由三个压电陶瓷堆组成的干涉仪移相器的校正与标定

根据傅里叶变换原理 ,提出了一种对由三个压电陶瓷堆 (PZT)组成的干涉仪移相器进行非线性及平行性校正与标定的方法。在对各个压电陶瓷堆进行非线性校正的基础上 ,利用干涉图像自动分析系统 ,综合分析各个压电陶瓷堆之间的牵制作用 ,从而得到对整体干涉仪移相器平行性校正的补偿依据。组建了一套卧式数字平面干涉仪 ,在干涉仪移相器承重 6kg的情况下进行实验 ,非线性误差由 12 %校正至 0 3 %。由于干涉仪相移器承重而引起的移相过程中的条纹旋转降至 2° ,条纹间距变化小于 2 %。     

光量子芯片中级联移相器的快速标定方法

集成光学技术在光量子信息处理等新兴技术有着重要的应用.相比于分立光学,集成光学技术具有体积小、成本低、稳定性好以及易操控的优势.然而,随着集成光量子芯片线路的复杂程度和规模的增加,对芯片上的移相器,比如级联马赫-曾德尔干涉仪中的相移器的标定,将会成为一个棘手的问题.传统的级联马赫-曾德尔干涉仪的移相器标定时间是随着级联...     

空间域相位调制干涉仪用于微位移测量

本文从波动光学的干涉理论出发,描述了空间域相位调制干涉测量位移的原理。给出干涉仪的系统构成原理。比较空间域相位调制与时间域相位调制的异同点。指出空间域相位调制的特点。提出空间域相位调制干涉仪的两种工作状态,即单条纹和双条纹工作状态。最后给出位移测量结果。     

液面基准法标定干涉仪系统误差

为消除干涉仪标准参考面的误差,保证其测量准确度,本文采用液面基准法建立光学平面基准对仪器的系统误差进行标定.首先建立弯曲静液面动力学方程从理论上分析润湿效应对液面平面度的影响,并结合实验分析气流、温度、震动等环境因素对液面稳定性的影响,讨论波面稳定性评价指标,给予实验验证.最后用建立的大液面基准对干涉仪系统误差进行标定,给出标定结果.     

用于微位移测量的笔束激光干涉仪

介绍了一种基于空间干涉原理的亚微米零差干涉位移测量方法。该方法是对笔束激光干涉仪在微位移测量领域的应用 ,干涉仪的测量精度不受光束波前畸变等光源噪声的影响。给出了干涉仪主要结构参数的选取原则 ;构建了用于微位移测量的笔束激光干涉仪实验系统。实验结果表明 ,该系统具有纳米测量分辨率。     

迭代最小二乘法用于非线性移相器的标定

针对移相干涉仪中移相器的非线性会影响测量结果准确性的问题,提出了一种基于迭代最小二乘拟合的标定干涉仪移相器的新方法。对移相器加电压并采集若干幅干涉图后,通过在帧间和帧内迭代开展最小二乘拟合可计算出干涉图间移相值,从而得出了电压值与移相值的对应关系曲线,通过对曲线作非线性拟合并对电压值进行精密调整,完成移相器的精确标定。在改造后的干涉仪上对此标定方法进行验证,与Zygo干涉仪相比,相同元件下两者测量结果之差的RMS值为1.726 nm。该标定方法可以降低高精度面形测量干涉仪对移相器线性度的要求。     

用迈克尔孙干涉仪测量位移的精度改进

迈克尔孙于涉仪"是近代著名的物理实验内容，在工科物理实验教学中，基本都有测量He-He激光的波长或钠双线的波长差的内容.本文结合科研工作的实际，讨论用迈克尔孙干涉仪测量位移的精度改进，此内容可作为该课程的一个综合实验或选做内容.如图所示，根据非定域干涉圆条纹的"吞"、"吐"现象，若M；镜移动了距离nd引起条纹"吞"或"吐"的数目为N，则波长λ已知，可测得面d，这就是用迈克尔孙干涉仪测长的基本原理.由（1）式可知，用迈克尔孙于涉仪测量位移，其精度基本为半波长的数量级.如实验中采用He-Ne激光器，其值约为0.4μm.这对于一般…     

