Near-field optical properties of wide bandwidth metal multi-layer dielectric gratings for pulse compressor

Metal multi-layer dielectric gratings (MMDG) for pulse compressors in high-energy laser systems should provide broad bandwidth as well as high laser-induced damage thresholds. The non-uniform optical near-field distribution of MMDG is an important factor that limits damage resistant capabilities. MMDG for pulse compressors operating at 800 nm with a corrugated SiO₂ layer are designed by using a genetic algorithm and the Fourier mode method. The diffraction efficiency, bandwidth, and near-field distribution of the MMDG are theoretically investigated. For the single dielectric match layer grating, the bandwidth is 140 nm, if the thickness and refractive index of the match layer are changed, the maximum electric field in the grating ridge, match layer, and metal layer of the grating increases with the decrease in grating diffraction efficiency. For the multi-dielectric match layer grating, the bandwidth and the maximum electric field in the metal layer decrease with the increase in high- and low-index material pairs, and the maximum electric field in the grating ridge and match layer initially decreases and then increases. Over a wide wavelength range, the maximum electric field in the grating ridge, match layer, and metal layer is minimal near the central wavelength. Moreover, MMDG should be used at larger incident angles while keeping enough bandwidth to reduce the electric field in the grating.     

基于严格耦合波理论的宽光谱金属介质膜光栅衍射特性分析

基于严格耦合波理论建立了金属介质膜光栅的衍射机理模型,给出了TE模式金属介质膜光栅衍射效率的表达式.以-1级衍射效率和工作带宽为评价函数,对金属介质膜光栅的表面浮雕结构进行了优化设计.对于800 nm和1053 nm为中心的TE波,设计的金属介质膜光栅-1级衍射效率优于97%的工作带宽分别达到130 nm和150 nm,最后讨论了设计的宽光谱高衍射效率金属介质膜光栅的制备工艺容差.此研究对于提高脉宽压缩光栅的性能具有重要的意义. 关键词： 衍射效率 金属介质膜光栅 严格耦合波理论     

亚波长金属偏振分束光栅设计分析

结合有效介质理论和薄膜光学的抗反射设计方法,设计了基于0.65μm工作波长的亚波长金属偏振分束光栅,给出了光栅的优化设计参数,采用严格耦合波理论分析了光栅的偏振分束特性.结果表明,亚波长金属光栅对TE偏振表现为金属膜特性,具有高反射,对TM偏振表现为介质膜特性,具有高透射,在-30°<θ<30°的大入射角范围和0.47μm<λ<0.80μm的宽入射波谱内,该光栅的透射光和反射光均具有高偏振消光比和低插入损耗的特点. 关键词： 亚波长金属偏振分束光栅 有效介质理论 薄膜光学 严格耦合波理论     

Broadband and high efficiency metal multi-layer dielectric grating based on non-quarter wave coatings as reflective mirror

This article deals with designing broadband and high efficiency metal multi-layer dielectric grating (MMDG) used to compress and stretch ultra-short laser pulse. The diffraction characteristics of MMDG are analysed with the method of rigorous coupled-wave method. The multi-layer dielectric used as reflective mirror is made up of non-quarter wave coatings. Taking the diffraction efficiency of the -1 order as the value of merit function, the parameters such as groove depth, residual thickness, duty cycle, and reflective mirror are optimized to obtain broadband and high diffraction efficiency. The optimized MMDG shows an ultra-broadband working spectrum with the average efficiency exceeding 97% over 160 nm wavelength centred at 1053 nm and TE polarization. The optimized MMDG should be useful for chirped pulse amplification.     

Broadband and high efficiency metal multi-layer dielectric grating based on non-quarter-wave coatings as a reflective mirror

This article deals with designing a broadband and high efficiency metal multi-layer dielectric grating (MMDG) used to compress and stretch an ultrashort laser pulse. The diffraction characteristics of the MMDG are analysed by using the rigorous coupled-wave method. The multi-layer dielectric used as the reflective mirror is made up of non- quarter-wave coatings. Taking the diffraction efficiency of the 1 order as the value of merit function, the parameters such as groove depth, residual thickness, duty cycle, and reflective mirror are optimized to obtain broadband and high diffraction efficiency. The optimized MMDG shows an ultra-broadband working spectrum with the average efficiency exceeding 97% over 160 nm wavelength centred at 1053 nm and TE polarization. The optimized MMDG should be useful for chirped pulse amplification.     

