Zündspannung und normaler Katodenfall der Glimmentladung für Edelgase und reine Molybdänkatoden

Breakdown voltage near PASCHEN -minimum and normal cathode fall of the glow discharge were calculated for inert gases and molybdenum cathodes on the basis of a simple theory. The method used was similar to TAKEISHI 's one. The calculated breakdown voltages are in good agreement with measured values, if back scattering of the y_i -electrons and the distance which electrons travel from the cathode without ionization is taken into account. In the case of the normal cathode fall the values calculated with the same assumptions for inert gases and molybdenum cathodes are much higher (up to 50%) than the well known experimental values. It was concluded, that the y_i-process in the glow discharge ist not the only important one. Comparing the calculated and experimental values of the normal cathode fall we obtain the result, that photons and/or ions from the glow release about 40–60% of all electrons at the cathode.     

Magnetic Control of Diffuse Discharges

By application of a crossed magnetic field, the electron energy distribution in a gas discharge can be shifted to lower energy values, as demonstrated by means of Monte Carlo calculations for electrons in He:SF6 mixtures. Consequently, through the change in the rate coefficients for ionization and attachment, the sustaining field in the discharge plasma is increased. This magnetically induced voltage rise was studied in a low-pressure glow discharge. The cathode fall was found to be the dominant component in determining the characteristics of this magnetically controlled discharge. The drastic rise of the cathode fall above a threshold value could be utilized in operating a glow discharge as an opening switch for an inductive energy storage system.     

Electron impact ionization and excitation rate coefficients in the negative glow region of a glow discharge

Some easy to use reasonable approximations for electron impact rate coefficients have been considered. The most important rate coefficients for electron collisions in noble gases are electron-neutral ionization and electron impact excitation. Electron-neutral ionization besides electron impact excitation of some states of the argon and helium atom in direct current (dc) glow discharge plasma has been calculated. The plasma parameters of electron are significant factors for computing the rate coefficients. We present first results of probe diagnostic that includes the double probe measurements of the plasma parameters, namely, electron temperature (T_e) and electron density (n_e). Electron properties obtained from the double probe characteristic curves including T_e and n_e as well as the calculated rate coefficients (ionization and excitation) were studied as a function of the axial distance from the cathode while the discharge operating parameters of voltage and pressure were varied. Two regions of the glow discharge were investigated: cathode fall region and negative glow. Particular emphasis was placed on the negative glow region.     

Application of Electron-Beam Ionized Discharges to Switches?a Comparison of Experiment with Theory

A theoretical investigation of high-pressure discharges ionized by an external electron beam (e-beam) was conducted. Only when secondary emission from the cathode and electron-impact ionization of metastable states were included in the analysis did calculated current-voltage (I-V) characteristics for argon and methane discharges compare well with experimental data. The I-V characteristics obtained reveal a sharp rise in the current at a certain threshold voltage. This threshold voltage and the entire I-V characteristic are shifted to lower voltages when metastable ionization is significant. Below the threshold voltage and at low external ionization source strengths, a region of negative differential conductivity is obtained. In the high-current region, the I-V slope is controlled by the secondary emission coefficient. The additional cathode sheath ionization from secondary emission and ionization from metastable states significantly reduces the discharge voltage. This important effect can be used to reduce e-beam switch losses and increase lifetime through judicious gas mixture selection and proper cathode conditioning.     

Vorstadium des Funkens,untersucht mit dem Bildverstärker

Streamer development (near cathode, midgap, and near anode streamers) was investigated by means of image intensification and image deflection as to conditions for streamer onset and streamer velocities during the various stages of the avalanche-to-plasma channel transition in several gases, e.g. N₂, H₂, A, CH₄ as well as air, and some more mixtures of gases, in the pressure range 100 to 500 Torr. Quantitative results were obtained, and the influence of the discharge parameters upon streamer development is discussed. — The enhanced and accelerated streamer stage (II) was now observed in either direction; the significantly fast and steep ionization waves (stage III) were found to start at the cathode as well as at the anode on arrival of the respective streamers. Velocities up to 10⁹ cm/sec were measured.     

Ion energies at the cathode of the DC planar magnetron sputtering discharge

The energy distribution of the ions striking the cathode of the dc planar magnetron system was measured over a range of the typical sputtering conditions (magnetic field of 0.07–0.13 T, argon pressure of 0.01–10 Pa, discharge voltage of 250–600 V). The results obtained allow us to conclude that the major part of the incident ion flux originates in the cathode fall region. The theoretical model developed in terms of mobility theory makes it possible to evaluate the cathode fall voltage and its dependence on the sputtering conditions. It was found that the normalized integral form of the incident ions, energy spectrum is practically independent of the sputtering discharge parameters.     