基于干涉仪测量的变形镜面形展平标定研究

为了全面地了解变形镜的性能,以便自适应光学系统更好地工作,进行了基于干涉仪测量的变形镜面形展平标定研究.首先,给变形镜的压电陶瓷驱动器施加一半的控制电压;再用Zygo干涉仪测得变形镜的面形,计算对应各个驱动器位置的镜面高度,并算得各个位置镜面高度相对平均镜面高度的偏差;最后,控制驱动器运动使偏差量为零.测试及实验表明,受压电陶瓷迟滞的影响,上述过程需要迭代4到6次镜面面形才会收敛到希望的准确度;对镜面周边无驱动器约束的21单元变形镜,展平之后其80%口径的面形接近     

基于干涉仪测量的变形镜面形展平标定研究

为了全面地了解变形镜的性能,以便自适应光学系统更好地工作,进行了基于干涉仪测量的变形镜面形展平标定研究.首先,给变形镜的压电陶瓷驱动器施加一半的控制电压;再用Zygo干涉仪测得变形镜的面形,计算对应各个驱动器位置的镜面高度,并算得各个位置镜面高度相对平均镜面高度的偏差;最后,控制驱动器运动使偏差量为零.测试及实验表明,受压电陶瓷迟滞的影响,上述过程需要迭代4到6次镜面面形才会收敛到希望的准确度;对镜面周边无驱动器约束的21单元变形镜,展平之后其80%口径的面形接近λ/20(λ=632.8 nm);对镜面周边有驱动器约束的137单元变形镜,展平后的面形优于λ/50.在望远镜不同的观测条件下,该技术可以快速地对变形镜进行展平标定,以适应不同的工作环境.     

基于全光纤马赫-曾德尔干涉仪的微位移传感研究

研究了一种基于全光纤马赫-曾德尔(Mach-Zehnder)十涉仪的高灵敏度微位移传感器，将干涉仪的一个臂固定在微动平台上，在消除环境干扰的情况下，通过对丁涉仪臂的拉伸，从光谱仪观察干涉谱线中某一特定波长的移动与拉伸长度成正比，从而实现一种位相调制型微化移传感器。当化移变化0．0020mm时，波长移动了0．61nm，调谐速率为305nm／mm，线性拟合度为0．9994。     

Design and calibration of a piezoelectric actuator for interferometric applications

The present work reports a possible solution for a low-cost piezoelectric actuator available for interferometric applications. In the paper the design, the assembly and the calibration of the actuator are described in detail.

The solution adopted consists of a machined stainless steel case deformed by three low-voltage multilayer plumbum zirconate titanate (PZT) ceramic blocks. In the proposed arrangement a three degree of freedom device is obtained, by which a translation and two rotations can be performed.

The PZTs are driven by a supply voltage provided by a 16 bit D/A converter directly connected to the parallel port of a personal computer which guarantees a very accurate output. This voltage is applied on each ceramic by means of a variable resistor, by which it is possible to adjust the maximum driving voltage for the single block. This electrical solution allows to match up the strokes of the ceramics in order to obtain a straight expansion of the whole actuator.

After the mechanical and electrical set-up of the actuator, a static calibration was carried out by inserting it along one arm of a Michelson speckle interferometer. The calibration procedure had emphasized the hysteresis loop and the non-linearity of the electromechanical behaviour of the actuator.     

Self-marking phase-stepping electronic speckle pattern interferometry (ESPI) for determining a phase map with least residues

Different from most of the electronic speckle pattern interferometry (ESPI) approaches, which involve the correlation fringe formulation followed by speckle noise elimination (or filtering), to develop a wrapped phase map, this study adopts the approach proposed by Creath in 1985 instead. However, Creath's approach is so critical of its applying interferograms, the influence of which is dependent on the robustness of the applied phase-shifting algorithm and the accuracy of the phase shifter. The self-marking technique proposed by Huang and Chou in 2000 is adopted herein to help overcome any unfavorable conditioning, including hysteresis, nonlinearity or plane tilting, of the pieozo-electrical transducer (PZT), to enable the successful implementation of the Creath's method. With its help, the whole phase stepping history of a practical work (i.e., an ESPI experiment for the present study) can be fully recorded and monitored. Thus, the required phase stepping frames can be accordingly decided and their further calculation will yield a phase map with least number of residues.     

