低气压氙气介质阻挡放电的一维仿真研究

通过建立一个自洽耦合的一维流体模型来描述低气压氙气介质阻挡放电(DBD),并采用有限元法对模型进行数值仿真研究,得到了不同外加电压幅值和频率下的气体间隙压降、放电电流、介质表面电荷随时间的变化关系以及电子、离子、中性粒子和空间电场的时域分布.仿真结果表明:介质表面电荷对放电的点燃与熄灭起着关键的作用;在一个放电周期内,根据气体间隙压降的变化情况,介质表面电荷可按六个阶段进行分析;随着外施电压幅值的增加,间隙击穿逐渐提前至外施电压过零点之前发生,放电更为剧烈;随着外施电压频率的提高,气体间隙压降减小,间隙容易击穿,放电也更加均匀.粒子及空间电场的时域分布表明氙气DBD为典型的辉光放电.     

Peculiarities of Dielectric Barrier Discharges

The dielectric barrier discharge (DBD) is a highly transient, non‐thermal discharge form, which exists in a broad pressure range. It occurs in arrangements, where a dielectric layer covers at least one electrode. The dielectric quenches the current and distributes the discharge over the whole surface. Depending on the geometrical conditions three basic types of DBD arrangements are distinguished. In arrangements with a gas gap a filamentary or a homogeneous‐diffuse discharge mode appears. The (stable) filamentary mode consists of a multitude of microdischarges, which in some extent can be rather easily tailored for e. g. plasma‐chemical applications. In arrangements with a long electrode (or several in parallel) on a dielectric surface and a plane counter‐electrode on the reverse side of the dielectric, pure surface discharges can be observed. They are characterised by low ignition voltages. The extension of the discharge on the surface depends on the voltage amplitude. If pairs of long electrodes are within the bulk of a dielectric, discharge phenomena appear on the surface of the dielectric. As these devices can be produced with small and precise electrode gaps, high mean field strengths in the discharge region can be realised. The properties of the discharges in these arrangements as well as their dynamics are described in detail and compared with one another. The advantages of each type are highlighted. Some aspects, which may be of interest for plasma‐chemical reactions on surfaces and in the gas space are discussed.     

多通道表面放电光泵浦源触发特性研究

 介绍了多通道表面放电光泵浦源的设计，理论分析了触发电压幅值及上升时间、绝缘基板厚度等参数对所设计光泵浦源触发特性的影响。分析表明：在触发电压作用下，通道两电极处电场出现强烈畸变，而通道中间电场基本为零。采用高速相机拍摄泵浦源的放电图像以及电流线圈测量各通道的放电电流这两种方法实验研究了泵浦源的同步性及放电均匀性。当氮氩混合气体总气压为0.1 MPa (氮氩体积比为3∶7)，充电电压20 kV，触发电压30 kV，前沿约10 ns时，成功实现了10通道均匀放电，抖动约20 ns。实验结果表明：在保证放电装置绝缘良好的情况下，若充电电压和触发电压越高，触发电压上升时间越短，触发电极至通道的有效距离越短，则多通道放电的抖动就越小，放电均匀性越好。     

实验研究大气压多脉冲辉光放电的模式和机理

采用稍不平行电极进行大气压He气介质阻挡多脉冲辉光放电实验,通过增强电子耦合器件相机短时曝光照片,研究大气压多脉冲辉光放电在不同时刻的放电模式.通过气隙放电电流、表面电荷计算,理论分析了表面电荷、空间电荷、外加电压与气隙电场强度的关系,研究大气压辉光放电形成多脉冲的机理.实验结果表明,放电首先在间隙稍窄的电极左端开始;在第一个脉冲电流峰值,电极右端也开始放电;第一个电流脉冲经历了Townsend放电到辉光放电的过程;电流脉冲之间的时间内,间隙一直维持着微弱的辉光放电;随后的每个电流脉冲均是辉光放电.理论分析表明,大气压辉光放电的多个电流脉冲是表面电荷、空间电荷与外加电压共同演化的结果;除放电伊始出现Townsend放电外,同一半周期内的放电电流脉冲中不会再出现Townsend放电. 关键词： 介质阻挡放电 增强电子耦合器件 大气压辉光放电 多脉冲     

实验研究大气压多脉冲辉光放电的模式和机理

采用稍不平行电极进行大气压He气介质阻挡多脉冲辉光放电实验,通过增强电子耦合器件相机短时曝光照片,研究大气压多脉冲辉光放电在不同时刻的放电模式.通过气隙放电电流、表面电荷计算,理论分析了表面电荷、空间电荷、外加电压与气隙电场强度的关系,研究大气压辉光放电形成多脉冲的机理.实验结果表明,放电首先在间隙稍窄的电极左端开始;在第一个脉冲电流峰值,电极右端也开始放电;第一个电流脉冲经历了Townsend放电到辉光放电的过程;电流脉冲之间的时间内,间隙一直维持着微弱的辉光放电;随后的每个电流脉冲均是辉光放电.理论分析表明,大气压辉光放电的多个电流脉冲是表面电荷、空间电荷与外加电压共同演化的结果;除放电伊始出现Townsend放电外,同一半周期内的放电电流脉冲中不会再出现Townsend放电.     

