移相干涉测量中的抗振技术

移相干涉测量技术是一种众所周知的非接触式的高精密测量方法,具有广泛的应用范围。环境振动是移相干涉仪测量误差的主要来源之一,国际上一些从事干涉测量的工作人员提出了许多抗振的方法,大体上分为主动技术和被动技术。主动抗振技术主要是系统自身探测振动并通过反馈回路对振动进行补偿,被动抗振技术则是通过各种技术措施尽量减小干涉仪对环境振动和气流影响的敏感度。从这两方面对干涉仪的抗振技术研究的进展做简单介绍,并介绍了作者所在课题组在这两个方面所进行的研究工作。     

几种任意步距步进相移算法的误差分析与对比

介绍了到目前为止的几种任意步距步进相移算法,并针对相移干涉仪的两种主要误差———移相误差和探测器非线性误差进行了计算仿真,进而比较分析了它们对这这些误差的抑制能力,其结果可为实际应用合理地选择算法提供理论依据。     

Characteristic polynomial theory of two-stage phase shifting algorithms

Two-stage phase shifting algorithms make possible to directly recover the sum or the difference of the optical phase of two different fringe patterns. These algorithms can be built by combining the known phase shifting algorithms in a non-linear way. In this work, we associate a two-dimensional characteristic polynomial to each two-stage phase shifting algorithm. This enables us to qualitatively compare their behaviour against the main systematic error sources, by means of an analysis protocol like that used for phase shifting algorithms. We show that this tool allows to understand the propagation of properties from precursor phase shifting algorithms to new evaluation algorithms built from them. As an experimental application, a wavefront distortion evaluation in differential phase-shifting interferometry is presented.     

Measurement of surface profile in vibrating environment with instantaneous phase shifting interferometry

In-process measurement has been the requirement of the precision industries, but due to vibrations while manufacturing, in-process measurement has been difficult to achieve. There is little work on in-process measurement using phase shifting interferometry, as phase shifting is extremely sensitive to vibrations. In this work, the advantage of the developed non-mechanical and instantaneous phase shifting interferometry is felt while measuring surface profile of large flat surfaces under vibrating conditions which can be extended for in-process measurement of surface profile. A near common path optical configuration is achieved and the effect of the environment is reduced. Moreover, the measurement of phase is instantaneous which increases the versatility of this technique for measuring vibrating objects. Profile measurements were carried out on a smooth mirror surface excited with vibrations of different frequencies and the technique was found to be immune to vibrations of up to 1000 Hz.     

抑制高阶谐波误差的随机相移条纹分析算法

高阶谐波和随机相移误差是影响条纹分析精度的主要因素。为了同时解决这两个问题,提出了基于频域滤波的迭代相移算法。该算法采用巴特沃斯低通滤波器,从频域上滤除条纹的高阶谐波分量,再运用最小二乘迭代方法从三帧随机相移条纹图像中提取相位信息。数值模拟和实验结果表明,该算法可有效地抑制由高阶谐波和随机相移引入的波纹误差,误差PV值和RMS值分别为0.368 8 rad和0.025 3 rad,其精度高于传统的三步相移算法和Wang算法。该方法适合于高精度干涉测量和三维物体表面轮廓测量。     

二维光栅角度信号响应函数研究

本文在平行相干光照明条件下,推导出了二维光栅剪切成像系统的角度信号响应函数,并描绘出了角度响应函数二维曲面.虽然光栅剪切成像系统常用的分束光栅有四种,分析光栅有三种,分析光栅和分束光栅之间还存在多种不同组合,但是产生的角度信号响应函数曲面却只有三种,即峰型位移曲面、谷型位移曲面和峰谷对称型位移曲面.其中峰型位移曲面和谷型位移曲面之间具有数值互补关系,由此还可以把峰型位移曲面和谷型位移曲面归纳为一种,最终只需要考虑两种位移曲面.这个理论结果无疑显著简化了人们对二维光栅剪切成像的认识,将对今后讨论定量提取二维角度信号的工作奠定基础.     

