Liquid-crystal microlens arrays using patterned polymer networks

A real-time dynamically tunable-focus microlens array made from a polymer-liquid-crystal (LC) composite is demonstrated. The polymer was first patterned in microlens array cavities by lamination, and the LC-monomer mixture was then injected to the molded polymer cavities and finally stabilized by UV light-induced networks. Using this new fabrication method, we demonstrated a lens with a spherical shape and a glazed surface. This LC-based microlens can reach approximately 100% light efficiency for linearly polarized light. The saturation voltage of the lens is approximately 60 Vrms, and the response time is approximately 30 ms.     

Tunable microlens arrays using polymer network liquid crystal

A tunable-focus microlens array based on polymer network liquid crystal (PNLC) is demonstrated. The PNLC was prepared using an ultraviolet (UV) light exposure through a patterned photomask. The photocurable monomer in each of the UV exposed spot forms an inhomogeneous centro-symmetrical polymer network which acts as a lens when a homogeneous electric field is applied to the cell. The focal length of the microlens arrays is tunable with the applied voltage.     

Effects of low polymer content in a liquid-crystal microlens

A small number of bifunctional monomers are mixed with a nematic liquid crystal (LC) and cured with a distributed electric field, which is produced by a circular-hole-patterned electrode structure. A gradient type of lens, that is, a LC microlens, is investigated for various polymer concentrations. Addition of 3% polymer is enough to freeze the gradient-index properties of the structure in the form of a convex lens, and a polymer-stabilized LC microlens is demonstrated. Although a lower concentration of polymer cannot hold the distribution properties in a curing process, it can maintain the variable focus as a nematic material can. The polymer networks can also eliminate the disclination line that usually appears and causes the lens in this type of LC device to deteriorate.     

六角形孔径平面微透镜阵列的制作及基本特性研究

采用光刻离子交换工艺制作了六角形孔径平面微透镜阵列.离子交换后的变折射率区域有微小重叠,填充系数可达95%以上.对制作的六角形孔径平面微透镜进行了折射率分布、数值孔径和像差等光学特性测试,得到的六角形孔径平面微透镜阵列光学性能均匀,成像质量较好的结果.该透镜阵列的研制成功为制作高质量高填充系数透镜阵列及模拟生物复眼光学系统奠定了基础.     

紫外衍射微透镜阵列的设计与制备

为了提高紫外焦平面阵列的填充因子,可以通过微透镜阵列与紫外焦平面阵列的集成,以改善紫外焦平面阵列的探测性能。根据标量衍射理论设计了用于日盲型紫外焦平面阵列的128×128衍射微透镜阵列,其工作中心波长为350nm,单元透镜F数为F/3.56。采用组合多层镀膜与剥离的工艺方法制备了128×128衍射微透镜阵列,对具体的工艺流程和制备误差进行了分析,测量了衍射微透镜阵列的光学性能。实验结果表明:衍射微透镜阵列的衍射效率为88%,与理论值95%有偏差,制备误差主要来自对准误差和线宽误差。紫外衍射微透镜阵列具有均匀的焦斑分布,与紫外焦平面阵列单片集成能较好地改善器件的整体性能。     

The Effect of Wettability of Nickel Mold Insert on the Surface Quality of Molded Microlenses

In micromolding of microlens array, it is important to prepare a mold insert of superb quality, which contains the micro-cavity of lens shape, because the geometrical quality of the mold insert defines the final quality of the molded micro-optics. In the present study, the electroforming process was used to make the metallic micro-mold insert for micro-molding of microlens array. The wettability property of the fabricated mold isnert was examined by measuring the contact angle of the polymer in the pliable state on the mold insert. Microlenses were compression-molded with the fabricated mold insert. The effects of the molding temperature and wettability property on the replication quality of the molded lenses were analyzed experimentally.     

Determination of Aberration Coefficient of Microoptic Arrays from Axial Confocal Response by Neural Method

We propose a high-speed and parallel method to determine lens aberrations from its confocal axial response. This method analyzes the intensity confocal response including the aberration information of the objective lens by means of neural network algorithm. This method is designed to work parallely for many microlenses, and simultaneously determines aberrations of each element of a microlens array. A prototype system can determine spherical aberration coefficients of a microlens in the range from −0.7λ to 0.3λ with less than 1% RMS error.     

Limitations of the Shack–Hartmann sensor for testing optical aspherics

Aspheric lenses and surfaces are increasingly used in modern high-quality optics. Therefore, new measuring methods for an accurate quantification of these aspheres are also necessary. The current approach to quantify aspheres is to apply null systems such as computer-generated holograms as a part of a null lens in a interferometer. An alternative to this method is the Shack–Hartmann wavefront sensor. The dynamic range of this sensor can be adjusted by the optical parameters of the applied microlens array. Hence, large wavefront aberrations can be measured directly without a null lens. However, there are basic limitations in the dynamic range of a Shack–Hartmann sensor (SHS) depending on the curvature of the incident wavefront. In this paper, an analytical expression to determine the strongest wavefront curvature which can be measured with a defined microlens array of an SHS is derived. It allows to calculate the microlens parameters required to measure the wavefront of a test lens. Particularly, the influence of rotational symmetric aspherical wavefront shapes to the dynamic range of an SHS has been studied. A comparison between interferometry and the SHS has been accomplished. Numerical solutions using scalar diffraction theory illustrate the analytical predictions.     