Multi-step phase-shifting algorithms insensitive to linear phase shift errors

We describe and analyse a group of multi-step phase calculation algorithms for evaluation of interferometric measurements using the phase-shifting technique. Phase-shifting algorithms are proposed, with a constant but arbitrary phase shift between captured frames of the irradiance of the interference field. The algorithms are similarly derived as so called Carré algorithm. The phase evaluation process is not dependent on linear phase shift errors. An advantage of the described algorithms is their ability to determine the phase shift value at every point of the detector plane. Moreover, a complex error analysis of proposed algorithms is performed and the algorithms are compared to several common error compensating phase stepping algorithms.     

Discussions about FFT-based two-step phase-shifting algorithm

An FFT-based two-step phase-shifting (TPS) algorithm is described in detail and implemented by use of experimental interferograms. This algorithm has been proposed to solve the TPS problem with random phase shift except π. By comparison with the visibility-function-based TPS algorithm, it proves that the FFT-based algorithm has obvious advantages in phase extracting. Meanwhile, we present a π-phase-shift supplement to the TPS algorithm, which combines the two interferograms and demodulates the phase map by locating the extrema of the combined fringes after removing the respective backgrounds. So combining this method and FFT-based one, one could really implement the TPS with random phase shift. Whereafter, we systematically compare the TPS with single-interferogram analysis algorithm and conventional three-step phase-shifting one. The results demonstrate that the FFT-based TPS algorithm has a satisfactory accuracy. At last, based on the polarizing interferometry, a schematic setup of two-channel TPS interferometer with random phase shift is suggested to implement the simultaneous collection of interferograms.     

Measurement of sub-surface delaminations in carbon fibre composites using high-speed phase-shifted speckle interferometry and temporal phase unwrapping

A high-speed phase-shifted speckle interferometer has been developed recently for studying dynamic events. Speckle interferograms are continuously recorded by a CCD camera operating at 1 kHz with temporal phase shifting carried out by a Pockels cell running at the same frequency. Temporal phase unwrapping through sequences of more than 1000 frames allows the determination of time-varying absolute displacement maps. This paper presents the application of this speckle interferometry system to the detection and measurement of sub-surface delamination defects in carbon fibre specimens. The influence of re-referencing the temporal phase unwrapping algorithm after different time intervals is analysed to reduce the random phase errors produced by speckle decorrelation and vibration. The performance of several phase-shifting algorithms to minimize the influence of the vibration noise caused by the vacuum pump used to load the specimen is also investigated.     

Phase retrieval in two-wavelength DSSI using a combined filtering method

Phase retrieval in two-wavelength DSSI (digital speckle shearing interferometry) using a combined filtering method is proposed for small deformation derivative measurement. A simultaneous two-wavelength illumination and 3-CCD camera are employed in the experimental setup. The proposed method, which uses a two-wavelength technique does not require the conventional spatial phase unwrapping and has the advantage of good noise suppression for phase retrieval. Experimental results obtained show that using the proposed combined filtering method sensitivity similar to the single wavelength technique can be achieved.     

Instantaneous phase shifting arrangement for microsurface profiling of flat surfaces

Phase shifting interferometry is a well-established technique for non-contact surface profile measurement. Though phase shifting technique has many advantages, it is marred by a few inaccuracies due to the vibration and mechanical movement of the phase shifter itself. Significant amount of work is reported to theoretically compensate these error sources. But for a few works, prominent achievements have not been reported in eliminating these error sources in phase shifting interferometry. In this paper, a novel optical layout, in combination with instantaneous phase shifting interferometry is described. Experiments were carried out with this setup on a super mirror with a λ/20 surface roughness, to demonstrate the validity of the principle.