Femtosecond laser nanostructuring of a tungsten surface

Tungsten surface nanostructuring is performed using the radiation of a Yb:KGW femtosecond laser in air and in liquid nitrogen. Arrays of linear nanostructures and nanorods of tungsten and tungsten nitride are fabricated on the surfaces of targets. Possible scenarios of transforming surface nanostructures of one type into another and the formation of network-like relief are considered.     

Femtosecond laser induced nanostructuring of zirconium in liquid confined environment

The surface, structural, and mechanical properties of zirconium after irradiation with Ti: sapphire laser(800 nm, 30 fs,1 k Hz) have been investigated. The zirconium targets were exposed for a varying number of laser pulses ranging from 500 to 2000 at a fixed fluence of 3.6 J/cm~2 corresponding to an intensity of 1.2×10~(14)W/cm~2 in ambient environments of deionized water and propanol. A scanning electron microscope(SEM) was employed to investigate the surface morphology of the irradiated zirconium. The SEM analysis shows the formation of various kinds of features including nanoscale laser induced periodic surface structures(LIPSS), sponge like surface structure, flakes, conical structures, droplets, pores, and cavities. The energy dispersive x-ray spectroscopy(EDS) analysis exhibits the variation in chemical composition along with an enhanced diffusion of oxygen under both ambient conditions. The crystal structure and phase analyses of the exposed targets were explored by x-ray diffraction(XRD) and Raman spectroscopy techniques, respectively. The XRD analysis confirms the presence of various phases of zirconium hydride and zirconia after ablation in both de-ionized water and propanol. However, excessive hydrides are formed in the case of propanol. The Raman analysis supports the EDS and XRD results. It also reveals the presence of oxides(zirconia) after irradiation in both de-ionized water and propanol environments.The chemical reactivity of zirconium was significantly improved in the presence of liquids which were accountable for the growth of novel phases and modification in the chemical composition of the irradiated Zr. A nanohardness tester was employed to measure the nanohardness of the laser treated targets. The initial increase and then decrease in nanohardness was observed with an increase in the number of laser pulses in the de-ionized water environment. In the case of propanol,a continuous decrease in hardness was observed.     

Femtosecond nanostructuring of silicon surfaces

Nanostructures were formed upon the irradiation of single-crystal silicon surfaces with femtosecond laser pulses. These nanostructures were detected using scanning electron microscopy, Raman spectroscopy, and a photoluminescence technique.     

Femtosecond pulsed laser ablation of thin gold film

Laser micromachining on 1000 nm-thick gold film using femtosecond laser has been studied. The laser pulses that are used for this study are 400 nm in central wavelength, 150 fs in pulse duration, and the repetition rate is 1 kHz. Plano-concave lens with a focal length of 19 mm focuses the laser beam into a spot of 3 μm (1/e² diameter). The sample was translated at a linear speed of 400 μm/s during machining. Grooves were cut on gold thin film with laser pulses of various energies. The ablation depths were measured and plotted. There are two ablation regimes. In the first regime, the cutting is very shallow and the edges are free of molten material. While in the second regime, molten material appears and the cutting edges are contaminated. The results suggest that clean and precise microstructuring can be achieved with femtosecond pulsed laser by controlling the pulse energy in the first ablation regime.     

Femtosecond laser ablation of polypropylene for breathable film

A polypropylene (PP) film was ablated using a femtosecond laser with a center wavelength of 785 nm, a pulse width of 184 fs and a repetition rate of 1 kHz. Increments of both the pulse energy and the shot number of pulses lead to co-occurrence of photochemical and thermal effect, demonstrated by the spatial expansion of rim on the surface of PP. The shapes of the laser-ablated PP films were imaged by a scanning electron microscope (SEM) and measured by a 3D optical measurement system (NanoFocus). And, the gas and water vapor transmission rate, mechanical properties of PP film micropatterned by fs laser pulses was characterized. Our results demonstrate that a femtosecond pulsed laser is an efficient tool for breathable packaging films in modifying the flow of air and gas, where the micropatterns are specifically tailored in size, location and number of which is easily controlled by laser processing conditions.     