Effect of plasma treatment of the dielectric on electroforming of a thin-film MIM system

It was found that when a thin dielectric film is exposed to the plasma of a low-voltage gas discharge, channels with elevated conductivity form in the film and these channels significantly facilitate the subsequent electroforming of the MIM system. It is concluded from the experimental data that even in the case of metallic electrodes highly conducting channels are formed in the dielectric by electronic processes occurring under the conditions of a strong electric field and not by diffusion of the electrode material.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 10, pp. 94–98, October, 1991.     

Numerical studies of atmospheric pressure glow discharge controlled by a dielectric barrier between two coaxial electrodes

The glow discharge in pure helium at atmospheric pressure, controlled by a dielectric barrier between coaxial electrodes, is investigated based on a one-dimensional self-consistent fluid model. By solving the continuity equations for electrons, ions, and excited atoms, with the current conservation equation and the electric field profile, the time evolution of the discharge current, gas voltage and the surface density of charged particles on the dielectric barrier are calculated. The simulation results show that the peak values of the discharge current, gas voltage and electric field in the first half period are asymmetric to the second half. When the current reaches its positive or negative maximum, the electric field profile, and the electron and ion densities represent similar properties to the typical glow discharge at low pressures. Obviously there exist a cathode fall, a negative glow region, and a positive column. Effects of the barrier position in between the two coaxial electrodes and the discharge gap width on discharge current characteristics are also analysed. The result indicates that, in the case when the dielectric covering the outer electrode only, the gas is punctured earlier during the former half period and later during the latter half period than other cases, also the current peak value is higher, and the difference of pulse width between the two half periods is more obvious. On reducing the gap width, the multiple current pulse discharge happens.     

介质阻挡放电斑图中放电通道的相互作用研究

在近大气压介质阻挡放电中，研究了六边形斑图的空间波长随放电参数的变化，仔细观察了稳定的六边形中放电通道的产生及运动行为.结果表明空间波长随电压增加而减小，变化曲线与放电间隙和气压有关.电压升高，边界处生成新的放电丝，位于六边形最外层顶点处新生成的放电丝沿径向运动，而位于六边形边长上新生成的放电丝的运动方向平行于距其最近的C₂轴(过六边形顶点). 继续升高电压，放电丝变为条状进而形成螺旋波或靶波.在观察实验结果和分析放电丝受力的基础上，认为放电区域可能存在一种类似二维库仑晶体中存在的约束势. 关键词： 介质阻挡放电 斑图 放电通道 约束势     

Cold-hollow-cathode arc discharge in crossed electric and magnetic fields

A crossed-field cold-hollow-cathode arc is stable at low working gas pressures of 10⁻²–10⁻¹ Pa, magnetic-field-and gas-dependent arcing voltages of 20–50 V, and discharge currents of 20–200 A. This is because electrons come from a cathode spot produced on the inner cathode surface by a discharge over the dielectric surface. The magnetic field influences the arcing voltage and discharge current most significantly. When the plasma conductivity in the cathode region decreases in the electric field direction, the magnetic field increases, causing the discharge current to decline and the discharge voltage to rise. The discharge is quenched when a critical magnetic field depending on the type of gas is reached. Because of the absence of heated elements, the hollow cathode remains efficient for long when an arc is initiated in both inert and chemically active gases.     

介质阻挡放电中不同厚度气隙内微放电通道的光谱特性研究

采用发射光谱法,研究了具有三层介质的介质阻挡放电中不同厚度气隙内微放电通道的等离子体参量的变化规律。与在传统的具有双层介质的介质阻挡放电系统中所产生的微放电通道不同,三层介质系统内微放电通道在光谱特性方面展现了完全不同的性质以及变化规律。实验发现,微放电通道在不同的放电气隙中具有不同的发光强度。利用氮分子第二正带系(C3Π_u→B3Π_g)的发射谱线以及对氮分子离子391.4 nm谱线强度与氮分子394.1 nm谱线强度之比的考察,实验进一步测量了氮分子(C3Π_u)的振动温度以及电子平均能量分别随氩气含量以及在不同电压下的变化规律。结果表明,当外加电压一定时,厚气隙内形成的微放电丝在分子振动温度以及电子平均能量上均低于薄气隙微放电丝。并且它们都随着氩气含量的增加而降低。随着电压的逐步升高,厚气隙内的微放电丝在以上两种参量上均基本保持不变,而薄气隙内微放电丝则出现较为明显的升高。这表明具有三层介质的介质阻挡放电中薄气隙较厚气隙对电压更为敏感且在相同电压浮动内电场变化范围更大。     

