利用微悬臂梁表面应力研究聚N-异丙基丙烯酰胺分子的构象转变

提出了一种基于微悬臂梁传感技术研究大分子折叠/构象转变的新方法.通过分子自组装的方法将热敏性的聚N-异丙基丙烯酰胺(PNIPAM)分子链修饰到微悬臂梁的单侧表面，用光杠杆技术检测温度在20—40℃之间变化时由于微悬臂梁上的PNIPAM分子在水中的构象转变所引起的微悬臂梁变形.实验结果显示：在升温过程中，微悬臂梁的表面应力发生了变化并且导致微悬臂梁产生了弯曲变形，这个过程对应着微悬臂梁上的PNIPAM分子从无规线团构象到塌缩小球构象的构象转变.在降温过程中，微悬臂梁发生了反方向的弯曲变形，这对应着PNIPA 关键词： 构象转变 聚N-异丙基丙烯酰胺分子链 表面应力 微悬臂梁     

基于光学相干测振系统的微悬臂梁缺陷检测

提出了基于光学相干测振（optical coherence vibrometer, OCV）系统的微悬臂梁缺陷检测方法。自搭建的OCV系统最大振动位移量程、最大振动频率分别为2.574 mm和138.5 kHz,应用该系统对含缺陷微悬臂梁-附加质量块耦合结构进行振动测量获得其固有频率,并利用附加质量块对固有频率的影响特性实现了对缺陷的定位。在对系统采集到的干涉光谱信号处理的过程中,采用FFT（fast Fourier transform, FFT）+ FT（Fourier transform, FT）细化频谱校正算法进行误差校正,精度可提高1 000倍以上,使系统实现纳米量级的位移测量。实验结果表明,该方法能够有效识别微悬臂梁的缺陷位置,为微小型结构的缺陷检测提供了一种新的方法,同时拓展了光学相干测振技术在工程结构无损检测的应用。     

Estimating thermal transport in deep X-ray lithography with an inversion method

This study proposes a general methodology for estimating the depth profile of the heat source of the thermal transport system during deep X-ray lithography. The exposure process in a lithography system is considered as an inverse heat conduction problem with an unknown heat source. The conjugate gradient method is used to solve the inverse problem. Numerical results confirm that the method proposed herein can accurately estimate the heat source even involving the inevitable measurement errors. Furthermore, this methodology can also be applied to estimate the local distribution of temperatures when using scanning thermal microscopy (SThM) to microthermally machine materials and will contribute to increase the quality of microthermally machined products. In addition, a thermomechanical data-storage system, which utilizes a resistively heated atomic-force-microscopy (AFM) cantilever tip to read and write data bits, can also adopt this inverse methodology to control the temperature of a polymer substrate.     

透明软质薄膜的表面形貌测量

为了实现光刻胶表面形貌的广域、高精度测量,对新一代测量理论及测量方法进行了研究。首先分析了被测物件的特性,根据其柔软、透明的特征提出应用光干涉法和机械探针相结合的方法进行测量,同时阐明了使用此方法进行表面形貌测量的优点,并据此原理搭建了光学多探针表面形貌测量装置,光学测量部分采用白光干涉计,探针部分采用拥有8只球型探头的多点悬臂测量探针。然后应用此装置对标准刻槽试件和半透明光造型薄膜试件进行了测量。测量52 nm的标准刻槽试件时得到了测量误差小于2%,标准偏差小于1 nm的结果,表明本装置可以达到高精度测量表面形貌的目的。通过测量高约400 nm的树脂材料证实了此装置可以克服多重反射的影响测量透明薄膜的表面形貌。     

Ultrasonic radiation in dynamic force microscopy

In dynamic force microscopy the cantilever of an atomic force microscope is vibrated at ultrasonic frequencies in the range of several 10 kHz up to several MHz while scanning a sample surface. The amplitude and phase of the cantilever vibration as well as the shift of the cantilever resonance frequencies provide information about local sample surface properties. In several operation modes of dynamic force microscopy, for example force modulation microscopy, tapping mode or atomic force acoustic microscopy, the sensor tip is in contact with the sample at least during a fraction of its vibration cycle. The periodic indentation of the tip with the sample surface generates ultrasonic waves. In this paper, the ultrasonic radiation of a vibrating cantilever into a sample and its contribution to the damping of the cantilever vibration are calculated. The theoretical results are compared to experiments.     

Physical properties of dynamic force microscopies in contact and noncontact operation

In the field of Scanning Force Microscopy several dynamical contact and noncontact modes have been introduced increasing the range of detectable surface and interface properties, and allowing to detect material properties such as elasticity and mass density on the nanometer scale. A detailed understanding of tip/surface interactions and the dynamic processes involved is required to understand the origin of a material contrast using these techniques. Here a general method to solve the equation of motion of a vibrating SFM cantilever/tip system in an external force field is presented. Contact modes as well as intermittent contact modes are discussed using a single set of equations describing the cantilever/tip motion, and by varying the size of amplitudes of the vibrating cantilever/tip system. To quantitatively describe the oscillation behavior of the SFM cantilever at large amplitudes the computer simulations are based on the MYD/BHW model providing a realistic contact model with respect to the contact area, the size of the contact forces as well as the transition from repulsive to attractive forces. The results are compared with the experiment and with different approaches based on analytical and numerical models.     