Femtosecond laser induced desorption of water from silver nanoparticles

The photodesorption mechanism of H₂O from quartz-supported silver nanoparticles has been studied by femtosecond laser two-pulse correlation and fluence dependence measurements. With the laser wavelength close to the maximum of the (1,1) plasmon resonance of the nanoparticles, the desorption was found to be purely thermal, i.e., induced by coupling of the desorption coordinate to the nanoparticle lattice temperature, both in the low- and the high-coverage regimes. The lattice cooling times of the nanoparticles are in the range of several hundred ps, in accordance with recent time-resolved X-ray measurements. Also observed is a reversible red-shift of the nanoparticle plasmon modes with increasing H₂O coverage which is attributed to dielectric screening. PACS 78.67.-n; 82.53.-k; 65.80.+n     

Femtosecond laser micromachining of an Au/Cr film nanostack

Selective laser patterning of thin films in a multilayer structure is an emerging technology for the fabrication of MEMS devices. A 775-nm Ti:sapphire laser (130 fs, 1 kHz) was used to irradiate thin-film stacks with variations in the process parameters, such as the pulse energy, feed rate, and numerical aperture of the objective lens. The two layers of the Au/Cr film have the same thickness, which is about 1000 nm. They were coated on a glass substrate. By SEM, an AFM and an optical surface profiler, we investigate the morphology of a pattern including the line width, groove depth, and laser-induced periodic surface structures (LIPSSs). The ablation depth was observed to depend on the pulse energy. In addition, from the energy spectrum, we find which layer was removed completely. The experimental results show that precise micromachining with a desired stability and reproducibility can be achieved by controlling the ablation energy and the feed rate. With a different energy and feed rate, we have processed the gating and the circle, which with the smooth cutting edge and groove was consistent with the beam spatial distribution.     

Femtosecond laser ablation of Au film around single pulse threshold

Ablation process of 1-kHz femtosecond lasers (pulse duration of 148 fs, wavelength of 775 nm) of Au film on silica substrates is studied. The thresholds for single and multi pulses can be obtained directly from the relation between the squared diameter D2 of the ablated craters and the laser fluence φo. From the plot of the accumulated laser fluence Nφth(N) and the number of laser pulses N, incubation coefficient of Au film is obtained to be 0.765. Some experimental data obtained around the single pulse threshold are in good agreement with the theoretical calculation.     

Femtosecond laser ablation of silver foil with single and double pulses

The average ablation depth per pulse of silver foil by 130 fs laser pulses has been measured in vacuum over a range of three orders of magnitude of pulse fluence up to 900 J cm⁻². In addition, double pulses with separations up to 3.4 ns have been used to probe time scales of relevance for femtosecond ablation. The double pulse ablation depth, when each pulse fluence is 0.7 J cm⁻², falls to that of a single pulse as the pulse separation is increased from 0 ps to 700 ps. This time scale decreases to only 4 ps as the fluence is increased to 11 J cm⁻². It then jumps to 500 ps across a transition fluence where the slope of the ablation depth versus logarithmic fluence characteristic changes abruptly to a higher value. In addition, for pulse separations near 1000 ps, the second pulse can cause re-deposition of ejecta from the first pulse resulting in a double pulse ablation depth only 40% that of the first pulse alone. This has important implications for the interpretation of double pulse femto-LIBS intensities. Our results suggest that the optical properties of nano or mesoparticles play a significant role in double pulse ablation with large pulse separations.     

Femtosecond pulsed laser ablation of 3CSiC thin film on silicon

A femtosecond pulsed Ti:sapphire laser (pulse width=120 fs, wavelength=800 nm, repetition rate=1 kHz) was employed to perform laser ablation of 1-m-thick silicon carbide (3CSiC) films grown on silicon substrates. The threshold fluence and ablation rate, useful for the micromachining of the 3CSiC films, were experimentally determined. The material removal mechanisms vary depending on the applied energy fluence. At high laser fluence, a thermally dominated process such as melting, boiling and vaporizing of single-crystal SiC occurs. At low laser fluence, the ablation is a defect-activation process via incubation, defect accumulation, formation of nanoparticles and final vaporization of boundaries. The defect-activation process reduces the ablation threshold fluence and enhances lateral and vertical precision as compared to the thermally dominated mechanism. Helium, as an assistant gas, plays a major role in improving the processing quality and ablation rate of SiC thin films due to its inertness and high first ionization energy. PACS 79.20.Ds; 42.62.Cf; 42.70.Qs; 61.72; 61.46     