空心阴极直流放电的二维自洽模型描述和阴极溅射分析

建立了空心阴极放电的二维自洽理论模型,理论研究了气压为50—120Pa,电压为150—300V的范围内Ar空心阴极放电特性、粒子密度和电离速率空间分布,特别考察了影响阴极溅射分布有关因素:阴极面上的电场、离子流和离子密度的沿阴极截面的空间分布.研究结果不仅证实了在所讨论的范围内,空心阴极效应明显存在而且发现归一化电离速率的空间分布形状强烈依赖于气压.通过研究电场、离子流和离子密度的空间分布解释了空心阴极溅射型离子激光器中不均匀阴极溅射的现象来源于阴极面附近的电场、离子流和离子密度的不均匀分布 关键词： 空心阴极放电 自洽模型 气体激光 阴极溅射     

Breakdown formation in a transient hollow cathode discharge-astatistical study

Discharge formation at low pressure is found to be greatly influenced in the presence of a suitable hollow cathode region. The formation of a moving virtual anode which extends the anode potential to within the hollow cathode region is thought to be responsible for the enhanced ionization growth which subsequently leads to gas breakdown. In this paper, the spatial evolution of the local potential in the discharge region of a pulsed hollow cathode discharge has been measured in a range of pressures with two different cathode apertures. An extensive data set has been collected and analyzed using a statistical technique. From the characteristic of the statistical distribution of the data, unique features associated with the role of hollow cathode at the different stages of discharge formation have been identified. It was found that the influence of the hollow cathode region is strongest in the start of ionization growth and in the final change over to high current breakdown     

A physical model of the low-current-density vacuum arc

A one-dimensional (1-D) physical model of the low-current-density steady-state vacuum arc is proposed. The model is based on the continuity equations for ions and electrons and the energy balance for the discharge system; the electric potential distribution in the discharge gap is assumed to be nonmonotonic. It is supposed that the ion current at the cathode is generated within the cathode potential fall region due to the ionization of the evaporated atoms by the plasma thermal electrons having Boltzmann's energy distribution. The model offers a satisfactory explanation for the principal regularities of a hot-cathode vacuum arc with diffuse attachment of the current. The applicability of the model proposed to the explanation of some processes occurring in a vacuum arc, such as the flow of fast ions toward the anode, the current cutoffs and voltage bursts, and the backward motion of a cathode spot in a transverse magnetic field is discussed     

Application of Mn nano-flower sculptured thin films produced on interdigitated pattern as cathode and anode electrodes in field ionization gas sensor

The photolitography method was used for producing interdigitated configurations for cathode and anode electrodes of a field ionization gas sensor in which Mn helical nano-flowers with 3-fold symmetry were deposited using oblique angle deposition together with rotation of the substrate about its surface normal, with each rotation divided into six sections. These sections were alternately rotated at high and low speeds. Three different distances were chosen in the design between anode and cathode electrodes, namely 40, 100 and 200 μm. Physical structure and morphology of electrodes were studied by field emission scanning electron microscope and atomic force microscope analyses.The breakdown voltage of the system was studied for nitrogen, oxygen, argon, air and carbon mono-oxide gases. Investigations with these gases at different distances between anode and cathode and different gas pressures confirmed Paschen's Law. Results showed that at low pressures, decreasing the gap between electrodes increases the breakdown voltage. With fewer gas molecules between the electrodes the number of interactions between particles is reduced and higher energies are required for ionization of gas molecules. At high pressures, the breakdown voltage is decreased because of an increased number of molecular interactions. The sensor demonstrated good selectivity between the different gases and selectivity was enhanced with increasing gas pressure. A direct relationship was found at low pressures (e.g., 0.1 mbar) between the breakdown voltage and the gas ionization energy while at high pressures (e.g., 1000 mbar) this relationship was reversed.     

The segmented hollow cathode discharge: a pumping source for UVmetal ion lasers

We have investigated the operation of a high-voltage segmented hollow cathode discharge which is an efficient pumping source for ultraviolet metal ion lasers. We present the photographically recorded visual appearance of the discharge and the spatial distribution of the ionization source obtained from Monte Carlo simulation of the electrons' motion. Both results show that the high voltage of the segmented hollow cathode discharge and the curved cathode surfaces result in a strong focusing of the fast electrons even at the relatively high operating pressure     

Vacuum anodic discharge as source of ionized fluxes of coating material

Cathodic and anodic discharges are effective sources of coating material ionized fluxes. Of special interest is the use of anodic discharges, particularly discharges with a thermoelectronic cathode. The discharge forms fluxes in high vacuum with regulated ionization and the absence of micro liquid droplets. The initiation conditions and characteristics of the discharge in the voltage range from 50 to 500 V with currents up to 5 A were investigated. The dependence of vacuum, interelectrode distance, and cathode heating temperature were considered. Conditions for the production of coating material fluxes with maximum ionization were established.     

