压电MEMS超声换能器研究进展

MEMS(micro-electromechanical systems)超声换能器(MEMS ultrasonic transducer,简称MUT)是采用微电子和微机械加工技术制作的新型超声换能器。与传统超声换能器相比,MUT具有体积小、重量轻、成本低、功耗低、可靠性高、频率控制灵活、频带宽、灵敏度高以及易于与电路集成和实现智能化等特点。是超声换能器的重要的研究方向之一。MUT的研究主要包括压电MUT(piezoelectric MUT,简称PMUT)和电容MUT(capacitiveMUT,简称CMUT)两个方面。本文概述了PMUT研究的发展进程和研究成果,展望了PMUT的研究和应用前景。     

Modeling of functionally graded piezoelectric ultrasonic transducers

The application of functionally graded material (FGM) concept to piezoelectric transducers allows the design of composite transducers without interfaces, due to the continuous change of property values. Thus, large improvements can be achieved, as reduction of stress concentration, increasing of bonding strength, and bandwidth. This work proposes to design and to model FGM piezoelectric transducers and to compare their performance with non-FGM ones. Analytical and finite element (FE) modeling of FGM piezoelectric transducers radiating a plane pressure wave in fluid medium are developed and their results are compared. The ANSYS software is used for the FE modeling. The analytical model is based on FGM-equivalent acoustic transmission-line model, which is implemented using MATLAB software. Two cases are considered: (i) the transducer emits a pressure wave in water and it is composed of a graded piezoceramic disk, and backing and matching layers made of homogeneous materials; (ii) the transducer has no backing and matching layer; in this case, no external load is simulated. Time and frequency pressure responses are obtained through a transient analysis. The material properties are graded along thickness direction. Linear and exponential gradation functions are implemented to illustrate the influence of gradation on the transducer pressure response, electrical impedance, and resonance frequencies.     

径向复合压电陶瓷超声换能器的径向振动特性研究

对径向复合压电陶瓷超声换能器的径向振动特性进行了分析。该换能器由一个厚度极化的压电陶瓷实心圆盘和一个金属圆环在半径方向复合而成。论文首先研究了压电陶瓷圆盘及金属圆环的径向振动,推出了其径向振动的机电等效电路。在此基础上,利用换能器的径向边界条件,得出了径向复合压电陶瓷换能器的机电等效电路及其共振频率方程。探讨了换能器的共振频率和有效机电耦合系数与其几何尺寸之间的依赖关系。设计并实际制作了一些径向复合超声换能器,对其径向共振及反共振频率进行了测试,并利用有限元法进行了数值模拟。研究表明,利用文中理论得出的换能器的共振频率与实测值及数值模拟结果基本符合。     

Micromachined ultrasonic transducers and arrays based on piezoelectric thick film

This paper reports on the design, fabrication, and characterization of diaphragm-type piezoelectric micromachined ultrasonic transducer (pMUT) and arrays. A combination of piezoelectric composite thick film techniques and silicon micromachining has been proven to be a promising approach for a batch production of pMUTs, especially pMUT transmitter arrays for ultrasound radiation. In this paper, some important issues related to the pMUT element design and micromachining processes are addressed. Thanks to the well-developed processing technology, pMUTs and arrays operating at different resonance frequencies by dimension variation have been successfully fabricated with a high yield for possible mass manufacturing. The characterization of piezoelectric composite thick film will be briefly reported. The performance of the prototype devices has been characterized in terms of vibration modes, dependency of the resonance frequency on bias voltage, nonlinearity, electromechanical coupling efficiency, equivalent circuit, output sound pressure level and directivity of a two-dimensional pMUT array. PACS 85.50.-n; 85.85.+j     

Load characteristics of high power sandwich piezoelectric ultrasonic transducers

Based on the equivalent circuit theory, the load characteristics of high power piezoelectric ultrasonic sandwich transducers are studied. Two types of loads are studied. One is liquid load as in ultrasonic cleaning, and the other is solid load as in ultrasonic drilling and machining. The effect of load and structure of the transducer on the resonance frequency of the transducer is analyzed. It is shown that the effect of load on the resonance frequency of sandwich transducers with different structures is different. For liquid load as in ultrasonic cleaning, the effect of the load on the resonance frequency of the sandwich transducer with symmetrical structure is the largest. It is the smallest for the transducer with its displacement node in the back metal cylinder. For solid load as in ultrasonic drilling and machining, the effect of the load on the resonance frequency of the sandwich transducer with its displacement node in the front metal cylinder is the largest. It is also the smallest for the transducer with its displacement node in the back metal cylinder. On the other hand, for some applications, such as ultrasonic drilling, when the lateral dimension of the tool is much less than that of the transducer, its effect on the resonance frequency of the transducer is small. The conclusions are useful in designing vibrating systems for different ultrasonic applications.     