Quantitative phase retrieval in dynamic laser speckle interferometry

The rapid progress of modern manufacturing and inspection technologies has posed stringent requirements on optical techniques for vibration characterization and dynamic testing. Due to its simplicity, accuracy and whole-field characters, laser speckle interferometry has served as one of the major techniques for dynamic measurement. In this paper, a two-step phase shifting method is developed for quantitative speckle phase measurement, which helps to eliminate the specklegrams needed for phase evaluation and facilitate dynamic measurement. Unlike previously reported two-step methods using fringe patterns with known phase shift of π/2, a small unknown phase shift is employed instead in the proposed method, which eliminates the need for phase shifting devices. Further investigation shows that small phase shifts are preferable over large phase shifts in this method. Shearographic experiments conducted have demonstrated the effectiveness of the proposed technique.     

Digital speckle interferometry for assessment of surface roughness

In this work, the principle of interferometry is used to assess the surface roughness of the machined surfaces. Interferometry produces an interference fringe pattern when two or more light waves interact with each other. It is one of the important tool for precision optical metrology and testing. Well-known advantages of the phase shifting interferometry include high measurement accuracy, rapid measurement, good result even with low contrast fringes and that the polarity of the wave front can be determined. In fringe projection techniques, a known optical fringe pattern is projected onto the surface of interest. The fringe pattern on the surface is perturbed in accordance with the profile of the test surface, thereby enabling direct derivation of surface profile.In this work, an attempt has been made to assess the surface roughness using a speckle fringe analysis method of five frame phase shift algorithm for machined surface (ground surface). As these fringes are too noisy, advanced filtering technique has been used so as to reduce noise and to get improved wrapped phase map from the phase shifted fringes. A phase unwrapping software has been developed using discrete cosine transform (DCT) to generate the three-dimensional (3-D) profiles. Finally, it is compared with R_a values measured using a mechanical stylus instrument, showing good agreement.     

New algorithm of white-light phase shifting interferometry pursing higher repeatability by using numerical phase error correction schemes of pre-processor, main processor, and post-processor

White-light phase shifting interferometry (WLPSI) is frequently used for the precision measurement of 3D patterns in various fields. Phase error is one of the most dominant errors in WLPSI, and it is mainly generated by the scanner positioning error and mechanical vibrations. In this paper, phase error detection method by image analysis is proposed, and the numerical correction method for minimizing the phase error is also proposed. The image reconstruction method (IRM), iterative IRM (IIRM) as pre-processors, partial IRM (PIRM), least squares method (LSM) as a main processor, and surface compensation method (SCM) as a post-processor were developed for correcting phase errors. The five methods are implemented and simulated, and the pros and cons of each method are explained.Mirau type interferometry and the phase error generator using a PZT stage were used, and the measurements by WLPSI were done under various vibration conditions. The captured images were analyzed by the five correction methods, and the results were compared. Phase error was effectively minimized by the correction methods, and repeatability of 0.2 nm was obtained in the case of the specimen of 500 nm in height. Repeatability of 10 nm was obtained by conventional WLPSI algorithms for the same specimen.     

A five-point stencil based algorithm used for phase shifting low-coherence interference microscopy

The phase shifting technique is the most widely used approach for detecting the envelope in low coherence interferometry. However, if the phase shifts calibration contains errors, some parasitic fringe structure will propagate into the calculated envelopes and cause imprecision in the envelope peak detection. To tackle these problems, a five-point stencil algorithm is introduced into the phase shifting interference microscopy. Considering the amount of parasitic fringes, envelope peak detection and computational efficiency, the presented approach leads to satisfactory results in performance. In combination with a simple polynomial curve fitting method the proposed algorithm exhibits good performance on envelope peak detection in surface profiling. Both of the simulated results and the experimental results indicated that the presented approach can be taken as an alternative to the currently existing methods used for phase shifting low-coherence interference microscopy.     

Measurement of surface figure of plane optical surfaces with polarization phase-shifting Fizeau interferometer

A Fizeau interferometer based set up for measurement of surface forms of plane optical surfaces has been discussed. Phase shifting interferometry has been applied using polarization phase shifter. A linearly polarized (632.8 nm) He–Ne laser has been used as the source. Light reflected from the object and the reference/master surfaces are made circularly polarized in opposite senses by means of two properly oriented quarter wave retardation plates placed at appropriate positions, one inside and other outside the interference cavity of the interferometer, and phase shifts are introduced between the object and the reference/master waves by varying angular orientation of a polarizer/analyzer. Final result is made free from any residual wave-front aberrations introduced by the (intra-cavity) wave plate by subtracting phase values obtained by PSI technique between a high optical quality master surface and the reference surface from that obtained for the test object surface with respect to the same reference surface for each point of the interference field. Results are shown for a plane surface.Advantages of the technique presented are linearity and high accuracy in phase stepping, no perturbation of the interference cavity during the phase shifting and possibility of real time or dynamic interferometry.     

