 自间隙原子