Reactive species generated during wet chemical etching of silicon in HF/HNO3 mixtures

The role of intermediate species generated during wet chemical etching of silicon in a HF-rich HF/HNO3 mixture was studied by spectroscopic and analytical methods at 1 degrees C. The intermediate N2O3 was identified by its cobalt blue color and the characteristic features in its UV-vis and Raman spectra. Furthermore, a complex N(III) species (3NO+.NO3-) denoted as [N4O6(2+)] is observed in these solutions. The time-dependent decay of the N(III) intermediates, mainly by their oxidation at the liquid-air interface, serves as a precondition for the study of the etch rate as function of the intermediate concentration measured by Raman spectroscopy. From a linear relationship between etch rate and [N4O6(2+)] concentration, NO+ is considered to be a reactive species in the rate-limiting step. This step is attributed to the oxidation of permanent existing Si-H bonds at the silicon surface by the reactive NO+ species. N2O3 serves as a reservoir for the generation of NO+ leading to a complete coverage of the silicon surface with reactive species at high intermediate concentrations. As long as this condition is valid (plateau region), the etch rate is constant and yields a smooth silicon surface upon completion of the etching. If the N2O3 concentration is insufficient to ensure a coverage of the Si surface by NO+, the etch rate decreases linearly with the N2O3 concentration and results in a roughening of the etched silicon surface (slope region).     

Imaging Nanometre‐Sized Hot Spots on Smooth Au Films with High‐Resolution Tip‐Enhanced Luminescence and Raman Near‐Field Optical Microscopy

A novel near‐field optical microscope based on a parabolic mirror is used for recording high‐resolution tip‐enhanced photoluminescence (PL) and Raman images with unprecedented sensitivity and contrast. The measurements reveal small islands on the Au surface with dimensions of only a few nanometres with locally enhanced Au PL. These islands appear as nanometre‐sized hot spots in tip‐enhanced Raman microscopy when benzotriazole molecules adsorbed on the Au surface serve as local sensors for the optical field. The spectra show that localized plasmons are the cause of both the locally enhanced Au PL and enhanced Raman scattering. This finding suggests that the dispersive background in the surface‐enhanced Raman spectra can be explained simply by the enhanced Au PL in the gap. Furthermore, our results show that the surface flatness must be better than 1 nm, to provide an optically homogeneous substrate for near‐field enhanced PL and Raman spectroscopy.     

Quantum Characterization of Some Cluster-Based Materials

Three kinds of cluster-based materials are prepared by evaporation and inert gas condensation method. Their structures and properties are examined by transmission electron microscopy, Raman scattering, STM/STS, optical spectroscopy, etc. Some important results are obtained: (1) surface phonon modes of quasi-free Si clusters are observed when Si clusters softly land onto the mother skeleton of the porous silicon and/or through grazing angle collisions with the walls of the pores; (2) very sharp peaks of conductance resonances are obtained when the STM tip is right on the top of the Au cluster deposited on the H-terminated silicon crystal; and (3) large blue shifts and photoluminescence from violet to orange with main peaks in the blue range are observed from Ge cluster-based nanofilms at an excitation wavelength of 370 nm. Mechanisms are discussed including the quantum confinement effect of the Ge cluster cores, radiation transition from oxygen difficiency centers in the oxide surface layers, and exciton confinement in the interfacial layers between the crystalline cores and the oxide shells.     

两步法制备多孔硅及其表征I:恒电流法(英文)

本工作通过采用电化学极 -化学氧化两步法在 1:1氢氟酸和乙醇溶液中制备出孔径约为 1～ 2 μm ,厚度大经为 6～ 10 μm的多孔硅样品 .首先将 0 .0 3A/cm2 的恒电流施加到p( 10 0 )硅片一段时间 ,然后将该硅片浸到 2 0 %的硝酸溶液中氧化一段时间 .通过此方法获得的多孔硅结构再进一步用扫描电子显微镜和拉曼光谱仪进行表面形貌和光学性质的考察 .所有制备出的多孔硅结构均有光致发光现象 .老化的多孔硅样品 (在干燥器放置一年 )的光致发光谱峰强度明显增强 ,但分别经过苯乙烯和十六碳烯 ( 1)两种有机溶剂处理 1h后的老化多孔硅样品的光致发光强度却没有显著改变 .     