用双图全息相移干涉法计算与时间有关的位相分布

提出一种双图全息相移干涉法．该方法可以用来计算与时间有关的位相分布，两幅全息干涉条纹图可以同时得到，并且有固定的９０°位相差．虽然两幅条纹图的位相可以随着时间变化，如环境影响，或载荷变化，但他们之间的位相差恒定．该方法利用二维傅氏变换，结合偏振相移法以及分光技术．     

Determination of residual stress by use of phase shifting moiré interferometry and hole-drilling method

A phase-shifting moiré interferometry and hole-drilling combined system was developed to determine residual stresses. The relationship between the 2D displacement data of three points around the drilled hole and the residual stresses relieved by hole-drilling was established. The experimental setup consisted of a four-beam moiré interferometer and a computer-controlled hole-drilling system. Two phase shifters controlled by computer were fixed in two of the four optic paths to directly get the displacement data. With special residual stresses calculation software, the phase distributions of the u and v field obtained by moiré interferometry were quickly converted into values of residual stresses. To analyze the accuracy of this experimental system, an aluminum specimen with a blind hole in the center was real-time tensioned in this system. The displacement field obtained by phase shifting moiré interferometry was compared with the finite element method solution. Good agreement was found with respect to each other. As an application, the in-depth residual stresses of a shot-peened aluminum plate were measured by this method, and possible error sources were discussed.     

载波相移全息干涉计量

本文报道了一项称为载波相移全息干涉计量的自动相位估算的新技术。该技术的主要特点是不同相移的条纹图案可用双曝光全息重视。这样即可用来对与时间相关的问题进行自动相位估算。     

Fast image-processing technique in phase-shifting holographic interferometry

A fast image-processing method in phase shifting holographic interferometry is proposed, in which the complicated phase calculation is completed with a logic circuit and look-up table. An electronic circuit was designed for the purpose. With these techniques, the processing time can be greatly reduced.     

Error analysis for a Mach-Zehnder type speckle interferometer

A phase shifting speckle interferometer based on a Mach-Zehnder geometry is presented. The displacement field is measured using an electro-optic phase shifting technique. An analytical investigation of the accuracy of the interferometer is performed by considering the most contributing error sources. It is shown that in the case of the use of a low power laser source, the geometrical aberration of the optical component is the main contribution to the systematic errors. The case of the sampling of a full measurement is investigated. It is demonstrated that the systematic error of the full measurement has the same statistics as those given by a simple acquisition. Experimental results are reported in the case of the measurement of the deformation of industrial connectors submitted to a crushing test. It is found that for a peak to valley of 32 μm, the trueness of the measurement appears higher than 160 nm.     

用待定系数法设计误差补偿相移算法

提出了一种以误差补偿为目的的新的相移算法设计方法—待定系数法,该方法首先在算法表达式中引入一系列待定参数,根据对误差补偿的要求提供约束方程,从而解出这些未知参数.待定系数法使得算法设计和误差分析是同时进行的,改变了以往先设计算法再进行误差分析和评价的过程,由待定系数法导出的相移算法对算法设计中所考虑的误差源具有良好的补偿性能.     

Comparative analysis of phase extraction methods based on phase-stepping and shifting curve in grating interferometry

Two phase extraction methods which are based separately on phase-stepping and shifting curve are mainly used in phase-sensitive imaging in gating interferometry to determine the x-ray phase shift induced by an object in the beam. In this paper, the authors perform a full comparative analysis and present the main virtues and limitations of these two methods according to the theoretical analysis of the grating interferometry.     

Multiple-surface interference fringes analysis basing on wavelength-modulated phase shifting interferometry

Phase-shifting interferometry is widely used for high-precision surface measurements, but has difficulty in dealing with parallel optical plates. In this paper, an advanced method is proposed to simultaneously measure surface distributions of parallel optical plates from multiple surface interference fringes. The basic theory behind the technique is by applying wavelength-modulated phase shifting interferometry (WMPSI) to get enough frames of multiple surface interference fringes. In the procession of wavelength-modulated phase shifting, the phase variation for one point of the surface is traced and is processed by Fourier transform, and then the frequency spectrum of every surface can be separated from each other. Therefore, it allows extraction of front surface, back surface and thickness variation from multiple surface interference fringes with high precision.