Low-temperature thermal conductivity of an amorphous palladium silicon alloy

The thermal conductivity of a glassy PdSi alloy has been measured in the temperature range 0.1–30 K. The thermal conductivity contributed by the phonons has the same anomalous behavior as found for all non-metallic amorphous materials. Heat treatment increases the phonon thermal conductance by ～50%, a change which does not appear to be related to partial crystallization.     

Variation of crystallization mechanisms in flash-lamp-irradiated amorphous silicon films

Flash lamp annealing (FLA) can form polycrystalline silicon (poly-Si) films with various microstructures depending on the thickness of precursor amorphous Si (a-Si) films due to the variation of crystallization mechanisms. Intermittent explosive crystallization (EC) takes place in precursor a-Si films thicker than approximately 2 μm, and the periodicity of microstructure formed resulting from the intermittent EC is independent of the thickness of a-Si films if their thickness is 2 μm or greater. In addition to the intermittent EC, continuous EC and homogeneous solid-phase crystallization (SPC) also occur in thinner films. These crystallization mechanisms are governed by the ignition of EC at Si film edges and the homogeneous heating of interior a-Si. The results obtained in this study could be applied to control the microstructures of flash-lamp-crystallized poly-Si films.     

Spatially localized current-induced crystallization of amorphous silicon films

Field-enhanced metal-induced solid phase crystallization (FE-MISPC) at room temperature is employed to create microscopic crystalline regions at predefined positions in hydrogen-rich amorphous silicon (a-Si:H) films. Electric field is applied locally using a sharp conductive tip in atomic force microscope (AFM) and nickel electrode below the a-Si:H film. The process is driven by a constant current of ?50 pA to ?500 pA while controlling the amount of transferred energy (1–300 nJ) as a function of time. Passing current leads to a formation of nanoscale pits in the a-Si:H films. Depending on the energy amount and rate the pits exhibit lower or orders of magnitude higher conductivity as detected by current-sensing AFM. High conductivity is attributed to a local crystallization of the films. This is confirmed by micro-Raman spectroscopy.     

Influence of amorphous buffer layers on the crystallinity of sputter-deposited undoped ZnO films

Undoped ZnO films were deposited by radio frequency (RF) magnetron sputtering on amorphous buffer layers such as SiO_x, SiO_xN_y, and SiN_x prepared by plasma enhanced chemical vapor deposition (PECVD) for dielectric layer in thin film transistor (TFT) application. ZnO was also deposited directly on glass and quartz substrate for comparison. It was found that continuous films were formed in the thickness up to 10 nm on all buffer layers. The crystallinity of ZnO films was improved in the order on quartz>SiO_x >SiO_xN_y>glass>SiN_x according to the investigated intensities of (0 0 2) XRD peaks. The crystallite sizes of ZnO were in the order of SiO_x～glass >SiN_x. Stable XRD parameters of ZnO thin films were obtained to the thickness from 40 to 100 nm grown on SiO_x insulator for TFT application. Investigation of the ZnO thin films by atomic force microscope (AFM) revealed that grain size and roughness obtained on SiN_x were larger than those on SiO_x and glass. Hence, both nucleation and crystallinity of sputtered ZnO thin films remarkably depended on amorphous buffer layers.     

The effects of oxygen,hydrogen and fluorine on the conductivity of high purity evaporated amorphous silicon films

Electron bombardment evaporation was used to deposit amorphous silicon (α-Si) films in an evaporator with a base pressure of 2 × 10^?10 Torr. Rutherford backscattering analysis was used to establish the conditions necessary for deposition of pure films.The DC conductivity was measured as a function of temperature (? 150°C to + 140°C). Pure films, which were deposited between room temperature and 400°C, were found to have a room temperature conductivity (σ_RT) in the region of 10^?3μ^?1cm^?1 and a log $\text{σα}\text{T}{}^{\mathrm{<mtext>1</mtext><mtext>4</mtext>}}$ dependence. The value of σ_RT could be reduced by annealing reaching a minimum of 2 × 10^?7μ^?1 cm^?1 for an anneal temperature (T_A) of 520°C, but activated conduction was not observed.The implantation of hydrogen or fluorine (or contamination with oxygen) had the effect of reducing σ_RT, with a minimum value of less than 10^?8μ^?1cm^?1 (T_A = 400°C) for fluorine implantation to a dose of ≈ 10¹⁶ cm² (≈ 0.4 at% concentration). These films had high temperature (50°C) activation energies typical of activated conduction in extended states on the edge of the mobility gap. Implantation of fluorine to a dose of 1.5 × 10¹⁷ resulted in a rise of σ_RT (T_A = 400°C) to nearly 10⁴μ^?1 cm^?1 and log $\text{σα}\text{T}{}^{\mathrm{<mtext>?1</mtext><mtext>4</mtext>}}$ behaviour.X-ray analysis revealed that some crystallization occurred in films annealed at 600°C. This is correlated with a rise in σ_RT of the pure films and the disappearance of the effects of the introduced impurities.     