Resonance modes of voltage-modulated scanning force microscopy

Mechanical resonance modes of the scanning force microscope (SFM) cantilever in contact conditions provide contrast enhancement in the imaging of surface charges when using voltage modulation techniques tuned to such resonances. Extensions of the method were made as regards the lateral (twisting) and frontal (buckling) modes of the cantilever, as well as the enhanced second harmonic detection of voltage-modulated response at resonance and near-resonance detection in the SFM tapping mode. As an example of application, vibration spectra and images taken on a triglycine sulfate (TGS) single crystal are discussed.     

Frequency shifts of cantilever in AFM

The frequency shift and frequency shift image of cantilever in AFM have been studied by numerical integration of the equation of motion of cantilever for silicon tip with rutile TiO₂(0 0 1) surface in UHV conditions and by the Hamaker summation method for the tip-surface interaction forces. The effects of the excitation frequency at the cantilever base and the equilibrium position of the tip on the frequency shift have been calculated and the results showed the same phenomena as those measured, e.g., the frequency shift increased dramatically or rapidly before the contact point and was then almost level off after the contact point. The effects of scanning speed and the initial closest distance of tip to the contact point have been calculated at different excitation frequencies at the cantilever base and the results showed that proper frequency shift image could be obtained either by noncontact mode at the excitation frequency slightly less than the resonance frequency of free cantilever, or by tapping mode at the excitation frequency a few times smaller than the resonance frequency of free cantilever.     

Determination of the mass of polymer films using an AFM cantilever

There are no established methods that have a sensitivity during the determination of an adsorbed polymer film mass that is not worse than 1 ng that do not require additional calibration and the usage of reference measures. A highly sensitive method for measuring an adsorbed polymer is proposed in this work. The added mass was determined by the change of the resonance frequency of a cantilever used in atomic-force microscopy (AFM) as a probe. A modification of the cantilever surface is proposed that allows one to avoid the affect of the adsorbed polymer on the cantilever force constant. The mass of poly(diallyldimethylammonium) (PDDA) chloride adsorbed on the cantilever surface was obtained with a sensitivity of 0/01 ng using an AFM cantilever.     

Laser-based modification of wettablility for carbon fiber reinforced plastics

This paper presents a laser-based technique for surface preparation of carbon fiber reinforced plastics (CFRP) for bonded repair. Ablative and non-ablative treatment of the surface is produced by variation of laser power and the resulting surface energy determined by goniometric measurements. Wettability has been directly related to a calculated wetting envelope. The investigations show an additional major influence of the surface topography on the shear strength of the joint. The direction of the applied laser lines in relation to the fiber direction was identified as an essential influence for this roughness. A ns IR-laser demonstrates high potential for surface preparation as well as for selective ply removal. The laser prepared surfaces are examined through optical microscopy, scanning electron microscope (SEM), and contact angle measurements. The wettability studies show a significant increment in surface energy after laser treatment, in relation to non-treated as well as surface grinding samples.     

Profile measurement system based on linnik-type interferometric microscope for visible-light region and infrared-light region

A profile measurement system consisting of linnik-type interferometric microscope, light source and cameras is developed based on white-light scanning interferometry extending from the visible-light region to the infrared-light region. Three-dimensional profiles of microstructures are obtained via a phase-stepping algorithm using a CMOS array camera for the visible-light region and an InGaAs CCD array camera for the infrared-light region. Errors of the measurement system along with extensive applications in MEMS device profile reconstruction of top surface, sidewall and internal structures are discussed in detail.     

Nanoscale imaging of surface piezoresponse on GaN epitaxial layers

Surfaces of GaN films were investigated by atomic force microscopy (AFM) with implemented piezoelectric force microscopy technique. A model of PFM based on the surface depletion region in GaN films is discussed. The local piezoelectric effect of the low frequency regime was found to be in phase with the applied voltage on large domains, corresponding to a Ga-face of the GaN layer. Low piezoresponse is obtained within the inter-domain regions. The use of frequencies near a resonance frequency enhances very much the resolution of piezo-imaging, but only for very low scanning speed the piezo-imaging can follow the local piezoelectric effect. An inversion of the PFM image contrast is obtained for frequencies higher than the resonance frequencies. The effect of a chemical surface treatment on the topography and the piezoresponse of the GaN films was also investigated. Textured surfaces with very small domains were observed after the chemical treatment. For this kind of surfaces, piezo-induced torsion rather than bending of the AFM cantilever dominates the contrast of the PFM images. A small memory effect was observed, and explained by surface charging and confinement of the piezoelectric effect within the carrier depletion region at the GaN surface.     