Operation of a coplanar-electrode plasma display panel cell

Plasma display panels (PDPs) are composed of miniature gas discharge devices sustained in noble gas mixtures. In this paper, the dynamics of a coplanar-electrode PDP cell are described using results from a two-dimensional computer simulation. During the first voltage pulse, the discharge takes place between the top and bottom electrodes. Due to charging of the bottom dielectric during the first discharge pulse, a surface discharge takes place between the top coplanar electrodes on successive pulses     

Tracing locations of new coating material during spark anodizing of titanium

The growth of anodic coatings on titanium, under sparking conditions, is investigated in tracer experiments, using alkaline silicate and phosphate electrolytes. Coatings are formed sequentially in each electrolyte, with phosphorus and silicon located by energy-dispersive X-ray analysis and glow discharge optical emission spectroscopy. The coatings, containing anatase, rutile and amorphous oxide, with incorporated phosphorus and silicon species, are shown to grow by discrete thickening at sites of dielectric breakdown. New material is found near the metal, within the coating bulk and at the coating surface. Approximately 10–30% of the new material is located near to the coating surface and about 40–60% near to the metal. The findings are attributed to the formation of breakdown channels allowing access of electrolyte species to the inner parts of the coating and to subsequent rapid formation of coating material, under high temperatures, associated with increased local current density, and high pressures, associated with volume constraints on oxide growth and gas generation.     

气流对氮气介质阻挡放电气体温度及放电模式的影响

利用光谱测量和高速照相的方法,对大气压氮气介质阻挡放电进行了研究.在气流的帮助下,2mm气隙中的均匀放电可以长时间得以维持.根据放电电流波形和1μs曝光时间的放电图像,这种均匀放电被判定为汤森放电.用氦氖激光器对实验中所用的光谱仪带来的谱线轮廓展宽进行了标定,并将得到的仪器展宽数据输入Specair软件,计算了不同气体温度下氮分子二正系0—2谱带的谱线轮廓.通过用计算谱线轮廓去拟合实验谱线轮廓,确定了氮分子的转动温度并将其近似为气体温度.结果表明:大气压氮气介质阻挡汤森放电并不能使气体温度大幅上升(ΔTg≤50K),气体温度的小幅上升不会引起热不稳定性而导致放电发展成为细丝放电.气流确实可以降低放电气体温度,但这不是使汤森放电得以维持的原因.通过比较加入气流前后的放电光谱可知,气流降低了气隙中杂质氧的含量,使得更多的氮分子亚稳态N2(A3Σu+)的寿命延长到下一次放电的起始时刻,为汤森放电提供了必需的大量种子电子.     

大气压氩气介质阻挡辉光放电的一维仿真研究

为了研究氩气(Ar)中介质阻挡大气压辉光放电(APGD)的放电机理, 通过建立一个一维的多粒子自洽耦合流体模型, 采用有限元方法进行数值计算, 得到了气体间隙压降、介质表面电荷密度、放电电流密度随时间的周期变化波形, 以及电子、离子、亚稳态粒子密度和空间电场强度的时空分布. 仿真计算结果表明：介质表面积聚的电荷对于放电的过程的起始及熄灭具有重要作用;当增大外施电压时, 放电击穿时刻提前, 放电电流密度和介质表面电荷密度峰值增大, 表明放电过程更加剧烈;随着阻挡介质相对介电常数的增大, 放电电流密度也随之增大. 各粒子密度及电场的时空分布表明放电过程在外施电压半个周期中只有一次放电, 且存在明显的阴极位降区、负辉区、等离子体正柱区等辉光放电的典型区域, 为大气压辉光放电(APGD).     

介质阻挡放电中体放电和沿面放电的光谱线形研究

在放电间隙较大的介质阻挡放电中,利用高速照相机,同时观察到了体放电(VD)和沿面放电(SD)。采用光谱法,研究了VD和SD的光谱线形随放电参数的变化。在氩气介质阻挡放电中,测量了VD和SD的Ar Ⅰ(2P₂→1S₅)谱线展宽和频移随气压及放电间隙的变化。结果发现：SD的展宽和频移均比VD的大,说明SD的电子密度高于VD的电子密度;随着压强从40 kPa增大到60 kPa,VD和SD的谱线展宽及频移均增加,表明它们的电子密度均随压强的增大而升高;随着d值从3.8 mm增大到4.4 mm,VD和SD的谱线展宽也增加,反映它们的电子密度均随d值的增大而增加。     