梯形介质膜光栅衍射特性分析

基于严格耦合波理论建立了梯形介质膜光栅的衍射机理模型,利用该模型讨论了底角为70°的梯形介质膜光栅-1级的衍射行为.通过对梯形介质膜光栅的占空比、槽深和剩余厚度的优化,设计了应用于1053 nm和51.2°角度入射的梯形介质膜光栅.对于顶层为HfO2的介质膜光栅,当槽深为200 nm,剩余厚度为100 nm,占空比为0.35时.其衍射效率优于99.5%,而对于顶层为SiO2的梯形光栅,为获得99.5%的衍射效率.其槽深为800 nm,剩余厚度为320 nm.而且,获得同样的衍射效率,顶层为HfO2的梯形光栅具有更宽的光谱特性.数值计算表明,严格耦合波理论模型对梯形介质膜光栅衍射效率的计算具有很好的收敛性和稳定性.     

多层介质膜脉冲压缩光栅近场光学特性分析

利用傅里叶模式理论分析了TE波自准直角入射的使用条件下，多层介质膜光栅的光栅区和多层膜区电场分布的特点.分别讨论了HfO₂和SiO₂为顶层光栅材料时，光栅结构参数对光栅脊峰值电场的影响，结果表明，对于不同膜厚的顶层材料，存在一个最佳膜厚度，使光栅脊峰值电场最小，并且当膜厚增大时，设计大高宽比的光栅可以降低该电场峰值.最后，在大角度条件下使用多层膜光栅也可以降低光栅脊处的峰值电场. 关键词： 衍射光学 多层介质膜光栅 模式理论 损伤阈值     

用于高能啁啾脉冲压缩的光子晶体光栅的设计

 为了克服目前高能短脉冲装置压缩光栅的损伤阈值无法满足要求的问题,针对星光Ⅲ装置皮秒激光束的压缩器,设计了由熔石英材料构成的、具有较高损伤阈值的光子晶体光栅,该光栅由2维光子晶体和表面光栅结构两部分组成,具有高反射效率和强角色散的能力。计算结果显示:经过优化设计的光子晶体光栅在波长1 053 nm,57°～77°的入射范围内,-1级衍射效率超过了92%,而当入射角为71°时,在1 040～1 090 nm光谱范围内,-1级衍射效率超过92%,性能满足使用要求。     

Hologram multiplexing in acrylamide hydrophilic photopolymers

Unslanted diffraction gratings are recorded in a 900 μm thick acrylamide photopolymer by means of peristrophic multiplexing. A solid state Nd:YAG (λ = 532 nm) laser is used as the recording beam, with a total incident intensity of 5 mW/cm², and a He-Ne laser as the reconstruction beam. The dye concentration in the photopolymer is optimized so that it does not limit the dynamic range. Nine holograms are recorded using constant exposure time scheduling and variable exposure time scheduling. From the results obtained it may be deduced that optimization of the dye allows us to work in the linear response region of the photopolymer and at the same time obtain high values of diffraction efficiency for each hologram. An exponential increase in exposure time as the number of holograms increases enables the values of diffraction efficiency to be homogenized with regard to the case of constant exposure scheduling. In this way, better use is made of the dynamic range of acrylamide hydrophilic photopolymer.     

Design of high-efficiency diffraction gratings based on total internal reflection for pulse compressor

We present designs of high-efficiency compression grating based on total internal reflection (TIR) for picosecond pulse laser at 1053 nm. The setup is devised by directly etching gratings into the bottom side of a prism so that light can successfully enter (or exit) the compression grating. Dependence of the −1 order diffraction efficiencies on the constructive parameters is analyzed for TE- and TM-polarized incident light at Littrow angle by using Fourier modal method in order to obtain optimal grating structure. The electric field enhancement within the high-efficiency TIR gratings is regarded as another criterion to optimize the structure of the TIR gratings. With the criterion of high diffraction efficiency, low electric field enhancement and sufficient manufacturing latitude, TIR compression gratings with optimized constructive parameters are obtained for TE- and TM-polarized incident light, respectively. The grating for TE-polarized light exhibits diffraction efficiencies higher than 0.95 within 23 nm bandwidth and relatively low square of electric field enhancement ratio of 5.7. Regardless of the internal electric field enhancement, the grating for TM-polarized light provides diffraction efficiencies higher than 0.95 within 42 nm bandwidth. With compact structure, such TIR compression gratings made solely of fused silica should be of great interest for application to chirped pulse amplification (CPA) systems.     