Laser crystallization of compensated hydrogenated amorphous silicon thin films

Raman backscattering and hydrogen effusion measurements were performed on compensated, highly P- and B-doped laser crystallized polycrystalline silicon. From hydrogen effusion spectra the hydrogen chemical potential, μ_H, is determined as a function of hydrogen concentration, which can be related to the hydrogen density-of-states distribution. Interestingly, hydrogen bonding is affected by doping of the amorphous starting material. Below the hydrogen transport states, four peaks are observed in the hydrogen density-of-states at 2.0, 2.2, 2.5 and 2.8 eV. The latest peak is not observed in B-doped samples. The hydrogen effusion results will be correlated with the results obtained from Raman backscattering measurements.     

An electron diffraction study of amorphous silicon oxide films

Amorphous silicon oxide films have been examined by high energy electron diffraction using the sector-microphotometer method of data collection common to gas phase electron diffraction. This data was analyzed with a least-squares procedure that is designed to minimize extraneous detail in the radial distribution function obtained by the Fourier sine transform of the interference function. The results of this analysis for thin film SiO₂ show that the overall bonding topology of the thin film agress well with that of bulk (vitreous) SiO₂ examined by X-ray diffraction. The experimental short distance parameters for the films whose composition was determined to be ～SiO_1.3, SiO, and SiO_0.8 are found to be consistent with those expected for a mixture of tetrahedrally bonded amorphous Si and SiO₂ phases in which the scale of the Si-like and SiO₂-like regions is of the order of a few basic tetrahedral units. This result is in agreement with previous examinations of SiO powder by X-rays and a previous examination of thin silicon oxide films by electron diffraction.     

Surface wave attenuation by silicon,hydrogen, and deuterium in amorphous silicon films

Motions of silicon, hydrogen, and deuterium in sputtered thin films of a-Si, a-Si:H, and a-Si:D were studied by measurements of the attenuation of surface acoustic waves propagating along the surface of piezoelectric crystals which were covered by the thin films. It is concluded that there are H and D atoms (ions) which are not directly associated with the Si bonds. Some of the H and D atoms (ions) are configurationally rearranged at room temperature. A part of the hydrogen (deuterium) or argon is located in voids.     

Lateral photovoltage measurements in hydrogenated amorphous silicon and silicon-oxygen thin films

Hydrogenated amorphous silicon (a-Si:H) and hydrogenated amorphous silicon-oxide alloy films (a-SiO_x:H) were investigated by temperature dependence of lateral photovoltage (LPV) measurements. The suboxide sample with [O] = 27 at.%, was found to exhibit larger LPV compared to the unalloyed sample. It is difficult to simply correlate LPV measurements to related diffusion length measurements, only. On the other hand, the observed magnitude of LPV in a-Si:H and its decrease with temperature, could be explained based on an internal electric field induced by diffusion electron and hole currents, and multiple trapping of the photocarriers.     

Study of the conductivity of nitrogen doped tetrahedral amorphous carbon films

The conductivity of nitrogen incorporated tetrahedral amorphous carbon (taC:N) films prepared by filtered cathodic vacuum arc (FCVA) system was studied. The film resistivity varied as a function of nitrogen content in a wide nitrogen content range from 1 to 23 at.%. An interesting phenomenon of the photoconductivity for the films was found, that the resistivity of those films with low nitrogen content (<5 at.%) increased due to the light irradiation. This kind of behavior of photoconductivity had not been discussed in previous papers on taC:N films.     

