Identification of nonlinear recording error in phase shifting interferometry

The phase shifting method for quantitative fringe pattern analysis provides high accuracy if stringent requirements on the component interferogram recording are met. In the paper the issue of detection and identification of error sources in the two-beam interferogram phase shifting experiment is discussed. The phase shift angle histogram and lattice-site representation are applied for that purpose. Special attention is paid to possible nonlinear recording of component interferograms in the presence of linear and nonlinear phase step errors. Four and five step phase shifting algorithms are considered. The superiority of the lattice-site representation is shown. In the case of phase steps equal to π/2, however, the lattice-site representation of shift angles for five frame algorithm does not allow to detect recording nonlinearity. The four frame counterpart shows to be very helpful in this respect. Its properties related to the fringe pattern profile under study, including a defocused Ronchi grating, are discussed.     

Reference phase shift determination in phase shifting interferometry

The phase shifting technique has recently seen application to many types of interferometers, including holographic, speckle and moiré systems for strain analysis. In these applications, close control of the phase shifts may be impossible due to the effect of mechanical vibrations, and this presents difficulties when extracting the phase information, since the reference phase shifts are generally assumed to be known. In this work, several approaches to the problem of determining the reference phase shifts in a perturbing environment are critically evaluated using computer simulations. The analyses provide a general relationship between precision and reference phase shift errors and demonstrate the performance of each method as certain idealised fringe pattern error parameters are varied. A practical example confirms the predictions of the numerical simulations and demonstrates the feasibility of using reference phase shift estimates to improve data reduction procedures.     

A state space approach in phase shifting interferometry

The paper proposes a state space approach for the determination of phase distribution in an interferogram in the presence of a non-sinusoidal waveform, random noise, and the miscalibration of the piezoelectric device. In this approach we first estimate the phase step imparted to the piezoelectric transducer (PZT) before determining the phase distribution. A denoising procedure is applied with the knowledge of the state-feedback matrix prior to the extraction of the phase step. This step ensures a good estimation of the phase distribution even at low signal-to-noise ratios. The other salient features of the proposed concept lie in its ability to compensate the detector non-linearity and in the use of non-collimated beams. The comparison of the proposed method with other bench-marking algorithms shows that our approach is efficient and robust. The experimental results show the feasibility of the proposed approach.     

相移技术中五步等步长Stoilov算法的性能分析

Stoilov算法是近几年提出的一种五步等步长相移算法。有关文献中的误差分析表明 ,该算法的性能优于四步等步长Carr啨算法闹懈隽耍樱簦铮椋欤铮鏊惴ǖ恼繁泶锸?,采用线性误差理论详细分析了算法的性能 ,尤其是算法性能对相移步长的依赖关系。分析表明 ,可以选择一个最佳的相移步长以有效减少位相测量误差 :相移步长为 5 2°时可有效抑制二次相移量误差的影响 ;相移步长为 90°时可极大地减少光强误差的影响。最后给出了Stoilov算法与Carr啨算法和Hariharan算法的比较。     

Shape identification using phase shifting interferometry and liquid-crystal phase modulator

A phase shifting technique using a Michelson interferometry system is presented and applied to surface contour measurement. Hyperbolic fringes are produced by the interference of two spherical wavefronts expanded from a beam expander. The fringe pattern is projected on an object surface and the deformed grating image is captured by a CCD camera for subsequent analysis by a PC. Phase variation is achieved by a liquid-crystal device incorporated in the Michelson interferometry system. Results obtained using the proposed method for objects of various shapes and sizes compared well with those from a conventional profilometer.     

Phase shifting interferometry using a robust parameter estimation method

The paper proposes a maximum-likelihood (ML) method based on spectral estimation theory for the estimation of phase distribution in interferometry in the presence of nonsinusoidal waveforms, noise, and the miscalibration of the piezoelectric device. The proposed method also allows the use of arbitrary phase steps. ML estimators are asymptotically efficient for large number of data samples. The method is complemented well by the incorporation of global search algorithm known as Probabilistic Global Search Lausanne for minimizing the ML function. The performance of the proposed method is studied in the presence of noise.     