多层介质膜脉宽压缩光栅的严格矢量分析

用于展宽和压缩激光脉冲的多层膜脉宽压缩光栅是由多层介质高反膜和位于其顶层的浮雕光栅构成。以设计的高反射多层膜为基础,利用傅里叶模式理论分析了其衍射场分布,给出了TE波自准直角入射的使用条件下,多层介质膜脉宽压缩光栅衍射效率的表达式。以-1级衍射效率为评价函数,分别讨论了HfO2和SiO2为顶层材料时,多层膜脉宽压缩光栅-1级衍射效率高于0.95的光栅结构参量范围。结果表明,在该条件下,选择HfO2为顶层材料时,光栅结构参量有较大的取值范围。给出了优化的光栅结构参量,并分析了光栅制作误差及其使用条件的宽容度,对光栅制作工艺和使用具有一定的指导意义。     

飞秒激光用多层介质膜脉宽压缩光栅的设计

以薄膜光学的干涉理论和衍射光学的傅里叶模式理论为基础，给出了0.8μm飞秒激光器用多层介质膜脉宽压缩光栅的理论设计；设计采用H3L(HL)^9H0.5L2.4H的多层介质膜为基底，当刻蚀后表面浮雕结构的占宽比为0.35，线密度为1480线/mm，槽深为0.2μm，顶层HfO₂的剩余厚度为0.15μm时，对于Littrow角度(36.7°)和TE波模式入射的衍射光栅其-1级衍射效率达到95％以上. 关键词： 飞秒激光 脉宽压缩光栅 多层介质膜     

Polarization-independent triangular-groove fused-silica gratings with high efficiency at a wavelength of 1550 nm

We describe polarization-independent triangular-groove fused-silica gratings illuminated by incident lights in the C + L bands as (de)multiplexers for dense wavelength division multiplexing (DWDM) application. The physical mechanisms of the grating can be shown clearly by using the simplified modal method with consideration of the corresponding accumulated average phase difference of two excited propagating grating modes, which illustrates that the grating structure depends mainly on the ratio of the average effective indices difference to the incident wavelength. Exact grating profile is optimized by using the rigorous coupled-wave analysis (RCWA). With the optimized grating parameters, the grating exhibits diffraction efficiencies of greater than 90% under TE- and TM-polarized incident lights for 101 nm spectral bandwidths (1500-1601 nm) and it can reach an efficiency of more than 99% for both polarizations at a wavelength of 1550 nm. Without loss of metal absorption, coating of dielectric film layers, the designed triangular-groove fused-silica grating should be of great interest for DWDM application.     

Optimization of thin-film design for multi-layer dielectric grating

Thin-film design used to fabricate multi-layer dielectric (MLD) gratings should provide high transmittance during holography exposure, high reflectance at use wavelength and sufficient manufacturing latitude of the grating design making the MLD grating achieve both high diffraction efficiency and low electric field enhancement. Based on a (HLL)⁹H design comprising of quarter-waves of high-index material and half-waves of low-index material, we obtain an optimum MLD coating meeting these requirements by inserting a matching layer being half a quarter-wave of Al₂O₃ between the initial design and an optimized HfO₂ top layer. The optimized MLD coatings exhibits a low reflectance of 0.017% under photoresist at the exposure angle of 17.8° for 413 nm light and a high reflectance of 99.61% under air at the use angle of 51.2° for 1053 nm light. Numerical calculation of intensity distribution in the photoresist coated on the MLD film during exposure shows that standing-wave patterns are greatly minimized and thus simulation profile of photoresist gratings after development demonstrates smoother shapes with lower roughness. Furthermore, a MLD gratings with grooves etched into the top layer of this MLD coating provides a high diffraction efficiency of 99.5% and a low electric field enhancement ratio of 1.53. This thin-film design shows perfect performances and can be easily fabricated by e-beam evaporation.     