应崇福院士90生辰学术报告会论文超声检测用压电换能器瞬态特性可控可调

超声检测用压电换能器瞬态特性主要包括瞬态空间响应和瞬态时间响应.本文通过调整控制换能器和激励源,实现瞬态空间响应和瞬态时间响应的某些特性的可控可调.其中包括在空间响应方面消除边缘波以获得平行声束和消除平面波以获得聚焦绳声束;在时间响应方面,调整换能器的背衬阻抗以获得可调首次波幅比和调整换能器结构和激励电信号以获得任意检测信号等.     

超声检测用压电换能器瞬态特性可控可调

超声检测用压电换能器瞬态特性主要包括瞬态空间响应和瞬态时间响应。本文通过调整控制换能器和激励源,实现瞬态空间响应和瞬态时间响应的某些特性的可控可调。其中包括在空间响应方面消除边缘波以获得平行声束和消除平面波以获得聚焦绳声束;在时间响应方面,调整换能器的背衬阻抗以获得可调首次波幅比和调整换能器结构和激励电信号以获得任意检测信号等。     

Finite element modelling of a rotating piezoelectric ultrasonic motor

The evaluation of the performance of ultrasonic motors as a function of input parameters such as the driving frequency, voltage input and pre-load on the rotor is of key importance to their development and is here addressed by means of a finite element three-dimensional model. First the stator is simulated as a fully deformable elastic body and the travelling wave dynamics is accurately reproduced; secondly the interaction through contact between the stator and the rotor is accounted for by assuming that the rotor behaves as a rigid surface. Numerical results for the whole motor are finally compared to available experimental data.     

The performance of thick piezoelectric transducers as wide-band ultrasonic detectors

A Q-switched Nd:YAG laser has been used to generate reproducible acoustic displacements in metallic samples. The acoustic waveforms were initially detected by an absolute displacement-sensitive, capacitance transducer. The capacitance transducer was then replaced in turn by two piezoelectric ceramic transducers of different thickness and diameter. Comparison of waveforms from the two types of detector indicate that thick piezoelectric transducers are useful in the detection of fast rise-time displacement waveforms at metal surfaces. Their performance is optimized by making them as thick as possible, with a small area of contact with the surface.     

厚度模压电超声换能器无源声学材料研究进展*

厚度模压电超声换能器作为超声波发射、接收以及电信号间转换的载体,是超声成像与检测系统的核心器件,一般由压电层、匹配层和背衬层3部分组成。超声换能器的性能一定程度上决定着整体超声设备的性能,影响了其在工业、医学、军事等领域的应用。该换能器的关键性能指标(带宽、灵敏度)除了受到压电层的影响,还与匹配层、背衬层等无源声学材料的设计密切相关。该文综述了近年来厚度模压电超声换能器无源声学材料(匹配层、背衬层和声透镜)的研究进展,提出了当前该类材料面临的难题和解决途径,并对其未来发展方向进行了展望。     

Characteristics of dual element ultrasonic transducers in the long pulse radiation mode

The frequency and transfer characteristics of dual element ultrasonic transducers are theoretically and experimentally investigated in the long pulse radiation mode for the case where one of the piezoelectric elements is connected to a control circuit in the form of an inductance coil or a resistor. For the controlled damper and controlled layer cases, the characteristic features of radiation as functions of the control circuit parameters are determined, as well as the conditions for an increase in ultrasonic wave radiation power. With certain conditions being satisfied, we demonstrate the possibility of amplitude modulation of the emitted ultrasonic wave by periodic switching of control circuit elements.     

A procedure for the efficient selection of piezoelectric ceramics constituting high-power ultrasonic transducers

The most characteristic narrow-band transducer structure for high-power ultrasonic applications is the well known piezoelectric sandwich which is reminiscent of the Langevin transducer. Such structure is generally used jointly with other components in the construction of industrial high-power transducers. One of the main objectives in the design and construction of such high-power transducers is to minimize energy losses. To that purpose the selection of the piezoelectric ceramic rings forming the sandwich requires clear and specific criteria. This paper deals with a numerical and experimental procedure for the accurate selection of the piezoelectric rings constituting high-power transducers, based on the analysis of the mechanical Q, the frequency and the resonance curve. The procedure was experimentally checked by constructing and characterizing several transducer structures.     