Probing organic layers on the TiO2(110) surface

In this work, we use first principles simulations to provide features of the dynamic scanning force microscopy imaging of adsorbed organic layers on insulating surfaces. We consider monolayers of formic (HCOOH) and acetic (CH(3)COOH) acid and a mixed layer of acetic and trifluoroacetic acids (CF(3)COOH) on the TiO(2)(110) surface and study their interaction with a silicon dangling bond tip. The results demonstrate that the silicon tip interacts more strongly with the substrate and the COO(-) group than the adsorbed acid headgroups, and, therefore, molecules would appear dark in images. The pattern of contrast and apparent height of molecules is determined by the repulsion between the tip and the molecular headgroups and by significant deformation of the monolayer and individual molecules. The height of the molecule on the surface and the size of the headgroup play a large role in determining access of the tip to the substrate and, hence, the contrast in images. Direct imaging of the molecules themselves could be obtained by providing a functionalized tip with attraction to the molecular headgroups, for example, a positive potential tip.     

Tip-enhanced Raman spectroscopy for nanoscale strain characterization

Tip-enhanced Raman spectroscopy (TERS), which utilizes the strong localized optical field generated at the apex of a metallic tip when illuminated, has been shown to successfully probe the vibrational spectrum of today’s and tomorrow’s state-of-the-art silicon and next-generation semiconductor devices, such as quantum dots. Collecting and analyzing the vibrational spectrum not only aids in material identification but also provides insight into strain distributions in semiconductors. Here, the potential of TERS for nanoscale characterization of strain in silicon devices is reviewed. Emphasis will be placed on the key challenges of obtaining spectroscopic images of strain in actual strained silicon devices. Figure Figure Concept of Tip Enhanced Raman Spectroscopy (TERS), which utilizes the strong localized optical field generated at the apex of a metallic tip when illuminated. TERS has been demonstrated to successfully probe the vibrational spectrum of today’s and tomorrow’s state-of-the-art silicon and next generation semiconductor devices     

Probing colloidal forces between a Si3N4 AFM tip and single nanoparticles of silica and alumina

The atomic force microscope (AFM) has been used to measure surface forces between silicon nitride AFM tips and individual nanoparticles deposited on substrates in 10(-4) and 10(-2) M KCl solutions. Silica nanoparticles (10 nm diameter) were deposited on an alumina substrate and alumina particles (5 to 80 nm diameter) were deposited on a mica substrate using aqueous suspensions. Ionic concentrations and pH were used to manage attractive substrate-particle electrostatic forces. The AFM tip was located on deposited nanoparticles using an operator controlled offset to achieve stepwise tip movements. Nanoparticles were found to have a negligible effect on long-range tip-substrate interactions, however, the forces between the tip and nanoparticle were detectable at small separations. Exponentially increasing short-range repulsive forces, attributed to the hydration forces, were observed for silica nanoparticles. The effective range of hydration forces was found to be 2-3 nm with the decay length of 0.8-1.3 nm. These parameters are in a good agreement with the results reported for macroscopic surfaces of silica obtained using the surface force apparatus suggesting that hydration forces for the silica nanoparticles are similar to those for flat silica surfaces. Hydration forces were not observed for either alumina substrates or alumina nanoparticles in both 10(-4) M KCl solution at pH 6.5 and 10(-2) M KCl at pH 10.2. Instead, strong attractive forces between the silicon nitride tip and the alumina (nanoparticles and substrate) were observed.     

Exploiting poly(dimethylsiloxane)-modified tips to evaluate frictional behavior by friction force microscopy

With the aim of investigating the effect of the surface properties on the friction behavior of self-assembled monolayers, we have modified tipless atomic force microscopy (AFM) cantilevers with a poly(dimethylsiloxane) (PDMS) lens. The friction coefficient using the silicon tip is strongly influenced by the mechanical properties of the substrate monolayer because hard, sharp silicon tips penetrate the surface of organic monolayers. However, the friction coefficient obtained for the PDMS-modified AFM cantilever is mostly due to the surface properties of the monolayer functional end group, rather than the viscoelastic deformation of the monolayer. The use of the PDMS tip was demonstrated as a novel means to investigate the effect of surface properties on the frictional behavior of self-assembled monolayers with various functional groups with less mechanical deformation.     