高功率微波沿面闪络击穿机制粒子模拟

针对高功率微波介质沿面闪络击穿物理过程,首先建立了理论模型,包括:动力学方程、粒子模拟算法、二次电子发射, 以及电子与气体分子蒙特卡罗碰撞模型、电子碰撞介质表面退吸附气体分子机制;其次,基于理论模型,编制了1D3V PIC-MCC程序,分别针对真空二次电子倍增、高气压体电离击穿和低气压面电离击穿过程,运用该程序仔细研究了电子和离子随时间演化关系、电子运动轨迹、电子及离子密度分布、空间电荷场时空分布、电子平均能量、碰撞电子平均能量、碰撞电子数目随时间演化关系、电子能量分布函数、平均二次电子发射率以及能量转换关系。研究结果表明:真空二次电子倍增引发的介质表面沉积功率只能达到入射微波功率1%左右的水平,不足以击穿;气体碰撞电离主导的高气压体电离击穿,是由低能电子（eV量级）数目指数增长到一定程度导致的,形成位置远离介质表面,形成时间为s量级;低气压下的介质沿面闪络击穿,是在二次电子倍增和气体碰撞电离共同作用下,由于数目持续增长的高能电子（keV量级）碰撞介质沿面导致沉积功率激增而引发的,形成位置贴近介质沿面,形成时间在ns量级。     

Characteristics of surface glow discharge in a low-pressure supersonic gas flow

Kinetic particle-in-cell simulations are performed to examine the characteristics of the surface glow discharge in a supersonic nitrogen flow. The gas pressure is varied between 100 and 500 mTorr; the applied voltage, between −500 and −1000 V. The analysis focuses on the effect of boundary conditions at the dielectric barrier surrounding the electrodes on the electron energy distribution function. The potential on the dielectric is found by using a local balance condition for the electron and ion currents to the surface. The results of self-consistent simulations show that a negative potential on the dielectric substantially reduces the rate of high-energy electron loss from the bulk plasma and thus significantly changes the ionization rate, as well as plasma parameters and configuration.     

流动氩气放电系统中条纹斑图形成的实验研究

采用双水电极介质阻挡放电装置, 在大气压下流动氩气中产生了稳定的条纹斑图, 并采用拍照和电学方法对其产生机理进行了研究. 研究发现, 条纹斑图仅出现在外加电压较低的情况下, 在较高电压下放电会过渡到均匀模式. 低电压下的条纹斑图是由于放电丝沿着气流方向定向移动形成的, 该定向移动速度几乎与电压无关, 主要由气体流量决定. 分析发现放电空间中活性粒子的记忆效应对条纹斑图的形成起决定作用. 电学测量发现放电电流和放电的气隙起始电压都随着气流的增加而减小, 本文对这一现象进行了定性解释. 本文结果对斑图动力学研究和介质阻挡放电的工业应用都具有很重要的意义.     

X波段高功率微波对介质窗材料的破坏现象

 在X波段微波源（频率9.4 GHz,功率1 GW）下,对4种典型介质窗材料（聚四氟乙烯、有机玻璃、低密度聚乙烯及高密度聚乙烯）在真空中进行了微波放电击穿实验,同时考虑了材料的不同表面处理工艺（表面刻槽和抛光）对其击穿特性的影响,对微波击穿后样品的表面形貌进行了宏观和微观分析,实验观测到:介质表面出现了沿微波电场方向的明显树枝状破坏现象,且材料表面处理工艺对其击穿破坏程度有显著影响,认为树枝状破坏通道与施加的微波场有着密切的关系。通过观察透明有机玻璃内部的树枝状破坏,发现树枝既沿介质表面生长,同时也向介质内部发展。提出了微波作用下介质窗击穿破坏的物理模型,认为微波电场导致树枝状破坏沿电场方向发展,而微波磁场导致树枝状向介质内部发展,并进一步给出了树枝状破坏起始和发展的可能原因。     

沿面型介质阻挡放电喷枪的发光特性及气体温度研究

利用氩气作为工作气体,采用正弦电压驱动沿面型等离子体喷枪,在大气压空气环境中产生了均匀的等离子体羽。电学和光学测量结果表明,等离子体羽放电只存在于外加峰值电压的正半周期,并且正半周期的放电脉冲个数随气体流量的增加而增加。通过对正半周期不同位置的发光脉冲信号进行比较,发现等离子体羽均按子弹形式传播,其中每一个发光脉冲均对应一次等离子体子弹传播过程。通过对比放电电流和等离子体羽的发光信号,发现等离子体羽的发光脉冲滞后于放电电流脉冲,且该延迟时间基本服从正态分布。该延迟时间随着外加电压峰值及气体流量的增大而减小。利用光纤测温仪测量了等离子体羽的气体温度,发现气体温度随外加峰值电压的增大而升高,随工作气体流量的增大而降低。通过分析放电过程,对上述现象进行了定性解释。