Automated collimation testing in Lau interferometry using phase shifting technique

We demonstrate an automated procedure for detection of collimation position of an incoherent beam in Lau interferometry using phase shifting technique. The experimental arrangement consists of a Lau-based interferometer in which light from a source grating illuminates a set of two coarse gratings separated by self-imaging distance. Phase shifting procedure is incorporated by translating the detector grating, corresponding to different positions of the collimating lens. The phase map is plotted corresponding to each position. The slope of the phase map is indicative of the collimation position of the optical beam. The technique is fully automatic and provides good accuracy and high precision.     

Generalized phase shifting interferometry based on Lissajous calibration technology

The feasibility and limitation of directly using the Lissajous figure and ellipse fitting technology to correct the phase extraction error in generalized data reduction algorithm (GDRA) for phase extraction of randomly phase-shifted interferograms are analyzed and discussed. By combining Lissajous calibration technology, which represents the transformative process of Lissajous ellipse to circle (ETC), with advanced iterative algorithm (AIA) we propose a novel generalized phase shifting algorithm (GPSA), and here it is abbreviated as ETCI method. The phase distribution and phase shifts that extracted from randomly phase shifted interferograms by use of ETCI are more accurate and the whole process is far faster than AIA. Additionally, proposed method is less sensitive to non-uniform background intensity and modulation amplitude. Numerical simulations are conducted to evaluate the performance of ETCI, and some influential factors are elaborated. The experimental results further indicate proposed method is suitable for truly random phase shifted interferograms.     

高精度干涉检验移相算法对振动误差的免疫能力

对移相干涉测量中影响移相稳定性,从而产生测量误差的小幅度机械振动进行了研究,建立了振动误差模型,仿真分析了Wyant84b三步算法、Hariharan87五步算法、七步算法和十三步算法4种不同移相算法对振动的免疫能力。模拟结果显示,十三步算法对振动的免疫能力最好,与已发表文献成果吻合,说明本文的模拟具有较高的可信度,在一定程度上能够对影响干涉仪精度的振动误差进行合理预测,并能够起到评价和筛选移相算法的作用。     

Multiple-surface interference fringes analysis basing on wavelength-modulated phase shifting interferometry

Phase-shifting interferometry is widely used for high-precision surface measurements, but has difficulty in dealing with parallel optical plates. In this paper, an advanced method is proposed to simultaneously measure surface distributions of parallel optical plates from multiple surface interference fringes. The basic theory behind the technique is by applying wavelength-modulated phase shifting interferometry (WMPSI) to get enough frames of multiple surface interference fringes. In the procession of wavelength-modulated phase shifting, the phase variation for one point of the surface is traced and is processed by Fourier transform, and then the frequency spectrum of every surface can be separated from each other. Therefore, it allows extraction of front surface, back surface and thickness variation from multiple surface interference fringes with high precision.     

Determination of fractional fringe orders in holographic interferometry using polarization phase shifting

A simple method to determine the fringe orders at points between fringes in holographic interferometry is presented. The method is based on the use of two reference beams in the recording and reconstruction of the interferogram. A phase difference is imposed between the reference beams on reconstruction through polarization elements. The interferogram is viewed through a polarizer to recombine the images. The fractional fringe order is obtained from the angle through which the polarizer is rotated to shift the adjacent fringe to the point of interest.     