Nanoscale Chemical Imaging Using Tip‐Enhanced Raman Spectroscopy: A Critical Review

Methods for chemical analysis at the nanometer scale are crucial for understanding and characterizing nanostructures of modern materials and biological systems. Tip‐enhanced Raman spectroscopy (TERS) combines the chemical information provided by Raman spectroscopy with the signal enhancement known from surface‐enhanced Raman scattering (SERS) and the high spatial resolution of atomic force microscopy (AFM) or scanning tunneling microscopy (STM). A metallic or metallized tip is illuminated by a focused laser beam and the resulting strongly enhanced electromagnetic field at the tip apex acts as a highly confined light source for Raman spectroscopic measurements. This Review focuses on the prerequisites for the efficient coupling of light to the tip as well as the shortcomings and pitfalls that have to be considered for TERS imaging, a fascinating but still challenging way to look at the nanoworld. Finally, examples from recent publications have been selected to demonstrate the potential of this technique for chemical imaging with a spatial resolution of approximately 10 nm and sensitivity down to the single‐molecule level for applications ranging from materials sciences to life sciences.     

Gold nanothorns-macroporous silicon hybrid structure: a simple and ultrasensitive platform for SERS

We synthesised a novel gold-on-porous silicon hybrid material that exhibits a highly sensitive and reproducible surface-enhanced Raman spectroscopy (SERS) response. The material was fabricated simply by reducing gold chloride with hydrofluoric acid on the surface of macro-porous silicon (macro-PSi). The material consists of thorn-shaped gold nanocrystals with characteristic shapes and sizes on the surface of macro-PSi.     

Nanoscale Chemical Imaging of Interfacial Monolayers by Tip‐Enhanced Raman Spectroscopy

We report an investigation of interfacial fluorinated hydrocarbon (carboxylic‐fantrip) monolayers by nanoscale imaging using tip‐enhanced Raman spectroscopy (TERS) and density functional theory (DFT) calculations. By comparing TERS images of a sub‐monolayer prepared by spin‐coating and a π–π‐stacked monolayer on Au(111) in which the molecular orientation is confined, specific Raman peaks shift and line widths narrow in the transferred LB monolayer. Based on DFT calculations that take into account dispersion corrections and surface selection rules, these specific effects are proposed to originate from π–π stacking and molecular orientation restriction. TERS shows the possibility to distinguish between a random and locked orientation with a spatial resolution of less than 10 nm. This work combines experimental TERS imaging with theoretical DFT calculations and opens up the possibility of studying molecular orientations and intermolecular interaction at the nanoscale and molecular level.     

Expanding generality of surface-enhanced Raman spectroscopy with borrowing SERS activity strategy

Surface-enhanced Raman scattering (SERS) was discovered three decades ago and has gone through a tortuous pathway to develop into a powerful diagnostic technique. Recently, the lack of substrate, surface and molecular generalities of SERS has been circumvented to a large extent by devising and utilizing various nanostructures by many groups including ours. This article aims to present our recent approaches of utilizing the borrowing SERS activity strategy mainly through constructing two types of nanostructures. The first nanostructure is chemically synthesized Au nanoparticles coated with ultra-thin shells (ca. one to ten atomic layers) of various transition metals, e.g., Pt, Pd, Ni and Co, respectively. Boosted by the long-range effect of the enhanced electromagnetic (EM) field generated by the highly SERS-active Au core, the originally low surface enhancement of the transition metal can be substantially improved giving total enhancement factors up to 10(4)-10(5). It allows us to obtain the Raman spectra of surface water, having small Raman cross-section, on several transition metals for the first time. To expand the surface generality of SERS, tip-enhanced Raman spectroscopy (TERS) has been employed. With TERS, a nanogap can be formed controllably between an atomically flat metal surface and the tip with an optimized shape, within which the enhanced EM field from the tip can be coupled (borrowed) effectively. Therefore, one can obtain surface Raman signals (TERS signals) from adsorbed species at Au(110), Au(111) and, more importantly, Pt(l10) surfaces. The enhancement factor achieved on these single crystal surfaces can be up to 106, especially with a very high spatial resolution down to about 14 nm. To fully accomplish the borrowing strategy from different nanostructures and to explain the experimental observations, a three-dimensional finite-difference time-domain method was used to calculate and evaluate the local EM field on the core-shell nanoparticle surfaces and the TERS tips. Finally, prospects and further developments of this valuable strategy are briefly discussed with emphasis on the emerging experimental methodologies.     