Research on micro-optical lenses fabrication technology

We present a detail investigation on the development of a series of gradient index (GRIN) optical glass microlens and polymer microlens and microlens arrays in our laboratory in recent years. The special glass material GRIN lenses have been fabricated mainly by using ion-exchange technology, which are applied to construct micro-optic devices and other applications. On one hand, we demonstrated the light propagation and imaging properties of GRIN lenses and the results analyzed. On the other hand, we have explored a drop-on-demand ink-jet printing method to produce microlens array using nano-scale polymer droplets involved with a uniform ultraviolet light and heat solidifying process. The experimental setup for manufacturing polymer microlens array and the performance of refractive microlens elements are also given in this paper.     

Lens Sag Measurement of Microlens Array Using Optical Interferometric Microscope

This study attempted to develop a detection system for lens sag of the microlens array in real time using an optical automatic inspection framework to link with the computer through a camera. An image processing technique was applied to detect the spherical microlens array, and then, the results were compared.The system light source used laser light and applied CCD to collocate with the microscope array to form an automatic optical detection system for an optical interferometric microscope. It applied the principle of the Fizeau interferometer, illuminated the surface of microlens array, and formed the phase difference required by the interference of two lights through the laser light reflected by the reference plane and the surface of the microlens array, thus, forming an interference fringe.When the sag of the microlens was much longer than the wave length of the detection light source, the fringe would be densely distributed, thus, only a few central fringes were clear in the microscopic image. An image processing method was used to search the center of the interference fringe and a creative algorithm was utilized to obtain the lens sag of the microlens. As proved by the experiment, lens sag of 4 microlens arrays were detected in real time, with a minimum detection error of 0.08 μm, and a maximum detection error of 4 μm (error value 1 ~ 9%), according to different sample processes. This system featured a simple structure and is applicable to non-contact detection and detection of different-sized microlens arrays.     

Electrically controllable microlens array fabricated by anisotropic phase separation from liquid-crystal and polymer composite materials

Anisotropic phase separation has been used to fabricate an electrically switchable microlens array from nematic liquid crystals. Nematic liquid-crystal-based microlens arrays have been built with diameters of approximately 400 microm and natural focal lengths as small as 1.6 mm. The focal length of each microlens in the array can be changed in milliseconds by an applied electric field. These devices, which have no internal substructures to scatter light, offer higher efficiency and greater light throughput than polymer dispersed devices.     

Applications of Liquid Crystals to Variable-Focusing Lenses

Liquid Crystal (LC) lens cells with variable focusing properties are fabricated using nematic LC materials and applicable to optical devices, and our recent work on these cells is described. First, the LC lens cells are prepared using lens-shaped substrates coated with transparent electrodes. Their focal length can be continuously varied between the values for an ordinary ray and an extraordinary ray by changing the voltage passing across them. Methods of improving properties and some applications of the lens-shaped LC lens are briefly described. The lens properties of these cells with plane-paralleled structure are then demonstrated, where the refractive index is graded to a quadratic distribution resulting from an axially symmetric non-uniform electric field. LC cells with axially distributed tilt angles are constructed using a pair of circular hole-patterned electrode substrates and very small LC lens (LC microlens) with variable focusing can be fabricated. Optimizing the electrode structure, device parameters, and material parameters of the LCs, excellent focusing properties can be obtained. The properties of the LC microlens are improved by using the polymer stabilization technique. The LC microlens with a divided electrode structure shows three-dimensional beam steering and focusing properties, and the astigmatic aberration caused by the molecular orientation effect can be compensated. Applications of the LC microlens to optical devices and systems are introduced.     

Design and fabrication of a microlens array by use of a slow tool servo

In recent years it has become possible to fabricate free-form optics by use of multiaxis ultraprecision machines. Here a 5 x 5 microlens array is fabricated by using an ultraprecision diamond turning machine equipped with four independent axes. Unlike the conventional process where a single diamond tool is used to machine one lens at a time, this research demonstrates the development of an innovative diamond tool trajectory that allows the entire microlens array to be machined in a single operation. The machined microlens array is measured for both curve conformity and surface roughness. Compared to the conventional approach where indexing the workpiece is difficult and unreliable, this process can produce microlenses with accurate geometry and optical surface finish. This unique process is described in detail from optical measurement to machining process design and development to final results. This research also demonstrates the possibility of fabricating any arbitrary shape with the same approach.     

