Interaction of a Surface Acoustic Wave with a Two-dimensional Electron Gas

When a surface acoustic wave (SAW) propagates on the surface of a GaAs semiconductor, coupling between electrons in the two-dimensional electron gas beneath the interface and the elastic host crystal through piezoelectric interaction will attenuate the SAW. The coupling coefficient is calculated for the SAW propagating along an arbitrary direction. It is found that the coupling strength is strongly dependent on the propagating direction. When the SAW propagates along the [011] direction, the coupling becomes quite weak.     

Velocity of a SAW propagating in a 2D phononic crystal

We have studied the propagation of a surface acoustic waves (SAW), in a structure constituted by a 2D phononic film (a few micrometers thick and having lattice constants of a few hundreds of micrometers in the two directions of the propagation plane) deposited onto a homogeneous semi-infinite substrate. First, we have calculated the dispersion relations of the acoustic modes by using a plane waves expansion method. We found that the surface branch exhibits both the folding effect and a band gap for the propagation along some particular directions. This is a very interesting result which demonstrates that the effects related to the existence of the band gap (sound velocity dispersion, diffraction, refraction, ultrasound tunneling, etc.) can all appear, even if the thickness of the phononic film is much less than the penetration depth of the SAW. Then, we used an all-optical technique to monitor the spectral content of the SAW propagating along the GammaX direction in the reduced Brillouin zone. We show that a wave with frequency in the stop band, is destructively diffracted after it propagates through less than ten periods. Finally, we report on measurements of the Rayleigh wave phase velocity and we show that the transit time is independent of the distance traveled inside the phononic crystal, suggesting that tunneling trough the sample is involved.     

SH Acoustic Waves in a Lithium Niobate Plate and the Effect of Electrical Boundary Conditions on Their Properties

It is theoretically and experimentally confirmed that the electromechanical coupling coefficient of SH waves propagating in a Y-cut lithium niobate plate along the X direction can exceed 30% when the plate thickness satisfies the condition h/λ= 0.02–0.15. This value of the coupling coefficient is approximately six to seven times greater than the maximal value obtained for SAW in the same material. Such a high value of K ² offers a possibility to control the wave velocity by varying the electrical boundary conditions, e.g., by moving a conducting screen toward the plate surface. The effect of such a screen on the properties of the SH waves is studied both theoretically and experimentally. On the whole, the results of the study show that the use of SH waves offers considerable improvements in the parameters of the known SAW devices and also opens up the possibilities for the development of new devices and sensors that have to operate in contact with a liquid medium.     

由于表面粗糙引起的激光声表面波色散的实验和理论研究

表面粗糙是材料制造过程中必有的副产物, 粗糙表面会引起其中传播的声表面波的速度发生变化. 在利用激光声表面波对材料性质进行评估时, 常用宽带的激光声表面波速度频散特性对材料性质进行反演. 为了研究表面粗糙度是否能作为反演的特征参数之一, 本文建立了激光在表面粗糙样品中激发声表面波、聚偏氟乙烯换能器宽带接收声表面波的实验装置来研究不同粗糙度表面对声表面波速度的影响; 理论上建立了激光在粗糙表面中激发声表面波的计算模型, 利用有限元法得到声表面波的时域特征, 并进一步得到声表面波的速度色散曲线, 理论结果和实验结果能很好地拟合. 这为利用激光声表面波对表面粗糙的评估提供理论和实验依据. 关键词： 表面粗糙 激光声表面波 速度色散 聚偏氟乙烯传感器 有限元法     

表征超大规模集成电路互连纳米薄膜硬度特性的声表面波的频散特性

利用声表面波(SAW)的频散特性来表征超大规模集成电路(ULSI)互连系统中低介电常数(k)薄膜的物性具有准确、快速、对材料无损伤等突出优点.研究了Si(100)衬底上淀积低k薄膜的分层结构中，SAW沿任意方向传播的色散关系.引入坐标变换后，单层薄膜特征矩阵从9阶降到6阶，双层薄膜特征矩阵从15阶降到10阶，大幅度提高了计算速度，有利于生产ULSI过程中的在线监测. 关键词： 超大规模集成电路 声表面波 传输方向 频散特性     

Algorithm for optimization of interdigital transducer in AOTF

The interdigital transducer is an important device element in acousto-optic tunable filter (AOTF) and the surface acoustic wave (SAW) propagates in lithium niobate (LiNbO₃) as a substrate in interdigital transducer. In the direction of x-cut y propagation in AOTF, the power-flux vector and propagation direction of the surface wave are not collinear, which decrease the RF-to-SAW waveguide coupling efficiency. In this paper, optimal program is proposed, giving the numerical calculation. We know that to improve the coupling efficiency the direction of interdigital transducer should be inclined about 4.5 in AOTF. The experiment shows a satisfactory result.     