Raman scattering of 4-aminobenzenethiol sandwiched between Ag/Au nanoparticle and macroscopically smooth Au substrate

Raman scattering measurements were conducted for a 4-aminobenzenethiol (4-ABT) monolayer assembled on a macroscopically smooth Au substrate. Although no peak was detected at the beginning, Raman peaks were distinctly observed by attaching Ag or Au nanoparticles onto the 4-ABT monolayer (Ag(Au)@4-ABT/Au(flat)). Considering the fact that no Raman signal is observed when Ag (Au) nanoparticles are adsorbed on a (4-aminophenyl)silane monolayer assembled on a silicon wafer, the Raman spectrum observed for Ag(Au)@4-ABT/Au(flat) must be a surface-enhanced Raman scattering (SERS) spectrum, derived from the electromagnetic coupling of the localized surface plasmon of Ag (Au) nanoparticles with the surface plasmon polariton of the underneath Au metal. The electromagnetic coupling responsible for SERS appeared to be governed more by the bulk Au substrate than the sparsely distributed Ag or Au nanoparticles. The chemical enhancement appeared on the other hand to be derived more from the formation of Au-S bonds than any charge-transfer interaction between the protonated amine group and the Au or Ag nanoparticles. The enhancement factors derived from the attachment of a single Ag or Au nanoparticle onto 4-ABT on Au were estimated to be as large as 8.3 x 10(5) and 5.0 x 10(5), respectively, (for the ring 3 band (b(2)) near 1390 cm(-1)) in which a factor of approximately 10(2) was presumed to be due to the chemical effect, with the remaining contributed by the electromagnetic effect.     

Substrate-induced modulation of the Raman scattering signals from self-assembled organic nanometric films

Raman scattering signals recorded by microscopy from organic self-assembled monolayers (thin nanometric films of calibrated thickness) on silica substrates were found to be much stronger than those obtained from identical films assembled on bulk silicon substrates. This effect, observed in the backscattering geometry, is shown to result from interferences between the direct and reflected beams (including both the excitation and scattered radiation) in front of a smooth reflecting surface. Strong dependence of the effect on the distance between the sampled monolayer and the bulk silicon substrate allows enhancement of the Raman signals of organic monolayer films on silicon by factors up to approximately 70 by using appropriate silica spacers. The dependence of the Raman signal intensity on film thickness was also studied for thicker nanometric films comprising a series of self-assembled organosilane multilayers on bulk silicon and fused silica substrates, and the predicted deviation from linearity in the case of the silicon substrate is experimentally confirmed.     

AFM of adsorbed polyelectrolytes on cellulose I surfaces spin-coated on silicon wafers

Thin layers of cellulose I nanocrystals were spin-coated onto silicon wafers to give a flat model cellulose surface. A mild heat treatment was required to stabilize the cellulose layer. Interactions of this surface with polyelectrolyte layers and multilayers were probed by atomic force microscopy in water and dilute salt solutions. Deflection–distance curves for standard silicon nitride tips were measured for silicon, cellulose-coated silicon, and for polyelectrolytes adsorbed on the cellulose surface. Transfer of polymer to the tip was checked by running deflection–distance curves against clean silicon. Deflection–distance curves were relatively insensitive to adsorbed polyelectrolyte, but salt addition caused transfer of cationic polyelectrolyte to the tip, and swelling of the polyelectrolyte multilayers.     

Array-orderly single crystalline silicon nano-wires

Array-orderly single crystal silicon nano-wires (SiNWs) using self-organized nano-holes of anodically oxidized aluminum were fabricated. By field emission scanning electron microscope (FESEM) and transmission electron microscope (TEM), the well-orderly single crystal SiNWs arrays were observed. The interval of the SiNWs is excellent symmetrical and consentaneous. The diameter and the length are around 35 nm and 4 μm, respectively. Furthermore, the energy dispersive X-ray spectroscopy analysis (EDX) indicated that the SiNWs consist of silicon core and silicon oxide sheath mainly. The Raman scattering was also carried out to analyze the structure of the oriented SiNWs. Finally, the growth mechanism of the SiNWs was discussed.     

Alternative method for fabricating chemically functionalized AFM tips: silane modification of HF-treated Si3N4 probes

An alternative method for fabricating functionalized, atomic force microscopy (AFM) tips is presented. This technique is simple and requires only minimal preparation and tip modification to generate chemically sensitive probes that have a robust organic monolayer of flexible terminal chemistry attached to the surface. Specifically, commercially microfabricated Si3N4 AFM tips were modified with self-assembled monolayers (SAMs) of octadecyltrichlorosilane and (11-bromoundecyl)trichlorosilane after removing the native silicon oxide surface layer with concentrated hydrofluoric acid. The structure of these SAM films on solid silicon nitride surfaces was studied using contact angle goniometry and Fourier transform infrared spectroscopy. Pull-off force measurements on various bare (mica, graphite, and silicon) and SAM-functionalized substrates confirm that mechanically robust, long-chain organic silane SAMs can be formed on HF-treated Si3N4 tips without the presence of an intervening oxide layer. Adhesion experiments show that the integrity of the organic film on the chemically modified tips is maintained over repeated measurements and that the functionalized tips can be used for chemical sensing experiments since strong discrimination between different surface chemistries is possible.     