非球面液滴微透镜固化控制和焦斑测量研究

利用电场改变液滴透镜的面形得到非球面,并实时检测其面形和焦斑图像,在适当的时候用紫外光固化液滴制作具有良好光学性能的非球面微透镜.比较了非球面液滴微透镜在固化前后面形、焦斑的变化和对透镜性能的影响,讨论了液滴透镜在固化过程中变形的机理和相应的解决方法.用分辨率50 nm的光斑探针扫描仪精确测量了固化后的非球面微透镜的聚焦光斑,测得了光斑轴向分布曲线和均方根直径3.384μm的聚焦光斑,经图像处理计算了透镜的点扩散函数和光学传递函数,评价了所制作的非球面微透镜的聚光和成像能力,并给出了透镜的实际成像图像,对于完善高品质非球面微透镜及其阵列的制作工艺具有重要意义.     

高质量光刻胶微小透镜阵列的制作

本文对光刻胶熔融法制作微小透镜阵列的机理进行了进一步深入的理论和实验研究,特别是提出和研究了非球面表面的形成问题。对微小透镜,特别是非球面形成过程的参数控制,例如对光刻胶小圆柱的高度、熔融光刻胶和基片的接触角的控制进行了较详细的讨论。我们制出了具有较好性能的微小透镜列阵,并给出了测量结果以及实物和成象照片。最后,给出了一种建议采用的实时控制高质量微小透镜列阵形成的装置方案。     

Design and Fabrication of Microlens Array for Near-Field Vertical Cavity Surface Emitting Laser Parallel Optical Head

A GaP microlens for collecting laser light was developed in the tip of a near-field probe. It is important to realize a near-field optical probe head with high throughput and a small spot size. The design and fabrication results of the GaP microlens array are described. The most suitable GaP microlens with a probe was calculated as having a 10 μm radius using the two-dimensional finite difference time domain (2-D FDTD) method. The full width half maximum (FWHM) spot size variation and optical power density tolerance were calculated as 157 nm ± 5 nm and 7%, respectively. A spherical GaP microlens was fabricated with a radius of 10 μm by controlling the Cl₂/Ar gas mixture ratio. The difference between the theoretical spherical shape and the fabricated GaP microlens was evaluated as 40 nm at peak to valley. The FWHM spot size and optical throughput of the fabricated microlens were measured as 520 nm and 63%, respectively. The microlens was the same as a theoretical lens with a 10 μm radius. The micron-lens array fabrication process for a near-field optical head was demonstrated in this experiment.     

精确控制大数值孔径微透镜列阵面形的显影阈值方法

提出了一种可对大矢高、非球面微透镜阵列面形进行精确控制的新方法。针对不同面形的微透镜阵列，该方法首先对光致抗蚀剂表面的曝光分布进行设计，然后，利用光致抗蚀剂显影过程中的阈值特性，对微透镜的面形实行控制。当抗蚀剂显影速率接近0时，即可获得设计的微透镜面形。该方法不仅大大提高了微透镜阵列矢高的加工范围，而且还减小了光刻材料显影特性对微透镜面形的影响，提高了微透镜阵列的面形控制精度，在实验中获得了矢高达114μm的微透镜阵列。最终实现了大浮雕深度、大数值孔径、非球面微列阵光学元件的面形控制。     

大数值孔径自聚焦平面微透镜列阵研究

采用离子交换工艺,在PS—1玻璃基片上制作自聚焦平面微透镜列阵,由于窗口区凸起,数值孔径高达0.58。本文还对窗口凸起的透镜特性和窗口直径对折射率分布的影响进行了理论分析,得到了有益结果。最后对样品的光学特性进行了讨论。     

Fiber optic bundle array wide field-of-view optical receiver for free space optical communications

We propose a design for a free space optical communications (FSOC) receiver terminal that offers an improved field of view (FOV) in comparison to conventional FSOC receivers. The design utilizes a microlens to couple the incident optical signal into an individual fiber in a bundle routed to remote optical detectors. Each fiber in the bundle collects power from a solid angle of space; utilizing multiple fibers enhances the total FOV of the receiver over typical single-fiber designs. The microlens-to-fiber-bundle design is scalable and modular and can be replicated in an array to increase aperture size. The microlens is moved laterally with a piezoelectric transducer to optimize power coupling into a given fiber core in the bundle as the source appears to move due to relative motion between the transmitter and receiver. The optimum position of the lens array is determined via a feedback loop whose input is derived from a position sensing detector behind another lens. Light coupled into like fibers in each array cell is optically combined (in fiber) before illuminating discrete detectors.     

扩展微透镜数值孔径范围的阶梯光刻热熔法研究

在微透镜阵列的光刻热熔制作法中，临界角效应严重影响了微透镜的制作范围和面形质量。在对临界角效应定性研究的基础上，提出了用阶梯光刻熔法来扩展热熔型微透镜阵列的数值孔径范围。实验结果表明，采用这一方法制作的微透镜，其单元孔径范围扩展为５０￣９００μｍ，相对口径范围扩大到为Ｆ／１￣Ｆ／１０，并有效地改善了临界角效应对大孔径微透镜面形质量的影响。