Optical properties of hydrogenated amorphous silicon films doped with fluorinated gases

Doped amorphous silicon films were prepared by plasma-enhanced chemical vapour deposition of silane and hydrogen mixtures, using phosphorus pentafluoride (PF₅) and boron trifluoride (BF₃) as dopant precursors. The films were studied by UV-vis spectroscopy and their photo and dark conductivity were measured, the latter as a function of temperature. The optical gap of the n-type samples, doped with PF₅, diminished as the concentration of this gas in the plasma was increased. However, the optical gap of p-type samples, doped with BF₃, did not show any appreciable optical gap decrease as the concentration of BF₃ was varied from 0.04% to 4.7%. The dark conductivity of the p-type films at these extremes of the doping range were 7.6 × 10⁻¹⁰ and 3.5 × 10⁻¹ Ω⁻¹ cm⁻¹, respectively.     

Characterization of hydrogenated amorphous silicon thin films prepared by magnetron sputtering

Magnetron sputtered hydrogenated amorphous silicon (a-Si:H) thin films have been characterized. Hydrogen (H₂) with argon (Ar) was introduced into the sputtering chamber to create the plasma. A sudden increase in the deposition rate occurred when the hydrogen was added. The maximum hydrogen content of 16 atomic percent (at.%) was achieved and a bandgap of about 2.07 eV was determined from the spectral investigations of the hydrogenated films. The effect of radio frequency (RF) power on the deposition rate, as well as on the hydrogen content was investigated. To change the hydrogen content in the films, the hydrogen flow rate was varied while keeping the argon flow rate constant. The hydrogen content in the films increased with increasing hydrogen flow rate up to the maximum content of 16 at.% and then decreased for further increases in hydrogen flow.     

Characterization of chromium silicide thin layer formed on amorphous silicon films

A detailed investigation of the compositional, optical and electrical properties of a chromium silicide layer grown at room temperature on top of doped amorphous silicon films is presented. The formation of the layer is promoted only when phosphorous atoms are present in the film. The deposition of a very thin n-type doped layer (around 5 nm) on top of a p-type doped film has allowed us to achieve the chromium silicide formation also on p-type material without changing its doping properties. Angle resolved X-ray photoelectron spectroscopy measurements demonstrate the presence of chromium-oxide, chromium silicide and metallic chromium in similar percentages for both p- and n-type doped layers. From the ellipsometric analysis, the refractive index spectra have been extracted, and the layer thickness has been estimated to be 5 nm for both p- and n-type doped layers. From planar conductivity measurements, we have found that the chromium silicide promotes an activation energy reduction from 0.24 eV down to 0.017 eV for the n-type layer and from 0.36 eV down to 0.14 eV for the p-type film.     

Temporal electric conductivity variations of hydrogenated amorphous silicon due to high energy protons

Electric conductivity variations of undoped, n-type and p-type hydrogenated amorphous silicon (a-Si:H) thin films irradiated with various energy protons are systematically investigated. Dark conductivity (DC) and photoconductivity (PC) of the undoped samples increase at first due to proton irradiation and then decrease dramatically with increasing proton fluence. The increase in DC and PC becomes greater with increased proton energy. However, this increase is metastable and gradually decreases with time at room temperature. Similar results are observed in the n-type a-Si:H, whereas only a monotonic decrease is observed in DC and PC for the p-type samples. The increase of both DC and PC due to proton irradiation is attributed to metastable donor center generation. On further irradiation both the DC and PC decrease by the accumulation of radiation-induced defects, which act as deep traps and compensate carriers. The decrease in DC and PC becomes less pronounced as the proton energy increase and can be fitted along a universal line when the proton fluence is converted into displacement per atom (dpa).     

AC conductivity in amorphous germanium

The ac conductivity in evaporated amorphous germanium films has been measured as a function of annealing and has been found to obey the ω^0.8 law, in accordance with the hopping model. The dc conductivity measurements on the same samples show a $\text{T}{}^{\mathrm{<mtext>1</mtext><mtext>4</mtext>}}$ law behaviour. The densities of localized states near the Fermi level g(E_F), obtained from both experiments are in reasonable agreement with each other. Both the measurements show a reduction by about a factor of 2 in g(E_F) when a freshly prepared film is fully annealed. High-temperature substrate films also show the ω^0.8 behaviour. This suggests that the frequency dependence of the ac conductivity is not caused by voids alone. Other possible explanations of our results are also discussed.