环形定子的激光致表面波机理及可视化探测研究

开展了用于新型激光驱动马达的环形定子的激光致表面波机理及实验研究. 提出一种带有凹槽阵列结构的环形定子新设计, 建立了激光在环形定子表面激发表面波的物理模型, 揭示了影响表面波幅值的关键因素; 采用一种新颖的激光致表面波可视化探测方法, 在波长1053 nm, 脉宽30 ns, 单脉冲能量1 mJ的激光激发下, 对表面波在铜质环形定子表面的传播特性进行了可视化探测实验. 理论与实验研究表明: 当激发光斑的位置紧邻凹槽阵列时, 沿着圆环向凹槽方向传播的表面波会被齿状凹槽阵列迅速衰减和吸收, 而沿着圆环向远离凹槽方向传播的表面波能够持续传递, 从而首次实现了激光致表面波在环形定子上的单向传播; 而对没有凹槽阵列结构的圆环进行的对比实验表明, 激光致表面波在圆环表面双向传播, 最终因相互混叠和串扰等而处于混乱状态. 由激光在该种环形定子表面激发出的单向表面波, 可望在光致表面波马达及驱动机构中获得应用. 关键词： 激光致表面波 环形定子 表面波可视化 激光驱动     

大气湍流中部分相干光束上行和下行传输偏振特性的比较

以部分相干的电磁高斯-谢尔模型(electromagnetic Gaussian-Schell model, EGSM) 光束为研究对象, 根据相干和偏振的统一理论以及随机光束的Stokes参量, 推导出EGSM光束在大气湍流中斜程传输时的偏振度(degree of polarization, DoP)和偏振方向角的表达式, 研究了大气湍流中上行和下行传输时EGSM光束偏振特性的不同. 研究结果表明: 在相同条件下, EGSM 光束下行传输时整个光场DoP的分布比上行传输要集中; 下行传输时轴上点的DoP达到最大值所对应的传输距离长于上行传输. 可以看出, EGSM光束沿下行路径传输时, 探测器可以接收更远距离处的波束传输信息.     

Plane Waves Propagating in Chiral Plasma and Chiral Ferrite Media

Plane wave propagation in chiral plasma and chiral ferrite media is studied in kDB coordinate system. General wave equations and characteristic equations of plane waves propagating along an arbitrary direction in chiral plasma and in chiral ferrites are derived in simple formulations respectively. Four wavenumbers and their corresponding dispersion characteristics are resulted for propagation both along and normal to the biasing magnetic field. When plane wave with negative helicity propagates along the biasing magnetic field in chiral ferrites, backward waves emerge. However backward waves occur with both positive and negative helicities when propagating along the biasing magnetic field in chiral plasma.     

研究激光激发的声表面波与材料近表面缺陷的振荡效应

根据激光激发声表面波的热弹运动方程及热传导方程, 采取有限元技术对方程进行求解, 得到声表面波传播波形图. 当声表面波经过近表面缺陷时, 声表面波与近表面缺陷之间产生一种振荡效应, 通过近表面缺陷的振荡波形幅值存在一个逐渐增加后又逐渐减小的过程. 当声表面波经过不同深度的近表面缺陷时, 振荡信号中心频率存在一定的变化规律. 数值仿真结果表明: 当近表面缺陷深度从0.1 mm到0.5 mm变化时, 振荡效应产生的振荡信号中心频率从0.4 MHz到0.76 MHz变化, 振荡信号中心频率与近表面缺陷深度呈近似线性关系, 这为近表面缺陷的定量检测提供了一种理论基础.     