Surface plasmon polariton-based optical beam profiler

We describe a surface plasmon polariton- (SPP-) based device for measuring the intensity distribution of strongly focused light beams. A gold thin film configured as a sharp step is positioned in the focal region of a light beam, converting light into SPPs. The SPPs emit directional leakage radiation into the glass substrate beneath the thin film. The intensity of the leakage radiation is proportional to the intensity of the incident local light at the position of the step, allowing us to reconstruct the optical field profile by scanning the thin film's edge through the focal region.     

Application of least-square estimation in white-light scanning interferometry

White-light scanning interferometry (WLSI) is a powerful tool for investigating the profile of a test object that contains sharp steps. Due to the light source used in WLSI system, it is able to overcome phase ambiguity problem, which is often encountered in monochromatic interferometry. In this paper, a new algorithm based on least-square estimation using short-time Fourier transform (STFT) is proposed to measure the profile of a test object. STFT is used to extract the peak position of the coherence envelope of a white-light interference signal and retrieve the corresponding phase values simultaneously at first. A complex phasor (CP) method is introduced to further reduce the phase noise. Then, the phase values at several positions around are utilized to achieve a more accurate peak position based on least-square line fitting. Both simulated and experimental results show that the proposed algorithm is able to accurately measure the profile of a test object.     

Optical edge-projection method for three-dimensional profilometry

A novel optical edge-projection method is proposed for surface contouring of an object with low reflectivity. A structured light edge is projected onto a dark surface, and the image is captured by a CCD camera. The object contour is evaluated with an active triangular projection algorithm, and one obtains a whole-field three-dimensional contour of the object by scanning the optical edge over the entire object surface. The proposed method is applied to a black nonreflective object made from woven carbon fiber and is also applied to measure the profile of a small object (a coin). The results show that an accurate profile of the specimen can be obtained.     

Broadband light source shearing interferometer using Savart plate and angular scanning technique

A shearing interferometer based on using broadband light source, Savart plate, and angular scanning technique is proposed for slope contour measurements in this Letter. Of which, the Savart plate divides the wavefront reflected from the detected surface into two laterally displaced ones, the interference pattern generated by the interference of the divided wavefronts is modulated by an envelope function, and the slope contour of the detected surface is determined by examining the shifting of the darkest fringe as the shear plate is angularly scanned. A setup for realizing the interferometer is constructed. The experimental results of using this setup agree the validity and feasibility of the proposed interferometer.     

Surface profile optimization of antireflection gratings for solar cells

The solar cell efficiency can be improved by antireflection gratings. In this paper, the antireflection gratings with different symmetrical surface profiles are investigated by numerical simulations based on the Rigorous Coupled-Wave Analysis. Simulated results show that the antireflection performance of sharp profile such as quadratic profile has a significant improvement compared with triangular and parabolic profiles, while the top cutoff in the grating tip will severely influence the antireflection performance. Meanwhile, proper length of flat region between grating features in the nonclose-packed triangular antireflection grating can have better antireflection performance than the close-packed counterpart for the same grating period and height. Such antireflection gratings with different surface profiles may offer attractive solutions to current commercial silicon solar cell, as well as organic and other semiconductor material based solar cells.     

On the operating stability of a scanning force microscope with a nanowhisker at the top of the probe

The functioning of the scanning probe microscope cantilever with a metal-carbon whisker at the top is studied. Metal-carbon whiskers grown by focused ion beam deposition in the presence of precursor gases have an aspect ratio in the range α = 10?200 and hold shape upon multiple scanning in the constant force mode. The advantage of probes with whiskers at the top in examining rough surfaces with vertical walls and narrow grooves is demonstrated experimentally. At high α, the scanning probe microscope is found to operate unstably, because the lateral surface of the whisker interacts with the specimen. It is shown that the axis of the whisker should be set normally to the specimen’s surface for the microscope to operate reliably at high aspect ratios.     

双探头三维表面轮廓测量系统

提出了一种将原子力显微(AFM)探头与位置敏感探测器测距探头相结合的双探头三维表面轮廓测量新方法, 可在获取样品表面轮廓的同时, 测定样品局部形貌。搭建了双探头三维表面轮廓测量系统, 阐述了系统的工作原理, 并对其结构组成包括双探头、步进扫描台和计算机控制平台进行了说明。用2000 line/mm的光栅进行了扫描实验, 对系统的测量范围进行了标定。以外径8 mm、内径4 mm的金属垫圈为样品, 进行了整体三维表面轮廓与局部表面形貌测量实验, 给出了垫圈表面图和局部三维形貌图。结果表明, 该系统能满足不同尺寸和材质的样品的测量要求, 即可实现对样品轮廓的大范围扫描测量, 又可对样品局部进行高精度形貌测量。     

光纤共焦扫描显微术用于光盘盘基预刻槽结构的检测

基于共焦扫描差分术,提出了检测不同表面反射率的物体表面表貌的方法,并提出了在光纤共焦扫描成像术中利用边缘判据进行边缘定位的极限尺度。上述思想用于检测光盘盘基预刻槽形结构,在建立的一套光纤共焦扫描成像装置上进行了光盘盘基预刻槽结构的检测,获得了槽宽、槽间距及槽深等实验数据,与槽标准参数相符。