Plasma-induced formation of Ag nanodots for ultra-high-enhancement surface-enhanced Raman scattering substrates

We report here plasma-induced formation of Ag nanostructures for surface-enhanced Raman scattering (SERS) applications. An array of uniform Ag patterned structures of 150 nm diameter was first fabricated on a silicon substrate with imprint lithography; then the substrate was further treated with an oxygen plasma to fracture the patterned structures into clusters of smaller, interconnected, closely packed Ag nanoparticles (20-60 nm) and redeposited Ag nanodots ( approximately 10 nm) between the clusters. The substrate thus formed had a uniform ultrahigh SERS enhancement factor (1010) over the entire substrate for 4-mercaptophenol molecules. By comparison, Au patterned structures fabricated with the same method did not undergo such a morphological change after the plasma treatment and showed no enhancement of Raman scattering.     

Real‐Space Observation of Atomic Site‐Specific Electronic Properties of a Pt Nanoisland/Au(111) Bimetallic Surface by Tip‐Enhanced Raman Spectroscopy

Resolving atomic site‐specific electronic properties and correlated substrate–molecule interactions is challenging in real space. Now, mapping of sub‐10 nm sized Pt nanoislands on a Au(111) surface was achieved by tip‐enhanced Raman spectroscopy, using the distinct Raman fingerprints of adsorbed 4‐chlorophenyl isocyanide molecules. A spatial resolution better than 2.5 nm allows the electronic properties of the terrace, step edge, kink, and corner sites with varying coordination environments to be resolved in real space in one Pt nanoisland. Calculations suggest that low‐coordinate atomic sites have a higher d‐band electronic profile and thus stronger metal–molecule interactions, leading to the observed blue‐shift of Raman frequency of the N≡C bond of adsorbed molecules. An experimental and theoretical study on Pt(111) and mono‐ and bi‐atomic layer Pt nanoislands on a Au(111) surface reveals the bimetallic effect that weakens with the increasing number of deposited Pt adlayer.     

Chemically bound gold nanoparticle arrays on silicon: assembly, properties and SERS study of protein interactions

A highly reproducible and facile method for formation of ordered 2 dimensional arrays of CTAB protected 50 nm gold nanoparticles bonded to silicon wafers is described. The silicon wafers have been chemically modified with long-chain silanes terminated with thiol that penetrate the CTAB bilayer and chemically bind to the underlying gold nanoparticle. The silicon wafer provides a reproducibly smooth, chemically functionalizable and non-fluorescent substrate with a silicon phonon mode which may provide a convenient internal frequency and intensity calibration for vibrational spectroscopy. The CTAB bilayer provides a potentially biomimetic environment for analyte, yet allows a sufficiently small nanoparticle separation to achieve a significant electric field enhancement. The arrays have been characterized using SEM and Raman spectroscopy. These studies reveal that the reproducibility of the arrays is excellent both between batches (<10% RSD) and across a single batch (<5% RSD). The arrays also exhibit good stability, and the effect of temperature on the arrays was also investigated. The interaction of protein and amino acid with the nanoparticle arrays was investigated using Raman microscopy to investigate their potential in bio-SERS spectroscopy. Raman of phenylalanine and the protein bovine pancreatic trypsin inhibitor, BPTI were studied using 785 nm excitation, coincident with the surface plasmon absorbance of the array. The arrays exhibit SERS enhancements of the order of 2.6 x 10(4) for phenylalanine, the standard deviation on the relative intensity of the 1555 cm(-1) mode of phenylalanine is less than 10% for 100 randomly distributed locations across a single substrate and less than 20% between different substrates. Significantly, comparisons of the Raman spectra of the protein and phenylalanine in solution and immobilized on the nanoparticle arrays indicates that the protein is non-randomly orientated on the arrays. Selective SERS enhancements suggest that aromatic residues penetrate through the bilayer inducing conformational changes in the protein.