大角带宽高衍射效率体全息光栅的设计和制备

高性能体全息光栅是全息波导的重要耦合元件,角带宽小、平均衍射效率不高是制约体全息光栅性能的重要因素.以不对称倾斜记录为出发点,设计并制备了大角带宽高衍射效率的体全息光栅.首先讨论在横电模式光和横磁模式光下体全息光栅的记录参数与其衍射效率的关系,找到平均衍射效率较高的记录参数范围,随后进一步分析在此范围内的记录参数与体全...     

Optimization of near-field optical field of multi-layer dielectric gratings for pulse compressor

Multi-layer dielectric (MLD) gratings for pulse compressors in high-energy laser systems should provide high diffraction efficiency as well as high laser induced damage thresholds (LIDT). Nonuniform optical near-field distribution is one of the important factors to limit their damage resistant capabilities. Electric field distributions in the gratings and multi-layer film region are analyzed by using Fourier modal method. Optimization of peak electric field in the gratings ridge is performed with a merit function, including both diffraction efficiency and electric field enhancement when the top layer material is HfO₂ and SiO₂, respectively. A set of optimized gratings parameters is obtained for each structure, which reduce the peak electric field within the gratings ridge to being respective 1.39 and 1.84 times the value of incident light respectively. Finally, we also discuss the effects of gratings refractive index, gratings sidewall angle and incident angle on peak electric field in the gratings ridge.     

基于严格耦合波理论的多层介质膜光栅衍射特性分析

基于严格耦合波理论建立了多层介质膜光栅的衍射机理模型,给出了TE波自准直条件下多层介质膜光栅衍射效率的表达式.以－1级衍射效率为评价函数,分析了表面浮雕结构分别为HfO₂和SiO₂材料的介质膜光栅获得衍射效率优于96%的结构参数.数值计算表明,顶层材料为HfO₂的介质膜光栅具有更宽的结构选择范围.最后分析了介质膜光栅的制备容差和允许的入射角度范围. 关键词： 衍射效率 多层介质膜光栅 严格耦合波理论     

宽光谱高衍射效率脉宽压缩光栅设计和性能分析

基于飞秒激光对脉宽压缩光栅宽光谱和高衍射效率的要求,提出了一种金属介质膜结构的宽光谱高衍射效率脉宽压缩光栅,该光栅由基底、金属介质膜和表面浮雕结构组成.为获得宽光谱高衍射效率的脉宽压缩光栅,采用严格耦合波理论对金属介质膜光栅的结构参数进行优化设计.数值分析表明当金属介质光栅的槽深、剩余厚度、占空比和入射角分别为272 ...     

SOI基纳米光栅耦合器的结构改进与仿真验证

针对硅基光波导与单模光纤在光耦合过程中存在耦合效率低,对准难度大的问题,提出了一种新型基于绝缘体上硅(SOI)结构的纳米光栅耦合器。运用有限时域差分法探究了纳米光栅耦合器的结构特性,结合光纤准直器的准直原理,系统分析了纳米光栅耦合器的结构模型。研究了入射光波长、入射角度、光栅占空比等因素对光栅耦合效率的影响,得出了基本纳米光栅耦合器的最佳结构参数;在基本耦合光栅结构的基础上进行了改进,增加了后反射器、增透膜和底层介质膜,并运用Optiwave OptiFDTD 8.0软件优化了各部分结构的设计参数,得到了优化的耦合光栅结构。纳米光栅耦合器的耦合效率提高至59.37%,3dB带宽达到65nm。     

Theoretical reflective performance of a sandwiched two-layer grating polarizer

The reflective polarizer is described by a sandwiched two-layer grating with a metal slab. Such a new polarizer is aimed to improve the performance of a reflective grating-based polarizer. The grating is optimized with the usual duty cycle of 0.5, where TE and TM polarizations are reflected in the –1st and the 0th diffraction orders, respectively. With optimized grating parameters, the extinction ratio can reach 45.5 dB and 41.9 dB in two diffraction orders, which are greatly improved compared with the conventional reported surface grating polarizer with the simple structure. Attractive merits of the new design are high efficiency, high extinction ratio, wide incident wavelength bandwidth for TE polarization, and wide angular range for TM polarization. Numerical results are expected to open new opportunities for the design of a grating-based polarizer with the enhanced performance by the complicated grating configuration.