Measurement of surface profile in vibrating environment with instantaneous phase shifting interferometry

In-process measurement has been the requirement of the precision industries, but due to vibrations while manufacturing, in-process measurement has been difficult to achieve. There is little work on in-process measurement using phase shifting interferometry, as phase shifting is extremely sensitive to vibrations. In this work, the advantage of the developed non-mechanical and instantaneous phase shifting interferometry is felt while measuring surface profile of large flat surfaces under vibrating conditions which can be extended for in-process measurement of surface profile. A near common path optical configuration is achieved and the effect of the environment is reduced. Moreover, the measurement of phase is instantaneous which increases the versatility of this technique for measuring vibrating objects. Profile measurements were carried out on a smooth mirror surface excited with vibrations of different frequencies and the technique was found to be immune to vibrations of up to 1000 Hz.     

Evaluation of a phase shifting method for vortex localization in optical vortex interferometry

The optical vortex interferometer uses a regular lattice of the optical vortices. In the previous papers we showed that changes in vortex lattice geometry can be related to physical quantities of the object being measured. The accuracy of such a measurement depends strongly on the precision of vortex point localization (vortex points are points where wavefront phase is undetermined). In this paper we compared the measurements of object wave tilt calculated from different localization methods applied to real interferograms and evaluate various localization methods.     

Accurate phase-shifting digital interferometry

In phase-shifting interferometry experiments, the accuracy of the phase shift is a major issue. Many experimental and data analyses are done to cancel phase-shift errors inherent to the modulation techniques used. We propose to remove most of the phase-shift error by recourse to a frequency-shifting method. This approach can be applied to both holography and interferometry. We validate the idea with a holographic experiment.     

Compensation of phase change on reflection in white-light interferometry for step height measurement

We present a method for compensating for the phase change on reflection in scanning white-light inteferometry that practically permits precise three-dimensional profile mapping of composite target surfaces that comprise multiple, dissimilar materials. The compensation method estimates the variation of phase change with the spectral distribution of the light source through a first-order approximation and then directly compensates for the measurement errors by performing two additional quasi-monochromatic phase-measuring interferometric measurements. Experimental results prove that the proposed compensation method is capable of reducing the measurement error in step height gauging to +/-5 nm or less.     

Accurate state and parameter estimation in nonlinear systems with sparse observations

Transferring information from observations to models of complex systems may meet impediments when the number of observations at any observation time is not sufficient. This is especially so when chaotic behavior is expressed. We show how to use time-delay embedding, familiar from nonlinear dynamics, to provide the information required to obtain accurate state and parameter estimates. Good estimates of parameters and unobserved states are necessary for good predictions of the future state of a model system. This method may be critical in allowing the understanding of prediction in complex systems as varied as nervous systems and weather prediction where insufficient measurements are typical.     

Comparative analysis of phase extraction methods based on phase-stepping and shifting curve in grating interferometry

Two phase extraction methods which are based separately on phase-stepping and shifting curve are mainly used in phase-sensitive imaging in gating interferometry to determine the x-ray phase shift induced by an object in the beam. In this paper, the authors perform a full comparative analysis and present the main virtues and limitations of these two methods according to the theoretical analysis of the grating interferometry.     

Phase-controlled nonlinear interferometry

We have studied the influence of (relative) phases between fundamental and generated harmonic in a variety of nonlinear optical experiments. The concomitant large coherence length and the various methods of phase-control known from linear optics facilitate amplitude superposition and the generation of novel interference patterns, which may be used to determine phase and amplitude of the constituent processes.Dedicated to Prof. Dr. Herbert Welling on the occasion of his 60th birthday     

Chirp estimation in phase-shifting interferometry

We propose a new approach for estimating the phase in the presence of a nonlinear response of a phase-shifting device: a piezoelectric transducer (PZT). The method is complemented well by the high resolution and the maximum likelihood estimation techniques in the estimation of the phase step and the nonlinear coefficient. The advantage of the proposed method is that it can be extended to the extraction of multiple phases in configurations involving multiple PZTs in the presence of nonlinearity. Symmetricity in the phase steps is not required in this method. Hence hysteresis of the PZT does not have any influence on the accuracy of the phase estimation. The effectiveness of the method is shown by experimental results.