Femtosecond and picosecond near-field ablation of gold nanotriangles: nanostructuring and nanomelting

We report on recent insights into the interaction between ultra-fast laser pulses and plasmonic nanoparticles. We discuss femtosecond near-field ablation as a simple but versatile tool for the nanoscale modification of surfaces and the high-resolution measurement of a nanostructure’s near field. Two model systems are presented, illustrating the complexity of near-field distributions. Furthermore, finite difference time domain calculations in combination with absorption spectra provide a deeper insight into the factors influencing the near-field distribution. For the first time, an almost perfect agreement between the measured ablation pattern and experiment has been reached for gold triangles with a side length around 500 nm. Additionally, the results from picosecond laser irradiated plasmonic structures display a new regime of nanoscale laser material processing. We present first results showing nanometre confined melting induced by laser pulses.     

Parallel nanostructuring of GeSbTe film with particle mask

Parallel nanostructuring of a GeSbTe film may significantly improve the recording performance in data storage. In this paper, a method that permits direct and massively parallel nanopatterning of the substrate surface by laser irradiation is investigated. Polystyrene spherical particles were deposited on the surface in a monolayer array by self-assembly. The array was then irradiated with a 248-nm KrF laser. A sub-micron nanodent array can be obtained after single-pulse irradiation. These nanodents change their shapes at different laser energies. The optical near-field distribution around the particles was calculated according to the exact solution of the light-scattering problem. The influence of the presence of the substrate on the optical near field was also studied. The mechanisms for the generation of the nanodent structures are discussed. PACS 81.16.Mk; 61.80.Ba; 81.16.Rf; 81.65.Cf     

Towards nanostructuring with femtosecond laser pulses

Detailed investigations of the possibilities for using femtosecond lasers for the nanostructuring of metal layers and transparent materials are reported. The aim is to develop a simple laser-based technology for fabricating two- and three-dimensional nanostructures with structure sizes on the order of several hundred nanometers. This is required for many applications in photonics, for the fabrication of photonic crystals and microoptical devices, for data storage, displays, etc. Measurements of thermionic electron emission from metal targets, which provide valuable information on the dynamics of femtosecond laser ablation, are discussed. Sub-wavelength microstructuring of metals is performed and the minimum structure size that can be fabricated in transparent materials is identified. Two-photon polymerization of hybrid polymers is demonstrated as a promising femtosecond laser-based nanofabrication technology. Received: 20 November 2002 / Accepted: 20 January 2003 / Published online: 28 May 2003 RID="*" ID="*"Corresponding author. Fax: +49-511/2788-100, E-mail: ch@lzh.de     

Femtosecond petawatt laser

The high‐power femtosecond laser has now become an excellent scientific tool for the study of not only relativistic laser–matter interactions but also scientific applications. The high‐power femtosecond laser depends on the Kerr‐lens modelocking (KLM) and chirped‐pulse amplification (CPA) technique. An all‐Ti:sapphire‐based 30‐fs PW CPA laser, which is called the PULSER (Petawatt Ultrashort Laser System for Extreme Science Research) has been recently constructed and is being used for accelerating the charged particles (electrons and protons) and generating ultrashort high‐energy photon (X‐ray and γ‐ray) sources. In this review, the world‐wide PW‐level femtosecond laser systems are first summarized, the output performances of the PULSER‐I & II are described, and the future upgrade plan of the PULSER to the multi‐PW level is also discussed. Then, several experimental results on particle (electron and proton) acceleration and X‐ray generation in the intensity range of mid‐10¹⁸ W/cm² to mid‐10²⁰ W/cm² are described. Experimental demonstrations for the newly proposed phenomena and the understanding of physical mechanisms in relativistic and ultrarelativistic regimes are highly expected as increasing the laser peak intensity up to over 10²² W/cm² ～10²³ W/cm².     