Simulation and design on SAW reflective delay line for wireless sensor application using coupling of modes

This paper presents an optimal design on surface acoustic wave reflective delay line using coupling of modes（COM）model.The reflection coefficient S₁₁of the SAW device is deduced to evaluate the device performance.Typical SAW reflective delay line consists of a piezoelectric substrate,an interdigital transducer（IDT）and several reflectors positioned along the acoustic propagation direction.The influences of the design parameters of the device, such as structure of the IDT,reflector types,etc.on device performance are investigated,and the optimal design parameters are determined.Based on these parameters,a 434 MHz SAW reflective delay line with single phase unidirectional transducers and three shorted grating reflectors is fabricated on 41°YX LiNbO₃.The measured S₁₁agrees well with the simulated one.Sharp reflection peaks,high signal noise ratio（S/N）,and low spurious noise between the reflection peaks are observed.     

Impulsive fracture of silicon by elastic surface pulses with shocks

During nonlinear evolution of surface acoustic waves (SAWs) stress increases with propagation, and may cause fracture of brittle materials. This effect was used to evaluate the strength of crystalline silicon with respect to impulsive load in the nanosecond time scale without using seed cracks. Short SAW pulses propagating in the [11(macro)2] direction on the Si(111) plane induce fracture at significantly lower SAW amplitudes than the mirror symmetric wave propagating in the [112(macro)] direction. This effect is explained by the differences in elastic nonlinearity of the two propagation directions.     

湍流大气中激光上行和下行传输时相位奇点的演化

利用激光大气传输四维程序数值模拟了激光在湍流大气中上行和下行传输时产生的相位奇点的变化过程。由模拟结果可知,当光束自地面向空中垂直上行传输时,相位奇点数密度随传输高度的变化有一个从无到有、从快速增加到缓慢增加、达到峰值后又减小的过程;湍流越强,畸变光场中产生的相位奇点数密度越大,达到的峰值越高,且达到峰值后减小的幅度也越大,但达到峰值时对应的传输高度越低;当激光自空中某一位置垂直下行传输时,相位奇点数密度随传输距离的增加有一个从无到有、从缓慢增加到快速增加且在接近地平面处急剧增加的过程。另外,通过对模拟结果的曲线拟合发现,激光在湍流大气中上行传输时产生的相位奇点数密度与传输高度的关系符合黑体辐射公式;当激光在湍流大气中下行传输时,相位奇点数密度随传输距离的增加呈指数增加。     

Wideband high-frequency line-focus PVDF transducer for materials characterization

This paper presents the design, fabrication, operating characteristics and applications of a wideband, high-frequency, line-focus beam transducer we constructed using a 9 microm thick piezoelectric polyvinylidene fluoride (PVDF) film. This transducer possesses a focal length of 2.38 mm and an aperture angle of 84 degrees. The frequency spectrum of the signal measured at the focal point indicates that the transducer has a wide frequency response which extends from 10 MHz to over 100 MHz. When compensated for the frequency-dependent attenuation of the coupling medium, the operational frequency exceeds 150 MHz. The transducer can be operated in a time-resolved pulse mode or in a radio-frequency (rf) tone burst mode. An application of the transducer to determine the anisotropic elastic property of a silicon wafer is demonstrated. The phase velocities of surface acoustic waves (SAW) propagating along various directions on the (001) surface of cubic silicon are measured and compared to computed values.     

斜入射激光驱动的冲击波在样品中传播特性的实验研究

在“神光-Ⅱ”高功率激光装置上，利用弯折靶、双台阶靶实验及通过对等离子体喷射状态的实验测量，研究了激光斜入射情况驱动的冲击波传播特性.结果表明，即使在大角度(约45°)斜入射的激光驱动下，靶材料中的冲击波依然是沿着靶面法线方向传播的，并能形成很好的一维正击波. 关键词： 斜入射 冲击波 弯折靶 双台阶靶 激光状态方程     

Smooth and oriented AlN thin films deposited by laser ablation and their application for SAW devices