基于ZnO压电薄膜的弯曲振动硅微压电超声换能器的研究

对所研制的硅微压电超声换能器（PMUT）的振动特性进行了研究分析。对硅微压电超声换能的振动膜薄板的厚度相对于薄板的尺度（边长）而言较薄的情况,理论分析与实验结果均表明残余应力对换能器的谐振频率影响较大:不考虑残余应力的理论分析得出的换能器谐振频率与器件的实验测量的结果相差较大,而考虑残余应力的分析给出的谐振频率结果与实验结果是符合的。本文还对所制作的硅微压电超声换能器的谐振频率及导纳进行测量,并给出其等效电路参数。其中振动膜边长为1mm的换能器的谐振频率为71.25 kHz。最后对其进行了简单接收发射实验,测得谐振频率处的接收灵敏度为-201.6 dB（ref 1 V/μPa）,发射电压响应约为137 dB（ref 1 μPa·m/V）。     

Definition and measurement of the normalized electrical impedance of lossy piezoelectric resonators for ultrasonic transducers

Relevant equivalent circuit parameters and values of material constants of a piezoelectric resonator can be determined from measurements of its electrical input impedance as a function of frequency. The complex electrical impedance curves and the associated critical frequencies are the basis of this characterization by the piezoelectric resonance method. In this paper, the previously introduced concept of normalized electrical impedance of the lossy resonator, extended to include piezoelectric losses, is applied to the analysis of the effects of different types of intrinsic losses on peak values, bandwidths and characteristic frequencies. The resulting impedance patterns depend solely on the electromechanical coupling coefficient and the loss tangents, providing a useful tool for the analysis of low-Q resonators. The normalized impedance is experimentally evaluated from the basic data provided by an HP 4194A impedance analyser by means of specifically developed ASP programs.     

Electrical characterization of plate piezoelectric transducers bonded to a finite substrate

This article presents a new technique for characterizing piezoelectric transducers attached to a finite substrate. It consists of determining the impedance of the transducer cleared of the effects caused by finite dimensions of the substrate. This technique is validated by comparison with measurements on a transducer mounted on an effectively half-infinite substrate. It is applied for the electrical matching of a lithium niobate plate transducer bonded to a fused quartz rod.     

Noise reduction on a Rhine-cruise ship due to damping material

In order to attenuate the structure-borne sound generated by the resiliently mounted auxiliary diesel engines and propagated via the decks to the passenger cabins of a Rhine-cruise ship, two decks and the hull between them were treated with 400 m² elasto-dissipative material. Measurements of the sound pressure levels in a cabin, situated between these decks, and vibration measurements, carried out both before and after the application of the damping material, indicated only small level reductions. The reduction caused by completion of the fitting out of the ship, however, appreciably exceeded the influence of the damping material.     

Redistribution of energy flow in a material due to damping

The field lines of energy flow of the radiation emitted by a linear dipole in free space are straight lines, running radially outward from the source. When the dipole is embedded in a medium, the field lines are curves when the imaginary part of the relative permittivity is finite. It is shown that due to the damping in the material all radiation is emitted in directions perpendicular to the dipole axis, whereas for a dipole in free space the radiation is emitted in all directions except along the dipole axis. It is also shown that some field lines in the near field form semiloops. Energy flowing along these semiloops is absorbed by the material and does not contribute to the radiative power in the far field.     

Estimation of interference of piezoelectric ceramic transducers in a hydroacoustic array

A method for experimental estimation of intrinsic and mutual impedances of transducers in a shipborne multielement hydroacoustic array is proposed and investigated. It is shown that consideration of the transducer interactions increases the radiated power and suppresses the lateral field.     

Computations and measurements of transient stress waves and electrical voltages generated by transmitting ultrasonic piezoelectric transducers

the Mason model is used to compute the transient stress generated by a thickness mode piezoelectric transducer excited by a step voltage for various backings or loadings. The predicted stress pulse is experimentally shown to conform with the plane wave component of the radiation field. Verification is effected after visualizing the real radiation field and isolating its plane wave component and after applying surface transduction for detection.From the transmitting transducer a generated voltage is brought to attention. This quantity is closely related to the width of the initial pulse in the received ultrasonic signal display. The theoretical induced voltages are verified experimentally.