Effects of laser fluence on near-field surface nanostructuring

In this work, molecular dynamics simulation is performed to explore the long-time (up to 5 ns) behavior of argon crystal in surface nanostructuring with an extremely localized near-field laser beam. The surface nanostructuring region is limited to tens of nanometers in diameter, although the simulated systems are much larger (comprised of more than 770,000 atoms). This study focuses on the long-time solidification and crystallization procedure, which is driven by the heat conduction in the material. The effect of the computational domain on the final nanostructure is studied in detail. Different laser fluences are used in the simulation to explore how and to what extent the energy input affects the dynamic melting behavior and the final dimension and profile of the surface nanostructure. In-depth theoretical investigation gives satisfactory explanation of the effect of the laser fluence on the melting depth. Spot-like structural defects in the sub-surface region are observed and investigated until full solidification.     

Single-shot front-side nanoscale femtosecond laser ablation of a thin silver film

Nano- and microscale holes, as well as related sub-ablative nanospikes and sub-micron bumps, were produced in a 30-nm thick silver film on a silica substrate by single femtosecond laser pulses with variable pulse energies, focused by different strong focusing optics. Characteristic laser energy deposition dimensions exceed the expected focal spots by nearly 2 microns, indicating the considerable lateral thermal transport in the film, while the effective hole formation thresholds decrease versus increasing numerical aperture of focusing optics. Morphologies of the sub-ablative solidified surface nanostructures and numerical estimates of deposited volume energy density undermine blowing-off the molten film due to subsurface boiling and near-critical phase explosion at lower and higher sub-threshold fluences, respectively.     

飞秒激光精密微纳加工的研究进展

飞秒激光由于其超快时间特性和超高峰值功率特性在精密微纳加工领域引起了人们广泛的重视．在与物质的相互作用中它能快速、准确地将能量作用在特定的区域内，从而可以获得极高的分辨率和加工精度。文章综述了飞秒激光精密微纳加工的最新研究进展，分别就飞秒激光烧蚀微加工和飞秒激光双光子聚合产生三维微纳结构进行了介绍，阐述了各自的物理机制．最后对飞秒激光微纳加工的研究前景做了初步探讨。     

Femtosecond laser ablation of DAST

High rate femtosecond (fs) laser ablation of the organic salt 4-N,N-dimethylamino-4-N-methyl-stilbazolium tosylate (DAST), an organic crystal with very high optical nonlinearities has been demonstrated. The threshold fluence and the ideal fluence range for damage free ablation for the wavelengths 550, 600, and 775 nm have been determined and the quality of the produced grooves has been investigated. The threshold fluences are in the order of 10–70 mJ/cm² and the ideal fluence range for damage free ablation is ranging from 30 to 300 mJ/cm², depending on the wavelength. The optimal focussing for ablation has been investigated and first results towards the structuring of a ridge waveguide are presented. We conclude that this method is most promising for waveguide patterning of DAST surfaces for integrated optics applications.     

Femtosecond laser ablation of aluminium

We investigate femtosecond laser ablation of aluminium using a hybrid simulation scheme. Two equations are solved simultaneously: one for the electronic system, which accounts for laser energy absorption and heat conduction, the other for the dynamics of the lattice where the ablation process takes place. For the electron-temperature a generalized heat-conduction equation is solved by applying a finite difference scheme. For the lattice properties, e.g. pressure, density or temperature, we use common molecular dynamics. Energy transfer between the subsystems is allowed by introducing an electron-phonon coupling term. This combined treatment of the electronic and atomic systems is an extension of the well known two-temperature model [Anisimov, Kapeliovich, Perel’man, Electron emission from metal surfaces exposed to ultra short laser pulses, JETP Lett. 39 (2)].     

Ultrafast laser nanostructuring of photopolymers: A decade of advances

Research into the three-dimensional nanostructuring of photopolymers by ultrashort laser pulses has seen immense growth over the last decade. In this paper, we review the basic principles and the most important developments and applications of this technology. We discuss the mechanisms the linear and nonlinear light absorption at tight focusing conditions, and we present some typical laser writing conditions with numerical examples. The photochemistry of traditional and novel photopolymers together with strategies for their photosensitization for laser structuring by ultra-short pulses are discussed. We also discuss current and potential future applications in diverse fields such as metamaterials, plasmonics, micro-optics, and biomedical devices and implants.