Aluminum nitride films of up to 1.2 7m thickness were deposited by excimer laser ablation onto c-, r-, m-, and a-cut sapphire substrates. The films were found to be of (00.1), (11.0), (10.0) and (00.1) orientation on c-, r-, m- and a-cut sapphire substrates, respectively. XRD pole figure measurements showed good in-plane alignment of all three sample sets. AFM measurements reveal that all films were atomically smooth in the initial stages of growth. Furthermore, for AlN(11.0) on r-cut sapphire the film surface remained smooth, with an r.m.s. roughness of about 1 nm up to a film thickness of 1.2 7m. AlN films with the polar c-axis parallel to the film surface are particularly favourable for SAW device applications, since the c-axis direction yields the strongest coupling coefficient. A smooth surface, as for AlN(11.0), is essential to prevent scattering of propagating surface acoustic waves. A SAW r.f. filter was fabricated with interdigital transducers of 5.6 7m wavelength on top of a 1.2 7m AlN(11.0) film on r-cut sapphire. The resonance frequency of 1.068 GHz corresponds well to theoretical expectations for the SAW velocity in this propagation geometry.     

Temperature-stable orientations in LGS and LGN piezoelectric crystals for surface acoustic waves

The temperature characteristics of surface acoustic waves (SAW) propagating in LGS and LGN crystals are numerically analyzed. The optimal orientations that correspond to the zero value of the first-order temperature coefficient of delay (TCD) for SAW propagating in these crystals are considered. The second-order TCD for SAW is calculated for a wide range of operating temperatures. It is shown that the temperature dependences of the material constants of LGS and LGN crystals are strongly nonlinear. The characteristics of SAW propagating in a structure that consists of an isotropic layer overlying an LGS or LGN piezoelectric crystal are numerically calculated. It is shown that, in the presence of a thin aluminum layer of a certain thickness on the crystal surface, in some cases it is possible to extend the operating temperature range within which the TCD for SAW is equal to zero.     

Conductance oscillations of a spin-orbit stripe with polarized contacts

We investigate the linear conductance of a stripe of spin-orbit interaction in a 2D electron gas; that is, a 2D region of length l\ell along the transport direction and infinite in the transverse one in which a spin-orbit interaction of Rashba type is present. Polarization in the contacts is described by means of Zeeman fields. Our model predicts two types of conductance oscillations: Ramsauer oscillations in the minority spin transmission, when both spins can propagate, and Fano oscillations when only one spin propagates. The latter are due to the spin-orbit coupling with quasibound states of the non propagating spin. In the case of polarized contacts in antiparallel configuration Fano-like oscillations of the conductance are still made possible by the spin orbit coupling, even though no spin component is bound by the contacts. To describe these behaviors we propose a simplified model based on an ansatz wave function. In general, we find that the contribution for vanishing transverse momentum dominates and defines the conductance oscillations. Regarding the oscillations with Rashba coupling intensity, our model confirms the spin transistor behavior, but only for high degrees of polarization. Including a position dependent effective mass yields additional oscillations due to the mass jumps at the interfaces.     

Characteristics of surface sound pressure and absorption of a finite impedance strip for a grazing incident plane wave

Distributions of sound pressure and intensity on the surface of a flat impedance strip flush-mounted on a rigid baffle are studied for a grazing incident plane wave. The distributions are obtained by superimposing the unperturbed wave (the specularly reflected wave as if the strip is rigid plus the incident wave) with the radiated wave from the surface vibration of the strip excited by the unperturbed pressure. The radiated pressure interferes with the unperturbed pressure and distorts the propagating plane wave. When the plane wave propagates in the baffle-strip-baffle direction, it encounters discontinuities in acoustical impedance at the baffle-strip and strip-baffle interfaces. The radiated pressure is highest around the baffle-strip interface, but decreases toward the strip-baffle interface where the plane wave distortion reduces accordingly. As the unperturbed and radiated waves have different magnitudes and superimpose out of phase, the surface pressure and intensity increase across the strip in the plane wave propagation direction. Therefore, the surface absorption of the strip is nonzero and nonuniform. This paper provides an understanding of the surface pressure and intensity behaviors of a finite impedance strip for a grazing incident plane wave, and of how the distributed intensity determines the sound absorption coefficient of the strip.     

Acoustic power flux in a waveguide

The acoustic power flux that occurs in an ideal waveguide in the presence of two modes propagating in it is considered. Singular points of the saddle and vortex types are found for modes of different numbers. The regions lying near the vortex-type points and characterized by the inverse direction of the power flux (i.e., from the receiver to the source) are determined. When a low-number mode propagates together with a higher-number one, the regions, where the power flux noticeably deviates from the general propagation direction, occupy a considerable part of the longitudinal section area of the waveguide.