微空心阴极放电的流体模型模拟

采用流体模型研究了微空心阴极放电(MHCD)的特点，对放电中电场的形成，电子和离子的密度分布，电子能量分布进行了数值模拟.该计算是针对高气压，圆筒形阴极结构下的He放电.结果表明放电中存在空心阴极效应，从电子能量分布可以看出，放电中存在高能电子，放电空间的电场分布主要表现为径向电场.此外，通过改变气压，阴极孔径等参数计算出它们对放电的影响.分析表明减小孔径有利于负辉区更充分的重合.提高气压将缩短阴极位降区. 关键词： 微空心阴极放电 流体模型     

Theory of a normal high-pressure glow discharge

In the present work, a theoretical model considering the processes of generation and losses of charged particles in the cathode region of a glow discharge in the drift approximation for ion and electron motion is developed. Exact analytical solutions, which can be used to calculate the current-voltage characteristics of the glow discharge in an arbitrary gas with the known Townsend ionization coefficient, are derived. The calculated parameters of the normal glow discharge (the current density, discharge burning voltage, and width of the space charge region) for different gases are in good agreement with the available experimental data. __________ Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 2, pp. 71–77, February, 2006.     

电极构形对形成大面积放电均匀性影响

 设计并制作了空心阴极、钮扣阴极、针阴极和条形阴极，利用CCD照相，在5cm×5cm口径范围内，分别对四种阴极放电的空间均匀性进行了研究。实验表明，在预电离电压800V，主放电电压3kV和气体气压约30Pa的条件下，利用空心阴极放电，能够获得空间较为均匀的放电等离子体。放电等离子体可以用作普克尔盒电光开关的等离子体电极。     

Experimental observation of high-voltage, low-current vacuum arcs

A poorly explored type of discharge has been investigated in high vacuum (10^-7 to 10^-6 torr), with a DC high voltage across 0.2- to 0.8-mm gaps. The discharge has been found to be quite different from other widely known types of vacuum and gas discharges by the combination of its voltage-current characteristics (hyperbola-type), source and carriers of current (mostly electrons), and spatial potential distribution (a considerable electric field across the gap and a steep potential fall near the cathode)     

Hollow cathode effects in charge development processes in transienthollow cathode discharges

A detailed experimental study of space charge formation and ionization growth in transient hollow cathode discharges (THCD) is presented. The experiment was performed with an applied step voltage up to 30 kV, with rise time less than 50 ns. The discharge was operated in different gases, at pressures in the range 50-750 mTorr, with cathode apertures ranging from 1 to 5 mm diameter and 5 to 20 mm long, with 10 cm electrode separation. Spatial charge formation, both in the hollow cathode region (HCR) and inter electrode space, has been studied with a capacitive probe array. Properties of high energy electron beams have been measured with a beam-target scintillator-photomultiplier arrangement. Detailed correlations of the electron beam evolution with the charge probe signals inside and outside the HCR clearly demonstrate the role of the electron beam in the initial formation and late evolution of a virtual anode and, in turn, the field enhanced ionization when the anode potential is brought close to the HCR. These results clearly identify the different regimes in which the Hollow Cathode plays a significant role in ionization growth in the inter electrode space and in the processes which eventually lead to electric breakdown     

Abnormal polarity effect in nanosecond-pulse breakdown of SF6 and nitrogen

The breakdown of gas gaps in an inhomogeneous electric field at subnanosecond and nanosecond voltage pulse rise times are studied, and the famous polarity effect in point-to-plane gaps is investigated. It is shown that at a voltage pulse rise time of ∼0.5 ns, the inversion of polarity effect takes place not only in electronegative gases such as SF₆, but also occurs in electropositive nitrogen. The inversion of polarity effect is related to a delay of electron emission from the plane cathode on arrival of the ionization wave front anode to the cathode. It is found that with a voltage pulse rise time of ∼0.5 ns, the inversion of polarity effect occurs at SF₆ and SF₆–N₂ pressures of 0.25 MPa and lower, and with a voltage pulse rise time of 15 ns, at a SF₆ pressure lower than 0.12 MPa.     

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基于OOPIC软件,对平面直流磁控溅射放电等离子体进行了二维自洽粒子模拟,重点研究了磁场、阴极电势和气压等工作参数对磁控放电特性的影响。模拟发现,在一定的工作参数范围内,随着磁场的增强,鞘层厚度变窄,鞘层电势降减小,阴极离子密度增大,但是分布变窄;随着阴极电势的增加,鞘层厚度稍微变窄,鞘层电势降增大,阴极离子密度增大,分布变宽;随着气压的升高,鞘层厚度基本不变,鞘层电势降会增大,阴极离子密度先增大后减小,分布略微变宽。